APPLIED MATERIALS P 5000 Mark II WCVD, 1 frame, 1 orienter, 1 load lock, 1 chamber dep, 1 chamber etch. Tungsten Dep (2 chamber WCVD + Etch back WEB), Tungsten Plugs Ti and TiN, good condition, 2001 vintage. (2)
CHA SE 1000 E-beam evaporator with planetary (4 planets - 8" max) and 24x40 SS Belljar, Has a DP10 diffusion pump, Leybold Mech. pump, 4-pkt E-gun and CV-8 power supply. Has a new compressor and is water cooled. It has a Glow discharge, 4 thermal-evaporation sources controlled by two SCR power controllers. Each controller controls two sources w/selectors. It has a heater 2KW total control by variable transformer. There is an extra Leybold Mechanical pump for replacement (supposedly just rebuilt but never used) and an IC6000 Crystal Monitor Deposition Controller of unknown condition. (uninstalled). There is a Sycon TM-100 thickness monitor. There is a 5 ton Chiller and a tool box with a lot of O-rings, bearings, tools, fuses, high voltage replacement parts for CV-8 Power supply. Can be demonstrated and inspected.
These items have been replaced on the machine:
All new bearings and o-rings in the 4 planetary rotation.
Rebuilt the E-Gun (done by EB sources)
Replaced the compressor on the 5 Ton chiller.
Had a custom Heater power supply with Omega controller built and installed.
Had a 7.5 KVA 240 volt insolation transformer installed.
Bought a manual for the CV-8
Brooks Automation VGC IR SSRK RS2322CG vacuum gauge controller with tubes and cables.
Inficon ceramic retainer and crystal holder
Rebuilt the CV-8 and CHA SE1000 and the E-Gun and got everything working.
Had a mask made and tested for dispersion and was told it was better than 1%.
Miscellaneous tooling to hold optics
Miscellaneous coating materials: SiO2 1000 grams, Hafnium Oxide HfO2 450g, Aluminum AL 500 grams, Aluminum Oxide Al2O3 500 grams, Chromium 250 grams, Titanium Oxide TiO2 500 grams and Magnesium Floride MgF2 1000 grams. (1)
