Evaporators: SATISLOH 400C

ID#: 103615 Status: Installed Manufacturer: SATISLOH Model: 400C Category: Evaporators Vintage: 1990 Equipment Details: Thin film evaporate plant

Chamber dimensions: 46L x 62H x 40D (cm)
Automatic and manual operation
Dome 20 lenses or flip over
Ultra sonic baths with heater

Rotary pump, 2-stage: 40 m3 / h
Cryo pump: 4000 L / s (values for water vapor)
Chamber volume: 100 liter
Substrate holder: 360 mm diameter
(20) 66 mm lenses
(16) 75 mm lenses

4-position EB-gun
Quartz process controller
Vacuum with EDWARDS E2M40 pump, 2 stages
Vacuum with cryo pump variant
Thin film quartz control: automatic or manual
(2) Pumps of hard coating lacquer
Outflow: (3) pieces
(2) Ovens
(3) Domes
Accessories included

Fuse: 380V, 20A / 220V, 35A
Transformer: 220 to 380V, 3 phase
Hot water: 35° to 40°C
EB-gun: +/- 8000V automatic or manual

1990 vintage.
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