Sputtering Systems: LEYBOLD HERAEUS Z550

ID#: 131001 Manufacturer: LEYBOLD HERAEUS Model: Z550 Category: Sputtering Systems Equipment Details: Semi-automatic cathode sputtering system

(Qty 2) PK150 magnetron sputtering cathodes: 6" diameter
Cathodes for DC and RF
DRESSLER Caesar 2.5 kW RF sputtering power supply
DRESSLER VM 3000 automatic matching unit
GS30 / 800 ADL DC sputtering power supply, 3 kW
Substrate table with water cooling and RF-bias / RF-etching
Gas inlet system with mass flow controller
Second gas inlet is prepared
LEYBOLD D-60A prevacuum pump
LEYBOLD Turbovac 450 turbomolecular pump with LN2-baffle.
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