Sputtering Systems: LEYBOLD HERAEUS Z550

ID#: 131001 Manufacturer: LEYBOLD HERAEUS Model: Z550 Category: Sputtering Systems Equipment Details: Semi-automatic cathode sputtering system

Includes:
(Qty 2) PK150 magnetron sputtering cathodes: 6" diameter
Cathodes for DC and RF
DRESSLER Caesar 2.5 kW RF sputtering power supply
DRESSLER VM 3000 automatic matching unit
GS30 / 800 ADL DC sputtering power supply, 3 kW
Substrate table with water cooling and RF-bias / RF-etching
Gas inlet system with mass flow controller
Second gas inlet is prepared
LEYBOLD D-60A prevacuum pump
LEYBOLD Turbovac 450 turbomolecular pump with LN2-baffle.
[+] Read more [-] Close
Price

Thank you for your inquiry.
Your information is being processed and you will be contacted shortly. If you do not receive an email from us, please check your bulk/spam filter.

Please enter your contact information and a member of CAE’s sales team will reach out to you to discuss the equipment.

* Required Field