Mask & Wafer Inspection: CYBEROPTICS Cyberscan Cobra

ID#: 135777

Manufacturer: CYBEROPTICS

Model: Cyberscan Cobra

Category: Mask & Wafer Inspection

Vintage: 1998

Equipment Details: Portable laser inspection system
Main unit: 50.8mm arm travel
Micrometer travel: 50.8mm focus
RMS stage flatness full travel: 2um

DRS-500 sensor:
Resolution: 0.125um
Accuracy: 1um
Standoff: 17mm
Spot size: 16 to 23um

Software not included
1998 vintage.
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