ID#: 172450

Manufacturer: APPLIED MATERIALS

Model: Spare Parts

Category: Spare Parts

Equipment Details: Spare parts:


Qty P/N Description
1 0030-20006 COVER SOURCE 13"
1 0030-20020 COVER SOURCE 13" G-12
2 0030-20007 COVER SOURCE 11.30"
0 0030-20101 SOURCE COVER, 13" VECTRA IMP
0140-70151 + 0150-70132 + 0020-13265 * 2ea PVD CH AC Line
6 0042-20136
3 0040-01846
1 0010-21393
2 0040-01375
3 0020-22263 ADAPTER PVD WATER LINES ON BOARD CRYO
1 0010-12481
3 "DC POWER BLOCK"
2 0040-02425 MTG BLOCK, WB CHAMBER, 150MM SPACING, AL
4 0040-22464 PILLOW BLOCK, GAMMA 2 194 MM
1 0020-23001 EXTENSION, SHUTTER ROTATION ASSY
3 0520-01017 SHUTTER ENCLOSURE
3 0020-22879 180 DEGREE ROTATE ACTUATOR
0 0040-39554 GIMBAL ASSY,ORIENTER LIFTER ASSY
2 "Endura motor"
1 "Endura oriental motor"
1 0090-20020 SENSOR ASSY HALL EFFECT
1 shutter CRB113W80-180S
1 "Rotation motor"
1 Gate valve
1 0040-13013 FLANGE 316SST XFER CHB FORELINE LINE, CE
1 0090-02982
"4 3" "0040-23670
0020-22263" . BRACKET, WATER FLOW . ADAPTER PVD WATER LINES ON BOARD CRYO
2 0040-22804 BRACKET, RIGHT MATCH BOX SUPPORT
2 0020-24778 MOUNTING BRACKET SENSORS SHUTTER LINKAGE
2 0010-03705 ASSEMBLY, ACTUATOR SUPPORT PLATE
2 0020-27135 SPACER, ACTUATOR SHUTTER LINKAGE
1 3080-01030 BELT TMG 3MMP 6MMW 96T HTD NEOPRENE
7 XSL-21-427 Cable ID Markers
2 NCDQ2B80-UIA990939
1 0020-20575 BRACKET MOTOR BRUSHLESS
1 Plate Contact
1 0020-23208 LIFT FINGER, 101% COVERAGE,WIDE BODY
1 "Interock
magnetic" -
3 0010-20300 ASSY LIFT PVD
1 0010-70271 ASSY 101 WAFER LIFT
1 0010-20300 ASSY LIFT PVD
1 Lift bellows
1 elbow
5 0040-20068 BELLOWS LIFTER PVD
2 0040-20146 BELLOWS WAFER ORIENTER
1 0040-20283 Centura PVD Pedestal CH 탈착 B급
0 0040-31998 WELDMENT, BELLOWS ASSY, UPPER, DXZ
1 "6"" A101 HEATER BELLOWS"
3 0020-28298
12 3700-01390 SEAL METAL BONNET 10.8 SERIES GATE VALV
1 0020-24057 BRKT VALVE WATER
1 0040-23559 BRACKET, RF MATCH MOUNT
2 0020-25180 BRACKET VALVE WATER PH AT 5
1 0040-23558 CLAMP, RF MATCH MOUNT
1 0040-20283 FRECLEAN BELLOWS
3 cooldown chamber 용 timming belt
1 0040-35519P1
2 0020-20700 CLAMP END AR FLEX 8" GATE VALVE
4 0020-22549 PLATE BLANKOFF MGN COUPLING
1 0150-09261 CABLE ASSY MFC, 63" LONG
3 0680-01213 -
1 J020-P0672-B -
1 0010-76155 OBS ASSY DC PWR SUPPLY BOX W/FUSE
3 ADAPTER 모양 다 다름
4 3080-01044 BELT TMG 3/8 PICH 1/2"W 16.50C NEO/GLASS
1 "EBARA
CONTROLLER
MODEL:305W"
1 IPC-6806S
1 AMT85472-3
2 8113020G002
1 "CONTROL MODULE"
2 "0190-15553 001"
1 "HETER PURGE 200MM"
1 0020-20125 HUB HEATER BEARING
7 0020-23438 COVER HOUSING MOTORIZED LIFT
1 0010-70254 ASSY 8" HEATER VCR W/2 TC'S
1 0010-70254 ASSY 8" HEATER VCR W/2 TC'S
1 0010-70254 ASSY 8" HEATER VCR W/2 TC'S
1 0010-70254 ASSY 8" HEATER VCR W/2 TC'S
1 0010-05692 ASSY., HEATER, PURGE, JMF, 200MM, HP TXZ
1 0010-21530 ASSEMBLY, NON-NTM ADVANCED 101 - 6" (6" A101 HEATER)
1 0010-13626 ASSY BIASABLE 101 HTR 8" REV LC01 (B101-HEATER(IMP)
7 332124-75
3 332124-50
2 A328840A
3 0620-02696 CABLE POWER 3 METER P035 STP-A2203
1 0140-20825 CABLE ASSY TRANSFER CH
2 RS232 CABLE -
2 RS485 CABLE -
1 0620-01343 CABLE TURBO INTERFACE ALCATEL HDPCVD
1 0190-55141 -
1 0100-20003 OBS DIGITAL INPUT OUTPUT PCB
1 0225-09433 -
1 0190-21303 CABLE ASSEMBLY, RF MATCH, PRECLEAN 2
1 27-300001-00 ION GAUGE GABLE
1 0090-20116 -
2 - WSC RKC 572-1M
1 332116-11 -
1 0720-00454 CONN Y-SPLITTER PS/2 KEYBOARD & MOUSE MI
1 0150-55141 -
1 0150-13116 CABLE ASSY, GAS PANEL POWER (25 FT)
1 0150-18047 CBL ASSY,TOP,ETO RF GEN CONTROL,CHAMBER
1 0150-76213 EMC COMP.,CABLE ASSY,SYSTEM MONITOR,EXTE
1 0150-21238 CABLE ASSY ENCODER INTCON 600 IN EMC COM
1 0150-20057 CABLE ASSY USER DI/O CONTROLLER
1 0150-76288 CABLE ASSY 50FT DC SOURCE - MDL
1 0150-57076 -
1 0150-21346 ENCODER INTERCONNECT, (EMC COMPLIANT)
1 0150-21338 GAS INTERCONNECT
1 0150-02175 CABLE ASSY, SYSTEMS VIDEO, 65FT EMC COMP
1 0150-01205 CABLE ASSY, DTLR COMMS, MCVD
1 0150-05685 -
1 0150-76876 CABLE ASSY 75FT CENTRU SMIF LLB INTERCON
1 0150-20574 CABLE ASSY A/B PUMP STD INTF
1 0150-76066 ASSY CABLE, SYSTEM VIDEO 35 FEET
1 0150-70137 ASSY CABLE SYSTEM VIDEO 25 FT.
1 0150-36500 CABLE ASSY, VHP XFER RESOLVER CNTRLLR TO
1 0150-76186 EMC COMP.,CABLE ASSY,PUMP UMBILICAL
1 0150-20755 CABLE ASSY SMOKE DET 2ND GEN RACK
1 0150-18033 CBL ASSY, COMMUNICATION, 75FT
1 0150-10506 C/A, SYSTEM MONITOR, 55FT EMC COMP
1 0150-10687 CABLE ASSY, SHIELDED OZONE MONITOR, 50'
2 0150-39003 CABLE, DI/O 37P, F/M, 40FT
1 0150-76458 CABLE, 79 FT RF COAXIAL 13.56 MHz, W/CON
1 0150-36084 CABLE ASSY,OVERTEMP SWITCH TxZ,MCVD
2 0150-38910 HEATER CABLE, DXZ CENTURA
1 Network cable
1 0190-09345 DOOR UP/DOWN CYLINDER, ADO-E
1 0190-00370 FLOW SWITCH ASSY,HDPCVD ULTIMA
3 0190-55141 -
1 0150-76646 CABLE,ASSYEMBLY,EMO INTERCONNECT, 75 FT
2 0150-20160 CABLE ASSEMBLY EMO INTERCONNECT
1 0150-26805 -
1 0150-76198 EMC COMP.,ASSY CABLE SYSTEM VIDEO 25
1 0150-76165 C/A EMC COMP, HEAT EXCHANGER, 25FT CSI
2 0150-22511 CABLE ASSY, MONO PUMP (STD INTF) 25FT
1 0150-09106 ASSY CABLE REMOTE 50 FT
1 0150-60066 -
1 0150-60063 -
3 0150-38816 ASSY,CABLE,RS-232,LAMP FAILURE DTCTR,
3 0150-26160 -
1 0150-36509 C/A, EMO INTERCONNECT, 65FT
1 0150-20149 CABLE ASSY,EMO/CHAMBER INTERCONNECT
3 0150-20075 CABLE ASSY EMO INTERCONN
1 0150-20181 CABLE ASSY,EMO INTERCONN SYS. AC/MAIN FR
1 0150-20149 CABLE ASSY,EMO/CHAMBER INTERCONNECT
1 0150-76156 CABLE ASSY, INSERTION FLOW SENSOR
1 0150-60065 -
1 0150-90239 -
2 0150-20238 CABLE ASSY.,LLA LED PWR
1 0150-20239 CABLE ASSY., LLB LED PXR
2 0150-76818 CABLE, HARNESS MFC CHAMBER B
1 0150-20112 CABLE ASSY, EMO GENERATOR 1/2 INT.
1 0150-09109 DC POWER FOOT
1 0150-10328 CBL I/O PWR. DIST.
1 0150-00103 CABLE ASSY, VID INTERCON
2 0150-20537 CABLE ASSY,PUMP CONTROL CH C
1 0150-04800 CABLE ASSY, +24VDC FANS & INTERLOCK, ULT
1 0150-20197 HARNESS ASSY, TC INTERFACE
1 0150-00296 REMOTE RECIPE SELECT CABLE ASSY
1 0150-00236 CABLE HE COOLNG CNTRL 8'
0 0150-20061 CABLE ASSY. SUPPLY CONTROL
1 0150-37037 C/A ADAPATER STATUS LIGHT PANEL
1 0150-38676 CABLE,POWER,SPILL PCB,CVD TI/TIN
1 0150-09880 CABLE ESC CONTROLLER CHAMBER D
1 ETCH End POINT -
1 0150-01060 CABLE ASSY, DUAL HELIUM CONTROL,INNER ZO
1 0150-35752 -
1 0150-01294 CABLE ASSY, GAS DISTR. BD. TO IGL/PNEU
3 0150-76099 CABLE ASSY, SCSI INTERFACE, CENTURA
1 0150-20187 CABLE ASSY, REMOTE SYSTEM VIDEO
0 0190-09459 CABLE ASSY, FIBER OPTIC 20 FT
1 0190-09061 GASKET WINDOW
1 0150-20262 CABLE ASSY DEGAS AC
1 0150-01061 CABLE ASSY, DUAL HELIUM CONTROL AO, 5000
1 0150-21692 CABLE ASSY. SQ RIGHT ANGLE W/ INTERLOCK
1 0150-21171 CABLE ASSY STEPPER DRIVER DIST.
1 0140-20835 HARNESS ASSY, XFER CH RETROFIT
1 0150-09889 CABLE ASSY, SCSI, 50P, EXT, 20-SLOT VME,
1 0150-75122 CABLE ASSEMBLY, WAFER MAPPING, EXTENSION
1 0150-18058 CABLE ASSY, ROBOT MOTOR ASSY, TOP
1 0620-01164 CABLE ASSY 332CG 6"LG + 2.75" 15P-DSUB / (Convectron Gauge Cable)
3 0150-35432 CABLE ASSY TC GAUGE CENTURA
1 0620-01277 CABLE CONVECTRON 76" LG DB15P-CG5
1 0150-35516 CABLE ASSY JUMPER PLUG WATER FLOW SWITCH
1 0240-24036 -
2 0150-21339 -
1 0150-21220 -
1 0150-20070 -
1 0150-20708 -
1 0150-10658 -
1 0150-21666 -
1 0150-76288 -
2 0190-13325 -
1 81124630150 -
1 EPI CABLE -
1 0150-20641 CABLE ASSY TC CHAMBER TRAY INTERFACE
3 0150-09583 CABLE COAXIAL DELTA
1 0150-20140 CABLE ASSY,RF MATCH/ CHAMBER INTERCONNEC
1 0150-21234 CABLE ASSYCHAMBER 1 INTCNT 50FT
1 0150-76186 EMC COMP.,CABLE ASSY,PUMP UMBILICAL
1 0620-01119 CABLE ASSY 332CG 6"LG + 2.75" 15P-DSUB/P
2 0150-16986 EMC COMP., CABLE ASSY, PUMP UMBILICAL
2 0190-18121 RF CABLE ETO SOURCE TOP ULTIMA HDP-CVD
1 0140-36168 HARNESS, CHAMB A-B-C-D, 65FT
1 0150-22190 CABLE ASSY, REM 2 INTERCON 25FT-CEM96
1 0150-21342 CHAMBER 4 INTERCONNECT, (EMC COMPLIANT)
1 0150-39004 CABLE, AI/O 50P, F/M, 40FT
1 0150-76179 EMC COMP.,HARNESS ASSY MAIN FRAME
1 0150-76183 EMC COMP.,HARNESS ASSY PNEUMATIC'S
1 0150-35880 CABLE ASSY, ROBOT CONTROL
1 0150-38815 ASSY,CABLE,RS-232,LAMP FAILURE DTCTR,XE,
1 0150-39339 CABLE ASSY, O2 SENSOR RS-232, 40FT CHB R
4 0150-35488 CABLE, ASSEMBLY, MONITOR, 40FT
1 0150-35490
1 0150-56346
1 0150-76175 EMC COMP.,CABLE ASSY,OPTERATOR PANEL,P26
1 0150-09583 CABLE COAXIAL DELTA
1 0190-18121 RF CABLE ETO SOURCE TOP ULTIMA HDP-CVD
1 0140-36168 HARNESS, CHAMB A-B-C-D, 65FT
1 0150-22190 CABLE ASSY, REM 2 INTERCON 25FT-CEM96
1 0150-21342 CHAMBER 4 INTERCONNECT, (EMC COMPLIANT)
1 0150-39004 CABLE, AI/O 50P, F/M, 40FT
1 0150-76183 EMC COMP.,HARNESS ASSY PNEUMATIC'S
1 0150-05240 CABLE ASSY, 90 DEG SHELL, 40FT UMILICAL,
1 0150-35880 CABLE ASSY, ROBOT CONTROL
1 0150-76181 EMC COMP.,HARNESS ASSY MAIN FRAME
1 0150-76179 EMC COMP.,HARNESS ASSY MAIN FRAME
1 0150-07697 CABLE ASSY, CHAMBER E, UMBILICAL, 75FT E
1 0190-35430 CONTROL,THERMOMETER FBR-OPT,120V,SPEC
1 0190-01605 DRIVER, SCR, 200MM RAD
1 0190-05682 PVD DUAL CHAMBER DEGAS 208V HEATER DRIVE
2 0010-25526 -
1 0010-18252 ASSY, CHAMBER GFCI, ULTIMA HDPCVD
2 0040-13269 AC ENCLOSURE , FACILITIES TRAY, CENTURA
1 0020-76403 ENCLOSURE, 208V OUTLET BOX, CENTURA
1 0040-20973 BRACKET, FLOW METER, NESLAB
1 - C200H-TC103
5 0100-00060 w PWB CHOPPER DRIVE II
1 1140-01046 -
1 - WBG-P14M4
1 SMOKE DETECTOR
5 0500-01047 ASSY END POINT DETECTOR UNIT DXZ
3 0010-09035 ASSY BWCVD THROTTLE VALVE 100,125 &150MM
1 0010-29979 ASSY ROUGH THROTTLE VALVE 300MM ULTIMA
1 0040-76967 -
1 0200-32117 -
1 0015-09077 HEATSINK, MODIFIED, THROTTLE DRIVE
2 0010-09119 ASSY, DRIVE, THROTTLE VALVE
1 0020-10758 HOUSING, TC AMP
1 1080-01252 5-PHASE DRIVER
1 0010-75328 ASSY, 2 PHASE DRIVER
2 - 5-PHASE DRIVER
2 - 2-PHASE DRIVER
2 0020-35885 BRKT, MTG,PWR RESISTOR
2 GATE VALVE
1 0010-00654 ASSY CABLE/BRACKET CHAMBER B
1 0010-03128 ASSY, MCA+, AC BOX 2
1 0010-20138 ASSY TC AMP HSNG
1 0010-13235 ASSY, HTESC MOTORIZED LIFT
2 2-PHASE DRIVER
1 2 Phase Driver
2 0010-20764 ASSY PVD DRIVER 200V
4 0010-01151 GFCI Driver
6 Wafer Detecting Sensor
1 WxZ 2Phase Driver
1 PK569AUA-A3 5Phase Vexta Motor
1 PK569AUA 5Phase Vexta Motor
2 2-Phase stepping Motor(PH265-05B-C12)
1 0010 00028 w POWER SUPPLY ASSY
3 0190-09395 LAMP DRIVER, RING LUGS, DELTA POWER
1 0010 00017 ION TC/AC CNTRL MODULE
1 0010-20079 ASSY, PVD CHAMBER DRIVER
5 - MFG P/N : G208D90R
1 0021-35996 BRACKET,MOUNTING,5-PHASE DRIVER
2 0190-70060 wMAGNET DRIVE ASSY
1 0190-09024
2 0190-69419 LAMP DRIVER
2 H685-502 FLOWALERT 1/2" BRASS
1 RTP Probe Power Supply
1 0010-15709 -
1 - ULTIMA RF MATCH
1 0010-23173 ASSEMBLY, SIDE MATCH, 200MM ULTIMA X, HD
1 0010-15487 TOP MATCH ASSY 200MM ULTIMA TE HDPCVD
1 0020-18491 BRACKET, TERMINAL BLOCK
1 0190-00220 CONTROLLER, MODEL OR2000 4 CH, WTM, ULTI
1 0010-04926 HV MODULE ASSY, NEGATIVE, CESC
1 0010-09933 HV MODULE ASSY, ESC
1 0010-30137 DPS,CATHODE,150MM,ASSY
2 0010-13713 HV MODULE, PLASMA SPRAYED CESC, DPS 200M
1 0190-09024 wMAGNET DRIVER ASSY
1 0010-01929 ASSY, RF MATCH, BIASED ELECTRODE BESC
1 0010-22161 ASSY, HIGH EFF RF MATCH,HTESC PH 1
1 0010-20524 MODIFIED 8" RF MATCH
1 0010-09146 ASSY,SIL.THRVLV 100-125-150MM,DOWNSTR, V
1 716-330122-002 -
1 CT0411-0701 -
1 - GAS SHIELD
3 0190-13025 REMOTE PLASMA SOURCE, 6KW HIGH DENSITY P
1 3D80-000552-14 -
1 3D80-000193-11 -
84 F621 -
3 000-1108-748 -
1 000-1101-730 -
4 000-1108-703 -
1 0021-10260 -
1 000-1053-850 -
1 000-1053-790 -
2 0190-18266 SPEC PNEUMATIC LOCKOUT ASSY DUAL 4:1
1 1 0240-31485 0240-31486 -
1 1 0020-86736 0040-13125 -
1 0020-76450 BRACKET TOP MTG SHORT MANIFOLD FAC I/F C
1 0200-36119 RING EDGE .17 200 MM W/FLAT SI BATCH COA
3 0020-30797 wPLATE PERF 200MM GIANT GAP NITRIDE
2 - ROBOT HURB
2 0010-70317 HP DRIVE
2 - HP+ DRIVE
10 - HP STICKER
2 0020-25770 VHP Robot Lower Arm
1 0040-0875*2, 0040-70218*2, 0040-70219*2
2 0010-76206 HTHU Blade A'ssy
1 0020-30BFB BLADE
1 - ESH 100-TB
2 0010-76004 ASSY BLADE ROBOT 6"
3 0010-76005 ASSY BLADE ROBOT 8
1 0100-70285 BLADE
1 0020-70285 BLADE 8 INCH, BUFFER, FROG LEG
2 0021-04509 CASSATTE
1 0020-13520
2 0190-13806 LAMP ASSEMBLY
10/11pac 0190-13806 LAMP ASSEMBLY
16 0190-13806 LAMP ASSEMBLY
1 - OS RAM 1000W 120V HALOGEN LAMP
8 1010-01424 USIO LAMP LAMP HALOGEN 120V 600W
3 USHIO LAMP -
6 1010-01423 LAMP HALOGEN 120V 300W
2 LAMP -
3 0010-13018 CONTROL FLOW MONITOR, ASSY
1 0190-70075 STEEL BALL BEARING
8 - LAMP SOKET
4 - 600W LAMP SOKET
6 LAMP (JIH 120V-600WB4)
9 1010-01424 LAMP, 120V, 600W
1 0020-20340
1 0020-32312 DOOR, SLIT VALVE, "S"
2 0020-76258 INSERT, SLIT VALVE, ALUMINUM
1 - -
1 0021-39585 INSERT, SLIT VALVE, ALUMINUM, ENP
1 - -
- 0020-37431 x 1 0020-31886 x 1 . ADAPTER PLATE,CVD CHAMBER . FLANGE, INSULATION,UNIBODY, .400 THK
- 0020-19003 x 2 0020-19001 x 2 . INSERT, SLIT VALVE SHO . SLIT VALVE SHO SPACER
- 0020-76301 x 1 0020-34011 x1 . ADAPTER, SLIT VALVE . SPACER,SLIT VALVE, MXP CENTURA
3 3700-05668 -
3 0240-76513 KIT, H-SLIT VALVE, 520 CHEMRAZ, REMOVEAB
1 0020-76390 ENCLOSURE, AC, CENTURA CHMBR FAC
2 0020-76391 COVER,AC ENCLOSURE,CENTURA FACILITIES
3 0010-20664 SLIT VALVE ASSY
1 0021-70380 BLANK, SHUTTER
2 0021-70380 BLANK, SHUTTER
1 gate valve(EPI)
F03-101050/33 0300X-MA24-1008 0340X MH24-APIU 1/0582 A-321337
2 0030-70048 MACHINING MOUNTING BLOCK SLIT VALVE
8 SLIT VALVE DOOR
1 CHAMBER -
1 CHAMBER -
1 TxZ,WxZ Lift Plate
1 NDM-B-127 Jig
3 PVD Cal Jig
1 PVD Cal Jig
1 PVD Cal Jig
6 Robot Cal Jig
1 0140-00576 CHAMBER HARNESS CABLE
1 0140-00842 -
1 0150-20510 CABLE ASSY,LLB WAFER MAP/CASS. SENSE
1 0620-01044 CABLE ASSY CONVECTRON CONTROL 9
2 0140-05685 HARNESS ASSY, MATCH CONTROL, HPDCVD
1 0140-76222 HARNESS ASSY, INTERCONNECT CH. W/B
1 0140-36068 HARNESS ASSY CHAMBER INRF
1 0140-07977 HARNESS ASSY, DC FAN & INTERLOCK, 200MM
1 0140-01918 HRNS ASSY MF INTRCONN IMP PVD CHMBR WB-M
1 0140-35964 HARNESS ASSY SEIKO STPH13033C INTERCONNE
1 0140-00726 H/A LAMP INTEGRATION LTESC
2 0140-00343 HARNESS ASSY, POS. C & D PC II INTC, WIT
1 0140-21406 HARNESS ASSY HIGH-EFFCIENCY MATCH /WTR F
8 0140-20694 HARNESS ASSY PVD SHUTTER SENSORS
2 0140-20693 HARNESS ASSY NEW MAIN CONNECT SHUTTER
3 0140-35104 HARNESS ASSY, BULKHEAD TO ORIENTER CENTU
2 0140-01919 HRNS ASSY MF INTERCONN IMP PVD WB-CHMBR
1 0140-18063 HARN ASSY,SOURCE CONDITIONING AND INTERL
1 0140-18136 HARNESS ASSY I/O EXPANSION, CHAMBER C&D,
1 0140-37846 HARNESS ASSY, INTERCONNECT, PVD IMP CH,
1 0140-09542 HARN ASSY THERMO-SWITCH MAG COIL INTERLO
2 0140-09969 HARNESS ASSY, INTERCONNECT, DXZ CHAMBR
1 0140-76223 HARNESS ASSY, INTERCONNECT CH. 1/2
1 0140-20693 HARNESS ASSY NEW MAIN CONNECT SHUTTER
1 0140-09065 HARNESS, ETCH
1 0140-38134 -
1 0140-21528 HARNESS ASSY, H20 FLOW CH1-4
1 0140-21406 HARNESS ASSY HIGH-EFFCIENCY MATCH /WTR F
1 0140-21407 HARNESS ASSY 2MHZ RF MATCH/WTR FLOW INTL
1 0140-00642 HARN. ASSY., ADAPTER WATER FLOW
1 0140-20118 HARNESS ASSY, CCD BD/LASER DRIVER INT.
1 0140-21462 HARNESS ASSY, TIME DELAY CONTROL
1 0140-21528 HARNESS ASSY, H20 FLOW CH1-4
2 0140-09996 PRESS. TRANSD. HRN 1-6
1 0140-76233 HARNESS ASSY SMK AMPL INTFC
1 0150-21692 CABLE ASSY. SQ RIGHT ANGLE W/ INTERLOCK
1 0140-01927 HRNS ASSY INTRCONN PVD CHMBR WB CHMBR
1 0140-21406 HARNESS ASSY HIGH-EFFCIENCY MATCH /WTR F
1 0140-21407 HARNESS ASSY 2MHZ RF MATCH/WTR FLOW INTL
1 0140-21400 -
1 0140-76814 MAIN HARNESS ASSY,MULTI/SINGLE SLOT,COOL
1 0140-07327
1 0140-35671 HARNESS ASSY,SIMPLE/STANDARD CATHODE
1 0140-21826 HARNESS ASSY, CHAMBER, TXZ AND AXZ
2 0190-30355
2 0020-26822 SHIELD 8" HTHU DEPO LOW KNEE
1 - RTP Quartz Window
1 0020-29344 SHIELD 8" 101 .190" THK AL 3 SPRTS VECTR
2 0020-23045 SHIELD 101% TIN COVERAGE
2 0020-23043 SHILD TIN, UPPER 8 INCH WAFER
4 0020-24914 COVER RING SST 8" 101 COVERAGE
1 0020-24914 COVER RING SST 8" 101 COVERAGE
3 0020-24914 COVER RING SST 8" 101 COVERAGE
3 0020-21665 SHIELD AL/TI 8" WAFER
2 0020-21665 SHIELD AL/TI 8" WAFER
4 0020-21708 CHUCK 8" SEE
1 - Orient chamber guid ring
1 0040-20321 HOOP LIFT 8" WELDMENT
1 0020-23951 BLADE 8" SHUTTER
1 0020-23951 BLADE 8" SHUTTER
1 0040-52152 BLADE, SHUTTER, 8 TA/BESC; W/PIN
1 0040-52152 BLADE, SHUTTER, 8 TA/BESC; W/PIN
2 0020-26967 PC II GAS TRENCH COVER
1 - 6" Clamp ring
1 - 8" Clamp ring
2 0021-20718 PEDESTAL COVER LOWER 8" B101 REV 2.1 SST
1 0020-27123 PEDESTAL, PCII 8" SNNF
1 0040-01549 COVER 8" PEDESTAL, B101 HTR, S-IMP, SST
1 0020-28867 DISK 8" ADVANCED 101 SHUTTER
2 0020-28869 SUPPORT CASS RIGHT 6 25 SLOT METAL
1 0020-35972 ARM, ROTATION ADJ. TIE DOWN CHMBR A & B
1 0020-21705 LIFTER 6"
5 0020-21707 LIFTER 8"
1 0020-75988 LIFTER, 200MM WAFER ORIENTER, OPTIMA
1 0020-29617 LIFT HOOP, OPEN, 8" E-CHUCK
3 0021-04248 HOOP LEFT EXTENDED 8"/6" B101
2 0021-06427 HOOP, LIFT, OPEN, 8" MCA E-CHUCK
2 0020-22242 LIFT HOOP 8"
0 0020-23209 lift hoop,8"wide body,101% coverage
1 - 6" HOOP
2 0040-20257 ASSY LIFT HOOP 8" WIDE BODY CHAMBER
1 0040-76308 WELDMENT, 8" HOOP, PVD W/B CHAMBER
1 0040-21913 HOOP LIFT 8" SIX FINGERS W/B HIGH TEMP
4 0020-20328 BEARING SPACER, ORIENTER ROTATION
1 0020-22570 LIFT HOOP 6", SHUTTER CHAMBER
2 0020-22844 PEDESTAL SHIELD, 8" PRECLEAN
1 0020-22844 PEDESTAL SHIELD, 8" PRECLEAN
4 0020-22844 PEDESTAL SHIELD, 8" PRECLEAN
1 0020-29385 CLAMP RING, 8 INCH, DEGAS @ E, JMF
1 0040-42259 MOUNT, TOP AE, SUPPORT PLATE, 200 ULTIMA
1 - COLLIMATOR
3 0020-25077 SHIELD LOWER 8" 101 G-12 SST
1 0020-24959 SHIELD LOW KNEE AL/TI PRCS SST 6" WFR .4
1 0020-26312 SHIELD UPPER 8" DURASOURCE TTN SST
1 0020-27190 SHIELD UPPER, G-12 FLAT HEAD, SST
1 0020-29343 SHIELD CLAMP, DARKSPACE .727" TALL VECTR
2 0020-24531 SHIELD ADAPTER G-12 SST
1 - PLATE
2 - RING
2 0020-00539 -
1 0200-00553 SUSCEPTOR, STANDARD, 200MM PRE-CLEAN
1 0242-76528 KIT SPUTTER ETCH (STD CATHODE) 8"
2 0200-09603 PIPE, INSULATING,QTZ,ESC
1 0010-10202 TESTED PEDESTAL ESC ASSY,200MM NOTCH WEB
5 - SHOWER HEAD
1 - SHOWER HEAD
6 0020-30773 PLATE DISTRIBUTION 200MM HEWEB
7 0020-42285 PLATE,BLOCKER 8" EC WXZ
2 0020-23043 SHILD TIN, UPPER 8 INCH WAFER
1 515-011835-001 -
1 - PLATE
2 - WCVD PARTS
2 - RING
2 0021-03740 COVER, QUARTZ LID, PRODUCER 200MM
1 0090-75049 ASSY CARDCAGE/BP
Granville-Phillips 332102 IONIZATION GAUGE SUPPLY
3 0200-35452 -
6 0020-20499 -
1 0200-20467 PIK INSULATOR QTZ 8" JMF EXTERNAL PCII
1 - 수리불가
2 0200-09129 ISOLATOR 200MM WB
3 - rtp quartz window
4 0200-09025 TUBE, QUARTZ 6MMX6.38
1 0020-24456 INSULTR QTZ 6" JMF PCII EXT PAS @A
1 - rtp blade
1 0200-40126 -
1 - Endura Tranfer Blade
1 0200-35004 BLADE, ROBOT, 8" QUARTZ
1 - BLADE, ROBOT, 4" QTZ
1 0200-35692 BLADE, 200MM QUARTZ, EHP-CR ROBOT
1 0200-36638 BLADE QUARTZ REDUCED CONTACT, 200MM RTP
1 6", 8" 겸용 CERAMIC BLADE
1 W412128513
1 CT0403-0407
1 6/8" Blade
1 0200-CXZINS-P1-ACI-326 -
1 0200-09827 RING, PEDESTAL, ESC, 200MM, NOTCH, WEB
1 0200-09828 RING FOCUS EXC, 200/201 MM, W, NOTCH, WE
1 0200-10169 PLATE, EDGE COVER, DXZ
1 0200-10143 INSERT, RING, CHAMBER, CERAMIC
1 0200-10164 SHIELD, PUMPING INSERT, SIN, DXZ
2 0020-20123 HEATER, ISOLATOR CERAMIC
1 0040-39559 INSERT, LINER HT TIN CVD 200MM
1 - 8" Insulator Quartz
1 0200-04085 -
2 0021-35008 PLATE, REFLECTOR, 200MM, MOD II
3 0200-35146 PIN, LIFT
4 0200-40156 LIFT PIN, CERAMIC, LONG
1 0020-29034 BRACKET,SENSOR,FLAG MOTOR LIFT EXT
1 0200-P2-ACI-446 -
3 - Quartz stick
1 0200-10163
3 0200-20315 REST BUTTON B101 CERAMIC
1 0200-20215 HOUSING, DOUBLE RF CONNECTOR, VECTRA IMP
1 0020-10157
3 0200-20176 FLANGE FEEDTHRU, INSULATOR
2 0200-20217 LAYBRINTH, FEEDTHRU COIL SUPPORT, VECTRA
3 0200-20175 LABYRINTH, RIGID COIL SUPPORT, VECTRA IM
1 0200-10144 ISOLATOR, PUMPING PLATE, DXZ
3 0020-25476 HUB INSULATOR HEATER ESC/HT HEATER
3 - O-ring napure ass68a-009
4 0020-21664 INSULATOR SOURCE 13"
1 - Quartz window
7 0020-20521 SPACER, INSULATOR LIFTER
1 0040-18208 -
1 0200-20285 PEDESTAL COVER UPPER 8" B101 VECTRA-IMP
1 0020-27205 CLAMP RING 8" SNNF HTHU 6 PADS
2 0200-18081 COVER LOW PROFILE HDP-CVD,ULTIMA
1 0200-20057 8" PCII JMF EXT INSULATOR TI PEDESTAL
1 - -
3 0200-18109 COLLAR, 200MM SNNF, SML FLT, ULTIMA HDPC
5 0200-09828 RING FOCUS EXC, 200/201 MM, W, NOTCH, WE
1 0200-09827 RING, PEDESTAL, ESC, 200MM, NOTCH, WEB
1 0200-10164 SHIELD, PUMPING INSERT, SIN, DXZ
1 0020-20484
4 0020-23836
1 0020-23917
1 0200-20426 INSULATOR, PINLESS 8" SNNF, PRECLEAN II
2 0020-22975 INSULATOR TIN 8" WAFER
1 Ceramic Isolator
1 Ceramic Isolator
4 - MTG BKT-TMP, RAT
2 - DIRECIONAL POWER SENSOR
5 DZ-2RQ1-A2 DOOR SWITCH
8 0020-76473 BRKT, GEN RACK, FLOOR MOUNT
- 0020-76474 BRKT, GEN RACK, CONNECTOR PLATE
1 0100-35050 wASSY CONTROLLER I/O CENTURA
1 3620-02332 KYPD REMOTE W/CABLE FOR ONBOARD CRYO PUM
1 0150-37226 CABLE,5-PHASE,DRIVER OUTLET
4 0200-35093 PIN WAFER LIFT
3 0040-41919 ADAPTER, AE TOP MOUNT, 300MM HDPCVD ULTI
4 - SIGNAL POWER (4ea)
3 TERMINAL BLOCK 2P
1 0190-19152 -
1 0190-14927 -
3 0100-34370 -
1 0020-48891 BLOCKER, APF, 300MM PRODUCER
1 0190-28822 -
4 0030-70084 HOLDOWN RING,VIEWPORT
1 0020-19477 TOP MOUNTING BLOCK, LLA, PHOTOMASK PRESE
1 0020-13975 BLOCK, MOUNTING, TOP SENSOR LLKB, WBLL
1 0020-13973 BLOCK, MOUNTING, TOP SENSOR LLKA, WBLL
1 0020-19478 -
2 0020-09603 -
1 0020-42001 -
3 0010-13445 MONITOR BASE ASSY
1 0200-39137 DOME CERAMIC, DPS CHAMBER
2 0010-21345 ASSY, CLEAR LID FOR A OR B
1 0020-35083 -
1 0010-76097 monitor base assy
1 monitor base assy
2 0021-09902 GASKET, THERMAL ESC, WEB
1 0200-09606 COVER, QTZ, 200MM, HIGH PROFILE, NOTCH,
1 0040-64458 ADAPTER, CESC, 2 HE ZONE, 200MM, DPS+
1 0010-10200 ASSY, TESTED PED ESC 200MM 1 FLT WEB
1 0040-00878 PEDESTAL ASSY,ESC,200MM,FLAT,EMXP+
7 0200-09579 COLLAR,SI,OX/MLR/NIT 200MM, FLAT
3 0200-31628 -
1 0040-99957 SHELL, ASSY,195MM SEMI TCH FLAT, DP
1 0090-35134 SHELL ASSY,ESC 195MM,FLAT,DPS CHAMBER
1 0200-36114 CYLINDER ENHANCED WAFER SUPPORT RTP
2 0200-36118 BATCH EDGE RING, 200MM WAFER, SILICON CO
3 0200-00289 CYLINDER,WAFER SUPPORT,SI COATED,200MM R
1 Deposing ring
1 0010-10202 TESTED PEDESTAL ESC ASSY,200MM TCH WEB
1 0020-31643 GAS DISTRIBUTION PLATE, ADIZED, SXTAL,
1 0020-40010 -
1 0021-76434 PANEL, A/C FR, B/D RR COVER SIDE EQ, MF
1 0200-09603 PIPE, INSULATING,QTZ,ESC
3 0020-38889 COVER FIXTURE,CLEANING,R2,SIMP CATHODE
2 0220-24065 -
1 0020-34775 BLOCKER, PERF,SILOX 8",UNIV CH,N-STEPP
1 0020-78697 8" WAFER RING, TUNGSTEN, TIIAN HEAD
2 0040-64458 ADAPTER, CESC, 2 HE ZONE, 200MM, DPS+
6 0020-09885 ISOLATOR N
1 0020-28937 PEDESTAL, 8" ADV 101 - FULL COVERAGE
2 0020-28711 VIEWPORT SHIELD, 10", CH A OR B LID
6 0040-18219 LASED, PEDESTAL, 200MM SNNF SML FLT
4 0200-00516 Edge Ring
7 0200-35157 SUSC R3 ROTATION, POLY BACK COAT 200MM
3 0200-00289+ 0200-00516 Edge Ring + Wafer Support Cylinder
1 TxZ Heater Connector
2 BAB3050HT CB, 50A, 3Ø
1 BAB3080HT CB, 80A, 3Ø
1 QC3015H CB, 15A, 3Ø
2 QOB 3305237 CB, 30A, 1Ø
2 QO 82305252 CB, 30A, 2Ø
1 OBHW CB, 15A, 2Ø
2 CB, 20A, 2Ø
1 QOB2155237 CB, 15A, 2Ø
2 CB, 3A, 3Ø
1 CB, 15A, 2Ø
3 CB, 10A, 1Ø
1 CB, 10A, 1Ø
1 CB, 10A, 1Ø
1 CB, 15A, 1Ø
1 CB, 1Ø
1 - cat no. JT3175T
4 - EARTH LEAKAGE BREAKER
1 3870-01135 VALVE BELLOWS CLOSED 1/4
1 - cat no. EHD3D5D
1 0680-01877 CB PNL BD 3P 240V 150A 22KAIC BOLT-ON
6 0680-01258 CB MAG THERM 1P 240VAC 10A BOLT-ON QOB-T
1 0680-01142 CB FRAME ONLY 600V 3P 250A INTERCHG TRIP
1 0680-01210 CB MAG THERM 1P 240VAC 20A BOLT-ON 뺴
2 0021-04354 CONDUCTOR, FLEX HTHU DC BIAS
1 0200-21404 Insulator RF connector DC BIAS
1 0010-76317 CENTURA INDEXER MOTOR ASSY.
12 3630-01092 RTNR RING INT 5/8 HSG .035THKSST
5 0015-20124 CABLE ASSY, GROUND STRAP ,LID
6 0020-20113 HUB DC BIAS, SHIELD ASSY
3 0020-20126 STAND-OFF, CERAMIC DC BIAS
2 0020-29640 REST BUTTON,ADV. 101,3.4 MM, FULL-COv
7 0020-20114 ISOLATOR, DC BIAS
1 0200-09636A PLUG,SIC W/HEAD
4 0020-25746 PAD 8" ZX HEATER DC BIAS
12 3630-01091 RTNRRING EXT 3/4 SFT .062THKSST
5 0020-29640 REST BUTTON,ADV. 101,3.4 MM, FULL-Cov
4 3630-04034 -
1 0020-20119 PAD DC BIAS
3 0015-20035 SCREW, INSULATOR
2 0010-00865 BAKEOUT LAMP CLAMP ASSEMBLY
1 2024-20229 Basic Wall Clamp KIT
1 0240-20752 KIT,Automated Lood Lock
16 0200-39197-P1 WINDOW, MANOMETER, 300 MM DPS
2 0240-25036 HDWR KIT, G12 Shield,Flat head
1 0242-34523 KIT, Elec inft
2 0020-21366 SCR SHOULDER DC BIAS TIW
1 0240-20229 Basic Wall Clamp KIT
1 0020-21007 Block Wall Clamp
4 0200-09450 Tube Gas Feed OD
1 0200-09450 TUBE GAS FEED OD 6.35MM BWCVD
10 0020-00275 PAWL ADJUSTER GATE VALVE
4 0020-31633 LIFT PIN, CONDUCTIVE
4 0020-31570 LIFT PIN, ANODIZED
2 0200-09540 COLLAR, DURATHON T
25 0020-42288 SCREW,NI BLCKR EC WXZ
12 0200-09723 SCREW,GUIDE PIN,HTR,WXZ
2 1010-01501 -
1 0020-31918 PLUG DC ESC, RECESSED, SIC
1 0020-31631 RING,INSULATOR,DC CONTAC ESC
8 0020-31017 BUSHING TERMINAL BWCVD
1 0240-11748 -
1 0100-09933 -
15 0200-20137-A PIN, PCII INSULATOR
1 0690-00380 -
1 3320-01060 GSKT SPIRA SHIELD.097DIA SST (1FT PCS)
3 0020-28957 REST BUTTON ADV 101 FULL COVERAGE 3.4MM
2 3880-01245 WSHR FLAT #4 OD .250 THK .030 SS
1 0020-29035 FLAG,LOWER MOTOR LIFT EXT
4 0240-76735 Kit, Floor Mount Generator Rack
1 0150-09689 CABLE MFC/ELECTRICAL BOX INTERCONNECT 3'
1 0050-09872 WELDMENT PLUMBING CLUSTER EXTENSION VER
1 0050-09670 TUBE WELDMENT TEOS IN LIQUID SOURCE ENCL
1 0226-96762 HARNESS AMPULE REFILLABLE LEVEL SENSORS
1 0050-09821 PLUMBING WELDMENT,TEOS CLUSTER 1/4 FLOW,
6 3300-01405 FTG, REDUCER KF-50 KF-40
1 0040-20733 W/B BARATRON ADAPTER
1 0020-13265 HOUSING,WB ELECTRICAL
1 0190-12941 BALL, .400 DIAMETER, GR 1 TORLON
28 0910-01200 Fuse 600 VAC 50A
25 0910-01185 Fuse Current Limiting 600 VAC
29 0910-01198 Fuse 600 VAC 100A
4 - Fuse currnet Limiting Class T, 600A IR 200 KA
5 - Time Delay Fuse IR 10KA, 500V
1 0100-37890 -
8 3310-01068 Ion Gauge Filament
4 - Convectron Gauge
1 - Gas shield
2 - Emo Switch , Cable
2 - Incorporated
1 0150-35853 CBL ASSY SERIPLEX COMM,CH A
1 - 500~900pF , 8Kv / 4.8Kv
1 0020-29409 CONDUCTOR,FLEX DC BIAS
3 3550-01117 PIN DOWEL 3/16 DIA X 3/8" LG SST
3 0020-24236 CLIP SPRING PC II ANTENNA DOWELL
1 3880-01022 WASHER,LKG SPLIT #4 .025
1 0015-20035 SCREW, INSULATOR
1 0020-20126 STAND-OFF, CERAMIC DC BIAS
9 0020-24018 PIN ANTENNA PC II POLI SI
1 3880-01004 -
1 0240-20297 KIT, PVD MANUAL RGA ISOLATION VALVE
3 3M80-000400-11 -
1 750B11TCD2GG NKS (000309417)
1 0020-22511 RETAIN BUTTON
2 3700-02870 ORING ID .614 CSD .070 EPDM 70 DURO
4 3320-01024 GSKT RTNR 1/4 VCR ID .24 X .15 HX
1 Solenoide 3way valve
2 Fitting
1 0021-35822-A
1 Fitting
2 0020-40564 BLANK-OFF POSITION E&F NON-ENP
1 0140-01019 -
1 3300-03024 FTG ADPTR ISO-100 TO KF 50 CRES
2 000-1108-026 -
8 0226-97866 -
1 0140-09987 HARNESS,TEOS PRESSURE INTERLOCK,LIQ. INJ
1 0020-22821 COVER WAFER MAP LED
1 0020-25199 -
2 0020-20558 BLANK SLIT VALVE
1 0270-76090 -
1 0020-22412 UPPER COVER, SLIT VALVE BELLOWS
1 0040-22829 STOP, SHUTTER BLADE, 8" E-CHUCK
1 0240-76242 KIT, HP HEATER LIFT
1 0020-20944 SHIELD TOP 8
1 000-1096-710 -
1 0150-20638 CABLE ASSY IGNITION NETWORK
1 8112095G001 Purge Valve (In Put 40~80PSI)
1 0140-20501 HARN ASSY DRVR +24/+5 POWER
29 0690-01583 FLG 1-1/3 OD CF BLANK
4 0020-25686 COVER HEATER CONTROL BOX
1 0090-20119 INTERLOCK SWITCH ASSY PC II RESONATOR
1 0020-19812 -
1 0020-44559 COVER, WAFER ORIENTER CONTROLLER PCBA
2 0020-22296 COVER ORIENTATION PCB
1 0040-23472 BLANKOFF HTESC PWR SUPPLY CHASSIS
1 0020-25478 COLLAR, SUSCEPTOR E-80 BWCVD BSE
1 0040-22802 HUB SPACER B101 HEATER
4 Chamber END CAP
2 0090-76030 ASSY, SENSOR SOURCE NBLL
3 0010-40155 ASSY, WAFER SENSOR LOW PROFILE TC
1 11100A6517 Comet photoelectric Thru013ean Source 10-30 VDC 6feet Cable
1 Filter
1 Wafer Sliding Sensing Blading
1 3840-06066
1 AC POWER LINE
1 PE-2500 M/N: 3157504-012
2 M/N:21251-1003R-001 (gate valve)
1 0010-17666 FLOW SWITCH ASSEMBLY, 200MM ULTIMA X
1 0010-09691 GAS BOX, 200 MM CVD
2 0020-09604 HOUSING
2 AS-202 -
1 AS-006 -
8 AS-019 -
2 AS-111 -
2 AS-022 -
2 AS-276 -
1 LF-10A
1 CPS-1001S RF POWER SUPPLY
1 LOW TEMPERATURE ESC CONTROLL MODULE
2 HFV8000
2 RTP Lamp Fuse Ass'y
2 RTP Lamp Fuse Ass'y
1 0010-12864 MAGNET ASSY, LP-8.8, SHIM, 200MM SIP ENC
1 0010-01198 ASSEMBLY MINI LP-3 MAGNET
1 0010-01198 ASSEMBLY MINI LP-3 MAGNET
1 0010-12530 MAGNET
1 0010-01994
1 0040-38797 -
1 0010-11304 -
1 0010-11305 -
2 0020-34454 -
2 0190-01094 -
2 0150-35616 -
1 GFGI KIT -
0 0010-01463 ASSY, FLOW MONITORING CHMBR A/C/E
1 0010-30378 ASSY,POWER SUPPLY,APC GAS PANEL,65FT
0010-11304
0010-37088 ASSY, SERIPLEX CHAMBER C, GPLIS
0010-11305 SERIPLEX, ASSY CHAMBER B, GPLIS
2 0190-01097 HOSE HX RETURN CHMB A SP1 CENTURA MMF
2 GAS PANEL
1 0050-10752 WELDMENT, BARATRON
1 P/N -
1 P/N Flow meter
1 P/N Baratron
1 P/N Baratron
1 P/N Baratron
1 P/N Baratron
1 P/N Baratron
1 P/N Baratron
1 P/N Vacuum Gauge Sensor
1 P/N Baratron
1 P/N Baratron
1 P/N Baratron
1 P/N Baratron
2 P/N Baratron
1 P/N Baratron
1 P/N Baratron
1 P/N Baratron
1 P/N Baratron
1 P/N Baratron
2 74-3061TT603-056 -
1 731086-49288 -
1 CDG1FA63-S4268-100 -
2 Baratron Model: 122BA-00100EB-S
0 - Baratron Model:124AA -01000BB
1 036-003750-1 -
1 3M36-050435-11 -
1 3M36-050434-11 -
2 - Flow Meter
1 0020-25770 gas spring
1 Capacitor 0.015MFD
1 3030-11587 -
1 3030-11582 -
1 3030-11583 -
2 3030-11585 -
1 P/N
1 3030-11588 -
1 3030-11586 -
1 3030-11584 -
1 P/N -
1 P/N -
1 P/N -
1 P/N -
2 P/N -
1 P/N -
1 P/N -
1 P/N -
1 P/N -
1 P/N -
1 P/N -
2 3030-09518 -
2 3030-09128 MFC D980 30SCCM SIH4 1/4VCR MTL NC 20P
3 P/N
1 P/N-
2 3030-09281 MFC D980 200SCCM 50%PH3/SIH4 1/4VCR MT
2 3030-08665 -
1 3030-06743 -
1 3030-09123 -
2 3030-09280 -
2 3030-09122 -
2 3030-07550 -
1 3030-07551 -
1 3030-11072 -
2 0190-16331 -
1 P/N -
1 P/N -
1 P/N -
1 P/N -
1 9660-100004 -
1 SiH4/1LM SFC1480FPD2 MC-4VLJ24
1 UNIT UFC-8160 N2 / 5LM
1 UNIT UFC-8160 N2/ 5SLM
1 UNIT UFC-8160 N2/ 5SLM
1 UNIT UFC-8160 N2 / 100SLM
1 UNIT UFC-8160 N2/ 5SLM
1 UNIT UFC-8160 SiH3 / 500SCCM
1 UNIT UFC-8160 N2 / 5SLM
1 UNIT UFC-8160 N2 / 5SLM
1 UNIT UFC-8160 N2 / 5SLM
1 UNIT UFC-8160 N2/ 5SLM
1 UNIT UFC-8160 SiH4 / 150SCCM
1 UNIT UFC-8160 N20 / 500SCCM
1 0190-36234 -
2 0190-09113 -
2 0190-09132 SW, 15" HG, VCR-4 OPEN DECREASING VAC, P
2 0190-09218 -
1 0190-35742 2PSI OVER-PRESSURE SWITCH
1 42A13DCH2AA025 -
1 1530-01232 -
4 LMD-14793 -
2 852B12PCJ2GC -
1 850B61PCD2GD -
1 3310-01087 GAUGE VAC MINI-CONVECTION W/AO&PROC RLY
1 3030-08004 LFM LF-310A-EVD TICL4 0.2GPM F.S. 1/4
1 A0313073800 -
4 0040-20048 FEEDTHRU LAMP
0 3870-01810 USE 3870-01307 VALVE MNL DIAPH 3500PSI 1
0 3870-01306 VALVE AIR ACTUATED NC 1/4 VCR F-F 10 RA
2 0020-18712 BRACKET FLAT NEEDLE VALVE ULTIMA HDP-CVD
1 45300396 -
1 0050-37678 WELDMENT SPOOL 4.69" M/FGECO
1 0050-33247 -
10 4500266 -
2 3870-01811 VALVE BLOCK DIAPH 3WAY 1/4VCR-F/F/M NC/N
1 P/N없음 -
1 0050-00493 WELDMENT, N2 PURGE MANIFOLD,VERIFLO
1 0050-34818 LINE, 1/4" VENT EPI ATM
1 43800720 -
3 45400891 -
3 45700354 -
3 3800-01173 RGLTR PRESS NO-GAGE 4 PORT 1/4VCR-F WELD
1 45400892 -
15 DN5170375 -
1 CA-98D9-Z -
4 0240-13342 -
0 WG3N58RR2
2 0190-21067 ASSY FILTER/DIFFUSER LOADLOCK
1 0190-21067 ASSY FILTER/DIFFUSER LOADLOCK
1 GLFF4000VM4 FILTER
1 Vacuum Gauge Tube
4 GLF6101VM4 -
55 Filter
8 N/C V/V
2 Regulator
2 3510-01090 (5007216H10RA) MOTT Flow Restrictor
1 0050-13127 ADAPTER,WELDMENT,VENT LINE,5RA
1 RD-023MS 2P MICTO STEP DRIVER
1 TYPE 0531 Vacuum Gauge
1 TURCK FCS-G1/4A4-ARX/D118
0 0010-02475 ASSY,HEAT EXCHANGER VALVES,CENTURA MMF
0 0040-02521 BRACKET MULTI CONNECTOR MCE GAS PANEL
1 0225-50092 -
1 0050-10167 MANIFOLD WELDMENT HE VENT
1 0020-39761 BRACKET, LOCKOUT VALVES (6) UGP MCVD
6 SMC NAR2060-N02 + VTA301-02-B(0190-03684)
1 3870-01256 VALVE BLWS PNEU 1-1/2IN NW-40B ON BOTH P
1 3870-01455 VALVE PNEU 1.50 OD PORT KALREZ
1 3870-01258 VALVE UNION BONNET 1/4 REMALE NPT
1 Regulator
3 Regulator
1 Regulator
2 Regulator
1 Bellows Valve
2 M/N:A/V-1002-NW13 M/N:AIV-1002-NWB
2 42800147 -
8 Fitting
1 0015-20164 -
1 HPS Division
3 3870-02007 VALVE PNEU DIAPH 125PSI N/C 1/4T-STUB
1 Ulitma
5 6inch
17 8inch
36 HEAD
3 10-39-SN Air Operated Vacuum High Purity Stainless ball V/V
1 10-39-SN Air Operated Vacuum High Purity Stainless ball V/V
KIV-150-P + gate valve
1 0010-17221 DPS CATH, 200MM, CESC
1 Coaxial Resistor
1 0010-01198 ASSEMBLY MINI LP-3 MAGNET
1 0010-01994 ASSY, HOSE WATER B101 HTR TEFLON
1 0040-09675 BASE,ESC
1 0021-35989 LID PLATE, TxZ VIEW LID
1 - DPS DOME
1 - DPS DTCU
1 0020-22547 ADAPTER 11.3" SOURCE WIDE BODY CHAMBER
2 - CHAMBER Lid/AL
1 0040-21705 ADAPTER,HI-PWR TTN,WB,H2O COOLED,TOP/BTM
1 JO20-P0538 -
1 0040-06477 CLAMP RING UPPER, RP
2 0010-12844-001 -
1 0010-20278 ASSY 8" DEGAS/ORIENTER CHAMBER 350C
1 0040-70090 -
6 0040-76073 ARM, WELDMENT, SOURCE, W/B
1 0040-20006 ARM,WELDMENT SOURCE STD OBSOLETE
0 0040-76072 ARM, WELDMENT
1 0040-21289 ADAPTER 16" CHAM DURASOURCE TTN
1 0020-23836 PLATE ADAPTER CLAMP G-12
1 0040-03932 ADAPTOR UPPER, SIP-CU 290MM, WATER COOLE
2 0040-03933 ADAPTOR LOWER, SIP-CU 290MM, WATER COOLE
1 - 12.9" Lid Source
1 0040-22274 ADAPTER, REV 4.3/4.2 VECTRA IMP
1 0020-22982 ADAPTER TIN 8" WAFER CHAMBER 16"
1 0020-06338 DUMMY TARGET, SOURCE 13"
2 - AL TARGET
1 - AL TARGET PLATE
1 - ORIENT CHAMBER
1 0010-20298 ASSY, DEGAS LAMP 8" 550C
1 - DXZ CHAMBER Lid
1 0010-13624 ASSY ADAPTER/FEEDTHRU KIT VECTRA IMP REV
1 0020-30059 PUMPING PLATE CONFORMAL SILANE NITRIDE 2
1 0021-36191 Pumping Plate(WxZ)
1 0020-10186 COVER TOP 200MM
1 0040-32073 GAS BOX, UNIVERSAL LID,W/ALIGNMENT HOLES
1 0040-09081 COVER, LEFT SIDE SECONDARY PUMP FRAME (CVD 6" CH Body)
4 - SIP - CHAMBER Lid
1 - PREHEATER
1 - CRYO PUMP VALVE KIT
2 0100-76038 ASSY, PCB LED-NB, FAST WAFER MAPPING
1 0100-01792 PCB ASSY, 5-PHASE STEPPER DRIVER INTERFA
21 0240-20021 LIST,BASIC SHIELD PARTS
9 0660-01619 CARD CONTROL PHASE ANGLE 120VAC FAST RE
5 0100-20073 wPCB ASSY, WAFER DETECTO
2 0100-00084 PCB ASSEMBLY, CAP.SENSOR **
1 0100-20180 PCB ASSY PVD DRIVER CENTURA
1 0100-18058 PCB ASSY., TC AMP INTERLOCK, ULTIMA
2 0100-35279 PCB ASSY, LOAD LOCK BEEPER
6 0240-23143 8" BASIC SHIELD PARTS-HTHU HEATER
3 0010-20225 MAGNET 'A' 13.0 AL ASSY
1 0100-13011 PCB ASSY, RF MATCH CONTROL
2 0100-09134 PCB ASSY DIDO FUSE
1 0100-09123 wPCBA WAFER SENSOR BOARD
1 0100-35138 ASSY, POLY DPS-A3, CHAMBER INTERFACE
2 0100-00008 w PCB TC GAUGE
2 0100-20065 PCBA, ROTATION MOTOR CONTROL
1 0100-09307 ASSY, DTLR INTERLOCK PC BOARD
1 0010-020098 -
2 0100-20066 PCB ASSY, ANALOG SYNC DETECT
1 0100-00014 PWB OPTO DETECTOR
1 "Canon
BH8-1534-01" -
1 Revc -
1 "SEI
0100-01996" ASSY, PCB SEI
1 0190-76043 PCBA ASSY, SBC SYNERGY 68040 CONTROLLER
0 0190-35776 MULTIPLEXED I/O CONTROL BOARD, CH D
1 0190-35762 SERIPLEX MUX I/O PCB(2), (048-079H)
1 0190-35653 SERIPLEX MUX I/O PCB(1),(016H-047H)
3 0100-11002 PWB DIGITAL I/O **
2 0270-20268 PCII BELLJAR BEADBLAST FIXTURE
1 OMS 0190-76005 SPEC CNTL DWG, INTELLIGENT MOTOR CONTROL
1 0100-76013 PCB ASSY, CENTURA CHAMBER A/C INTERCONNE
1 0240-20551 LIST 8" SHIELD
1 0100-20216 PCB ASSY STEPPER DRIVER INTERFACE
1 0100-76037 ASSY PCB, CHAMBER TRAY DIST, POS B & D,
2 0190-35310 ASSEMBLY PCB RTP CHAMBER INTERFACE
1 0100-20004 wPCB ASSY, CHAMBER INTERCONNECT
1 0100-20313 CHAMBER INTERCONNECT PCB
1 0130-76030 -
1 61-0273-22 -
0 0100-00165 SERIAL SIDEBOARD, ASSY
0 "0100-09169
0100-09299" . wEXPANDED RS-232 CNTRL. ASSY . ASSY, SERIAL SIDE BOARD
2 0100-00979 ASSY PCB STEPPER CNTRLR W/DAUGHTER CARDS
23 0020-27455 DISK 8" ADVANCED 101 SHUTTER
0 0100-00398 ASSY, PCB SEI
1 0100-09054 PCB ASSY, ANALOG INPUT
2 0100-11001 w PWB, ANALOG OUTPUT
4 0100-35071 PVD GAS PANEL DIST BD
2 0100-35071 PVD GAS PANEL DIST BD
0 0100-00156 wISOLATION AMPLIFIER BRD ASSY
6 0020-26973 8" TI SHUTTER DISK
2 0100-20051 PCB ASSY, TURBO INTERCONNECT
1 0100-09127 wPCB ASSY INTERCONN BD WAFER SENSOR
10 0020-23952 WAFER DISK 8" SHUTTER
2 0100-09017 wPCB ASSY CHBR INTERCONN
3 0020-22909 PEDESTAL SHIELD, 6" PRECLEAN
1 011222-103 IG MODULE
1 0100-09071 wPCB ASY SBC I/O BRK-OUT
1 0100-09006 PCB ASSY, INTELLIGENT INTERFACE SBC
1 0100-09054 PCB ASSY, ANALOG INPUT
1 0100-00003 w PWB VME STEP CONT. I
1 0021-06336 DISC,8"SHUTTER SNNF CU LT BESC
1 0100-20063 PCB ASSY, TC GAUGE
1 0100-00049 w PWB, ANALOG SIGNAL CND
1 0100-00010 w PWB ION GAUGE
1 0100-20069 ELECT ASSY,ENHANCED WAFER ORIENTER
1 0020-25256 8" 101 SHUTTER DISC
1 0100-20027 wPCB ASSY,CONTACTOR INTERLOCK
1 0090-76110 ASSEMBLY, ELECTRICAL, VME CPU SYNERGY UP
2 0190-09379 wPCB ASSY VME CPU SYNERGY UPGRADED
1 0100-20012 PCB ASSY, ISOLATION AMPLIFIER
1 0100-00206 wPWB ASSY DETECT II EASE/NON-EASE
1 0021-17720 DISK, SNNF, SHUTTER, TA/BESC, AL-SPRAYED
1 0010-21497 DRIVE ASSY,GEM 3.5 FLOPPY
1 0021-20042 DISK 8" B101 SST SHUTTER
1 0100-38019 ASSY, PCB, DLVRY LINE/INJT HEATER CNTRL
1 0100-00208 PCB ASSY GAS PANEL III,FUSED
1 0100-20152 PCB ASSY SYSTEM EXPANSION
1 0240-33243 KIT, TEB DTLR TO MULTI-PLIS INTRLK
1 0110-00793 -
1 0190-00318 VGA VIDEO CONTROLLER ASSY
1 "A0109L04
-01VBI.O" -
2 000-1096-102 -
2 0030-09027 HOUSING TC AMP MACHINING
1 0100-09131 wASSY DWG FLUID OVERFILL BOARD
2 0020-24914 COVER RING SST 8" 101 COVERAGE
SET -MASS STORAGE MODULE -0600-00031 -0100-13024(ASSY, PCB INTERFACE PROCESSOR DIST.)
1 0190-76142 HARD DISK DRIVE 540MB 3.5" SCSI
1 51-31034-0A3 -
1 0190-01779 DRIVE, HARD DISK WITH WIN NT, CENTURA 20
1 SFD-3218 -
3 20-10480 -
1 07N3210 -
1 P/N 없음 -
1 0100-00162 wEXP I/O DISTRIBUTION BOARD ASSY
4 0130-35034
1 0110-20177 -
1 0020-70173 PLATE MOUNTING TURBO PCB
1 BES-530-12 -
1 0100-09224 PCB ASSY EXPANDED RS232 INTERCONNECT
1 0110-70015 -
1 0100-00275 PCB ASSY, LT/ESC/AI/INTLK BREAK-OUT
1 0190-35197 GAS PANEL MANIFOLD "G"
1 0100-35083 PCB ASSY CHAMBER INTCNCT B&D CENTURA MXP
1 0100-20066 PCB ASSY, ANALOG SYNC DETECT
3SET "0100-20078 1120-01035
ats02-0012
ats02-0014
ats02-0015" ORIENTER LASER KIT
1 000-1082-207 -
1 1050-235 -
- 000-1053-310 -
2 000-1050-299 -
1 000-1103-426 -
2 0100-00533 PCB, ASSY, MCA+ ELECTRONICS DC/RF ISOLAT
1 0100-20051 PCB ASSY, TURBO INTERCONNECT
3 0020-31566 PLATE, LEFT, CONTROLLER BOX, ESC
4 0020-23041 CLAMP,SHIELD 8" WAFER
1 0100-20313 CHAMBER INTERCONNECT PCB
2 0100-76124 DIGITAL INPUT OUTPUT PCB
2 0100-20173 ASSY.PCB, STEPPER CONTROLLER 1.7 AMP DRI
0 0100-20001 wPCB ASSY,SYSTEM ELECT.I (System Electronics Interface B/D)
1 0100-00893 PCBA TC GAUGE
1 0090-00811 ASSEMBLY, PCB DUAL GAS LEAK DETECTOR
1 0100-20026 wPCB ASSY,STEPPER DRIVER DISTRIBUTION
2 HDD(SEAGATE) 1. Model:ST3420N S/N:AYW33205 2. Model:ST3420N S/N:AYY56019
2 0660-01660 CONVECTRON GAUGE B/D
1 HDD(IBM) Model:34330 S/N: AYY56019
2 0100-20070 PCB ASSY,MAG/LAMP DIST
1 0190-09099 SPEC., PREALIGNER MOTOR HARNESS, KAWASAK
1 0100-11001 w PWB, ANALOG OUTPUT
1 0100-09054 PCB ASSY, ANALOG INPUT
1 0190-00318 VGA VIDEO CONTROLLER ASSY
1 0100-01859
1 PCB V 2.0 MAGNETIC BEARING
1 ACT1300M/1600M
1 ACT1300M/1600M
1 STP-XH 2603P STP CONTROL UNIT
1 U493657-15 ENDURA CONTROL PANEL
1 W10500000 S/N : 709245
1 0620-01061 CABLE PUMP MOTOR MTR (10FT) NT/TMP340M
2 - 000-1096-303 REV:A
1 EBARA CONTROLLER MODEL: 156
1 EBARA CONTROLLER PENEL TYPE: 303 PWM-1DM
1 EBARA CONTROL PANEL TYPE:ET150 SD-12M
1 STP-XH 2603P
0 3620-00201 ATH 1600M
1 STP-301 CVB
0 0150-20708 CABLE ASSY 75' DC SOURCE DML
1 TURBO PUMP ET150M P/N: A3000153
1 - ET150 SD
1 - ET300UZ
5 0240-25036 HDWR KIT,G12 SHIELD,M3 FLAT HEAD
G12 SCREW SET
1 0010-01831 ASSY TC AMP LOW TEMP BESC
1 0090-00475 ASSY EXPANDED SERIPLEX 210 MAINFRAME PRO
1 PVD B/(ION GAUGE B/D)
1 0100-20060 wPCB ASSY,PVD DRIVER
1 9J4010-010 HDD S/N:LNC39428
1 0190-01404 SERIPLEX VME CONTROL BOARD SPXVME6U1V2
0 0190-76005 SPEC CNTL DWG, INTELLIGENT MOTOR CONTROL
1 AI/O 0190-05997
1 0100-00396 ASSY PCB ANALOG I/O AIO BD
1 0010-76341 PVD DUAL BLADE RORBOT
1 0010-22985 PEDESTAL, PIB, 300MM FDR SLTESC DYLYN AS
1 684-1-L-CE -
1 2261-002-D MDX-500
1 GD-V770 GAS DETECTOR
1 GD-K710 GAS DETECTOR
1 HPC-2D CDG ADAPTOR UNIT
1 409233-MC -
2 - LID SOURCE
1 - LID SOURCE COVER
1BOX - SHIP PVD CH LID
16 SMC KQ2L01-32
1 3700-02869 ORING ID .426 CSD .070 EPDM 70 DURO
2 3300-02448 FTG PLUG AIR 1/4T X 1.38LG
1 3700-02871 ORING ID .549 CSD .103 EPDM 70 DURO
4 3500-01155
1 3700-02215 ORING ID12.000 CSD.103 CHEMRAZ SC513
4 Lift Pin
1 PVD Cal Jig
1 PVD shield jig
1 0040-20343
1 3400-01108 HOSE 10' FLEX LINE HE CRYO 3/4" DIA FEM/
1 RF Tube(Preclean CH사용)
2 3620-01471 9600 COMPRESSOR
5 - MDX-L12M-650
3 - CRYO PUMP
2 0010-21844 MAGNET ASSY DURASOURCE TTN ENCAPSULATED
3 0010-22411 HEATER ASSY MCA'D, SNNF, 8, MCA+ ESC
- 0190-21111 12KW DC POWER SUPPLY Hi-Z. Read More [v] Close [^]