Evaporators: EDWARDS E306A

ID#: 189372 Manufacturer: EDWARDS Model: E306A Category: Evaporators Wafer Size: 4" Equipment Details: Evaporator, 4"
Base pressure: 5-8 x 10-6 Torr
Unit uses a rotary diffusion pump combination
Chamber size: 12” diameter cylinder, 14” in height
Process: platinum evaporation
E-beam source
Single 4" wafer holder suspended from lid and without rotation
Low vacuum roughing pump
Thickness monitor
EDWARDS 5 Mechanical pump
Currently de-installed.
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