Spare Parts: Various Lot

ID#: 194356

Manufacturer: Various

Model: Lot

Category: Spare Parts

Equipment Details: HPCVD Equipment
Qty Description
(1) PlatForm Module-Basic,HPCVD
(2) CVD Gas Box Assembly, BPSG
(3) LIQUID AUTO REFILL SYSTEM (TEB)
(2) LIQUID AUTO REFILL SYSTEM (TEPO)
(7) Indexer Feedthru, HPCVD
(7) Endpoint Detector(SiF4),with RS232 Funct
(11) O-ring W=0.275" ID=46.46" Chemraz 629
(17) Ablock regulator, 0-60psig, 3p
(1) ASTRONex 6 LITER NF3;
(19) 021 Gate Al Vulcanized G67P Seal 50X336
(2) Dry Pump,A100P; Pump
(1) Chiller,HX300 Semi
(7) Stage Valve Heater,208V 105 Degree C,LTA
(6) Valve,NW 100 Single Stage,MF100 Inline
(9) Driver,Motor Controller,S30661
(14) Hi-Temp DI canister kit / resin
(29) Filter,4m/4m,PTFE,0.003u,3SLM
(7) Kit ,Throttle Valve Heater (55-0770)
(3) Cylinder,Rectangular Valve,VAT253778
(15) High Flow Gas Regulator,20PSI,SST316
(11) Xdcr-LDM,890A,100psia,1/4male
(8) 2 X TO CVD (R)HOSE 3/4" 22M
(3) SCR Power Controller
(36) Seal,Centering Ring ASSY NW100,Al/Karlez
(30) O-ring AS568A-346 Kalrez #8085
(7) vlv,3p,mblk,2f/2f/2f,nc/nc,fuj
(2) O-RING,W=0.210'',ID=49.96'',CHEMRAZ629
(1) MV,TEB,MV-1142-PV-33,3g/min
(27) CABLE,POWER,HEATER,HPCVD
(6) VAC Angle Valve XLD-40-X1043
(34) Seal,Centering Ring ASSY NW16,Al/Karlez
(20) Flow Switch,3-300cm/s,G1/2,Liquid,PNP
(1) Endpoint Detector(SiF4),OPTI-Sense 5000
(32) O-ring AS568A-340 Kalrez #8085
(18) Flow Sensor,SI1000 W/ Cable&Adapter,PNP
(17) ASSY,FLOW SENSOR,HPCVD
(6) Smooth Venting Valve 1/4''F-VCR
(3) MFC1179A,2000SCCM 1/4VCR,N2 DeviceNet
(3) Heater 4.0,T-VLV,2AP1
(3) 385 VAC Gauge,DeviceNet,1/4VCR
(4) H X TO CVD (S)HOSE 3/4" 22M
(13) Filter,8m/8m,PTFE,0.003u
(2) REC Door_L V-Type 50X336,Al AAZ2
(40) Flow Restr,1/4",SST,7SLM,OS 0.018"Dia
(2) PID PRESSURE CONTROLLER
(11) CV Angel Valve KF16,Normally closed
(2) LFM, TEPO, 1g/min, STEC
(12) O-RING AS 568A-272 Perlast G67P
(5) Monoblock, NC/NC, 1/8"VCR M/F/
(1) Mass Flow Metet w/ Heater,N2,20SLM
(9) Pressure Switch,1000T F/S,650T TRIP
(182) "SCRW,CLMP,NR,M8x20L,SST304,MSUM HFUB8-2
(6) AC Angle Valve XLA-40-F911
(17) Filter,4m/4m,PTFE,0.003u,30SLM
(13) Seal Kits for 653B F-CUP Flapper
(44) O-ring AS568A-230 Kalrez #8002UP
(3) 275 VAC Gauge,DeviceNet,1/4VCR
(3) Pump,IPUP A100,Hand Held Display
(16) O-ring AS568A-251 Kalrez #8085
(10) O-ring AS568A-350 Kalrez #8085
(4) MINI-CONVENTRON Gange,1/4 VCR Famale
(25) Flow Restr,1/4",SST,10SLM,OS 0.029"Dia
(64) O-ring AS568A-213 Kalrez #8002UP
(33) O-ring AS568A-226 Kalrez #8085
(27) O-ring AS568A-230 Kalrez #8085
(23) O-ring AS568A-326 Kalrez #8002UP
(4) Right Angle Section Heater,Dia 6.35mm
(36) O-ring AS568A-314 Kalrez #8085
(5) 1/4 turn,loto,2 port straight
(15) Ball Valve,Swagelok 3/4'',SST316
(5) HEATER FOR 1/4" HORIZONTAL,SERIES
(53) O-ring AS568A-214 Kalrez #8085
(8) Quick Connector,Body,Tube Fitting,1/2"
(9) O-ring AS568A-243 Kalrez 4079
(13) Flow Restr,OS 0.0155"Dia.SS-4-VCR-6-DM
(6) AX7680 SERIES AC CONNECTOR
(16) O-ring AS568A-320 Kalrez #8085
(1) Vaccum Grease,Krytox 240AC
(9) Sensor,Foup Present,LDPT
(4) GAS LINE HEATER TC CABLE, CVD
(3) CV Angel Valve KF25,Kalrez seal
(1) MFM Heater For 8455 Model, 208V, 150W
(12) O-ring AS568A-234 Kalrez #8085
(38) O-ring AS568A-211 Kalrez #8085
(28) O-ring AS568A-217 Kalrez #8002UP
(1) vlv,3p,mblk,2f/2f/2f,nc/no,fuj
(8) Flow Restr,OS 0.035"Dia.SS-4-VCR-6-DM
(31) O-ring AS568A-205 Kalrez #8002UP
(13) O-ring AS568A-229 Kalrez #8085
(8) Presssure Switch,PPD3-R10N-6B-P70
(5) Leak Detection Sensor,NPN,SUS Mount,2m
(2) HE WATER MNLD W,CHMBR FRAME,HPCVD
(138) Seal Ring NW100; Teflon
(3) HEATER JACKET, 3-WAY VALVE,GAS BOX
(6) Flow Restr,OS 0.0095"Dia.SS-4-VCR-6-DM
(5) SYSTEM MANOMETER SIGNAL CABLE,CVD
(3) O-Ring,W=0.139",ID=5.734",Kalrez 4079
(3) SYSTEM LIQUID DELIEVERY SYSTEM SINGAL CA
(3) "CABLE ASSY,LDS SIGNAL,

HORIBA,BPSG,75FT"
(29) O-ring W=0.139" ID=0.421" Chemraz 639
(4) QUICK CONNECTOR-COUPLER-3/4" FEMALE
(2) Valve,2P,NC,Temp Range:-10℃~150℃
(33) STRAP FOR HEATER JACKET
(5) Flow Restr,OS 0.0130''Dia.SS-4-VCR-6-DM
(20) Time-Delay Fuse,600V,20A,0.81X2.25in
(20) Fuse,Time Delay,600V, 30A,0.81X2.25in
(30) STRAP FOR HEATER JACKET
(7) O-ring AS568A-224 Kalrez#8002UP
(12) O-ring W=0.139" ID=1.171" Chemraz 639
(12) O-ring W=0.139" ID=0.984" Chemraz 629
(3) CH TO O3 Kit Water Hose 1/2" (S) Blue 5M
(3) CH TO O3 Kit Water Hose 1/2" (R)Red 5M
(2) SYSTEM LIQUID DELIEVERY SYSTEM SINGAL CA
(12) O-ring W=0.139" ID=0.921" Chemraz 639
(3) ASTRON LIFTING KIT
(4) Flow Restr,1/4",SST,5SLM,OS 0.015"Dia
(18) Photosensor, L-shaped type,5-24V,NPN
(1) Pressure Switch/Gage,Dwyer 3000MR-50MM
(2) Cartridge DEI 11''MXNED D50238
(5) O-Ring,W=0.210" ID=29.894",Viton
(2) vlv,2p,4f/n/4f/n, nc,fuji,alp
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