Sputtering Systems: VARIAN 3118

ID#: 36368

Status: De-installed

Manufacturer: VARIAN

Model: 3118

Category: Sputtering Systems

Vintage: 1985

Equipment Details: Sputtering system
Custom rotating drum substrate carrier for high throughput

Varian 3118 framework
Bell jar and hoist
Diffusion pump and valving
Rotating substrate carriage
Jar: 24"L x 20W
Angstrom Sciences DC Magnetron cathode, 24"

De-installed
1985 vintage.
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