APPLIED MATERIALS ENDURA Products

  • APPLIED MATERIALS: Endura 5X

    Details
    ID#:
    9073612
    Category:
    Reactors
    Front end load station, 12" | For Applied Materials Endora or Centura platforms | FOUP interface.
  • APPLIED MATERIALS: Endura

    Details
    ID#:
    9093861
    Category:
    Spare Parts
    Wafer Size:
    12" 
    Lot of Endura 12" Spare Parts: | | 0190-22925 RF GEN, 13.56MHZ, 1.25KW, 480VAC | 0010-76428 ASSY, PVD SLIT VALVE ACTUATOR | 0190-19395 CRYO COMPRESSOR | 0010-27430 PEDESTAL, PIB, 300MM MCA HT ESC ASSY, KOVAR RING W | 0010-18108 A101 HEATER ASSY.
  • APPLIED MATERIALS: Endura II

    Details
    ID#:
    9072983
    Category:
    Reactors
    System, 12" | Process: W (tungsten) | | Configuration: | Ch#2,3: W | Ch#4,5: IMP | | 2007 vintage.
  • APPLIED MATERIALS: Endura II

    Details
    ID#:
    9072984
    Category:
    Reactors
    System, 12" | Process: W (tungsten) | | Configuration: | Ch#1,2,3: W | | 2010 vintage.
  • APPLIED MATERIALS: Endura II

    Details
    ID#:
    9072982
    Category:
    Reactors
    System, 12" | Process: W (tungsten) | | Configuration: | Ch#1,3,4,5: W | Ch#C,D: Pre-clean | | 2009 vintage.
  • APPLIED MATERIALS: Endura

    Details
    ID#:
    9073562
    Category:
    Spare Parts
    Heat chamber.
  • APPLIED MATERIALS: Endura II

    Details
    ID#:
    9072981
    Category:
    Reactors
    System, 12" | Process: W (tungsten) | | Configuration: | Ch#1,2: IMP | Ch#3,4: W | | 2009 vintage.
  • APPLIED MATERIALS: Endura

    Details
    ID#:
    9082912
    Category:
    Spare Parts
    Chamber lids.
  • APPLIED MATERIALS: Endura 300

    Details
    ID#:
    9070412
    Category:
    Reactors
    Wafer Size:
    12" 
    Vintage:
    2002 
    PVD system, 12" | Aluminum interconnect | | Chamber 1: | For Al-Cu PVD chamber | DCPS;Master,OPTIMA DCG-200,ENI,for PVD | Slave,OPTIMA DCG-200,ENI,for PVD | PUMP/CRYO,SICERA KZ-8L3C,SHI | HT ESC type stage | Ar;200/20sccm | | Chamber 2: | Chamber ONLY For PVD | Not used | | Chamber 3: | For TiN PVD chamber | DCPS;OPTIMA DCG-200,ENI,for PVD | PUMP/CRYO,SICERA KZ-8L3C,SHI | A101 type stage | Ar/N2;150/200sccm | | Chamber D: | For Pre-CLN chamber,PCXT | RFPS;GHW-12A/GMW-25A,ENI,for BIAS/SLA | PUMP/CRYO,SICERA KZ-8L3C,SHI | Ar;200/20sccm | | Chamber E,F: | For Degas,Plate heater | PUMP/CRYO,SICERA KZ-8L3C,SHI | Ar,press. Controlled | | Missing Parts as of Q3 2014: | Air solenoid valve unit (Ch-1), US13676 4060-00238, | Cathode feedthrough (Ch-1), 0190-76276 | Cathode cooling water hose, N/A | CP compressor (bottom), CSW-61C / 0190-2932 | Degas Lifting FOUP Assy (Ch-F) | HT-ESC(Ch-1), 0010-23066 | Robot Blade, 0021-32929 | | Missing Degas Lifting FOUP Assy (Ch-F): | (4) 0020-75627, 300mm Degas Clamp Insert | (2) 0020-25615, Clamp | (7) 3880-01245, Flat Washer | (1) 3220-01051, Floating Joint Coupling | (1) 0021-21267, Left Cover | (1) 0190-76278 / 0190-1342, Linear Guide | (1) 0020-42056, Lower Lift Stop | (1) 0021-21268, Right Cover | (7) 3690-01888, Screw | (1) 0090-20003, Sensor Assembly and Cable Harness | (4) 3690-01642, Socket Head Cap Screw | (3) 3690-01945, Socket Head Cap Screw | (6) 3690-01942, Socket Head Cap Screw | (7) 3880-01103, Split Locking Washer | (4) 3880-01025, Split Locking Washer | (6) 3880-01025, Split Locking Washer | (1) 0020-42055, Upper Lift Stop | (2) 3870-02530, Valve | (1) 0040-21402, Wafer Lift Bellows | (1) 0040-42640, Wafer Lift Block | (1) 3020-01152, Wafer Lift Pneumatic Cylinder | (1) 0040-76520, Wafer Lift Rail Support | | Currently de-installed and stored in fab | 2002 vintage.
  • APPLIED MATERIALS: Endura II

    Details
    ID#:
    9072277
    Category:
    Spare Parts
    PVD Chamber, pre-clean.
  • APPLIED MATERIALS: Endura II

    Details
    ID#:
    9072291
    Category:
    Spare Parts
    Ti / TiN PVD Chamber, pre-clean.
  • APPLIED MATERIALS: Endura II

    Details
    ID#:
    9072980
    Category:
    Reactors
    System, 12" | Process: W (tungsten) | | Configuration: | Ch#1,5: IMP | Ch#3,4: W | Ch#C,D: DS TTN | | 2008 vintage.
  • APPLIED MATERIALS: Endura II

    Details
    ID#:
    9072467
    Category:
    Spare Parts
    Wafer Size:
    12" 
    Preclean Chambers, 12" | VAT valves: included | Matches: no.
  • APPLIED MATERIALS: Endura II PreClean XT Turbo

    Details
    ID#:
    9073878
    Category:
    Spare Parts
    Wafer Size:
    12" 
    Chambers, 12" | Process: Pre-Clean | Missing: turbo/cable.
  • APPLIED MATERIALS: Endura II TxZ

    Details
    ID#:
    9073881
    Category:
    Spare Parts
    Wafer Size:
    12" 
    MOCVD Chambers, 12" | Process: CVD TiN | Star Ampoule Upgraded.
  • APPLIED MATERIALS: Endura

    Details
    ID#:
    9082556
    Category:
    Reactors
    System.
  • APPLIED MATERIALS: Endura

    Details
    ID#:
    9082792
    Category:
    Reactors
    PVD system, 6" | (2) Chambers: STD, wide body, PC.
  • APPLIED MATERIALS: Endura II

    Details
    ID#:
    9082794
    Category:
    Reactors
    PVD system,, 12" | Process: metal | 2001 vintage.
  • APPLIED MATERIALS: Endura TxZ

    Details
    ID#:
    9082797
    Category:
    Spare Parts
    PVD Chambers only, 12".
  • APPLIED MATERIALS: Endura

    Details
    ID#:
    9082278
    Category:
    Spare Parts
    Process chamber.
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