APPLIED MATERIALS ENDURA Products

  • APPLIED MATERIALS: Endura 5500

    Details
    ID#:
    9045453
    Category:
    Reactors
    PVD system, 8".
  • APPLIED MATERIALS: Endura 300

    Details
    ID#:
    9070412
    Category:
    Reactors
    Wafer Size:
    12" 
    Vintage:
    2002 
    PVD system, 12" | Aluminum interconnect | | Chamber 1: | For Al-Cu PVD chamber | DCPS;Master,OPTIMA DCG-200,ENI,for PVD | Slave,OPTIMA DCG-200,ENI,for PVD | PUMP/CRYO,SICERA KZ-8L3C,SHI | HT ESC type stage | Ar;200/20sccm | | Chamber 2: | Chamber ONLY For PVD | Not used | | Chamber 3: | For TiN PVD chamber | DCPS;OPTIMA DCG-200,ENI,for PVD | PUMP/CRYO,SICERA KZ-8L3C,SHI | A101 type stage | Ar/N2;150/200sccm | | Chamber D: | For Pre-CLN chamber,PCXT | RFPS;GHW-12A/GMW-25A,ENI,for BIAS/SLA | PUMP/CRYO,SICERA KZ-8L3C,SHI | Ar;200/20sccm | | Chamber E,F: | For Degas,Plate heater | PUMP/CRYO,SICERA KZ-8L3C,SHI | Ar,press. Controlled | | Missing Parts as of Q3 2014: | Air solenoid valve unit (Ch-1), US13676 4060-00238, | Cathode feedthrough (Ch-1), 0190-76276 | Cathode cooling water hose, N/A | CP compressor (bottom), CSW-61C / 0190-2932 | Degas Lifting FOUP Assy (Ch-F) | HT-ESC(Ch-1), 0010-23066 | Robot Blade, 0021-32929 | | Missing Degas Lifting FOUP Assy (Ch-F): | (4) 0020-75627, 300mm Degas Clamp Insert | (2) 0020-25615, Clamp | (7) 3880-01245, Flat Washer | (1) 3220-01051, Floating Joint Coupling | (1) 0021-21267, Left Cover | (1) 0190-76278 / 0190-1342, Linear Guide | (1) 0020-42056, Lower Lift Stop | (1) 0021-21268, Right Cover | (7) 3690-01888, Screw | (1) 0090-20003, Sensor Assembly and Cable Harness | (4) 3690-01642, Socket Head Cap Screw | (3) 3690-01945, Socket Head Cap Screw | (6) 3690-01942, Socket Head Cap Screw | (7) 3880-01103, Split Locking Washer | (4) 3880-01025, Split Locking Washer | (6) 3880-01025, Split Locking Washer | (1) 0020-42055, Upper Lift Stop | (2) 3870-02530, Valve | (1) 0040-21402, Wafer Lift Bellows | (1) 0040-42640, Wafer Lift Block | (1) 3020-01152, Wafer Lift Pneumatic Cylinder | (1) 0040-76520, Wafer Lift Rail Support | | Currently de-installed and stored in fab | 2002 vintage.
  • APPLIED MATERIALS: Endura Vectra

    Details
    ID#:
    9069415
    Category:
    Spare Parts
    Wafer Size:
    8" 
    IMP PVD Chamber, 8" | Chamber body type: wide | Pedestal or heater lift: motorized | Wafer chuck options: B101 | Gate valve type: 3-position gate valve | Cryo restrictor type: standard | Cryo plate stand-offs: none | Shutter: magnetically coupled | Short detect impedance network: no | Chamber lip clamp lever extension: no | Magnet type: RH2 | Coil type: EB3.
  • APPLIED MATERIALS: Endura 5500

    Details
    ID#:
    9038551
    Category:
    Reactors
    System, 8" | Loadlock type: narrow body | Buffer robot type: HP | Buffer robot blade: STD | Transfer robot type: HP+ | Transfer robot blade: STD | Lid hoist: N/A | | Chamber A: | Process type: pass, AL | Chamber body: STD | Chamber lid: 8" STD | Magnet: 0010-20225 | Heater / pedestal: heater | Shutter: N/A | Cryo/turbo pump: cryo | Gate valve: 2 position | RF/DC Gen1: MDX-L12M | RF/DC Gen2: MDX-I12 | Gas #16: N2 100 SEC4400MC | Gas #17: N2 20 SEC4400M | | Chamber B: | Process type: cool down | Chamber body: wide | Chamber lid: 8", STD | Magnet: 0010-20223 | Heater / pedestal: 101% | Shutter: yes | Cryo/turbo pump: cryo | Gate valve: 2 position | RF/DC Gen1: MDX-L12M | Gas #18: N2 200 SEC4400M | Gas #19: N2 200 SEC4400M | Gas #20: N2 20 SEC4400m | | Chamber 3: | Process type: TI | Chamber body: wide | Chamber lid: 8", STD | Magnet: 0010-20223 | Heater / pedestal: 101% | Shutter: yes | Cryo/turbo pump: cryo | Gate valve: 2 position | RF/DC Gen1: MDX-L12M | Gas #2: N2 100 SEC4400MC | Gas #3: N2 200 SEC4400MC | | Chamber 4: | Process type: TI | Chamber body: wide | Chamber lid: 8", STD | Magnet: 0010-20258 | Heater / pedestal: HEATER | Shutter: N/A | Cryo/turbo pump: cryo | Gate valve: cryo | RF/DC Gen1: MDX-L12M | Gas #5: N2 20 SEC4400M | Gas #6: N2 100 SEC4400MC | | Chamber E: | Process type: orienter degas | TC option: yes | | Chamber F: | Process type: orienter degas | TC option: yes | | Signal tower: 3-color | | Pumps: | Loadlock: A30W | CH 2: N/A | Cryo comp: 9600 | Cryo pump: ON BOARD | System: Leybold WSU151/D25BCS | CH 3: N/A | | Powered down | 1995 vintage.
  • APPLIED MATERIALS: Endura

    Details
    ID#:
    9038550
    Category:
    Reactors
    HP-PVD system, 8" | | Includes: | (3) WB | (2) STD | (2) HP | (1) OD (Heater) | (1) ORT | 3P, 9600 | DC Power | NBLL | Missing some parts | | Deinstalled | 1999 vintage.
  • APPLIED MATERIALS: Endura

    Details
    ID#:
    9078150
    Category:
    Spare Parts
    Chambers.
  • APPLIED MATERIALS: Endura

    Details
    ID#:
    9038549
    Category:
    Reactors
    HP-PVD system, 8" | | Includes: | (2) STD | (2) WB | (2) OD (Heater) | (2) HP | 3P, 9600 | DC Power | NBLL | | Deinstalled | 1999 vintage.
  • APPLIED MATERIALS: Endura

    Details
    ID#:
    9038554
    Category:
    Reactors
    Wafer Size:
    8" 
    Vintage:
    1999 
    Liner / Barrier system, 8" | | Includes: | (2) TxZ | (2) HP+ | (1) OD | (1) PC2 | (1) IMP | NBLL | HP | | Powered down | 1999 vintage.
  • APPLIED MATERIALS: Endura 5500

    Details
    ID#:
    9039884
    Category:
    Reactors
    Vintage:
    1993 
    PVD system | Preclean etch rate: 7.5 A/s | 380 V, 50 Hz, 116 Amps | 1993 vintage.
  • APPLIED MATERIALS: Endura

    Details
    ID#:
    9043082
    Category:
    Spare Parts
    Wafer Size:
    12" 
    RF-flow chamber, 12".
  • APPLIED MATERIALS: Endura

    Details
    ID#:
    9043083
    Category:
    Spare Parts
    Wafer Size:
    12" 
    RF-flow chamber, 12".
  • APPLIED MATERIALS: Endura 5500

    Details
    ID#:
    190620
    Category:
    Sputtering Systems
    Wafer Size:
    8" 
    PVD Sputtering system, 8" | Chamber Type: 4 Chamber (1 Standard Body, 3 Wide Body), Pre-Clean 1 Type | Process: Al, Ti, TiN | | Configuration: | Chamber A: Pass through | Chamber B: Cool down | Chamber D: Preclean I | Chamber F: Orienter degas | Chamber 1: ALCu (clamp) | Chamber 2: TiN (101) | Chamber 3: Ti (101) | Chamber 4: Ti (clamp) | | Installed | 1995 vintage.
  • APPLIED MATERIALS: Endura II

    Details
    ID#:
    9072980
    Category:
    Reactors
    System, 12" | Process: W (tungsten) | | Configuration: | Ch#1,5: IMP | Ch#3,4: W | Ch#C,D: DS TTN | | 2008 vintage.
  • APPLIED MATERIALS: Endura 5500

    Details
    ID#:
    9066899
    Category:
    Spare Parts
    Lot of spare parts for 6" sputtering system: | | 5 0910-01073 PORTE FUSIBLE | 6 0910-01074 CAPOT PORTE FUSIBLE | 2 3550-01117 PIN DOWEL 3/16 x 3/8L | 4 3300-02884 FTG PLUG HOLLOW HEX 7/16 | 2 0015-20035 SCREWS INSULATOR | 10 3690-01944 SCREW 1/4-20 X 7/8 | 116 3690-02126 SCREW 6-32 X 7/8 | 5 3690-01847 SCREW 8-32 X 3/4 | 18 3690-02564 SCREW 6-32 X 7/16 TITA. SLOT.F | 8 3690-02568 SCREW 4-40 X 1/4 CAP | 20 3690-02569 SCREW 6-32 X 1 TITAN | 17 3880-01022 WASHER SPLIT | 11 3880-01004 WASHER FLAT | 4 0020-24236 CLIP SPRING PC II | 5 3320-02242 WASHER CUIVRE | 4 0190-70075 BEARING BALL 1.0BORE 1.388 | 1 3630-01092 RETAINING RING INT | 6 3630-01091 RETAINING RING EXT | 1 0020-20117 CONDUCTOR FLEX DC BIAS | 2 0020-29409 CONDUCTOR FLEX DC BIAS | 3 0020-20114 INSULATOR DC BIAS | 2 0020-20113 HUB DC BIAS ASSY | 3 0020-20119 PAD DC BIAS | 2 0020-22839 PIN PRECLEAN LIFT | 2 0020-22805 PLATE ADAPTER | 17 3880-01006 WASHER FLAT #6.3750D X .149 | 2 3880-01304 WASHER FLAT 1/4" .045 THK S | 1 3690-01125 SCREW 6-32 X 3/8 PHILIPS PAN | 6 3690-02674 SCREW 1/4-20 X 1/2 PHILIPS PAN | 9 3500-01175 NUT KEPS 1/4-20 X 15/64TH | 26 3690-02085 SCREW 1/4-20 X 3/8 CAP | 5 3410-01008 INSR 1/2 OD X 3/8 ID SST | 3 0020-16091 BUTTON REST PEDESTAL TIN COATE | 10 3690-01882 SCREW MACH SKT HK 6-32X1.75L | 7 0020-23587 SPACER MODIF SHIELD 8" G-12 | 108 3880-01023 WASHER | 1 0020-25730 SHIELD UPPER G12 DBL | 2 3320-01026 GASKET COPPER | 1 0150-20617 CABLE ASSY CH 5 HEATER CONVECT | 1 0140-20542 HARNESS ASSY CHAMBER 5 OVERTEM | 1 0150-20618 CABLE ASSY CH 5 HEATER TC AMP | 1 0150-20197 HARNESS ASSY TC INTERFACE | 1 0150-20633 CABLE ASSY CHMB 5 SLIT VALVE | 1 0010-76059 BOARD J 20S VME CONT W/5.2 | 1 0100-20173 BOARD STEPPER CONTROL | 1 0100-20012 BOARD ISOLATION AMPLI | 1 0100-20038 BOARD RELAY CONTROL | 1 0100-20040 BOARD REMOTE SUPPLY DI | 2 0020-22956 CLAMP RING | 1 0020-27093 SHIELD LOW KNEE 6" | 1 0020-24386 COVER RING 6" | 1 0020-27124 PEDESTAL PCII 6" JMF/SMF | 1 0010-20129 6" BUFFER BLADE ASSY W/CNTNR | 1 0010-20248 VALVE ASSY SLIT WITH 'F | 2 0020-21462 INSULATOR SOURCE 11.3" CERAMIC | 1 0020-21468 CLAMP SHIELD 5" & 6" | 1 0020-26439 SHIELD LOWER 6" | 1 0020-22909 PEDESTAL SHIELD | 1 0020-22547 ADAPTER 11.3" SOURCE WIDE | 2 0040-21178 BELL JAR | 1 0020-26589 SHIELD PRECLEAN 6" | 1 0020-26111 CLAMPING RING | 2 706-0634 ARTICULATION A ROTULE | 1 3320-01033 GASKET SHIELD RF .094DIA 30LB/LIN-IN STD-FO | 1 3320-01032 GASKET SHIELD RF .172DIA 30LB/LIN-IN STD-FO | 2 0020-20673 PIN CHAMBER MONOLITH INTERFACE | 1 3300-02376 FTG TUBE O.D 3/8 PLUG | 1 3700-02749 O-RING 228 VITON 75 DURO | 6 3870-01281 VALVE BLANK PLATE ASSY FOR SMC | 1 3870-01284 VALVE BLANK PLATE ASSY FOR SMC | 2 3880-01243 WASHER #8 SST .031THK .375 OD BLK OXID | 3 3880-01378 WASHER LKG SPLIT #1/4 .365ODX.254IDX.062T | 4 3880-01042 WASHER FLAT #10 .444ODX.203IDX.050THK SST | 11 3880-01027 WASHER LKG SPLIT #5/16 .125W X .078THK SST | 2 3880-01306 WASHER FLAT #4 .125ID X .375OD X .040THK STL ZINC | 6 3880-01221 WASHER FLAT #4 .250OD X .116ID X .0625THK SST303 | 4 3690-01659 SCREW CAP FLT HD 4-40 X 3/8L PHIL 82DEG SST | 8 3690-01627 SCREW CAP SKT HD 10-24 X 1L HEX SKT SST | 6 3690-01538 SCREW CAP SKT HD 10-24 X 1/2L HEX SKT SST | 2 3690-01073 SCREW CAP SKT HD 1/4-20 X 3/4L HEX SKT SST | 2 3690-01307 SCREW MACHINED HEX HEAD 1/4-20X1-14 SST | 2 3690-02349 SCREW CAP SKT HD 4-40 X 1/4L HEX SKT SST SLVR-PLT | 18 3690-01850 SCREW VENT PAN HD 4-40 X 3/8L PHH SST SLVR-PLT | 51 3690-01922 SCREW CAP SKT HD 6-32 X 1/2L HEX SKT SST SLVR-PLT | 3 3690-02515 SCREW VENT CAP SKT HD 6-32 X 1/2L HEX SKT SLVR-PLT | 1 3690-03074 SCREW MACH PAN HD 8-32 X 3/8L PHIL SST SLVR-PLT | 4 3690-01955 SCREW CAP SKT HD 8-32 X 5/8 HEX SKT SST SLVR-PLT | 2 3690-01885 SCREW CAP SKT HD 10-32X5/8L HEX SKT SST SLVR-PLT | 12 3690-02123 SCREW CAP SKT HD5/16-18X1.25L HEX SKT SST SLVR-PLT | 4 3690-02702 SCREW CAP SKT HD 1/4-20 X 6.0L HEX SKT SST | 5 3060-01474 BEARING 4.71 X 9.51 X 3.16 mm | 1 0150-20669 CABLE ASSY 75' RF COAXIAL 400KHZ W/CLAM | 1 6LVV-DPFR4-O VANNE INOX A MEMBRANE, 1/4 VCR FEMELLE-FEMELLE | 2 0020-26967 PC II, GAS TRENCH COVER | 1 0150-20660 CABLE RF MATCH TO CHAMBER | 1 0010-20753 WAFER LIFT ASSY | 1 0010-20754 PEDESTAL LIFT ASSY.
  • APPLIED MATERIALS: Endura

    Details
    ID#:
    9043080
    Category:
    Spare Parts
    Wafer Size:
    12" 
    Chamber, 12".
  • APPLIED MATERIALS: Endura II

    Details
    ID#:
    9072277
    Category:
    Spare Parts
    PVD Chamber, pre-clean.
  • APPLIED MATERIALS: Endura

    Details
    ID#:
    9076710
    Category:
    Etchers / Ashers
    Vintage:
    2000 
    System, 12" | 2000 vintage.
  • APPLIED MATERIALS: Endura

    Details
    ID#:
    9073562
    Category:
    Spare Parts
    Heat chamber.
  • APPLIED MATERIALS: Endura II

    Details
    ID#:
    9072979
    Category:
    Reactors
    System, 12" | Process: cobalt | | Configuration: | Ch#1,2: HAR Cobalt | Ch#3,4: SIP | Ch#5: IMP | Ch#C,D: SICONI | | 2013 vintage.
  • APPLIED MATERIALS: Endura II

    Details
    ID#:
    9072984
    Category:
    Reactors
    System, 12" | Process: W (tungsten) | | Configuration: | Ch#1,2,3: W | | 2010 vintage.
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