APPLIED MATERIALS ENDURA Products

  • APPLIED MATERIALS: Endura 5X

    Details
    ID#:
    9073612
    Category:
    Reactors
    Front end load station, 12" | For Applied Materials Endora or Centura platforms | FOUP interface.
  • APPLIED MATERIALS: Endura II

    Details
    ID#:
    9072979
    Category:
    Reactors
    System, 12" | Process: cobalt | | Configuration: | Ch#1,2: HAR Cobalt | Ch#3,4: SIP | Ch#5: IMP | Ch#C,D: SICONI | | 2013 vintage.
  • APPLIED MATERIALS: Endura

    Details
    ID#:
    9038549
    Category:
    Reactors
    HP-PVD system, 8" | | Includes: | (2) STD | (2) WB | (2) OD (Heater) | (2) HP | 3P, 9600 | DC Power | NBLL | | Deinstalled | 1999 vintage.
  • APPLIED MATERIALS: Endura II

    Details
    ID#:
    9072982
    Category:
    Reactors
    System, 12" | Process: W (tungsten) | | Configuration: | Ch#1,3,4,5: W | Ch#C,D: Pre-clean | | 2009 vintage.
  • APPLIED MATERIALS: Endura II

    Details
    ID#:
    9072981
    Category:
    Reactors
    System, 12" | Process: W (tungsten) | | Configuration: | Ch#1,2: IMP | Ch#3,4: W | | 2009 vintage.
  • APPLIED MATERIALS: Endura II

    Details
    ID#:
    9072467
    Category:
    Spare Parts
    Wafer Size:
    12" 
    Preclean Chambers, 12" | VAT valves: included | Matches: no.
  • APPLIED MATERIALS: Endura II

    Details
    ID#:
    9072291
    Category:
    Spare Parts
    Ti / TiN PVD Chamber, pre-clean.
  • APPLIED MATERIALS: Endura Vectra

    Details
    ID#:
    9069415
    Category:
    Spare Parts
    Wafer Size:
    8" 
    IMP PVD Chamber, 8" | Chamber body type: wide | Pedestal or heater lift: motorized | Wafer chuck options: B101 | Gate valve type: 3-position gate valve | Cryo restrictor type: standard | Cryo plate stand-offs: none | Shutter: magnetically coupled | Short detect impedance network: no | Chamber lip clamp lever extension: no | Magnet type: RH2 | Coil type: EB3.
  • APPLIED MATERIALS: Endura 300

    Details
    ID#:
    9070412
    Category:
    Reactors
    Wafer Size:
    12" 
    Vintage:
    2002 
    PVD system, 12" | Aluminum interconnect | | Chamber 1: | For Al-Cu PVD chamber | DCPS;Master,OPTIMA DCG-200,ENI,for PVD | Slave,OPTIMA DCG-200,ENI,for PVD | PUMP/CRYO,SICERA KZ-8L3C,SHI | HT ESC type stage | Ar;200/20sccm | | Chamber 2: | Chamber ONLY For PVD | Not used | | Chamber 3: | For TiN PVD chamber | DCPS;OPTIMA DCG-200,ENI,for PVD | PUMP/CRYO,SICERA KZ-8L3C,SHI | A101 type stage | Ar/N2;150/200sccm | | Chamber D: | For Pre-CLN chamber,PCXT | RFPS;GHW-12A/GMW-25A,ENI,for BIAS/SLA | PUMP/CRYO,SICERA KZ-8L3C,SHI | Ar;200/20sccm | | Chamber E,F: | For Degas,Plate heater | PUMP/CRYO,SICERA KZ-8L3C,SHI | Ar,press. Controlled | | Missing Parts as of Q3 2014: | Air solenoid valve unit (Ch-1), US13676 4060-00238, | Cathode feedthrough (Ch-1), 0190-76276 | Cathode cooling water hose, N/A | CP compressor (bottom), CSW-61C / 0190-2932 | Degas Lifting FOUP Assy (Ch-F) | HT-ESC(Ch-1), 0010-23066 | Robot Blade, 0021-32929 | | Missing Degas Lifting FOUP Assy (Ch-F): | (4) 0020-75627, 300mm Degas Clamp Insert | (2) 0020-25615, Clamp | (7) 3880-01245, Flat Washer | (1) 3220-01051, Floating Joint Coupling | (1) 0021-21267, Left Cover | (1) 0190-76278 / 0190-1342, Linear Guide | (1) 0020-42056, Lower Lift Stop | (1) 0021-21268, Right Cover | (7) 3690-01888, Screw | (1) 0090-20003, Sensor Assembly and Cable Harness | (4) 3690-01642, Socket Head Cap Screw | (3) 3690-01945, Socket Head Cap Screw | (6) 3690-01942, Socket Head Cap Screw | (7) 3880-01103, Split Locking Washer | (4) 3880-01025, Split Locking Washer | (6) 3880-01025, Split Locking Washer | (1) 0020-42055, Upper Lift Stop | (2) 3870-02530, Valve | (1) 0040-21402, Wafer Lift Bellows | (1) 0040-42640, Wafer Lift Block | (1) 3020-01152, Wafer Lift Pneumatic Cylinder | (1) 0040-76520, Wafer Lift Rail Support | | Currently de-installed and stored in fab | 2002 vintage.
  • APPLIED MATERIALS: Endura 5500

    Details
    ID#:
    9087850
    Category:
    Reactors
    Wafer Size:
    1999 
    Vintage:
    8" 
    System, 8" | (2) Buff Robot type: HP | Loadlock: Narrow BD wo / Tilt out | Heat exchanger: Neslab III | CRT cart | | Chamber 1: STD body | Manometer: Single | Pump: Cryo | Pump config: CTI OB-8F | RF generator: MDX-10K | RF match: N/A | Gate valve: 2-POS | Slit valve O-ring: Viton | Shutter: N/A | Gas: Argon (100 sccm, Stec 4400) | Standard gas stick configuration | | Chamber 2: Wide body | Manometer: Single, 1 Torr | Pump: Cryo | Pump config: CTI OB-8F | RF generator: AE MDX-L12M | Gate valve: 2-POS | Slit valve O-ring: Viton | Shutter: yes | Gas: Nitrogen (200 sccm, Stec 4400), Argon (100 sccm, Stec 4400) and Argon (20sccm, Stec 4400) | Standard gas stick configuration | | Chamber 3: STD body | Manometer: Single | Pump: Cryo | Pump config: CTI OB-8F | Heater: Neslab III | RF generator 1: AE MDX-20K | RF generator 2: AE MDX-10K | Gate valve: 2-POS | Slit valve O-ring: Viton | Shutter: N/A | Gas: Argon (100 sccm, Stec 4400) | Standard gas stick configuration | | Chamber 4: Wide body | Manometer: Single | Pump: Cryo | Pump config: CTI OB-8F | RF generator: AE MDX-L12 | Gate valve: 2-POS | Slit valve O-ring: Viton | Shutter: N/A | Gas: Argon ( 200 sccm, Stec 4400), Argon (100 sccm, Stec 4400) and Argon (20 sccm, Stec 4400) | Standard gas stick configuration | | Chamber A: Pass through | RF generator: N/A | Gas valve: Verifio | Slit valve O-ring: Viton | Manometer: N/A | Heater: N/A | Chamber pump: Edward | Chamber lid: Clear lid | Turbo pump: N/A | | Chamber B: Cool down | RF generator: N/A | Gas valve: Verifio | Slit valve O-ring: Viton | Manometer: N/A | Heater: PCW | Chamber pump: Edward | Chamber lid: Clear lid | Turbo pump: N/A | | Chamber C: PC II | Process: Oxide etch | Manometer: 1 Torr | RF generator 1: Comdel CPS 1000SD | RF generator 2: FRPP LF10A | RF match: 13.56 MHz | Gas valve: 2-POS | Slit valve O-ring: Viton black | Chamber pump: Edward | Pump config: 361C | Turbo pump: Leybold | Gases: Argon (300 sccm, Stec 4400) and Argon (20 sccm, Stec 4400) | Standard gas stick configuration | | Chamber D: N/A | Chamber E: Orient / Degas | Chamber F: Orient / Degas | | Slots: | 1 SBC B/D | 2 Videl B/D | 3 OMS B/D | 4 DI/O B/D #1 | 5 DI/O B/D #2 | 6 DI/O B/D #3 | 7 DI/O B/D #4 | 8 DI/O B/D #5 | 9 DI/O B/D #6 | 10 SEI B/D | 11 486C | 12 DI/O B/D #7 | 13 AO B/D #1 | 14 Stepper B/D #1 | 15 Spare | 16 Spare | 17 Spare for Stepper | 18 Stepper B/D #2 | 19 AI B/D | 20 AO B/D #2 | 21 AO B/D #3 | 22 Harddisk Drive | 23 Spare | 24 GROUNDING JAC | 25 Convectron B/D | 26 Convectron B/D | 27 Convectron B/D | 28 Convectron B/D | 29 TC | 30 Spare | 31 ION Gauge B/D #1 | 32 ION Gauge B/D #2 | 33 DI/O B/D #11 | 34 DI/O B/D #12 | 35 DI/O B/D #13 | 36 DI/O B/D #14 | 37 DI/O B/D #14 | 38 DI/O B/D #15 | 39 DI/O B/D #14 | 40 Floppy disk | 41 Spare | 42 Cryo | 43 Al Mux | 44 Al Mux | 45 Al Mux | 46 Spare | 47 Opto Detect B/D #1 | 48 Opto Detect B/D #2 | 49 Opto Detect B/D #4 | 50 Spare | | 480 VAC, 3 Phase, 3 wires and ground | 1999 vintage.
  • APPLIED MATERIALS: Endura II

    Details
    ID#:
    9072277
    Category:
    Spare Parts
    PVD Chamber, pre-clean.
  • APPLIED MATERIALS: Endura II

    Details
    ID#:
    9072983
    Category:
    Reactors
    System, 12" | Process: W (tungsten) | | Configuration: | Ch#2,3: W | Ch#4,5: IMP | | 2007 vintage.
  • APPLIED MATERIALS: Endura

    Details
    ID#:
    9087064
    Category:
    Spare Parts
    PVD HTHU Chamber.
  • APPLIED MATERIALS: Endura

    Details
    ID#:
    9076710
    Category:
    Etchers / Ashers
    Vintage:
    2000 
    System, 12" | 2000 vintage.
  • APPLIED MATERIALS: Endura

    Details
    ID#:
    9078150
    Category:
    Spare Parts
    Chambers.
  • APPLIED MATERIALS: Endura

    Details
    ID#:
    116701
    Category:
    Reactors
    Wafer Size:
    8" 
    Vintage:
    2006 
    PVD system, 8" | | Chamber A: | Pass through | Nupro Gas valve | Viton (black) slit valve o-ring | Chamber lid clear | | Chamber B: | Cool down | Nupro Gas valve | Viton (black) slit valve o-ring | PCW heater / cathode cooling | Chamber lid clear | | Chamber 1: | IMP Vectra | Ti process | B101 susceptor / pedestal | IMP process kit type | Single manometer: 100mTorr | Vitron (black) slit valve o-ring | Shutter option yes | 12.9" lid | AE MDX-L12M RF gen DC supply 1 | AE HFV-8000 RF gen DC supply 2 | RF match 13.56MHz | Neslab III heater / cathode | 3 pos gate valve position | Cryo chamber pump | Gas 1: 100 sccm, N2, STEC 4400, MFC 15, 2xMnfold | Gas 2: 100 sccm, N2, STEC 4400, MFC16, 2xMnfold | Base pressure: 659m Torr | Leak rate: 0nT/min | Heater temp: 33.6 | | Chamber 2: | TxZ HP+ | CVD TiN process | HP Plus susceptor / pedestal | HP+ process kit type | Single manometer | Manometer 1: 10mTorr | Manometer 2: 100mTorr | Vitron (black) slit valve o-ring | AE PDX-900-2V RF gen DC supply 1 | Wall cooling: AMAT1 | Heater / cathode cooling: AMAT1 | Endpoint system: no | Alcatel chamber pump | Leybold turbo pump | Gas 1: 2slm, N2, STEC 7440, MFC 20, 2xMnfold | Gas 2: 3slm, N2, STEC 4400, MFC19, 2xMnfold | Gas 3: 1sccm, N2, MKS, MFC18, 2xMnfold | Gas 4: 1slm, N2, STEC 4400 | Gas 5: 1slm, N2, STEC 4400 | Gas 6: 1slm, He, STEC 4400 | Gas 7: 1slm, Ar, STEC 4400 | Heater temp: 30.2 | | Chamber 3: | TxZ HP+ | CVD TiN process | HP Plus susceptor / pedestal | HP+ process kit type | Single manometer | Manometer 1: 10mTorr | Manometer 2: 100mTorr | Vitron (black) slit valve o-ring | AE PDX-900-2V RF gen DC supply 1 | Wall cooling: AMAT1 | Heater / cathode cooling: AMAT1 | Alcatel chamber pump | Leybold turbo pump | Gas 1: 2slm, N2, STEC 4400, MFC1, 2xMnfold | Gas 2: 3slm, N2, STEC 4400, MFC2, 2xMnfold | Gas 3: 1 sccm, N2, MKS, MFC3, 2xMnfold | Gas 4: 500 sccm, He, STEC 4400 | Gas 5: 1slm, H2, STEC 4400 | Gas 6: 1slm, N2, STEC 4400 | Gas 7: 1slm, H2, STEC 4400 | Heater temp: 23.5 | | 2006 vintage.
  • APPLIED MATERIALS: Endura

    Details
    ID#:
    9078880
    Category:
    Reactors
    Wafer Size:
    8" 
    PVD system, 8" | (2) Co-Titanium Chamber | 101-TiN Chamber | Aluminium / 0.5% Cu Chamber | Pre-clean II Chamber | PVD Style Degas Chamber | Flat Align Chamber.
  • APPLIED MATERIALS: Endura II

    Details
    ID#:
    9074000
    Category:
    Spare Parts
    PVD TiN Chamber, 12" | STL ESC installed.
  • APPLIED MATERIALS: Endura II

    Details
    ID#:
    9073999
    Category:
    Spare Parts
    Wafer Size:
    12" 
    PVD Al Chamber, 12" | STL ESC installed.
  • APPLIED MATERIALS: Endura II

    Details
    ID#:
    9072984
    Category:
    Reactors
    System, 12" | Process: W (tungsten) | | Configuration: | Ch#1,2,3: W | | 2010 vintage.
Copyright © 2011 Capital Asset Exchange & Trading LLC. All rights reserved.