APPLIED MATERIALS ENDURA Products

  • APPLIED MATERIALS: Endura 5X

    Details
    ID#:
    9073612
    Category:
    Reactors
    Front end load station, 12" | For Applied Materials Endura or Centura platforms | FOUP interface.
  • APPLIED MATERIALS: Endura

    Details
    ID#:
    9093861
    Category:
    Spare Parts
    Wafer Size:
    12" 
    Lot of Endura 12" Spare Parts: | | 0190-23771 RF GEN, 350KHZ | 0190-22925 RF GEN, 13.56MHZ, 1.25KW, 480VAC | 0010-76428 ASSY, PVD SLIT VALVE ACTUATOR | 0190-19395 CRYO COMPRESSOR | 0010-18108 A101 HEATER ASSY.
  • APPLIED MATERIALS: Endura 5500

    Details
    ID#:
    9088284
    Category:
    Reactors
    Sputtering system, 6" | Narrow | Not tilt. | Common: Thin | Software version: C8.5 | | A: Pass | B: Cool | C: X | D: X | E: Degas / Orient | F: X | | 1: X | 2. TiW | 3: AlCu | 4: X | 5: X | | 1: X | 2: 0010-20389"E" | 3: 0010-20224B | 4: X | | 1: X | 2: CT-8F | 3: CT-8F | 4: X | | Buff: CT-8F | Tra: CT-8F | L/L: X | L/L: QMB250 | PC: D25BCS | TurboVac 361C | | A: X | C: X | D: X | | Neslab 327099990101 model | Robot: not HP | Clamp: 101 | | 1993 vintage.
  • APPLIED MATERIALS: Endura 5500

    Details
    ID#:
    9087047
    Category:
    Reactors
    Wafer Size:
    8" 
    System, 8" | Robot: HP (buffer and Transfer) | Load lock: Narrow Body | Compressor: 9600 | Chiller: Neslab III | | Chambers: | A - Pass Thru | B - Cooldown | C - PreClean PIK II | E,F - Orienter/Degas | 1 - Wide body AlCu | 2 - Water cool MCA+ | 3 - Wide body TiN | 4 - Water cool MCA+.
  • APPLIED MATERIALS: Endura 5500

    Details
    ID#:
    9087048
    Category:
    Reactors
    Wafer Size:
    6" 
    Vintage:
    1994 
    HP PVD System, 6" | Chamber 1: Ti (STD) | Chamber 2: TiN (WB) | Chamber 3: Al (STD) | Chamber 4: TiN (WB) | | Cryo Compressor 8510 | (1) MDX-L6 | (2) MDX-L12 | | 200VAC, 50/60Hz | 1994 vintage.
  • APPLIED MATERIALS: Endura HP

    Details
    ID#:
    9085295
    Category:
    Reactors
    Vintage:
    1996 
    PVD System | Loadlock: narrow body | 1996 vintage.
  • APPLIED MATERIALS: Endura 5500P

    Details
    ID#:
    9084326
    Category:
    Reactors
    Sputtering system, 6" | Narrow | Not tilt. | Common: Thin | Software version: C8.5 | | A: PC2 | B: Cool | C: X | D: X | E: Degas / Orient | F: X | | 1: Ti | 2. AL2O3 | 3: AlCu | 4: TiN | 5: Pasting | | 1: 0040-20201 | 2: 0010-20389"E" | 3: New Moon | 4: 0010-00223C | | 1: CT-8F | 2: CT-8F | 3: CT-8F | 4: CT-8F | | Buff: CT-8F | Tra: CT-8F | L/L: D25BCS | L/L: QMB250 | PC: D25BCS | TurboVac 361C | | A: X | C: X | D: X | | Neslab 327099990106 model | Robot: HP | Clamp: 101. | | | | | | | | | | |
  • APPLIED MATERIALS: Endura 5500P

    Details
    ID#:
    9084325
    Category:
    Reactors
    Sputtering system, 6" | Narrow | Not tilt. | Common: Thin | Software version: C8.5 | | A: PC2 | B: Cool | C: X | D: X | E: Degas / Orient | F: Degas / Orient | | 1: X | 2. TiW standard | 3: AlCu standard | 4: X | 5: X | | 1: X | 2: 0010-20389D | 3: 0010-20675PC | 4: X | | 1: X | 2: OB-8F | 3: OB-8F | 4: OB-8F | | Buff: OB-8F | Tra: OB-8F | L/L: D25BCS | L/L: QMB250 | PC: D25BCS | TurboVac 361C | | A: CPS-1001/LF10A | C: X | D: X | | Neslab 327099990106 model | Robot: HP | Clamp: 101. | | | | | | | | | | |
  • APPLIED MATERIALS: Endura

    Details
    ID#:
    9082912
    Category:
    Spare Parts
    Chamber lids.
  • APPLIED MATERIALS: Endura TxZ

    Details
    ID#:
    9082797
    Category:
    Spare Parts
    PVD Chambers only, 12".
  • APPLIED MATERIALS: Endura 5500

    Details
    ID#:
    9082608
    Category:
    Reactors
    HP PVD System, 6" | (2) Wide body with 11.3 source | (1) Standard body with 11.3 source | Narrow body load lock | Process: Al, TiN, Ti | (3) Process chambers | (1) PCII chamber | (2) Degas / Oriented chambers and TC monitor | VHP robot.
  • APPLIED MATERIALS: Endura 300

    Details
    ID#:
    9070412
    Category:
    Reactors
    Wafer Size:
    12" 
    Vintage:
    2002 
    PVD system, 12" | Aluminum interconnect | | Chamber 1: | For Al-Cu PVD chamber | DCPS;Master, OPTIMA DCG-200, ENI, for PVD | Slave, OPTIMA DCG-200, ENI, for PVD | PUMP/CRYO, SICERA KZ-8L3C, SHI | HT ESC type stage | Ar;200/20sccm | | Chamber 2: | Chamber ONLY For PVD | Not used | | Chamber 3: | For TiN PVD chamber | DCPS;OPTIMA DCG-200, ENI, for PVD | PUMP/CRYO, SICERA KZ-8L3C, SHI | A101 type stage | Ar/N2;150/200sccm | | Chamber D: | For Pre-CLN chamber, PCXT | RFPS;GHW-12A/GMW-25A, ENI, for BIAS/SLA | PUMP/CRYO, SICERA KZ-8L3C, SHI | Ar;200/20sccm | | Chamber E,F: | For Degas, Plate heater | PUMP/CRYO, SICERA KZ-8L3C, SHI | Ar, press. Controlled | | Missing Parts as of Q3 2014: | Air solenoid valve unit (Ch-1), US13676 4060-00238, | Cathode feedthrough (Ch-1), 0190-76276 | Cathode cooling water hose, N/A | CP compressor (bottom), CSW-61C / 0190-2932 | Degas Lifting FOUP Assy (Ch-F) | HT-ESC(Ch-1), 0010-23066 | Robot Blade, 0021-32929 | | Missing Degas Lifting FOUP Assy (Ch-F): | (4) 0020-75627, 300mm Degas Clamp Insert | (2) 0020-25615, Clamp | (7) 3880-01245, Flat Washer | (1) 3220-01051, Floating Joint Coupling | (1) 0021-21267, Left Cover | (1) 0190-76278 / 0190-1342, Linear Guide | (1) 0020-42056, Lower Lift Stop | (1) 0021-21268, Right Cover | (7) 3690-01888, Screw | (1) 0090-20003, Sensor Assembly and Cable Harness | (4) 3690-01642, Socket Head Cap Screw | (3) 3690-01945, Socket Head Cap Screw | (6) 3690-01942, Socket Head Cap Screw | (7) 3880-01103, Split Locking Washer | (4) 3880-01025, Split Locking Washer | (6) 3880-01025, Split Locking Washer | (1) 0020-42055, Upper Lift Stop | (2) 3870-02530, Valve | (1) 0040-21402, Wafer Lift Bellows | (1) 0040-42640, Wafer Lift Block | (1) 3020-01152, Wafer Lift Pneumatic Cylinder | (1) 0040-76520, Wafer Lift Rail Support | | Currently de-installed and stored in fab | 2002 vintage.
  • APPLIED MATERIALS: Endura 5500P

    Details
    ID#:
    9084320
    Category:
    Reactors
    Sputtering system, 6" | Narrow | Common: Thin | Software version: C8.5 | | A: PC2 | B: Cool | C: PC2 | D: PC2 | E: Degas / Orient | F: Degas / Orient | | 1: X | 2. TiW standard | 3: AlCu | 4: AlCu standard | 5: X | | 1: X | 2: 0010-21020PA | 3: 0010-20224 "B" | 4: 0010-20224 "B" | | 1: X | 2: OB-8F | 3: OB-8F | 4: OB-8F | | Buff: OB-8F | Tra: OB-8F | L/L: D25BCS | L/L: QMB250 | PC: D25BCS | TurboVac 361C | | A: CPS-1001/LF10A | C: X | D: X | | Neslab 327099990101 model | Robot: HP | Clamp: 101. | | | | | | | | | | |
  • APPLIED MATERIALS: Endura Vectra

    Details
    ID#:
    9069415
    Category:
    Spare Parts
    Wafer Size:
    8" 
    IMP PVD Chamber, 8" | Chamber body type: wide | Pedestal or heater lift: motorized | Wafer chuck options: B101 | Gate valve type: 3-position gate valve | Cryo restrictor type: standard | Cryo plate stand-offs: none | Shutter: magnetically coupled | Short detect impedance network: no | Chamber lip clamp lever extension: no | Magnet type: RH2 | Coil type: EB3.
  • APPLIED MATERIALS: Endura 5500

    Details
    ID#:
    9087049
    Category:
    Reactors
    Wafer Size:
    6" 
    Vintage:
    1994 
    HP PVD System, 6" | Chamber 1: Ti (STD) | Chamber 2: TiN (WB) | Chamber 3: Al (STD) | Chamber 4: TiN (WB) | | Cryo Compressor 8510 | (1) MDX-L6 | (2) MDX-L12 | | 200VAC, 50/60Hz | 1994 vintage.
  • APPLIED MATERIALS: Endura II

    Details
    ID#:
    9082794
    Category:
    Reactors
    PVD system,, 12" | Process: metal | 2001 vintage.
  • APPLIED MATERIALS: Endura 5500 HP

    Details
    ID#:
    9088596
    Category:
    Reactors
    System, 6" | (2) AlSiCu Sputter chambers | (2) TiN Sputter chambers | (1) Ti Sputter chamber.
  • APPLIED MATERIALS: Endura

    Details
    ID#:
    9089538
    Category:
    Etchers / Ashers
    Wafer Size:
    8" 
    Vintage:
    1999 
    Oxide etcher, 8" | Chamber 1: STD body | Chamber 2: Wide body | Chamber 3: STD body | Chamber 4: Wide body | Chamber A: Pass through | Chamber B: Cool down | Chamber C: PCII | Chamber D: none | Chamber E: Orient / Degas | Chamber F: Orient / Degas | Buff robot type: HP | Transfer robot type: HP | Load lock type: BD wo / tilt out | Heat exchanger 1: Neslab III | CRT: CRT cart | MF facilities: rear | System power: 408VAC, 3 Phase, 3 wire + G | | Chamber A: | Chamber type: pass through | RF generator: N/A | Gas valve: Veriflo | Slit valve O-ring: Viton | Manometer: none | Heater / cathode cooling: none | Chamber pump: Edwards | Chamber lid: clear | Turbo pump: none | | Chamber B: | Chamber type: cool down | RF generator: N/A | Gas valve: Veriflo | Slit valve O-ring: Viton | Manometer: none | Heater / cathode cooling: PCW | Chamber pump: Edwards | Chamber lid: clear | Turbo pump: none | | Chamber C: | Chamber type: PCII | Chamber process: oxide etch | Manometer configuration: single | Manometer 1: 1 torr | Manometer 2: none | Slit valve O-ring: Viton (black) | Shutter option: no | RF gen / DC supply 1: Comdel CPS 1000SD | RF gen / DC supply 2: RFPP LF10A | RF match: 13.56MHz | Gate valve position: 2-pos | Chamber pump: Edwards | Pump configuration: 371C | Turbo pump: Leybold | | Gases: | Gas 1 300 sccm Argon Stec 4400 MFC12 Standard | Gas 2 20 sccm Argon Stec 4400 MFC13 Standard | | Chamber 1: | Chamber type: STD body | Manometer configuration: single | Slit valve O-ring: Viton | Shutter option: no | RF gen / DC supply 1: AE MDX-10K | RF match: none | Gate valve position: 2-pos | | Gases: | Gas 2 100 sccm Argon Stec 4400 MFC16 Standard | | Chamber 2: | Chamber type: wide body | Manometer configuration: single | Manometer 1: 1 torr | Slit valve O-ring: Viton | Shutter option: yes | RF gen / DC supply 1: AE MDX-L12M | Heater / cathode cooling: Neslab III | Gate valve position: 2-pos | Chamber pump: Cryo, CTI OB-8F | | Gases: | Gas 1 200 sccm N2 Stec 4400 18 Standard | Gas 2 100 sccm Argon Stec 4400 19 Standard | Gas 3 20 sccm Argon Stec 4400 20 Standard | | Chamber 3: | Chamber type: STD body | Manometer configuration: single | Manometer 1: 1 torr | Slit valve O-ring: Viton | Shutter option: no | RF gen / DC supply 1: AE MDX-20K | RF gen / DC supply 2: AE MDX-10K | Heater / cathode cooling: Neslab III | Gate valve position: 2-pos | Chamber pump: Cryo, CTI OB-8F | | Chambers 4: | Chamber type: wide body | Manometer configuration: single | Manometer 1: 1 torr | Slit valve O-ring: Viton | Shutter option: no | RF gen / DC supply 1: AE MDX-L12 | Gate valve position: 2-pos | Chamber pump: Cryo, CTI OB-8F | | Gases: | Gas 1 20 sccm Argon Stec 4400 MFC4 Standard | Gas 2 100 sccm Argon Stec 4400 MFC5 Standard | Gas 3 200 sccm Argon Stec 4400 MFC6 Standard | | System Controller: | 1 SBC B/D 26 Convectron B/D | 2 Videl B/D 27 Convectron B/D | 3 OMS B/D 28 Convectron B/D | 4 DI/O B/D #1 29 TC | 5 DI/O B/D #2 30 Spare | 6 DI/O B/D #3 31 ION Gauge B/D #1 | 7 DI/O B/D #4 32 ION Gauge B/D #2 | 8 DI/O B/D #5 33 DI/O B/D #11 | 9 DI/O B/D #6 34 DI/O B/D #12 | 10 SEI B/D 35 DI/O B/D #13 | 11 486C 36 DI/O B/D #14 | 12 DI/O B/D #7 37 DI/O B/D #14 | 13 AO B/D #1 38 DI/O B/D #15 | 14 Stepper B/D #1 39 DI/O B/D #14 | 15 Spare 40 Floppy Disk | 16 Spare 41 Spare | 17 Spare for Stepper 42 Cryo | 18 Stepper B/D #2 43 AI Mux | 19 AI B/D 44 AI Mux | 20 AO B/D #2 45 AI Mux | 21 AO B/D #3 46 Spare | 22 Harddisk Drive 47 Opto Detect B/D #1 | 23 Spare 48 Opto Detect B/D #2 | 24 GROUNDING JAC 49 Opto Detect B/D #3 | 25 Convectron B/D 50 Spare | | 1999 vintage.
  • APPLIED MATERIALS: Endura

    Details
    ID#:
    9038554
    Category:
    Reactors
    Wafer Size:
    8" 
    Vintage:
    1999 
    Liner / Barrier system, 8" | | Includes: | (2) TxZ | (2) HP+ | (1) OD | (1) PC2 | (1) IMP | NBLL | HP | | Powered down | 1999 vintage.
  • APPLIED MATERIALS: Endura

    Details
    ID#:
    9038550
    Category:
    Reactors
    HP-PVD system, 8" | | Includes: | (3) WB | (2) STD | (2) HP | (1) OD (Heater) | (1) ORT | 3P, 9600 | DC Power | NBLL | Missing some parts | | Deinstalled | 1999 vintage.
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