APPLIED MATERIALS MIRRA MESA Products

  • APPLIED MATERIALS: Mirra Mesa

    Details
    ID#:
    9077553
    Category:
    Wafer Grinding, Lap...
    CMP system, 8" | Cross Assembly: | Absolute Encoder Harmonic Drive | (4) NSK Megatorque spindle assemblies with fuse blowing fix | (4) Vexta 5-phase head sweep motors | | (4) Cu Titan polishing heads | (3) Platen system with Alpha low-noise gearboxes, Yaskawa motors w/ NEC compliant cables | (3) AMAT DDF3 pad conditioners | Cu Slurry delivery system | AMAT Copper Rinse / Slurry delivery arms | Leak proof polisher skins | Closed loop monitoring features | Fluid reduction package | Input voltage: 200-240 VAC 50/60 Hz | | Integrated Mesa cleaner: | Wafer sense transfer station | Single wafer machined (leak proof) Megasonic tank | Vertical spin rinse dry station | Flow monitoring on all cleaner chemical and DI flows (On/off) | Edge grip automation | Side feed facilities and exhaust | Mesa power supplied by Mirra controller | Line of sight top cover between Mesa and Mirra | | Digital ISRM monitor integrated into the polisher (all 3 platens) with: | Full face HW/SW capability and dual optical ISRM / iSCAN ISRM in platen 1.
  • APPLIED MATERIALS: Mirra Mesa

    Details
    ID#:
    9063651
    Category:
    Wafer Grinding, Lap...
    CMP system.
  • APPLIED MATERIALS: Mirra Mesa

    Details
    ID#:
    9082363
    Category:
    Wafer Grinding, Lap...
    Cleaner, 12".
  • APPLIED MATERIALS: Mirra 3400 / AS02000

    Details
    ID#:
    9074118
    Category:
    Wafer Grinding, Lap...
    Wafer polishers, 8" | Integration: Mirra and AS2000 | Software: PS58p0 | OS: English | Syscon | I-Pressure pump | Pharmaceutical fluid supply Cabinet | FABS | Manual | 2003 vintage.
  • APPLIED MATERIALS: Mirra Titan II

    Details
    ID#:
    9049233
    Category:
    Spare Parts
    Wafer Size:
    8" 
    Polishing head, 8" | For Mirra profiler, 4-zone.
  • APPLIED MATERIALS: Mirra 3400 / AS2000

    Details
    ID#:
    9074119
    Category:
    Wafer Grinding, Lap...
    Wafer Polisher, 8" | Integration: Mirra and AS2000 | Software: PS58p0 | OS: English | Syscon | I-Pressure pump | Pharmaceutical fluid supply Cabinet | FABS | Manual | 2003 vintage.
  • APPLIED MATERIALS: Mirra Trak

    Details
    ID#:
    144245
    Category:
    Wafer Grinding, Lap...
    Wafer Size:
    8" 
    Vintage:
    2001 
    Oxide CMP system, 8", non-SMIF | Model number: CMP 5201 | Application Oxide | Consumed Process Materials: | Buff Slurry Not used | Pad Conditioner DDF 2 | Pad Conditioner Holder Magnet Type | Factory Interface Options: | Cleaner Type Ontrack | Megasonics None | Robot Type Rorze | In Situ Removal Rate Monitor ISRM (digital) | In Line Metrology Not used | SECS GEM Interface YES | Cassette Tank Not used | Cassette Type 8", Cassette Type | Installation Type FABS 212 | Calibration Tool: | Special Kit for Maintenance None | Dow n force cal. None | Head rebuild kit None | RPM 3 Cal Kits None | Fabs Lap Top Computer None | Platen and Head Options: | Polishing Head Titan 1 head | Retaining Ring 3rd vendor | Pad Wafer Loss Sensor YES | Platen Temperature Control Not used | Long Robot System: | Long Robot Used | Slurry Delivery Options: | Slurry Delivery YES | Slurry Flow Rate YES | Slurry Flow Monitor YES | Slurry Containment Bulkhead YES | Slurry Facilities YES | Slurry Loop Line YES | Slurry Dispense Arm YES | Slurry Leak Detector YES | DI Water YES | High Pressure Rinse YES | System S/W Status: | Mirra Type 3400 | Cleaner Type Ontrack | Fabs type FABS 212 | System Safety Equipment: | Red Turn To Release EMO Button YES | EMO Guard Ring YES | System Labels YES | Earthquake Brackets Not used | Smoke Detector YES | Electrical Requirements: | Line Frequency 50/60Hz | Line Voltage 208VAC | Uninterruptible Pow er Supply Not used | Pow er Lamp Yes | Pow er Connected Lamp Yes | Circuit Breaker Yes | AC Outlet Box Yes | Conf igurable IO Yes | GFI Yes | Factory Hookup: | Upper Exhaust Yes | Low er Exhaust Yes | Upper Exhaust Connection Yes | Drain Manifold Yes | Drain Adapter Yes | Castors for Mirra System Only Fabs | Weight Distribution Plate(Skid pad) NONE | User Interface: | Gray Area keyboard/mouse | Cleanroom Monitor/keyboard/m | Class 1 Cart for 1 Monitor monitor only None/Need to new one if it need | Class 1 Cart for 2 Monitors | Class 100 Cart for 2 Monitors | Stainless Cart Gray area None/ Need to new one if it need | Mouse or Trackball Mouse | Printer Not used | Hard Disk Backup Not used | Polisher/Fabs Light Tower: | Polisher Tower Mounting Type Yes Fabs-Wall mount type | Polisher Tower No of Colors 3 | Polisher Tower Colors Sequence Red/Green/Orange | Cleaner Options: | OnTrak Cleaner Yes HF :1%, Ammonium :29% | Maintenance Options: | Spray Gun Yes | Side Panel Window Yes | Pad Conditioner Cover Yes | Cross cover Yes | Slurry Flow Calibration Kit | Lapping Stone Not used | Robot Door Lock Yes | Special Options: | Nylon Brush Not used | EChain Tef lon Sheet Not used | UPA Upgrade Roof / Stainless | Independent membrane Vac Yes | Low Pressure Release Water | Voltage: 200/208 VAC, 3.0 | Frequency: 50/60 Hz | Full load current: 170A 3 Wire (Delta) | Ampere rating of largest load: 30A | Short circuit interrupt capacity: 10,000A | Ground fault: 25mA | 2001 vintage.
  • APPLIED MATERIALS: Mirra 3400 / AS2000

    Details
    ID#:
    9074117
    Category:
    Wafer Grinding, Lap...
    Wafer Polisher, 8" | Integration: Mirra and AS2000 | Software: PS58p0 | OS: English | Syscon | I-Pressure pump | Pharmaceutical fluid supply Cabinet | FABS | Manual | 2003 vintage.
  • APPLIED MATERIALS: Mirra 3400

    Details
    ID#:
    9061540
    Category:
    Wafer Grinding, Lap...
    Wafer Size:
    8" 
    Vintage:
    1998 
    Oxide CMP system, 8" | Software Version MT59c4 | CPU Pentium M | SECS SECS II | UPS NO | In-Situ-Measurement Nova Scan 2040 | Wafer Shape SNNF (Semi Notch No Flat) | Wafer Cassette 8” Bishop CR200A-02B3-H/PEEK Material | SMIF Interface NO | | Configuration: | Loading Configuration 4-WET STAGE LOADERS | Load Cup Standard | Temperature Control NO | Head type Titan2 | Head # 4-Head | Slurry supply 2-Line | Platen 3-Platen | Platen 1 slurry POUs Slurry / DIW | Platen 2 slurry POUs Slurry / DIW | Platen 3 slurry POUs Slurry / DIW | Controller Unit 1 Unit | | 1998 vintage.
  • APPLIED MATERIALS: Mirra

    Details
    ID#:
    9077696
    Category:
    Wafer Grinding, Lap...
    Vintage:
    2000 
    CMP / Scrubber system, Cu | 2000 vintage.
  • APPLIED MATERIALS: Mirra 3400

    Details
    ID#:
    9054030
    Category:
    Wafer Grinding, Lap...
    Wafer Size:
    8" 
    Vintage:
    1998 
    CMP Oxide polishing system, 8", 1998 vintage.
  • APPLIED MATERIALS: Mirra 5201 CMP

    Details
    ID#:
    9075720
    Category:
    Wafer Grinding, Lap...
    Wafer Size:
    8" 
    Vintage:
    2005 
    Polisher, 8" | Mesa oxide | Open type fabs | 2005 vintage.
  • APPLIED MATERIALS: Mirra 3400

    Details
    ID#:
    116913
    Category:
    Wafer Grinding, Lap...
    Wafer Size:
    8" 
    Vintage:
    2004 
    CMP Oxide polishing system, 8", 2004 vintage.
  • APPLIED MATERIALS: Mirra

    Details
    ID#:
    9077155
    Category:
    Wafer Grinding, Lap...
    CMP system | DAINIPPON AS-2000 CMP Scrubber.
  • APPLIED MATERIALS: Mirra

    Details
    ID#:
    189976
    Category:
    Wafer Grinding, Lap...
    ILD (InterLayer Dielectric) CMP system, 8" | Oxide / Poly Silicon / STI.
  • APPLIED MATERIALS: Mirra 3400

    Details
    ID#:
    9067916
    Category:
    Wafer Grinding, Lap...
    Wafer Size:
    8" 
    Poly CMP integration system, 8" | (3) Platens | (4) Heads | (1) Cleaner.
  • APPLIED MATERIALS: Mirra OnTrak

    Details
    ID#:
    9064388
    Category:
    Wafer Grinding, Lap...
    Wafer Size:
    8" 
    Vintage:
    1999 
    Oxide CMP System, 8" | 1999 vintage.
  • APPLIED MATERIALS: Mirra 3400

    Details
    ID#:
    9067393
    Category:
    Wafer Grinding, Lap...
    Systems, 8" | Non-SMIF.
  • APPLIED MATERIALS: Mirra OnTrak

    Details
    ID#:
    9064387
    Category:
    Wafer Grinding, Lap...
    Wafer Size:
    8" 
    Vintage:
    1997 
    Oxide CMP System, 8" | 1997 vintage.
  • APPLIED MATERIALS: Mirra 3400

    Details
    ID#:
    9074116
    Category:
    Wafer Grinding, Lap...
    Wafer Size:
    8" 
    Vintage:
    1999 
    Polisher, 8" | Stand alone | | Wafer shape: Notch type | Process type: STI CMP | Device type: Logic | Polish slurry: Oxide | Platen 1 Pad: IC1010 Pad | Platen 2 Pad: IC1010 Pad | Platen 3 Pad: IC1010 Pad | Pad Conditioner: DDF 3 | Pad Conditioner head: Snap on type | Pad Conditioner holder: Magnetic holder | | Robot type: AMAT Long Robot | In Situ Removal rate monitor: ISRM (Digital) P1,2,3 | SECS GEM Interface: Yes | Cassette tank | Cassette type: 8", 4-ports | Integrated system basic FABS: None | | (9) Polishing heads: Titan-1 Head | Retaining ring: PPS | UPA/Rotary joint: STD 3-ports | Pad wafer loss sensor: Yes (Dual sensor) | Platen motor gear box: P1 stober, P2, 3 Alpha | Plate temperature control: None | | Slurry delivery: A, B line P1,2,3 | (6) Rotary pump type | Slow flow rate: Yes | Slurry flow monitor: Yes | Slurry containment bulkhead: Yes | Slurry facilities: Yes | Slurry loop line: Yes | Slurry dispense arm: Long arm | Slurry leak detector: Yes | Di water: Yes | High pressure rinse: Yes | | Mirra VME Type: Redisys P-I type | Mirra Software: PS58p0; ISRM: 1S11g6 | | Red turn to release EMO Button: Yes | EMO Guard ring: yes | System labels: Yes | Earthquake brackets: Yes | Smoke detector: Yes | | Line frequency: 50/60 Hz | Line voltage: 208 VAC, 3-wire Delta | Uninterruptible power supply: Yes, VME Rack | Power lamp: Yes | Power connected lamp: Yes | Circuit breaker: Yes | AC Outlet box: Yes | Configurable IO: Yes | GFI: Yes (100 mA) | | Polisher to controller cable: STD 50 ft | Controller to monitor cable: Yes | Slurry system interface cable: None | | Upper exhaust: Yes | Lower exhaust: yes | Upper exhaust connection: yes | Drain manifold: Yes | Drain adapter: Yes | | Gray area: Monitor, keyboard, mouse | Cleanroom: Monitor, keyboard, mouse | Stainless cart: Cleanroom, gray area | Mouse | Printer | Hard disk backup | | Polisher tower mounting type | Polisher tower No. of colors: (3) | Polisher tower colors sequence: Red/Yellow/Green | | Spray gun: Yes | Side panel window: Yes, clear type | Pad conditioner cover: Yes | Slurry flow calibration kit None | Lapping stone: None | Robot door lock: None | | Nylon brush | E-chain teflon sheet: Yes | | (1) DIW Booster unit | | No Cleaner | (3) Polisher lower base cover missing | | 1999 vintage.
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