APPLIED MATERIALS MIRRA MESA Products

  • APPLIED MATERIALS: Mirra Mesa

    Details
    ID#:
    9077553
    Category:
    Wafer Grinding, Lap...
    CMP system, 8" | Cross Assembly: | Absolute Encoder Harmonic Drive | (4) NSK Megatorque spindle assemblies with fuse blowing fix | (4) Vexta 5-phase head sweep motors | | (4) Cu Titan polishing heads | (3) Platen system with Alpha low-noise gearboxes, Yaskawa motors w/ NEC compliant cables | (3) AMAT DDF3 pad conditioners | Cu Slurry delivery system | AMAT Copper Rinse / Slurry delivery arms | Leak proof polisher skins | Closed loop monitoring features | Fluid reduction package | Input voltage: 200-240 VAC 50/60 Hz | | Integrated Mesa cleaner: | Wafer sense transfer station | Single wafer machined (leak proof) Megasonic tank | Vertical spin rinse dry station | Flow monitoring on all cleaner chemical and DI flows (On/off) | Edge grip automation | Side feed facilities and exhaust | Mesa power supplied by Mirra controller | Line of sight top cover between Mesa and Mirra | | Digital ISRM monitor integrated into the polisher (all 3 platens) with: | Full face HW/SW capability and dual optical ISRM / iSCAN ISRM in platen 1.
  • APPLIED MATERIALS: Mirra Mesa

    Details
    ID#:
    9063651
    Category:
    Wafer Grinding, Lap...
    CMP system.
  • APPLIED MATERIALS: Mirra Mesa

    Details
    ID#:
    9075137
    Category:
    Wafer Grinding, Lap...
    CMP system | Oxide | De-installed | 2004 vintage.
  • APPLIED MATERIALS: Mirra Trak

    Details
    ID#:
    144245
    Category:
    Wafer Grinding, Lap...
    Wafer Size:
    8" 
    Vintage:
    2001 
    Oxide CMP system, 8", non-SMIF | Model number: CMP 5201 | Application Oxide | Consumed Process Materials: | Buff Slurry Not used | Pad Conditioner DDF 2 | Pad Conditioner Holder Magnet Type | Factory Interface Options: | Cleaner Type Ontrack | Megasonics None | Robot Type Rorze | In Situ Removal Rate Monitor ISRM (digital) | In Line Metrology Not used | SECS GEM Interface YES | Cassette Tank Not used | Cassette Type 8", Cassette Type | Installation Type FABS 212 | Calibration Tool: | Special Kit for Maintenance None | Dow n force cal. None | Head rebuild kit None | RPM 3 Cal Kits None | Fabs Lap Top Computer None | Platen and Head Options: | Polishing Head Titan 1 head | Retaining Ring 3rd vendor | Pad Wafer Loss Sensor YES | Platen Temperature Control Not used | Long Robot System: | Long Robot Used | Slurry Delivery Options: | Slurry Delivery YES | Slurry Flow Rate YES | Slurry Flow Monitor YES | Slurry Containment Bulkhead YES | Slurry Facilities YES | Slurry Loop Line YES | Slurry Dispense Arm YES | Slurry Leak Detector YES | DI Water YES | High Pressure Rinse YES | System S/W Status: | Mirra Type 3400 | Cleaner Type Ontrack | Fabs type FABS 212 | System Safety Equipment: | Red Turn To Release EMO Button YES | EMO Guard Ring YES | System Labels YES | Earthquake Brackets Not used | Smoke Detector YES | Electrical Requirements: | Line Frequency 50/60Hz | Line Voltage 208VAC | Uninterruptible Pow er Supply Not used | Pow er Lamp Yes | Pow er Connected Lamp Yes | Circuit Breaker Yes | AC Outlet Box Yes | Conf igurable IO Yes | GFI Yes | Factory Hookup: | Upper Exhaust Yes | Low er Exhaust Yes | Upper Exhaust Connection Yes | Drain Manifold Yes | Drain Adapter Yes | Castors for Mirra System Only Fabs | Weight Distribution Plate(Skid pad) NONE | User Interface: | Gray Area keyboard/mouse | Cleanroom Monitor/keyboard/m | Class 1 Cart for 1 Monitor monitor only None/Need to new one if it need | Class 1 Cart for 2 Monitors | Class 100 Cart for 2 Monitors | Stainless Cart Gray area None/ Need to new one if it need | Mouse or Trackball Mouse | Printer Not used | Hard Disk Backup Not used | Polisher/Fabs Light Tower: | Polisher Tower Mounting Type Yes Fabs-Wall mount type | Polisher Tower No of Colors 3 | Polisher Tower Colors Sequence Red/Green/Orange | Cleaner Options: | OnTrak Cleaner Yes HF :1%, Ammonium :29% | Maintenance Options: | Spray Gun Yes | Side Panel Window Yes | Pad Conditioner Cover Yes | Cross cover Yes | Slurry Flow Calibration Kit | Lapping Stone Not used | Robot Door Lock Yes | Special Options: | Nylon Brush Not used | EChain Tef lon Sheet Not used | UPA Upgrade Roof / Stainless | Independent membrane Vac Yes | Low Pressure Release Water | Voltage: 200/208 VAC, 3.0 | Frequency: 50/60 Hz | Full load current: 170A 3 Wire (Delta) | Ampere rating of largest load: 30A | Short circuit interrupt capacity: 10,000A | Ground fault: 25mA | 2001 vintage.
  • APPLIED MATERIALS: Mirra 3400 / AS02000

    Details
    ID#:
    9074118
    Category:
    Wafer Grinding, Lap...
    Wafer polishers, 8" | Integration: Mirra and AS2000 | Software: PS58p0 | OS: English | Syscon | I-Pressure pump | Pharmaceutical fluid supply Cabinet | FABS | Manual | 2003 vintage.
  • APPLIED MATERIALS: Mirra 3400 / AS2000

    Details
    ID#:
    9074119
    Category:
    Wafer Grinding, Lap...
    Wafer Polisher, 8" | Integration: Mirra and AS2000 | Software: PS58p0 | OS: English | Syscon | I-Pressure pump | Pharmaceutical fluid supply Cabinet | FABS | Manual | 2003 vintage.
  • APPLIED MATERIALS: Mirra Titan II

    Details
    ID#:
    9049233
    Category:
    Spare Parts
    Wafer Size:
    8" 
    Polishing head, 8" | For Mirra profiler, 4-zone.
  • APPLIED MATERIALS: Mirra Titan II

    Details
    ID#:
    9049234
    Category:
    Spare Parts
    Wafer Size:
    8" 
    Polishing head, 8" | For Mirra profiler, 4-zone.
  • APPLIED MATERIALS: Mirra 3400 / AS2000

    Details
    ID#:
    9074117
    Category:
    Wafer Grinding, Lap...
    Wafer Polisher, 8" | Integration: Mirra and AS2000 | Software: PS58p0 | OS: English | Syscon | I-Pressure pump | Pharmaceutical fluid supply Cabinet | FABS | Manual | 2003 vintage.
  • APPLIED MATERIALS: Mirra Titan II

    Details
    ID#:
    9049236
    Category:
    Spare Parts
    Polishing head, 8" | For Mirra profiler, 4-zone.
  • APPLIED MATERIALS: Mirra Titan II

    Details
    ID#:
    9049235
    Category:
    Spare Parts
    Wafer Size:
    8" 
    Polishing head, 8" | For Mirra profiler, 4-zone.
  • APPLIED MATERIALS: Mirra

    Details
    ID#:
    9077698
    Category:
    Wafer Grinding, Lap...
    Vintage:
    1999 
    CMP / Scrubber system | STI / HS slurry | 1999 vintage.
  • APPLIED MATERIALS: Mirra 3400

    Details
    ID#:
    9027740
    Category:
    Wafer Grinding, Lap...
    CMP polishing system, 8" | AS-2000 integration | Mirra Mainframe with ISRM | Titan head | AS-2000 Dry-in/dry-out cleaner with DBC-TBC-DTC | FABS (configuration available) | Currently installed in a cleanroom | 2000 vintage.
  • APPLIED MATERIALS: Mirra 3400

    Details
    ID#:
    9067916
    Category:
    Wafer Grinding, Lap...
    Wafer Size:
    8" 
    Poly CMP integration system, 8" | (3) Platens | (4) Heads | (1) Cleaner.
  • APPLIED MATERIALS: Mirra

    Details
    ID#:
    9054297
    Category:
    Wafer Grinding, Lap...
    Wafer Size:
    8" 
    Vintage:
    1998 
    System, 8" | | Mirra 3400 planarizer mainframe: | (4) Head | (3) Platen system | Set of four tool | Set of (3) latest revision of pad conditioners | InSitu removal monitor (ISRM) on all platens | ISRM computer, monitor | PC workstation with single 17" monitor | Separate controller with 30ft. umbilicals, top AC feed | (4) each wafer cassettes | Robot Non-integrated | Cassette type, 200mm, 25-Slot, PFA Cassettes | (30) ft. cable for polisher | CE/S2-93/OSHA compliant EMO button, Blank Label | Wafer loss sensor for Oxide | Smoke detector for controllers | Controller light tower | | (3) Slurry | (1) DI water per platen | (25) ft. cable for monitor. | (1) stainless steel cart, with two (2) monitors and two bezels | 200mm upper exhaust flange | Lower exhaust | 3-Color status vertical signal lamp on robot front face (34-1350). | Auto-Lift cassette tank | Nova 2040 | | 1998 vintage.
  • APPLIED MATERIALS: Mirra 3400

    Details
    ID#:
    9054030
    Category:
    Wafer Grinding, Lap...
    Wafer Size:
    8" 
    Vintage:
    1998 
    CMP Oxide polishing system, 8", 1998 vintage.
  • APPLIED MATERIALS: Mirra OnTrak

    Details
    ID#:
    9050390
    Category:
    Wafer Grinding, Lap...
    CMP System, 12".
  • APPLIED MATERIALS: Mirra 3400

    Details
    ID#:
    9027840
    Category:
    Wafer Grinding, Lap...
    Wafer Size:
    8" 
    Vintage:
    2000 
    CMP polishing systems, 8" | AS-2000 integration | Mirra Mainframe with ISRM | Titan head | AS-2000 Dry-in/dry-out cleaner with DBC-TBC-DTC | FABS (configuration available) | 2000 vintage.
  • APPLIED MATERIALS: Mirra

    Details
    ID#:
    9076593
    Category:
    Spare Parts
    Polishing heads.
  • APPLIED MATERIALS: Mirra 3400

    Details
    ID#:
    9067915
    Category:
    Wafer Grinding, Lap...
    Oxide CMP integration system, 8" | (3) Platens | (4) Heads | (1) Cleaner.
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