BALZERS DIF 400 Products

  • BALZERS: DIF 160

    Details
    ID#:
    31326
    Category:
    Pumps
    diffusion pump.
  • BALZERS: BFA 400 MF

    Details
    ID#:
    9048071
    Category:
    Spare Parts
    Combination baffle | P/N: PT B03 503.
  • BALZERS: DIF 250

    Details
    ID#:
    31327
    Category:
    Pumps
    diffusion pump.
  • BALZERS: DIF 500A

    Details
    ID#:
    75060
    Category:
    Pumps
    diffusion pump, ISO 500. 11,500 l/s. Unit weight: 396 lbs.
  • BALZERS: DIF 500A

    Details
    ID#:
    9061848
    Category:
    Pumps
    Diffusion pump.
  • PFEIFFER / BALZERS: QMA 400

    Details
    ID#:
    136849
    Category:
    Pumps
    Faraday cup | | Specifications: | Mass analyzer | Ion source | Filter | Ion detector | Flange with all feedthroughs | | Requires RF generator and QMS 420 operating console.
  • BALZERS: DIF 250

    Details
    ID#:
    83528
    Category:
    Pumps
    diffusion pump.
  • BALZERS: BAF 301D

    Details
    ID#:
    70883
    Category:
    Etchers / Ashers
    Freeze-etching system for TEM sample preparation, with 19" tall x 15" wide vacuum chamber with tapered rear wall. 18" deep at bottom & 13" deep at top, with full opening O-ring sealed hinged door with 6" ID viewport. The chamber has additional KF and ISO ports. The pumping system consists of a Balzers Dif 900 diff pump and a MCG 900 combo LN2 trap with a rated pumping speed of 450 l/s at the inlet of the baffle. Electropneumatic valves are used throughout and a Duo 30A 26.5 cfm two-stage direct drive roughing pump is also included. Sample temperature is controlled by a Balzers GA1 freeze etching control unit from -150 to +50ºC with LN2 required for cooling. Additionally, a filament transformer with output of 4, 8 & 16 volts for carbon evaporation and a Balzers QSG 201 film thickness monitor with QSK113 crystal holder. A vacuum system controller is not provided.
  • UNAXIS / BALZERS: LLS 502

    Details
    ID#:
    112177
    Category:
    Sputtering Systems
    Wafer Size:
    4" 
    Sputtering systems, 4" | | Specifications: | | Main body: | Model: Balzers LLS 502, 3x400/230V 50/60Hz | (2) CT8F cryo pumps | (1) DU0030 Lotary pump | | Substrate holder: | 3 type of Balzers substrates can be used: | 4" dia X 0.5mmt | 4" dia X 1.2mmt | 4" dia X 2.0mmt | | Gas box: | For Sputter, 1 x MFC: Ar. 500 sccm | For Etching, 2 x MFC: Ar. 20/50 sccm | For Slow Vent, 1 x MFC: N2. 5000 sccm | | DC-PM cathode: | Model: (5) Balzers AK515 | Cathode Length : 5" x 15" | Stack sputter | | DC Cathode power: | Model: Advanced Energy MDC 5KX | Maximum Power : 5KW | | (4) Magnet systems: | (3) Balzers MB 515 For Cu. Cr. Ti. | (1) Balzers MC 515 For PamaAroi, Ni80/Fe20 | | Substrate Heating Heaters: | Balzers MCC Ni50/Fe50 | For Load Block chamber: | Quartz Ramp Heater | Heater Capacity : 2 KW | Maximum Temperature : 200 Degree | For Process chamber : | Quartz Ramp Heater | Heater Capacity : 4 KW | Maximum Temperature : 400 Degree | | Ion Beam Etching System For Load Lock chamber: | Model: Inotech Linia Ion gun | Length : 6.0 x 30.0cm | Acceleration Voltage : 0-1000 V | Beam Current : 300mA | Ar Gas flow : 10 sccm | Working distance : 28 / 29cm | Cooling Method | Power : MPS500IPBN | New Driver | | Chamber Cover: Balzers stainless steel | | Transformer trance: Yamamitu Denki | 1st : 3 layers 200V 3phases | 2nd : 3 layers 400/230V 5phases | Capacity : 40KVA | Length : about 700W x 700D x 780H | | Target material: | Length : 5" x 15" | Material : Ti, Cu, Cr, FeNi | | Chiller unit: Miura Zimusyo | | Maintenance hoist: Balzers | | DC Bias: Above 150V | | Poli code: PFC 400 | Power : 3 layers 200V 3Ph 16A | Capacity : 3.2 KVA | cooling Water : 3.8 lpm / 18 degree | (1) DC pulsed, 5KW | (1) RF, 3KW | | Currently de-installed and warehoused | Decommissioned in 2007 | Can be inspected | 1995-1996 vintage.
  • BALZERS: BAK 760 D

    Details
    ID#:
    9016971
    Category:
    Evaporators
    Coater | Vacuum pump UNO 100 | Roots pump WKP 500 | Diffusion pump DIF 500A | High vacuum valve PVA 500 | Baffle with cooling compressor BBA 500 | Meissner Cold trap with Polycold PFC 550ST | E-Gun with 1 x ESQ 110, EHV 110 and 1 x ESK 110 | Layer thickness controller QSK 310 (single quartz) | Rotary drive, with auto turn system and turn paddle or one carrier segment | (2) Resistant evaporating devices | Backside heater 9 KW | Incl. vacuum tubes and measuring devices | Controller BPU 420 G, PRO 420 and VAC 420, screen and keyboard.
  • BALZERS: BA 510

    Details
    ID#:
    186817
    Category:
    Evaporators
    Bell jar system | (3) Thermal Sources | Shutters | 510mm Diameter | Pump system | -Diffusion pump Balzers Diff 200 | -Balzers Buffle BFA 200 | -Freon compressor PW3K7 with R413A | -Pfeiffer rotary pump DUO 030A | -n°2 Balzers EVA 040P | -Balzers vent valve EVM016 | -Balzers high vacuum valve PVA 200PD with Throttle function | Instruments for vacuum controls | -Balzers TPG 070 with 3 TPR 010 | -Balzers IKW 010 with IKG 020 with set points for run process | -PC 101 for automatic pumping control | Process Systems | -Balzers BPU 100 automatic systems process control for n°4 sources and 36 layers. | -Quarz Monitor Balzers QM101 With head QSK 300 | -N° 2 thermal source working with automatic system BPU and thyristor Eurotherm | -Automatic Balzers shutter for both sources | -Automatic rotary system BD104 | Electrical System | -3P-N-GND 380V for 50hz | -EEO 101 safety stop | -ERE 101 connection box | -EPC 301 distribution power box | -Water cool valves and flows switches | -Electrical and water predisposition for E-Gun | Includes operation and maintenance manuals. |
  • UNAXIS / BALZERS: BAK EVO 760

    Details
    ID#:
    183631
    Category:
    Evaporators
    Multiple Source Thermal Evaporator | Configured with 3 shutters and 8 water cooled power feed throughs | 3 Inficon XTC crystal deposition monitors each controlled via Khan computer | Substrate carrier for 8 in. dia. substrates | Khan process control with user friendly graphics | Fully integrated multi-tasking PC-based control system | CTI-400 Cryopump with 9600 Compressor and Pump Package for quick pump down | 2001 vintage. |
  • BALZERS: BAK 550

    Details
    ID#:
    159825
    Category:
    Evaporators
    Box coater | Small sputtering device in the top of the vacuum chamber | Hüttinger RF power supply with matchbox | (Type TIS05 & FPG300RF) | Advanced Energy DC power supply (Type PSS390) | Balzers IMG060B, Granville-Phillips 270D17 and MKS 127 Baratron vacuum measuring equipment | Balzers QMA 200 mass spectrometer system | Does not include: | Pre-vacuum | High vacuum pumping system | Operating voltage: 280 to 400 VAC, 50 Hz.
  • BALZERS: HLT 160

    Details
    ID#:
    9014787
    Category:
    Leak Detectors
    Portable helium leak detectors | 1 test port free of oil back-streaming | Auto-ranging and autocalibration | No LN2 required | Remote keypad control | Transport cart with backing pump | Sensitivity to 2×10-11 mbar 1/s | BG Z04 750/690 | 110 V, 60 Hz, 600 VA | | Includes Balzers DUO-016B pump, 110 V.
  • BALZERS: LFC 150

    Details
    ID#:
    150542
    Category:
    Etchers / Ashers
    Plasma chip carrier cleaner | Plasma-cleans carriers in standard magazines | De-installed | 3 x 400 V, 20 A, 60/60 Hz, 8.5 kVA | Water: 2-5 bar | Air: 5-8 bar | Nitrogen: 5-8 bar | Argon: 3-200 bar | 1999 vintage.
  • BALZERS: BA 510

    Details
    ID#:
    35733
    Category:
    Evaporators
    Vacuum evaporator | | Includes | Stainless water traced bell jar (20" x 25") | (2) Viewports on a 22" OD stainless steel baseplate with hydraulic hoist | (2) High current feedthroughs | Pumping system: DIF200 diffusion pump, 2000 l/s | Water cooled baffe: Balzers BFA200W | Electropneumatic valves | Vacuum system controller: Balzers PC101 | Direct drive mechanical roughing pump: Balzers DUO030A, 26.5 cfm | Evaporative systems: Filament transformer | Manual shutter with motorized horizontal substrate rotation | Digital cold cathode: Balzers PKG100 | Pirani gauge.
  • BALZERS: BAK 600

    Details
    ID#:
    161695
    Category:
    Evaporators
    Batch coating system | Capable of handling ~(8) 6" wafers at once | Includes: | BALZERS HGG700 HV transformer | BSG 301 control unit for HGG 700 (0-400 mA) | RVE 016 gas inlet valve DN 10 KF (flange) | High voltage feedthrough | Vacuum switch | High voltage cable | Connection cable HGG J2 - BSG J3 (4m) | Connection cable HGG J3 - BSG J1 (4m) | Vacuum monitor (4m).
  • PFEIFFER / BALZERS: WKP 6000 AM

    Details
    ID#:
    158906
    Category:
    Pumps
    Vintage:
    2008 
    Dry vacuum pump blower | No: PP W77 000 | Specifications: | Volume Flow Rate: Theor 6000 m3/h | Rotation Speed: 3000 1/min | Oil: P3 | Drive Power: 15kW | Input: 400 / 690 V 50Hz | Weight: 265KG | 2005 vintage | Motor Specifications: | 3~160M-2 | VDE: 0530 | IEC: 34-1 | I.P.55 / I.CI.F | Thermistor (PTC) Max: 2,5VDC 155°C | | 2008 vintage.
  • BALZERS: UMS 500

    Details
    ID#:
    144768
    Category:
    Evaporators
    Special Ultra High Vacuum System | With a pressure < 3x 10e-11mbar | (1) Balzers Electron Beam Power Supply EHV 110A | (2) Balzers Electron Gun Control EKS 110A | (1) Balzers RTC 110 Rate Controller | (2) Balzers ES300 E-Guns | (1) Balzers Ion Gauge Control IMG 070 | (1) Balzers Sublimation Control USS 110 | (1) Balzers UMS Control UMC 101 | (1) Pfeifer Turbo Pump Power Supply TCP 300 | (1) Balzers Heater Control Unit UAS 301 | (1) Advanced Energy ID 2500 Ion Beam Drive | (1) Ion Beam Source | (1) Balzers Quadrupole Mass Spectrometer QMG511 | (1) Varian TSP control Unit Model VT922-0052 | (1) Balzers Temperature Control Unit 0° to 400°C | | Water Distributor Rack | | Includes Documentation with drawing and schematics.
  • PFEIFFER / BALZERS: TPH 2200 SG

    Details
    ID#:
    191053
    Category:
    Pumps
    Turbo molecular pump | PFEIFFER / BALZERS TCP5000 controller.
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