FEI MICRION 875 AUTOFIB Products

  • FEI: Certus 3D

    Details
    ID#:
    200445
    Category:
    Ion Milling
    Vintage:
    2007 
    FIB 3D dual beam system, P1 level tool | | Includes: | (2) Loadports: | Loadport, 100 x 1.2 mm | 2nd Loadport, 100 x 1.2 mm | | Detectors: CDEM, TLD | Mounted flange | Custom wafer holder for 4" Germanium wafers, NSR required | Additional material types: Tungsten, Carbon Dep, and enhanced Etch | | High resolution FE-SEM column: | 0.2 to 2 KeV | Schottky thermal field emitter | 45 degree objective lens | Motorized heated objective apertures | High intensity FEI Sidewinder ion column | Beam current range: 1 pA to 20 nA | | In-lens detection system | FEI exclusive IC3D software | (6) Axial accessory ports | Automatic vacuum system with integrated wafer loadlock | Oil-free turbomolecular pumping system for specimen chamber | (3) Ion pumps | Robotic cassette-to-cassette autoloader | Non-contact pre-aligner and dual cassette stations | (4) Axis motorized 12" stage with optical encoders and closed loop computer control | Multi-axis joystick | (1) Wafer holder (for standard substrates) | Video Printer | Team Systems Model TP-6530: High-resolution thermal printer | Optical microscope: | Magnification range from 10X to 40X | MS-Windows operating system | 21-inch color flat screen monitor | Integral vibration and stray field cancellation system | Prevacuum pump: Edwards L70 pre-vacuum pump. | Chiller: Neslab HX-75 chiller | Slight Z adjustment | Source: Tungsten | CE-marked | | Optional: | I-Watch Software v1.3 | IC3D Workstation, with IC3D v 6.0 | GIS Insulator Enhanced Etch (XeF2, IEE) | | Needs to be replaced: | PRA700 Power supply PN 4022-268-01378 | SEM Encoder | Electron flange | | De-installed | 2007 vintage.
  • FEI: 300 HP

    Details
    ID#:
    189618
    Category:
    Scanning Electron M...
    Dual beam FIB-SEM, 12" | | DA 300HP (Dual-Beam FEI for Biopsy JDA) | Nanolift | Express FOUP-Loader (25), 300mm, incl. 200mm option | AutoFIB | AutoTEM | Th. Printer | Chiller | UI cart | | 2008 vintage.
  • PHILIPS / FEI: XL 30

    Details
    ID#:
    9057340
    Category:
    Scanning Electron M...
    Vintage:
    1998 
    Scanning electron microscope (SEM) | (2) EDS detectors: (1) EDAX, (1) Princeton Gamma-Tech OPH039-1038 | Windows 2000 | Software: FEI Microscope Control, version 7.0 | 1998 vintage.
  • FEI: 4022-268-00561

    Details
    ID#:
    9024615
    Category:
    Spare Parts
    Micro-element measuring system.
  • FEI: 4035-272-59592

    Details
    ID#:
    9024610
    Category:
    Spare Parts
    Wafer holder assy, 200/300.
  • FEI: 19011

    Details
    ID#:
    9024611
    Category:
    Spare Parts
    Standard sample test systems.
  • FEI: Morgagni

    Details
    ID#:
    9051785
    Category:
    Scanning Electron M...
    TEM | Currently installed.
  • FEI: 5322-695-16148

    Details
    ID#:
    9024614
    Category:
    Spare Parts
    Detector, thru lens, TLD.
  • FEI: 4022-260-56891

    Details
    ID#:
    9024613
    Category:
    Spare Parts
    Aperture strip, FEG/SFEG.
  • FEI: 24115

    Details
    ID#:
    9024609
    Category:
    Spare Parts
    Quick change beam acceptance aperture replacement kits, 20nA.
  • FEI: 4022-197-94963

    Details
    ID#:
    9024608
    Category:
    Spare Parts
    PM supply 10kV EXS.
  • PHILIPS / FEI: FIB-610

    Details
    ID#:
    9021863
    Category:
    Scanning Electron M...
    Focused ion beam imaging workstation | | Includes: | FEI LBO-51MA display | FEI PCSP system power controller | FEI ID2 deflection controller | FEI SCI stage controller | FEI 1IPS ion pump power supply | FEI 1GI gas injection controller | FEI CPS video controller | FEI MVD deposition control unit | TurboTronik NT-340-M turbo pump controller | | SCI stage control module is misaligned with the fastening holes | PCSP system power controller has missing joystick.
  • FEI: 200xP

    Details
    ID#:
    9046854
    Category:
    Ion Milling
    Focused ion beam system | Magnum ion column | 50 mm Stage | (2) GIC | Turbo vacuum | 1999 vintage.
  • FEI: Nova 200

    Details
    ID#:
    9046379
    Category:
    Scanning Electron M...
    Dual beam system.
  • FEI: 4035-272-05751

    Details
    ID#:
    9024607
    Category:
    Spare Parts
    CDEM.
  • FEI: 23229

    Details
    ID#:
    9024592
    Category:
    Spare Parts
    Aperture strip, prelens.
  • FEI: 4022-268-00916

    Details
    ID#:
    9024616
    Category:
    Spare Parts
    Gauge, Pirani, APG-MP.
  • FEI: 4022-198-28181

    Details
    ID#:
    9024617
    Category:
    Spare Parts
    Vac. switch 15mbar REL.
  • FEI: Tecnai G2 F20

    Details
    ID#:
    141774
    Category:
    Scanning Electron M...
    TEM | S-Twin lens | EDAX EDS included | 2004 vintage.
  • FEI: Vectra 986+

    Details
    ID#:
    9038310
    Category:
    Ion Milling
    FIB Station | | Includes: | (2) Bays | Column: 50KeV, 32 mm WD | Source: ION Gallium | Second source | Stage: X & Y motion, 50nm beam accuracy | Stage drift laser compensation | Penta nozzle | Beehive nozzle | Copper depo nozzle | (14) Apertures | Cognex pattern recognotion software | Optical IR microscope | Real Time OBIC endpointing | Stage current endpointing | Image endpointing: Secondary particle emission | Gas assisted Etching: Chlorine, Xenon, Water | Deposition: Tungsten, Copper | Insulator deposition: Siloxane, Oxygen | Copper Removal: CoppeRX | Direct write copper deposition | Beam placement accuracy (BPA) | VisION column (last column upgrade) | Field emission.
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