FEI MICRION 875 AUTOFIB Products

  • FEI / MICRION: 96052

    Details
    ID#:
    9064650
    Category:
    Spare Parts
    Vintage:
    2012 
    Column, 5 nm | For FEI / MICRION 9600 | 2012 vintage.
  • FEI: 5322-695-16148

    Details
    ID#:
    9024614
    Category:
    Spare Parts
    Detector, thru lens, TLD.
  • FEI: 4022-260-56891

    Details
    ID#:
    9024613
    Category:
    Spare Parts
    Aperture strip, FEG/SFEG.
  • FEI: 4022-268-00561

    Details
    ID#:
    9024615
    Category:
    Spare Parts
    Micro-element measuring system.
  • FEI: 200

    Details
    ID#:
    9048247
    Category:
    Scanning Electron M...
    Dual beam FIB / SEM | Magnum column.
  • FEI: Nova NanoSEM 430

    Details
    ID#:
    9047188
    Category:
    Scanning Electron M...
    Vintage:
    2011 
    SEM | High and low vacuum | High resolution | FEG SEM | 4" mm x 4" mm stage | Loaded: TLD SE, BSE, SED, LV SED (LVD), UHR LV SED (Helix), Low KV BSED, GAD | 2011 vintage.
  • FEI: 4022-268-00916

    Details
    ID#:
    9024616
    Category:
    Spare Parts
    Gauge, Pirani, APG-MP.
  • PHILIPS / FEI: XL 40

    Details
    ID#:
    9049866
    Category:
    Scanning Electron M...
    SEM | LaB6 emitter, 6-position bias control | OS: Windows 3.11 | Fully integrated image storage | ET type Secondary Electron Detector | FEI (Philips) Solid State BSE detector | CCD Chamberscope | Resolution: 3nm at 30kV; 15nm at 1kV | Magnification range: 10x – 400,000x | Accelerating Voltage: 0.2 to 30kV | Drawer type door | 5 axis stage (XYZRT) – XYR motorized with 150mm travel in X and Y | Manual Tilt and Z adjustment | External Z adjustment of 37mm | Interior chamber size 379mm x 325mm x 315mm | (8) accessory ports, including BNC electrical feedthrough | Currently installed.
  • FEI: DualBeam 835

    Details
    ID#:
    9047185
    Category:
    Ion Milling
    Wafer Size:
    8" 
    Vintage:
    2000 
    Dual ion beam FIB / SEM, 8" | Magnum ion | 2 GIS | 8" Load lock | 2000 vintage.
  • FEI: Quanta 200

    Details
    ID#:
    9052447
    Category:
    Scanning Electron M...
    Vintage:
    2006 
    3D Dual beam Focused Ion Beam (FIB) / Scanning Electron Microscope (SEM) | | Hardware: | Standard Detectors: (ETD, CCD camera) | Additional Environmental Detectors: GSED, X-ray PLA | 2-channel Detector Pre-amplifier | Stage: 50mm 5-axis motorized | External Scan Interface | (1) Platinum Gas Insertion System (GIS) | Turbo Molecular Pump with Roughing Pumps (2x Edwards XDS10) | Compressor (120V, 60Hz with 4-liter tank) | Power: 230VAC 50/60Hz, 20A max current requirement | | Hardware Upgrade: | Nanopattern Generation System (NPGS) | | Performance (at install): | Electron Column: 2.86nm resolution at 30kV | Ion Column: 8.245nm resolution at 30kV | | Consumables: | Spare tungsten filaments | Spare apertures | | PC (FIB): | HP xw4400 workstation, Intel Core2 6300, 1.86Ghz | Windows XP, xTm software version 1.7.4 | | PC (NPGS): | HP xw4600 workstation, Intel Core2Duo E8200 2.66 Ghz | Windows XP, NPGS Version 9.0.265 (2012) | | Additional Software: | AutoFIB | AutoTEM | AutoSlice and View | Amira | | 2006 vintage.
  • FEI: 820

    Details
    ID#:
    9052452
    Category:
    Ion Milling
    Focused ion beam dual beam system | 220 V, 50/60 Hz, 3,500 VA | 1996 vintage.
  • FEI: DA300

    Details
    ID#:
    9052303
    Category:
    Wafer Testing And M...
    Wafer Size:
    12" 
    Defect analyzer, 12" | | Includes: | Dual beam system | Electron imaging | Focused ion beam milling | FOUP wafer handling | Omniprobe nanomanipulator | Scanning transmission electron microscopy (STEM) | Energy dispersive x-ray spectroscopy (EDX) | Gas injection systems (GIS) with tool automation: | Deposition: Platinum, Tungsten | Reactive: Insulator enhanced etching (XEF2) | TEM Sample preparation | Cross section and plan view lamellae | Low kV cleaning capability | SEM Imaging | Electron or ion beam milling/deposition | | Sample stage: 12" | Stage motion: 305 x 305 mm travel | Stage motion: 1.5 μm accuracy | Schottyky electron gun: 200 V - 30 kV | Image resolution: 7 nm FIB, 2 nm SEM | Liquid metal gallium ion source: 5 - 30 kV | Milling current range: pA - nA | STEM imaging: DF, BF, HAADF 1.1 nm at 30 kV.
  • FEI: 24115

    Details
    ID#:
    9024609
    Category:
    Spare Parts
    Quick change beam acceptance aperture replacement kits, 20nA.
  • FEI: 19011

    Details
    ID#:
    9024611
    Category:
    Spare Parts
    Standard sample test systems.
  • FEI: 4035-272-59592

    Details
    ID#:
    9024610
    Category:
    Spare Parts
    Wafer holder assy, 200/300.
  • FEI: DualBeam 830

    Details
    ID#:
    9047184
    Category:
    Ion Milling
    Wafer Size:
    8" 
    Vintage:
    1999 
    Dual ion beam FIB / SEM, 8" | Pre lens ion | 2 GIS | Turbo vacuum | 1999 vintage.
  • FEI: 4035-272-05751

    Details
    ID#:
    9024607
    Category:
    Spare Parts
    CDEM.
  • FEI: 5322-695-16115

    Details
    ID#:
    9024620
    Category:
    Spare Parts
    Poletip 60° Snorlens.
  • FEI: 4035-272-16981

    Details
    ID#:
    9024619
    Category:
    Spare Parts
    F/G, S-ion column.
  • FEI: DualBeam 820

    Details
    ID#:
    9026430
    Category:
    Ion Milling
    Dual ion beam FIB / SEM.
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