FEI MICRION 875 AUTOFIB Products

  • FEI: Expida 1285

    Details
    ID#:
    9095881
    Category:
    Ion Milling
    Wafer Size:
    8"-12" 
    Scanning Microscope System, 8"-12" | Integrated electron and ion columns for semi-automated process control | Defect review, characterization, and failure analysis | | (1) Notched wafer holder | In-lens detection system for secondary and backscattered electrons | FEI xP software: wafer alignment, repetitive FIB operations, and critical dimension | (6) axial accessory ports for gas chemistry (4 maximum) | EDS detectors | Optical microscopes | Automatic vacuum system with integrated wafer loadlock | Oil-free turbomolecular pumping system for specimen chamber | (3) Ion pumps for differential pumping of ion and electron columns | Rough pump foreline | Robotic 8"/12" autoloader with non-contact prealigner | | High resolution Sirion FE-SEM column: 0.2 to 30 KeV | Schottky thermal field emitter | 60° Dual-objective lens: field free and immersion modes | Motorized heated objective apertures | | High intensity FEI Sidewinder ion column | Beam current range from 1 pA to 20 nA. | | (5) Axis motorized 305 mm stage | High accuracy optical encoders | Closed loop computer control | Multi-axis joystick | | Distributed control | Pentium-based host computer | Controls multiple single-board satellite processors | MS Windows operating system | Integrated 19" LCD color monitor | Video printer | | Manual user interface (MUIF) console | Stigmation | Magnification | XY fine position | Standard mouse control | | Integral vibration and stray field cancellation system | SEMI S2-0703 and CE compliant. | | Options available: | Roughing pump | FOUP, SMIF, or open cassette load.
  • FEI: DualBeam 865

    Details
    ID#:
    9076200
    Category:
    Ion Milling
    Wafer Size:
    8" 
    Vintage:
    2002 
    Dual ion beam FIB / SEM | Schottky FEG SEM | Magnum ion column | Low KV capable for Hi-Res TEM sample preparation | SE and BSE imaging | Secondary ion imaging | Resolution of SEM: 3 nm at 5 KV and 30 KV | Software: Window XP, FEI XP UI | Stage: 200 mm full travel, -5° to 60° tilt | (3) GISes | Wafer robot | | De-installed in Q4 2012 | 2002 vintage.
  • FEI: 800

    Details
    ID#:
    9046863
    Category:
    Ion Milling
    Focused ion beam system | 8" XY Stage travel | Prelens | (2) GIS | 1999 vintage.
  • FEI: 4022-198-28181

    Details
    ID#:
    9024617
    Category:
    Spare Parts
    Vac. switch 15mbar REL.
  • FEI: 4022-268-00916

    Details
    ID#:
    9024616
    Category:
    Spare Parts
    Gauge, Pirani, APG-MP.
  • FEI: 820

    Details
    ID#:
    9082626
    Category:
    Spare Parts
    FIB Mainframe only.
  • FEI: 4022-262-21611

    Details
    ID#:
    9024618
    Category:
    Spare Parts
    Deflector test box.
  • FEI: 4035-272-16981

    Details
    ID#:
    9024619
    Category:
    Spare Parts
    F/G, S-ion column.
  • FEI: Tecnai G2 F30 S-Twin

    Details
    ID#:
    9028804
    Category:
    Scanning Electron M...
    Vintage:
    2006 
    Scanning / Transmission electron microscope (S/TEM) | 0.34 nm point-to-point Resolution | Gatan Tridiem 863 CCD 2k x 2k Camera | Vacuum: diffusion pump with mechanical RP | | Gun: | Schottky FEG | 20 – 300 kV | Automatic aperture system | | Imaging: | STEM, HAADF, BF/DF | 2k x 2k CCD | | Spectroscopy: | Edax EDS | Gatan 863 Tridiem | | Special applications: | Holography (Bi-Prism, and Gatan Holoworks) | Lorentz | Tomography (FEI SW and tomography holder) | EFTEM EELS | Tecnai free lens control | | Sample holder: | Single tilt compustage | High visibility double tilt low background holder | Tomography holder | | 2006 vintage.
  • FEI: DualBeam 820

    Details
    ID#:
    9026430
    Category:
    Ion Milling
    Dual ion beam FIB / SEM.
  • FEI: 800

    Details
    ID#:
    9080063
    Category:
    Ion Milling
    Focused Ion Beam (FIB) system, 8".
  • FEI: Nova NanoLab 600

    Details
    ID#:
    9081351
    Category:
    Scanning Electron M...
    SEM | Ion gun: non-operational.
  • FEI: 4022-268-00561

    Details
    ID#:
    9024615
    Category:
    Spare Parts
    Micro-element measuring system.
  • FEI: 5322-695-16148

    Details
    ID#:
    9024614
    Category:
    Spare Parts
    Detector, thru lens, TLD.
  • FEI: 4035-272-05751

    Details
    ID#:
    9024607
    Category:
    Spare Parts
    CDEM.
  • FEI: 820

    Details
    ID#:
    9084978
    Category:
    Ion Milling
    Wafer Size:
    8" 
    Vintage:
    1998 
    Focused Ion system, 8" | Dual beam | Model: XCDA-Z | ION source: needs to be refilled | Currently installed.
  • FEI: DB235

    Details
    ID#:
    9085333
    Category:
    Ion Milling
    DualBeam FIB System.
  • FEI: 23229

    Details
    ID#:
    9024592
    Category:
    Spare Parts
    Aperture strip, prelens.
  • FEI: 4022-197-94963

    Details
    ID#:
    9024608
    Category:
    Spare Parts
    PM supply 10kV EXS.
  • FEI: 24115

    Details
    ID#:
    9024609
    Category:
    Spare Parts
    Quick change beam acceptance aperture replacement kits, 20nA.
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