FEI MICRION 875 AUTOFIB Products

  • FEI: FIB200

    Details
    ID#:
    9082663
    Category:
    Ion Milling
    Focused Ion Beam System | | Single beam | Pre-lens ion column provides image resolution of 7nm and milling current up to 11nA | 50x50mm XY stage, with rotation, tilt and z-motions | Loadlock with separate pump for fast sample exchange | Turbo pump for main chamber | Real time monitor to observe milling, aka Leader oscilloscope | Keithley Pico-ammeter to measure beam current | Chamber camera and monitor | Computer control with FEI software and Seiko screen printer | Manual user interface (MUI), joystick and mouse controls | Manuals | (2) gas injectors with controller: choose from iodine, XeF2, Platinum, or TEOS gases | Line transformer (main), AC distribution box and Maintenance tool kit.
  • FEI: DualBeam 865

    Details
    ID#:
    9076200
    Category:
    Ion Milling
    Wafer Size:
    8" 
    Vintage:
    2002 
    Dual ion beam FIB / SEM | Schottky FEG SEM | Magnum ion column | Low KV capable for Hi-Res TEM sample preparation | SE and BSE imaging | Secondary ion imaging | Resolution of SEM: 3 nm at 5 KV and 30 KV | Software: Window XP, FEI XP UI | Stage: 200 mm full travel, -5° to 60° tilt | (3) GISes | Wafer robot | | De-installed in Q4 2012 | 2002 vintage.
  • FEI: Nova NanoSEM 430

    Details
    ID#:
    9047188
    Category:
    Scanning Electron M...
    Vintage:
    2011 
    SEM | High and low vacuum | High resolution | FEG SEM | 4" mm x 4" mm stage | Loaded: TLD SE, BSE, SED, LV SED (LVD), UHR LV SED (Helix), Low KV BSED, GAD | 2011 vintage.
  • PHILIPS / FEI: FIB-610

    Details
    ID#:
    9021863
    Category:
    Scanning Electron M...
    Focused ion beam imaging workstation | | Includes: | FEI LBO-51MA display | FEI PCSP system power controller | FEI ID2 deflection controller | FEI SCI stage controller | FEI 1IPS ion pump power supply | FEI 1GI gas injection controller | FEI CPS video controller | FEI MVD deposition control unit | TurboTronik NT-340-M turbo pump controller | | SCI stage control module is misaligned with the fastening holes | PCSP system power controller has missing joystick.
  • FEI: 4035-272-05751

    Details
    ID#:
    9024607
    Category:
    Spare Parts
    CDEM.
  • FEI: DualBeam 835

    Details
    ID#:
    9047185
    Category:
    Ion Milling
    Wafer Size:
    8" 
    Vintage:
    2000 
    Dual ion beam FIB / SEM, 8" | Magnum ion | 2 GIS | 8" Load lock | 2000 vintage.
  • FEI: DualBeam 830

    Details
    ID#:
    9047184
    Category:
    Ion Milling
    Wafer Size:
    8" 
    Vintage:
    1999 
    Dual ion beam FIB / SEM, 8" | Pre lens ion | 2 GIS | Turbo vacuum | 1999 vintage.
  • FEI: 23229

    Details
    ID#:
    9024592
    Category:
    Spare Parts
    Aperture strip, prelens.
  • FEI: DB235

    Details
    ID#:
    9047177
    Category:
    Ion Milling
    Vintage:
    2003 
    Dual ion beam FIB / SEM | Magnum ion column | 2 GIS | Small chamber dual beam | | Omniprobe, evactron, and more GIS available | 2003 vintage.
  • FEI: DualBeam 835

    Details
    ID#:
    9047178
    Category:
    Ion Milling
    Wafer Size:
    8" 
    Vintage:
    2000 
    Dual ion beam SEM / FIB, 8" | Magnum ion | 2 GIS | Wafer loading robot | 2000 vintage.
  • FEI: DualBeam Expida 1285

    Details
    ID#:
    9047183
    Category:
    Ion Milling
    Wafer Size:
    8" 
    Vintage:
    2000 
    Dual ion beam FIB / SEM, 8" - 12" | 2000 vintage.
  • PHILIPS / FEI: XL 40

    Details
    ID#:
    9049866
    Category:
    Scanning Electron M...
    SEM | LaB6 emitter, 6-position bias control | EDX | OS: Windows 3.11 | Fully integrated image storage | ET type Secondary Electron Detector | FEI (Philips) Solid State BSE detector | CCD Chamberscope | Resolution: 3nm at 30kV; 15nm at 1kV | Magnification range: 10x – 400,000x | Accelerating Voltage: 0.2 to 30kV | Drawer type door | 5 axis stage (XYZRT) – XYR motorized with 150mm travel in X and Y | Manual Tilt and Z adjustment | External Z adjustment of 37mm | Interior chamber size 379mm x 325mm x 315mm | (8) accessory ports, including BNC electrical feedthrough | Currently installed.
  • FEI: DA300

    Details
    ID#:
    9052303
    Category:
    Wafer Testing And M...
    Wafer Size:
    12" 
    Defect analyzer, 12" | | Includes: | Dual beam system | Electron imaging | Focused ion beam milling | FOUP wafer handling | Omniprobe nanomanipulator | Scanning transmission electron microscopy (STEM) | Energy dispersive x-ray spectroscopy (EDX) | Gas injection systems (GIS) with tool automation: | Deposition: Platinum, Tungsten | Reactive: Insulator enhanced etching (XEF2) | TEM Sample preparation | Cross section and plan view lamellae | Low kV cleaning capability | SEM Imaging | Electron or ion beam milling/deposition | | Sample stage: 12" | Stage motion: 305 x 305 mm travel | Stage motion: 1.5 μm accuracy | Schottyky electron gun: 200 V - 30 kV | Image resolution: 7 nm FIB, 2 nm SEM | Liquid metal gallium ion source: 5 - 30 kV | Milling current range: pA - nA | STEM imaging: DF, BF, HAADF 1.1 nm at 30 kV.
  • FEI: Tecnai F30 S-Twin

    Details
    ID#:
    9062878
    Category:
    Scanning Electron M...
    FE-TEM | 300KV | | Operational system: | Electron microscope TECNAI F30 S-TWIN, FP 5035/20 | NEC 20" Monitor, 9432-909-93371 | Extended Work Station, 5352/02 | Imaging and analysis software, 5400/00 | CompuStage Low Background Dbl-tilt holder, 6595/15 | Low dose exposure technique, 5407/00 | 28 sheet film holder, 6209/20 | Magazine for 56 unexposed sheet film holders, 6222/00 | Magazine for 56 exposed sheet film holders, 6223/00 | Desiccator for 2 magazines, 92021 | Replacement FEG assembly, 6180/00 | Mains matching Transformer, 6345/51 | Cooling water unit 60hz, 9432 909 96311 | Spare Objective Aperture, 6149/50 | FEG Diagnostics, 5265/00 | TEM General Diagnostics, 5266/00 | STEM General Diagnostics, 5267/00 | HT Diagnostics, 5269/20 | Air compressor, 9432-909-96271 | Electron optics: | Tecnai Scripting, 5451/00 | Tecnai Photo montage, 5456/00 | Gatan 894.P27FAP | | STEM and HAADF: | EDX Spectroscopy Technique, 5402/00 | Digital Pulse Processor, 9432-909-95322 | Detector Unit , PV 9761/08 | Beam Control and Mapping software Pkg, 9432-909-95391 | EDAX Mat.Sc. TEM SW, 95371 | External Analog Interface XAIB, 6778/00 | | GATAN Cameras: | Gatan Ultrascan 1000 2kx2k / Grade 2(B) | Gatan retractable TV rate CCD Camera type 692, 9432-909-22434 | Digital Micrograph for Tecnai, 5406/40 | Slow Scan CCD imaging technique, 5406/00 | TV rate imaging Technique, 5405/00 | | Holography Option 2D Dopant Profiling: | Lorenz Lens, 9432-900-22431 | Biprism Holder, 9432-900-22432 | Holoworks SW (Gatan), 9432-900-22433.
  • FEI: SDP-100 SIMS III

    Details
    ID#:
    9062899
    Category:
    Spare Parts
    SIMS detector | For FIB-200 dual beam FIB/SEM.
  • FEI: Tecnai F30

    Details
    ID#:
    9063939
    Category:
    Scanning Electron M...
    FE-TEM | | Includes: | TEM Body: Main unit | FEG Gun: Electron gun | H/T Tank | Chiller with PCW supply | Power cabinet: Main unit with power supply | STEM Cabinet: STEM Cabinet, (2) PC and HDD Remote | TEM Cabinet | Water rack | Cover | Desk | ETC: Monitor, turbo controller | | Non-SMIF | Automatic online component: No | Wafer OF Type: Notch at 6 o'clock | Software OS: Windows | No PPD | Option for lens cloudiness: PL Purge | 2007 vintage.
  • FEI: Vectra 986+

    Details
    ID#:
    9062560
    Category:
    Ion Milling
    Wafer Size:
    6" 
    Physical analysis tool, 6" | OBIC | Flood Gun | Tilt and Rotate Cassette | FIB Assist | Laser stage: interferometry | 50kV column | IET: no | Gases: XeF2, Cl2, TMCTS, H2O, WF6 | Currently crated and warehoused.
  • FEI: Tecnai G2 F20

    Details
    ID#:
    141774
    Category:
    Scanning Electron M...
    TEM | S-Twin lens | EDAX EDS included | 2004 vintage.
  • FEI: 820

    Details
    ID#:
    9052452
    Category:
    Ion Milling
    Focused ion beam dual beam system | 220 V, 50/60 Hz, 3,500 VA | 1996 vintage.
  • FEI: Strata DB235

    Details
    ID#:
    9082028
    Category:
    Ion Milling
    Dual ion beam.
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