FSI MERCURY Products

  • FSI: MERCURY

    Details
    ID#:
    9073573
    Category:
    Photoresist
    Wafer Size:
    6" - 8" 
    Spray processor | (6) cassettes for 6" wafers | (4) cassettes for 8" wafers | PLC controller | 15" touchscreen LCD display | PFA high purity pneumatic operated valve | No metal contamination | In line ultrapure DI water heater | Canister console | Recirculation tank for HF/BOE | Chamber temperature measurement | | Modernized Helios 52 included: | Communication compatible with FSI Mercury over RS232 | RJ45 Ethernet communication | Modern and reliable SSR relay | Touch screen display operation | Intuitive user interface | Auto - adaptive temperature regulation | High reliability | Events archive | Modernized safety features | Remote control and supervision | Multilanguage interface - English, Russian, Chinese, Korean, Czech, etc. | | Process availability: | B clean | C clean | RCA clean | SC1 clean | SC2 clean | Oxide etch | Ozone clean | Piranha clean | Rise and dry | | Optionals: | Computer network support | SECSII/GEM support | O3 water generator as H2S04 alternative | IR acid heater | Remote control by smart phone | Compact one piece version | | Canister configuration: | 1st canister console: H2SO4, HCl, DHF canisters | 2nd canister console: H2O2, NH4OH canisters | | Flowmeter configuration: | H2SO4 - 200 - 2000 sccm | HCl - 30 - 400 sccm | DHF - 200 - 2000 sccm | H2O2 - 30 - 400 sccm | NH4OH - 30 - 400 sccm | | Dual Exhaust configuration | 2 Drain Option | New PFA 6" / 6 position turntable included | New control system with HMI | New valves and PFA lines in process console | Filter cartridges are not included.
  • FSI: MERCURY MP

    Details
    ID#:
    9073318
    Category:
    Spare Parts
    PVDF turntable, 4" for Mercury MP | P/N: 913501-001.
  • FSI: MERCURY MP

    Details
    ID#:
    9078295
    Category:
    Photoresist
    Wafer Size:
    8" 
    Vintage:
    1998 
    Spray processor, 8" | (6) Canisters | Autofill option | Full option with O3 | 1998 vintage.
  • FSI: MERCURY MP

    Details
    ID#:
    9078294
    Category:
    Photoresist
    Wafer Size:
    8" 
    Vintage:
    1997 
    Spray processor, 8" | (6) Canisters | Autofill option | Full option with O3 | 1997 vintage.
  • FSI: MERCURY MP

    Details
    ID#:
    9078287
    Category:
    Photoresist
    Wafer Size:
    8" 
    Vintage:
    2000 
    Spray processor, 8" | (6) Canisters | Autofill Option wo O3 | 2000 vintage.
  • FSI: MERCURY MP

    Details
    ID#:
    9078291
    Category:
    Photoresist
    Wafer Size:
    8" 
    Vintage:
    1996 
    Spray processor, 8" | (6) Canisters | Autofill option | Full option with O3 | 1996 vintage.
  • FSI: MERCURY MP

    Details
    ID#:
    9078293
    Category:
    Photoresist
    Wafer Size:
    8" 
    Vintage:
    1997 
    Spray processor, 8" | (6) Canisters | Autofill option | Full option with O3 | 1997 vintage.
  • FSI: MERCURY MP

    Details
    ID#:
    9078296
    Category:
    Photoresist
    Wafer Size:
    8" 
    Vintage:
    1999 
    Spray processor, 8" | (6) Canisters | H2SO4, HF, NH4OH, H2O2, HCL | Autofill option | Full option with O3 | 1999 vintage.
  • FSI: MERCURY MP

    Details
    ID#:
    9078297
    Category:
    Photoresist
    Wafer Size:
    8" 
    Vintage:
    1999 
    Spray processor, 8" | (6) Canisters | H2SO4, HF, NH4OH, H2O2, HCL | Autofill option | Full option with O3 | 1999 vintage.
  • FSI: MERCURY MP

    Details
    ID#:
    9080744
    Category:
    Photoresist
    Spray processors, 8" | Post CMP | HNO3, H2O2, HF, HN4OH | 1995 vintage.
  • FSI: MERCURY MP

    Details
    ID#:
    9080748
    Category:
    Photoresist
    Wafer Size:
    8" 
    Vintage:
    1996 
    Spray processors, 8" | PR strip | H2O4, H2O2, HF, HN4OH | 1996 vintage.
  • FSI: MERCURY MP

    Details
    ID#:
    9080742
    Category:
    Photoresist
    Spray processors, 8" | APM, NH4OH, H2O2 | 1993 vintage.
  • FSI: MERCURY MP

    Details
    ID#:
    9078302
    Category:
    Photoresist
    Wafer Size:
    8" 
    Vintage:
    2000 
    Spray processor, 8" | H2SO4, HF, NH4OH, H2O2, HCL | 2000 vintage.
  • FSI: MERCURY MP

    Details
    ID#:
    9078298
    Category:
    Photoresist
    Wafer Size:
    8" 
    Vintage:
    2000 
    Spray processor, 8" | (6) Canisters | Autofill option | Full option with O3 | 2000 vintage.
  • FSI: MERCURY MP

    Details
    ID#:
    9078299
    Category:
    Photoresist
    Wafer Size:
    8" 
    Vintage:
    2000 
    Spray processors, 8" | (6) Canisters | Autofill Option | 2000 vintage.
  • FSI: MERCURY MP

    Details
    ID#:
    9078300
    Category:
    Photoresist
    Wafer Size:
    8" 
    Vintage:
    2001 
    Spray processor, 8" | (4) Canisters | Autofill Option wo O3 | 2001 vintage.
  • FSI: MERCURY MP

    Details
    ID#:
    9078283
    Category:
    Photoresist
    Wafer Size:
    8" 
    Vintage:
    2000 
    Spray processor, 8" | (6) Canisters | Autofill Option wo O3 | 2000 vintage.
  • FSI: MERCURY MP

    Details
    ID#:
    9080749
    Category:
    Photoresist
    Spray processors, 8" | Spray wet clean | H2O4, H2O2, NH4OH | 1996 vintage.
  • FSI: MERCURY MP

    Details
    ID#:
    188826
    Category:
    Photoresist
    Wafer Size:
    6" 
    Spray processor, 6" | Configured for (4) chemicals | (3) Drains | 6" turntable | Booster pump | H2SO4 chemical heater | Helios 52 DI water heater.
  • FSI: MERCURY MP

    Details
    ID#:
    9042063
    Category:
    Photoresist
    Spray processor, 8".
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