FSI MERCURY Products

  • FSI: MERCURY

    Details
    ID#:
    9045478
    Category:
    Photoresist
    Spray processor, 8" | Software: Windows | Non-SMIF | Wafer OF type: flatzone | Y2K completion: yes | 2001 vintage.
  • FSI: MERCURY

    Details
    ID#:
    9030479
    Category:
    Photoresist
    Metal etch system, 8" | De-installed.
  • FSI: MERCURY MP

    Details
    ID#:
    188826
    Category:
    Photoresist
    Wafer Size:
    6" 
    Spray processor, 6" | Configured for (4) chemicals | (3) Drains | 6" turntable | Booster pump | H2SO4 chemical heater | Helios 52 DI water heater.
  • FSI: MERCURY

    Details
    ID#:
    9045477
    Category:
    Photoresist
    Wafer Size:
    8" 
    Vintage:
    2001 
    Spray processor, 8" | Software: Windows | Non-SMIF | Wafer OF type: flatzone | Y2K completion: yes | 2001 vintage.
  • FSI: MERCURY MP

    Details
    ID#:
    9015541
    Category:
    Photoresist
    Spray processor.
  • FSI: MERCURY MP

    Details
    ID#:
    9042063
    Category:
    Photoresist
    Spray processor, 8".
  • FSI: MERCURY

    Details
    ID#:
    9036942
    Category:
    Photoresist
    Spray processor.
  • FSI: MERCURY

    Details
    ID#:
    9037636
    Category:
    Photoresist
    Spray processor, 8" | 8" SMIF | 208 V, 40 A, 1 Ph | Powered down | 1996 vintage.
  • FSI: MERCURY

    Details
    ID#:
    9038965
    Category:
    Spare Parts
    Controlling consoles | | Includes: | Controlling computer | Touch panel | Valve block with cards | EP regulators | | LC4 unit not included | Currently in a plastic cabinet.
  • FSI: MERCURY MP

    Details
    ID#:
    9040438
    Category:
    Photoresist
    Spray processor / acid etching system, 8" | 1996 vintage.
  • FSI: MERCURY OC

    Details
    ID#:
    9015074
    Category:
    Photoresist
    Vintage:
    1994 
    Spray processor | 5-chemical | Side bowl spray post | (2) Drains | PVDF 8" table | 1994 vintage.
  • FSI: -

    Details
    ID#:
    162221
    Category:
    Photoresist
    Wafer Size:
    6" 
    4-position PFA turntable, 6" | Originally used in a FSI Mercury MP | Used in SC1 and SC2 processes | Capable of handling high profile 6" cassettes (such as A194-60M) | No O-rings | Includes spray nozzles | Removed from tools that were upgraded to 8" | De-installed in 2005.
  • FSI: ChemFill 1510 HF

    Details
    ID#:
    155024
    Category:
    Photoresist
    Chemical dispense module, hydroflorine | Flushed and decontaminated.
  • FSI: F-252U

    Details
    ID#:
    9015967
    Category:
    Spare Parts
    Spare part.
  • FSI: Spare Parts

    Details
    ID#:
    9016334
    Category:
    Spare Parts
    Lot of spare parts: | | 290009-200 Rev C CPU board | 290017-200 Rev A Saturn I/O board | 290020-200 Rev B printed circuit board | 290022-200 Rev C Saturn flow control board (Qty 6) | 290024-400 Rev B Saturn backplane PC board | 290051-200 Rev A Saturn memory board | 290055-200 Rev C Saturn CPU board | 290031-200 Rev A Saturn interface board | 2001-001 Saturn valve board (Qty 5) | 209104-200 interface board (Qty 2) | 290023-200 Rev A Saturn numeric key pad (Qty 6) | 290028-400 Rev F Saturn maintenance panel | 290033-200 Rev B Saturn canister interface board | 290034-200 Rev D Saturn power supply | 290053-200 Rev A Terminal board | 290054-200 Rev A Saturn terminal board | 290082-200 Rev A Saturn board | 29N037-200 printed circuit board | 300888-001 air cylinder | 902070-001A Saturn program loader | F-252U Saturn power transformer | 4625690-0001 teflon bowl liner.
  • FSI: 902070-001A

    Details
    ID#:
    9015966
    Category:
    Spare Parts
    Spare part.
  • FSI: TITAN MP

    Details
    ID#:
    98285
    Category:
    Photoresist
    Wafer Size:
    4" 
    Acid spray processor | Turntable for 4" | Upgrade to 6" possible | Chemicals: H2SO4, H202, HCl, NH4OH, HF | (Qty 2) drain | (Qty 2) canister console.
  • FSI: ChemFill 1510 H2O2

    Details
    ID#:
    155027
    Category:
    Photoresist
    Vintage:
    2001 
    Chemical dispense module, dual tank | Hydrogen peroxide | Utilities requirements: 110V | 2001 vintage.
  • FSI: 290053-200 Rev A

    Details
    ID#:
    9015963
    Category:
    Spare Parts
    Printed circuit board.
  • FSI: 290054-200 Rev A

    Details
    ID#:
    9015964
    Category:
    Spare Parts
    Printed circuit board.
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