FSI MERCURY Products

  • FSI: MERCURY MP

    Details
    ID#:
    9041875
    Category:
    Photoresist
    Spray processor, 8" | FFU (Filter fan unit) | | CHEMICAL SYSTEM: (consisting of flow pick-up, filter, canister, burst disk) | (2) Chemical Inouls | NH4OH: flow range 100 - 300 cc/min, PN 915 768-202 | HCI: flow range 100 - 300 cc/min, PN 915 768-100 | 10:1 HF: flow range 1200 - 1500 cc/min, PN 915 788-262 | 10:1 HF: flow range 30 - 300 cc/min, PN 917 454-260 | H2SO4: flow range 600 - 800 cc/min, PN 915 768-060 | H202: flow range 100 - 300 cc/min, PN 915 768-090 | | Dual canister valving (for 3 Position Cabinet) | PN 911 647-001 | | Auxillary Flow allows to feed two flow controlled units from one supply line | PN (to be determined) | | DI H2O mix function hot/cold | Flow range 1500-2000 cc/min | PN 615 788-002 | | HF Last Process Valving option | PN 904 331-003 | | Flow switch option for N2 (Atomizer) | PN 910 224-101 | | Drain valve assembly (PVDF)— 4 Drains | PN 903 887-204 | | Drain Cooling | Provides a special P-trap for the normally open drain which includes an internal coil of Teflon tubing for cooling of the drain effluent from a customer supplied 'chilled' waterline. | PN 907 174.003 | | Dual exhaust option | PN 910 213-101 | | CANISTER CONSOLES | (2) Canister consoles to accommodate each three chemical tanks; right/left hand hinge | PN 906 051-316 | | Remote canister console option - 15m | PN 910 226-050 | | Vertical lift kit: | | Vertical lift kit (5 chemicals) - This assembly provides an auxiliary pressure regulator to isolate H2SO4 (viscous) canister pressure and inline check valves for holding chemical in the vertical column and prevent canister backfilling when canisters are depressurized. | PN 904 836-005 (H2SO4 lower level) | | Component rinse valving - 6 Chemicals | PN 916 643-006 | | Pre-sprayport chemical sampling | Provides a common (all chemical) sampling port prior to the Mercury spraypost | PN 906 538-002 | | Autofilling valving for automatic refill of the canisters | From a central supply, for 6 chemicals | PN 906 056-306 | | Turntables | Assembly PFA turntable | Replaced by 8" turntable | | DI Heater | Model Helios 52 DI water heater | 415 V, 50 Hz, 3 Phase | PN 910 216-005 | | IR - All chemical heater | PN 912 945-102 | | Booster pump | Can be used independently of the Helios 52 | PN 910-221-004 | | Consumables kit | PN 916 148-001 | | Air handling and Mercury modification kit | Class capability 1.0 at 1.0 micron inclusive of fans, internal lightings and anti-stativ grids | PN (to be determined) | | 2000 vintage.
  • FSI: MERCURY MP

    Details
    ID#:
    9015541
    Category:
    Photoresist
    Spray processor.
  • FSI: MERCURY

    Details
    ID#:
    9030479
    Category:
    Photoresist
    Metal etch system, 8" | De-installed.
  • FSI: MERCURY MP

    Details
    ID#:
    188826
    Category:
    Photoresist
    Wafer Size:
    6" 
    Spray processor, 6" | Configured for (4) chemicals | (3) Drains | 6" turntable | Booster pump | H2SO4 chemical heater | Helios 52 DI water heater.
  • FSI: MERCURY

    Details
    ID#:
    9045477
    Category:
    Photoresist
    Wafer Size:
    8" 
    Vintage:
    2001 
    Spray processor, 8" | Software: Windows | Non-SMIF | Wafer OF type: flatzone | Y2K completion: yes | 2001 vintage.
  • FSI: MERCURY MP

    Details
    ID#:
    9042063
    Category:
    Photoresist
    Spray processor, 8".
  • FSI: MERCURY

    Details
    ID#:
    9045478
    Category:
    Photoresist
    Spray processor, 8" | Software: Windows | Non-SMIF | Wafer OF type: flatzone | Y2K completion: yes | 2001 vintage.
  • FSI: MERCURY

    Details
    ID#:
    9036942
    Category:
    Photoresist
    Spray processor.
  • FSI: MERCURY

    Details
    ID#:
    9037636
    Category:
    Photoresist
    Spray processor, 8" | 8" SMIF | 208 V, 40 A, 1 Ph | Powered down | 1996 vintage.
  • FSI: MERCURY

    Details
    ID#:
    9038965
    Category:
    Spare Parts
    Controlling consoles | | Includes: | Controlling computer | Touch panel | Valve block with cards | EP regulators | | LC4 unit not included | Currently in a plastic cabinet.
  • FSI: MERCURY MP

    Details
    ID#:
    9040438
    Category:
    Photoresist
    Spray processor / acid etching system, 8" | 1996 vintage.
  • FSI: MERCURY OC

    Details
    ID#:
    9015074
    Category:
    Photoresist
    Vintage:
    1994 
    Spray processor | 5-chemical | Side bowl spray post | (2) Drains | PVDF 8" table | 1994 vintage.
  • FSI: -

    Details
    ID#:
    162221
    Category:
    Photoresist
    Wafer Size:
    6" 
    4-position PFA turntable, 6" | Originally used in a FSI Mercury MP | Used in SC1 and SC2 processes | Capable of handling high profile 6" cassettes (such as A194-60M) | No O-rings | Includes spray nozzles | Removed from tools that were upgraded to 8" | De-installed in 2005.
  • FSI: 902070-001A

    Details
    ID#:
    9015966
    Category:
    Spare Parts
    Spare part.
  • FSI: F-252U

    Details
    ID#:
    9015967
    Category:
    Spare Parts
    Spare part.
  • FSI: Spare Parts

    Details
    ID#:
    9016334
    Category:
    Spare Parts
    Lot of spare parts: | | 290009-200 Rev C CPU board | 290017-200 Rev A Saturn I/O board | 290020-200 Rev B printed circuit board | 290022-200 Rev C Saturn flow control board (Qty 6) | 290024-400 Rev B Saturn backplane PC board | 290051-200 Rev A Saturn memory board | 290055-200 Rev C Saturn CPU board | 290031-200 Rev A Saturn interface board | 2001-001 Saturn valve board (Qty 5) | 209104-200 interface board (Qty 2) | 290023-200 Rev A Saturn numeric key pad (Qty 6) | 290028-400 Rev F Saturn maintenance panel | 290033-200 Rev B Saturn canister interface board | 290034-200 Rev D Saturn power supply | 290053-200 Rev A Terminal board | 290054-200 Rev A Saturn terminal board | 290082-200 Rev A Saturn board | 29N037-200 printed circuit board | 300888-001 air cylinder | 902070-001A Saturn program loader | F-252U Saturn power transformer | 4625690-0001 teflon bowl liner.
  • FSI: 290054-200 Rev A

    Details
    ID#:
    9015964
    Category:
    Spare Parts
    Printed circuit board.
  • FSI: Phoenix

    Details
    ID#:
    92957
    Category:
    Photoresist
    Spin rinser, 6", desk top unit.
  • FSI: ChemFill 1510 H2O2

    Details
    ID#:
    155027
    Category:
    Photoresist
    Vintage:
    2001 
    Chemical dispense module, dual tank | Hydrogen peroxide | Utilities requirements: 110V | 2001 vintage.
  • FSI: 290033-200 Rev B

    Details
    ID#:
    9015959
    Category:
    Spare Parts
    Printed circuit board.
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