FSI MERCURY Products

  • FSI: MERCURY OC

    Details
    ID#:
    9015074
    Category:
    Photoresist
    Vintage:
    1994 
    Spray processor | 5-chemical | Side bowl spray post | (2) Drains | PVDF 8" table | 1994 vintage.
  • FSI: MERCURY MP

    Details
    ID#:
    9042063
    Category:
    Photoresist
    Spray processor, 8".
  • FSI: MERCURY MP

    Details
    ID#:
    9015541
    Category:
    Photoresist
    Spray processor.
  • FSI: MERCURY MP

    Details
    ID#:
    9061678
    Category:
    Photoresist
    Spray processor | M/N: 903776-001 | 120 V, 60 Hz, Single phase, 20 Amp | 1994 vintage.
  • FSI: MERCURY

    Details
    ID#:
    9030479
    Category:
    Photoresist
    Metal etch system, 8" | De-installed.
  • FSI: MERCURY

    Details
    ID#:
    9036942
    Category:
    Photoresist
    Spray processor.
  • FSI: MERCURY

    Details
    ID#:
    9038965
    Category:
    Spare Parts
    Controlling consoles | | Includes: | Controlling computer | Touch panel | Valve block with cards | EP regulators | | LC4 unit not included | Currently in a plastic cabinet.
  • FSI: MERCURY MP

    Details
    ID#:
    9059227
    Category:
    Photoresist
    Spray processor, 6" | | Failed: | Heraeus heater | Controller | | 1995 vintage.
  • FSI: MERCURY MP

    Details
    ID#:
    9040438
    Category:
    Photoresist
    Spray processor / acid etching system, 8" | 1996 vintage.
  • FSI: MERCURY

    Details
    ID#:
    9065484
    Category:
    Photoresist
    Wafer Size:
    6" 
    Material Handling System, 6" | Electrical cabinet | Staubli Electrical Control Cabinet.
  • FSI: MERCURY MP

    Details
    ID#:
    9064931
    Category:
    Photoresist
    Wafer Size:
    8" 
    Vintage:
    1996 
    Spray processor, 8", 1996 vintage.
  • FSI: MERCURY

    Details
    ID#:
    9065481
    Category:
    Photoresist
    Spray processors | Currently in production | 1993-1996 vintages.
  • FSI: MERCURY

    Details
    ID#:
    9062911
    Category:
    Spare Parts
    Vintage:
    2000 
    Dual booster pump | 230/240 V, 50 Hz, SIngle phase, 7 Amps | 2000 vintage.
  • FSI: MERCURY MP

    Details
    ID#:
    188826
    Category:
    Photoresist
    Wafer Size:
    6" 
    Spray processor, 6" | Configured for (4) chemicals | (3) Drains | 6" turntable | Booster pump | H2SO4 chemical heater | Helios 52 DI water heater.
  • FSI: -

    Details
    ID#:
    162221
    Category:
    Photoresist
    Wafer Size:
    6" 
    4-position PFA turntable, 6" | Originally used in a FSI Mercury MP | Used in SC1 and SC2 processes | Capable of handling high profile 6" cassettes (such as A194-60M) | No O-rings | Includes spray nozzles | Removed from tools that were upgraded to 8" | De-installed in 2005.
  • FSI: 290053-200 Rev A

    Details
    ID#:
    9015963
    Category:
    Spare Parts
    Printed circuit board.
  • FSI: 290033-200 Rev B

    Details
    ID#:
    9015959
    Category:
    Spare Parts
    Printed circuit board.
  • FSI: 290054-200 Rev A

    Details
    ID#:
    9015964
    Category:
    Spare Parts
    Printed circuit board.
  • FSI: 290028-400 Rev F

    Details
    ID#:
    9015957
    Category:
    Spare Parts
    Spare part.
  • FSI: 290023-200 Rev A

    Details
    ID#:
    9015956
    Category:
    Spare Parts
    Printed circuit board.
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