KARL SUSS ACS200 Products

  • KARL SUSS: ACS200

    Details
    ID#:
    9002986
    Category:
    Photoresist
    Coater / Developer | Dual Cassette | | Configuration: | 1) Coat with 3 dispenses | (1) Develop | (1) Cool | (1) Vaper Prime | (4) Hot plates | 208V, 60Hz.
  • KARL SUSS: PM5

    Details
    ID#:
    9048235
    Category:
    Probers
    Analytical probe station | Temptronic TPO315B-TS-2 Temperature Controller | 6" Temptronic Chuck | Mitutoyo 378-134-4 Trinocular Microscope | (4) Mitutoyo Objectives | M Plan Apo SL50 / SL 50x | M Plan Apo 20x | M Plan Apo 2x | M Plan Apo 10x | (2) Mitutoyo 10x/24 WF Eyepieces | Princeton MicroMax RTE/CCD-1317-K/1 Camera with Controller | (4) Karl Suss Probe Heads | Mitutoyo 378-664 Light Source | Cables.
  • KARL SUSS: PM8

    Details
    ID#:
    9052222
    Category:
    Probers
    Analytical prober | Temptronic chuck: 6" with mini-chamber and Karl Suss Air Dryer | Mitutoyo Microscope: | WF10x/24 Eye Pieces | Objectives: M Plan APO x2, 10, 20 | LampLink Illuminator (fiber cable not included) | Anti-Vibration Isolation Pillars | Power Supply: NetzGerat EA-3008/24.
  • KARL SUSS: MA 6

    Details
    ID#:
    190401
    Category:
    Mask Aligners
    Wafer Size:
    6" 
    Mask aligner, 6" | Configured for Top and Backside Alignment (BSA) | Bond Align (BA6) option installed (additional tooling required to align wafers) | Exposure modes: hard, soft, vacuum, and proximity contact | Lamphouse: 1000 W | Microscope: Karl Suss M334 microscope | CCD camera | Objectives: 5x / 10x, (2 sets) | UV400 optics (for 365 nm and 405 nm exposure) | Karl Suss CIC 1200 power supply | Vibration isolation table | Includes vacuum chuck, mask holder, operations manual | System power: 230 V, 50/60 Hz.
  • KARL SUSS: SB 6

    Details
    ID#:
    9039822
    Category:
    Bonders
    Vintage:
    2001 
    Substrate bonder, 4" | Can be configured up to 6" | Manual loading/unloading of previously aligned wafer in SUSS BA6 using the SUSS transport fixture | Software: automatic process data recording | Motorized Z axis | Chamber door with flange for automatic lid, class 1 cleanroom compatible | Overpressure in chamber to avoid contamination during load/unload | Adaptation for hot chuck A-150 | Transport plate A-150 for loading sledge | | Vacuum: | Membrane pump: 30 l/min | Turbo molecular pump: Varian V250D | Pump time: <6 min from 1000 to 1x10-4 mbar in clean chamber | Purge time: <1 min from 0 to 1 bar | | Hot chuck, SB6/W-150: | High vacuum bond chuck from <50 to 550 ºC with resistive heater and active air cooling | Hot chuck 150mm for fixture size A-150 | Flatness 20 µm at 500 ºC | | Temperature control +/- 5 deg, programmable temperature ramps | Temperature uniformity +/- 3% | Heating time 130-400 ºC 12 min | Cooling time 400-200 ºC 14 min. | | Sandwich plate for hot chuck, SB6/W-100/A-150/90º | Universal bond tool, SB6II/P/E-AREA-C2/HEAT/W-150: anodic and thermo-compression-bonding of wafers W-100-150 and chips S-40-100, stack thickness 0,4mm-6mm | Spring loaded center bend pin: 20-50N, for keeping high alignment accuracy during heat-up | Heater: up to 500ºC | Pressure plate F. Uni tool, SB6/SST/W-100/A-150/P-8 | Anodic bond controller: 2KV/ 10 mA: programmable voltage, polarity, current limit | | Stored in cleanroom | 2001 vintage.
  • KARL SUSS: MA-150 RSH

    Details
    ID#:
    76513
    Category:
    Mask Aligners
    Vintage:
    2003 
    Proximity mask aligner | Cassette to cassette | Double side exposure | Top / bottom side alignment | Wafer handling: | Cybeq-System: Robot Model 6100 | Pre-Alignment Model 2850 | Topside Microscope: DVM6 with motorized X-Axis | Bottomside Microscope 0103L-0104R | Lamp Power Supply: CIC (1000W) | PC Type: Digital 862WW/KA522ALSCV | Light Source: UV 400 HP | Light Intensity Sensor: 365nm, 405nm | Mask Holder opening: 6"x6" | Mask Size: 6"x6" | Wafer Chucks: 200 125 35 Chuck MA150RH/ML/CONT/W-150RH/ML | Software Version: 3.2 | Cassette Station 1: Wafer Cassette EMPAK | Cassette Station 2: Wafer Cassette EMPAK | Cassette Station 3: Mask Cassette SUSS TYPE | Cassette Station 4: Not Used | Includes: | Genmark Robot, Centering Station, Priming Oven, Gyrset Spinner with three photoresist | Lamp Type 1000W (UV400HP) | Exposed Area: 6" | CE Marked | 2003 vintage.
  • KARL SUSS: MJB-3 IR

    Details
    ID#:
    9041578
    Category:
    Mask Aligners
    Mask aligner | Backside and Topside Alignment Capabilities | Scanning backside alignment is accomplished using an IR camera which detects infrared light transmitted through an IR transparent chuck, as well as the substrate and mask being aligned | Alignment microscope uses 5X, 10X and 20X objective lenses for backside or topside alignment | For topside alignment the eyepieces are 10X | Exposure source: 350W Hg lamp powered by a Suss Model CIC 500 | System incorporates UV-400 optics to transfer the energy to the substrate | Substrate may be exposed in soft or hard contact with both forms of alignment | Topside alignment vacuum contact (high precision HP) is available.
  • KARL SUSS: ACS 200 HCV

    Details
    ID#:
    9056245
    Category:
    Spare Parts
    Temperature stack module | HCV unit 6 slot capacity with chiller and pump integration | (1) standard cool plate for SUSS ACS200 | (3) standard hot plates for SUSS ACS200 | Only 2 chill plates available.
  • KARL SUSS: PA 200

    Details
    ID#:
    55009
    Category:
    Probers
    Vintage:
    1995 
    Semiautomatic prober | | Specifications: | Chuck: 8", ambient, configurable from 1" to 8" | Black box | Motorized computer controls | Emission microscope system | Defective regions emit light, visible using highly intensified cameras | HYPERVISION Visionary 2000 enclosure mounted on vibration table | HYPERVISION TCI-350-Y-37 camera | HYPERVISION TCI-350 camera controller / cooler | KARL SUSS PA200PB prober controller, 110V, 44VA, 1995 vintage | MICRO G 63-561 vibration table | Filters: GIF, ND2 | | OLYMPUS microscope | Lenses: 20x, 50x, 100x extensions | | OLYMPUS Hyper Lens: | OM-System Zuiko | Auto-S | 50mm | 1:1.2 | | NIKON illuminator | | HEWLETT-PACKARD 6624A power supply | Output channel 1: 0-7V/0-5A or 0-20V/0-2A | Output channel 2: 0-7V/0-5A or 0-20V/0-2A | Output channel 3: 0-20V/0-2A or 0-50V/0-0.8A | Output channel 4: 0-20V/0-2A or 0-50V/0-0.8A | GPIB communication | | CE marked | Power requirements: 110V, 400VA, 60Hz | 1995 vintage.
  • KARL SUSS: MA-200 CC

    Details
    ID#:
    9014984
    Category:
    Mask Aligners
    Wafer Size:
    8" 
    Mask aligner exposure system, 8" notch only | Capable of working with wafer masks up to 9" x 9" | Automatic mask aligner | Configured for top side alignment | Ergonomic cassette plateforms | 1000 W lamp house | Lamp power supply unit CIC1000 LH1000 | UV400 Optic (for 365 nm and 405 nm) | Lamp adapter LH1000/HBO MA8/MA200 | Suss 2-channel light sensor 365/405 nm | AL3000 auto alignment system | DVM8 microscope with motorized objective movement with field expanders | Objective 20x Olympus UMPL FL 20X - working distance 12 mm | XRS pre aligner | Large clear field proximity mask holder for 9" corner marks, with 8" exposure area | 8" proximity chuck.
  • KARL SUSS: MA-200

    Details
    ID#:
    9016061
    Category:
    Mask Aligners
    Mask aligner, 8" | UV400/cont/W-200 optics | 365/405 dual range sensor | MA200 Wafer Chuck (200mm) | Mask Holder with Guard | DVM8 with Sony cameras-machine level | (2) L25X Objective | Field Expanders | SUSS AL3000 Auto Align system with Rosie.
  • KARL SUSS: PA 150

    Details
    ID#:
    9043155
    Category:
    Probers
    Prober, 8" | Vacuum chuck | | Microscope: | Mitutoyo FS+60 | M Plan APO 10x, 20x, 5L100X | 10x/24 eyepieces | Sony DXC-107A video camera | | Suss power supply | Joystick controller | Integrated vacuum manifold.
  • KARL SUSS: MA 45

    Details
    ID#:
    9054194
    Category:
    Mask Aligners
    Aligner | Currently set for 2"x 2" substrates | Capable for substrates or wafers up to 4.5" x 5" area | 350 Watt | Suss Splitfield optics with Leitz 6.5x objectives.
  • KARL SUSS: MA 8 / BA 600

    Details
    ID#:
    9033742
    Category:
    Mask Aligners
    Mask aligner | Configured for Topside and Backside Alignment (BSA) | Suss DVM8 Microscope (Dual Video Microscope) | Objectives: 5x, 10x | Power: 230 V, 50/60 Hz | UV400 optics (for 365 nm and 405 nm exposure) | Suss CIC 1000 power supply | Capable of hard, soft, vacuum, and proximity contact | 1000 W lamphouse | Anti-vibration table | Vacuum chuck: (1) chuck included | Mask holder: (1) mask holder included | Operations manual and documentation.
  • KARL SUSS: PM8

    Details
    ID#:
    9030666
    Category:
    Probers
    Probe station | With video and laser capabilities | Picoprobe tips | Micromanipulator probe tips | Picoprobe arms | Probe power units | Suss PH150 PH120 manipulators | Ablation chuck & platon fixture | Other manipulators | PM8 unit A video cam | Photonic Model 2205 LEP LTD 6-12V power supply | PM8 unit A power supply | PM8 unit B lenses & eye pieces | PM8 unit B MicroPoint Mod 2204 | PM8 unit B power supply | LSI laser VSL-337 & pulse gen mod 337969 | PM8 unit B Fostec light pn 20520 | Spectra Physics Laser Model 337201-00 | 8 inch wafer probe chuck | PM8 shipping hardware | Manuals & care kit | Micro-manipulators available | Currently disassembled | 2003 vintage.
  • KEM / KOKUSAI: MKS-500

    Details
    ID#:
    142859
    Category:
    Lab Equipment And A...
    Karl Fischer moisture titration unit, 2005 vintage.
  • Various: Lot

    Details
    ID#:
    194356
    Category:
    Spare Parts
    HPCVD Equipment | Qty Description | (1) PlatForm Module-Basic,HPCVD | (2) CVD Gas Box Assembly, BPSG | (3) LIQUID AUTO REFILL SYSTEM (TEB) | (2) LIQUID AUTO REFILL SYSTEM (TEPO) | (7) Indexer Feedthru, HPCVD | (7) Endpoint Detector(SiF4),with RS232 Funct | (11) O-ring W=0.275" ID=46.46" Chemraz 629 | (17) Ablock regulator, 0-60psig, 3p | (1) ASTRONex 6 LITER NF3; | (19) 021 Gate Al Vulcanized G67P Seal 50X336 | (2) Dry Pump,A100P; Pump | (1) Chiller,HX300 Semi | (7) Stage Valve Heater,208V 105 Degree C,LTA | (6) Valve,NW 100 Single Stage,MF100 Inline | (9) Driver,Motor Controller,S30661 | (14) Hi-Temp DI canister kit / resin | (29) Filter,4m/4m,PTFE,0.003u,3SLM | (7) Kit ,Throttle Valve Heater (55-0770) | (3) Cylinder,Rectangular Valve,VAT253778 | (15) High Flow Gas Regulator,20PSI,SST316 | (11) Xdcr-LDM,890A,100psia,1/4male | (8) 2 X TO CVD (R)HOSE 3/4" 22M | (3) SCR Power Controller | (36) Seal,Centering Ring ASSY NW100,Al/Karlez | (30) O-ring AS568A-346 Kalrez #8085 | (7) vlv,3p,mblk,2f/2f/2f,nc/nc,fuj | (2) O-RING,W=0.210'',ID=49.96'',CHEMRAZ629 | (1) MV,TEB,MV-1142-PV-33,3g/min | (27) CABLE,POWER,HEATER,HPCVD | (6) VAC Angle Valve XLD-40-X1043 | (34) Seal,Centering Ring ASSY NW16,Al/Karlez | (20) Flow Switch,3-300cm/s,G1/2,Liquid,PNP | (1) Endpoint Detector(SiF4),OPTI-Sense 5000 | (32) O-ring AS568A-340 Kalrez #8085 | (18) Flow Sensor,SI1000 W/ Cable&Adapter,PNP | (17) ASSY,FLOW SENSOR,HPCVD | (6) Smooth Venting Valve 1/4''F-VCR | (3) MFC1179A,2000SCCM 1/4VCR,N2 DeviceNet | (3) Heater 4.0,T-VLV,2AP1 | (3) 385 VAC Gauge,DeviceNet,1/4VCR | (4) H X TO CVD (S)HOSE 3/4" 22M | (13) Filter,8m/8m,PTFE,0.003u | (2) REC Door_L V-Type 50X336,Al AAZ2 | (40) Flow Restr,1/4",SST,7SLM,OS 0.018"Dia | (2) PID PRESSURE CONTROLLER | (11) CV Angel Valve KF16,Normally closed | (2) LFM, TEPO, 1g/min, STEC | (12) O-RING AS 568A-272 Perlast G67P | (5) Monoblock, NC/NC, 1/8"VCR M/F/ | (1) Mass Flow Metet w/ Heater,N2,20SLM | (9) Pressure Switch,1000T F/S,650T TRIP | (182) "SCRW,CLMP,NR,M8x20L,SST304,MSUM HFUB8-2 | (6) AC Angle Valve XLA-40-F911 | (17) Filter,4m/4m,PTFE,0.003u,30SLM | (13) Seal Kits for 653B F-CUP Flapper | (44) O-ring AS568A-230 Kalrez #8002UP | (3) 275 VAC Gauge,DeviceNet,1/4VCR | (3) Pump,IPUP A100,Hand Held Display | (16) O-ring AS568A-251 Kalrez #8085 | (10) O-ring AS568A-350 Kalrez #8085 | (4) MINI-CONVENTRON Gange,1/4 VCR Famale | (25) Flow Restr,1/4",SST,10SLM,OS 0.029"Dia | (64) O-ring AS568A-213 Kalrez #8002UP | (33) O-ring AS568A-226 Kalrez #8085 | (27) O-ring AS568A-230 Kalrez #8085 | (23) O-ring AS568A-326 Kalrez #8002UP | (4) Right Angle Section Heater,Dia 6.35mm | (36) O-ring AS568A-314 Kalrez #8085 | (5) 1/4 turn,loto,2 port straight | (15) Ball Valve,Swagelok 3/4'',SST316 | (5) HEATER FOR 1/4" HORIZONTAL,SERIES | (53) O-ring AS568A-214 Kalrez #8085 | (8) Quick Connector,Body,Tube Fitting,1/2" | (9) O-ring AS568A-243 Kalrez 4079 | (13) Flow Restr,OS 0.0155"Dia.SS-4-VCR-6-DM | (6) AX7680 SERIES AC CONNECTOR | (16) O-ring AS568A-320 Kalrez #8085 | (1) Vaccum Grease,Krytox 240AC | (9) Sensor,Foup Present,LDPT | (4) GAS LINE HEATER TC CABLE, CVD | (3) CV Angel Valve KF25,Kalrez seal | (1) MFM Heater For 8455 Model, 208V, 150W | (12) O-ring AS568A-234 Kalrez #8085 | (38) O-ring AS568A-211 Kalrez #8085 | (28) O-ring AS568A-217 Kalrez #8002UP | (1) vlv,3p,mblk,2f/2f/2f,nc/no,fuj | (8) Flow Restr,OS 0.035"Dia.SS-4-VCR-6-DM | (31) O-ring AS568A-205 Kalrez #8002UP | (13) O-ring AS568A-229 Kalrez #8085 | (8) Presssure Switch,PPD3-R10N-6B-P70 | (5) Leak Detection Sensor,NPN,SUS Mount,2m | (2) HE WATER MNLD W,CHMBR FRAME,HPCVD | (138) Seal Ring NW100; Teflon | (3) HEATER JACKET, 3-WAY VALVE,GAS BOX | (6) Flow Restr,OS 0.0095"Dia.SS-4-VCR-6-DM | (5) SYSTEM MANOMETER SIGNAL CABLE,CVD | (3) O-Ring,W=0.139",ID=5.734",Kalrez 4079 | (3) SYSTEM LIQUID DELIEVERY SYSTEM SINGAL CA | (3) "CABLE ASSY,LDS SIGNAL, | HORIBA,BPSG,75FT" | (29) O-ring W=0.139" ID=0.421" Chemraz 639 | (4) QUICK CONNECTOR-COUPLER-3/4" FEMALE | (2) Valve,2P,NC,Temp Range:-10℃~150℃ | (33) STRAP FOR HEATER JACKET | (5) Flow Restr,OS 0.0130''Dia.SS-4-VCR-6-DM | (20) Time-Delay Fuse,600V,20A,0.81X2.25in | (20) Fuse,Time Delay,600V, 30A,0.81X2.25in | (30) STRAP FOR HEATER JACKET | (7) O-ring AS568A-224 Kalrez#8002UP | (12) O-ring W=0.139" ID=1.171" Chemraz 639 | (12) O-ring W=0.139" ID=0.984" Chemraz 629 | (3) CH TO O3 Kit Water Hose 1/2" (S) Blue 5M | (3) CH TO O3 Kit Water Hose 1/2" (R)Red 5M | (2) SYSTEM LIQUID DELIEVERY SYSTEM SINGAL CA | (12) O-ring W=0.139" ID=0.921" Chemraz 639 | (3) ASTRON LIFTING KIT | (4) Flow Restr,1/4",SST,5SLM,OS 0.015"Dia | (18) Photosensor, L-shaped type,5-24V,NPN | (1) Pressure Switch/Gage,Dwyer 3000MR-50MM | (2) Cartridge DEI 11''MXNED D50238 | (5) O-Ring,W=0.210" ID=29.894",Viton | (2) vlv,2p,4f/n/4f/n, nc,fuji,alp
  • HYPERVISION: V 2000

    Details
    ID#:
    149304
    Category:
    Scanning Electron M...
    Backside emission analysis microscopy system | Configuration: | Probe system: | SUSS MicroTec probe station and probe arm | Chuck: 8" | Automatic control plant | TMC anti-vibration pad | Microscope system: | Objective lens: 5x, 20x, 50x | CCD system | PC system | Power supply system | Equipment performance requirement: | Wavelength: 605 to 1060nm | Installation requirements: | Power: 220V ± 10%, 2A, 330W, 50/60Hz | GN2: 80 to 100psi | Vacuum: 0.8bar.
  • GETINGE: PACS2000

    Details
    ID#:
    9005733
    Category:
    Lab Equipment And A...
    Autoclave steam sterilizer.
  • Various: Lot

    Details
    ID#:
    193302
    Category:
    Spare Parts
    Lot of Optical spare parts: | JDS Uniphase RX3 Multichannel backreflection meter - Multimode Tester 50 and 62.5 micrometer - 4 laser sources | Melles Griot NanoTrak NTS | EFD Ultra Dispensing Tips, Part no. 51251-B 0.01X1 Red, 50 Pc each | EFD 3cc Disposable Barrel Reservoirs- molded silicone free, part no. 5109LL-B | Fiber Optic patch cord 20 meters, FSPS-6060-20 Att 0.1 to 0.65 Return Loss 40 | Fiber Optic patch cord 160 ft, SIM JPR D/E STII+3.0 &.9 - FOF-160-64H-64C-1 | Fiber Optic patch cord, 90 ft SIM JPR D/E STII+3.0 &.9 - FOF-90-64H-64C-1 | DMC Penumatic Fiber Optic Cable Cutter , 80-120 psi | Fiber Optic Connector Polisher , used in ADC plant | SMC NIR 201- N02 , NEW, Precision Regulator | SMC N2000-02-C , NEW, Micro Mist Seperator | JDS Uniphase SB Fiber optic Switch 2X8 (Dual-Common) | Schleuniger FiberStrip 7030 | Schleuniger FO3-F4-1710.D 125/250uM Coating Blade Set | Schleuniger FO3-F4-1709.D 250uM Centralizers | Schleuniger FO3-F4-1709E 400uM Centralizers | Schleuniger FO3-F4-1709B 500uM Centralizers | Schleuniger FO3-F4-1710.A 125/900uM Coating Blades | Schleuniger FO3-F4-1709.A 900uM Centralizers | Melles Griot Relative Input power | ADC Test VAM Splitter | Schleuniger 7030 Stripper and Gribber | Mini isolator station, with stage and few newport 3 axis xyz Micrometers | 1550 module tune station with Newport tools , stage and Micrometers | Pigtailed polarizers 1550 nm and 1310nm | Pigtailed polarizers 1550 nm and 1310nm | Pigtailed polarizers 1550 nm and 1310nm | Kyosemi PDE008TU new Detector, pin, 80um, InGaAs photodiode, FC/PC ferrule connector, PD Module, brand new. 780nm to 1710 nm; 0.8 A/W in 1300nm to 1600 nm; Optical return loss -45 dB; Maximum current 5 mA; Bias voltage 3-5 V; Package TO can: diameter 0.220 inch; Electrical bandwidth DC-5 GHz for item 56, and DC-1GHz for item 57 (assuming good RF electrical connections). Factory packaged. | Siecor M90 SM MM Fusion Splicer w Cleaver | Siecor Optical Fiber Fusion SET NT7L30 | SWB Microscope (Micro Enterprises Inc) | SWB Microscope (Micro Enterprises Inc) | KARL STORZ Super Circuits PC-23C | Microscop Module-Scope | Jobin Yvon Black Box | Hund Wetzlar microscope.
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