KARL SUSS ACS200 Products

  • KARL SUSS: ACS200

    Details
    ID#:
    9002986
    Category:
    Photoresist
    Coater / Developer | Dual Cassette | | Configuration: | 1) Coat with 3 dispenses | (1) Develop | (1) Cool | (1) Vaper Prime | (4) Hot plates | 208V, 60Hz.
  • KARL SUSS: PM5

    Details
    ID#:
    9048235
    Category:
    Probers
    Analytical probe station | Temptronic TPO315B-TS-2 Temperature Controller | 6" Temptronic Chuck | Mitutoyo 378-134-4 Trinocular Microscope | (4) Mitutoyo Objectives | M Plan Apo SL50 / SL 50x | M Plan Apo 20x | M Plan Apo 2x | M Plan Apo 10x | (2) Mitutoyo 10x/24 WF Eyepieces | Princeton MicroMax RTE/CCD-1317-K/1 Camera with Controller | (4) Karl Suss Probe Heads | Mitutoyo 378-664 Light Source | Cables.
  • KARL SUSS: MA 6

    Details
    ID#:
    190401
    Category:
    Mask Aligners
    Wafer Size:
    6" 
    Mask aligner, 6" | Configured for Top and Backside Alignment (BSA) | Bond Align (BA6) option installed (additional tooling required to align wafers) | Exposure modes: hard, soft, vacuum, and proximity contact | Lamphouse: 1000 W | Microscope: Karl Suss M334 microscope | CCD camera | Objectives: 5x / 10x, (2 sets) | UV400 optics (for 365 nm and 405 nm exposure) | Karl Suss CIC 1200 power supply | Vibration isolation table | Includes vacuum chuck, mask holder, operations manual | System power: 230 V, 50/60 Hz.
  • KARL SUSS: PM8

    Details
    ID#:
    9052222
    Category:
    Probers
    Analytical prober | Temptronic chuck: 6" with mini-chamber and Karl Suss Air Dryer | Mitutoyo Microscope: | WF10x/24 Eye Pieces | Objectives: M Plan APO x2, 10, 20 | LampLink Illuminator (fiber cable not included) | Anti-Vibration Isolation Pillars | Power Supply: NetzGerat EA-3008/24.
  • KARL SUSS: PA 200

    Details
    ID#:
    9058870
    Category:
    Probers
    Prober | Javalin Chromachip Camera, Model No: JE3362 | Temptronic Controller, Model No: TP03010B-2100-1 | Karl Suss Controller. Part No: PA200/300PB, Model No: 210AA074-01 | Vibration Isolation Table: -Attached Parts, Part No: 83380418 -Type: ZEV-10-T1 | Karl Suss Joystick.
  • KARL SUSS: MJB-3 IR

    Details
    ID#:
    9041578
    Category:
    Mask Aligners
    Mask aligner | Backside and Topside Alignment Capabilities | Scanning backside alignment is accomplished using an IR camera which detects infrared light transmitted through an IR transparent chuck, as well as the substrate and mask being aligned | Alignment microscope uses 5X, 10X and 20X objective lenses for backside or topside alignment | For topside alignment the eyepieces are 10X | Exposure source: 350W Hg lamp powered by a Suss Model CIC 500 | System incorporates UV-400 optics to transfer the energy to the substrate | Substrate may be exposed in soft or hard contact with both forms of alignment | Topside alignment vacuum contact (high precision HP) is available.
  • KARL SUSS: SB 6

    Details
    ID#:
    9039822
    Category:
    Bonders
    Vintage:
    2001 
    Substrate bonder, 4" | Can be configured up to 6" | Manual loading/unloading of previously aligned wafer in SUSS BA6 using the SUSS transport fixture | Software: automatic process data recording | Motorized Z axis | Chamber door with flange for automatic lid, class 1 cleanroom compatible | Overpressure in chamber to avoid contamination during load/unload | Adaptation for hot chuck A-150 | Transport plate A-150 for loading sledge | | Vacuum: | Membrane pump: 30 l/min | Turbo molecular pump: Varian V250D | Pump time: <6 min from 1000 to 1x10-4 mbar in clean chamber | Purge time: <1 min from 0 to 1 bar | | Hot chuck, SB6/W-150: | High vacuum bond chuck from <50 to 550 ºC with resistive heater and active air cooling | Hot chuck 150mm for fixture size A-150 | Flatness 20 µm at 500 ºC | | Temperature control +/- 5 deg, programmable temperature ramps | Temperature uniformity +/- 3% | Heating time 130-400 ºC 12 min | Cooling time 400-200 ºC 14 min. | | Sandwich plate for hot chuck, SB6/W-100/A-150/90º | Universal bond tool, SB6II/P/E-AREA-C2/HEAT/W-150: anodic and thermo-compression-bonding of wafers W-100-150 and chips S-40-100, stack thickness 0,4mm-6mm | Spring loaded center bend pin: 20-50N, for keeping high alignment accuracy during heat-up | Heater: up to 500ºC | Pressure plate F. Uni tool, SB6/SST/W-100/A-150/P-8 | Anodic bond controller: 2KV/ 10 mA: programmable voltage, polarity, current limit | | Stored in cleanroom | 2001 vintage.
  • KARL SUSS: PA 200

    Details
    ID#:
    55009
    Category:
    Probers
    Vintage:
    1995 
    Semiautomatic prober | | Specifications: | Chuck: 8", ambient, configurable from 1" to 8" | Black box | Motorized computer controls | Emission microscope system | Defective regions emit light, visible using highly intensified cameras | HYPERVISION Visionary 2000 enclosure mounted on vibration table | HYPERVISION TCI-350-Y-37 camera | HYPERVISION TCI-350 camera controller / cooler | KARL SUSS PA200PB prober controller, 110V, 44VA, 1995 vintage | MICRO G 63-561 vibration table | Filters: GIF, ND2 | | OLYMPUS microscope | Lenses: 20x, 50x, 100x extensions | | OLYMPUS Hyper Lens: | OM-System Zuiko | Auto-S | 50mm | 1:1.2 | | NIKON illuminator | | HEWLETT-PACKARD 6624A power supply | Output channel 1: 0-7V/0-5A or 0-20V/0-2A | Output channel 2: 0-7V/0-5A or 0-20V/0-2A | Output channel 3: 0-20V/0-2A or 0-50V/0-0.8A | Output channel 4: 0-20V/0-2A or 0-50V/0-0.8A | GPIB communication | | CE marked | Power requirements: 110V, 400VA, 60Hz | 1995 vintage.
  • KARL SUSS: MA-150 RSH

    Details
    ID#:
    76513
    Category:
    Mask Aligners
    Vintage:
    2003 
    Proximity mask aligner | Cassette to cassette | Double side exposure | Top / bottom side alignment | Wafer handling: | Cybeq-System: Robot Model 6100 | Pre-Alignment Model 2850 | Topside Microscope: DVM6 with motorized X-Axis | Bottomside Microscope 0103L-0104R | Lamp Power Supply: CIC (1000W) | PC Type: Digital 862WW/KA522ALSCV | Light Source: UV 400 HP | Light Intensity Sensor: 365nm, 405nm | Mask Holder opening: 6"x6" | Mask Size: 6"x6" | Wafer Chucks: 200 125 35 Chuck MA150RH/ML/CONT/W-150RH/ML | Software Version: 3.2 | Cassette Station 1: Wafer Cassette EMPAK | Cassette Station 2: Wafer Cassette EMPAK | Cassette Station 3: Mask Cassette SUSS TYPE | Cassette Station 4: Not Used | Includes: | Genmark Robot, Centering Station, Priming Oven, Gyrset Spinner with three photoresist | Lamp Type 1000W (UV400HP) | Exposed Area: 6" | CE Marked | 2003 vintage.
  • KARL SUSS: ACS 200 HCV

    Details
    ID#:
    9056245
    Category:
    Spare Parts
    Temperature stack module | HCV unit 6 slot capacity with chiller and pump integration | (1) standard cool plate for SUSS ACS200 | (3) standard hot plates for SUSS ACS200 | Only 2 chill plates available.
  • KARL SUSS: ACS 200

    Details
    ID#:
    9060469
    Category:
    Photoresist
    Coater / Developer Cluster System, up to 8" | Round substrates: 2" - 8" | Square substrates: 2" to 6" | Dock and Lock process modules: independent, field upgradeable | Parallel flow | GYRSET closed-bowl coating technology | Currently in cleanroom | Karl Suss Robot (Genmark GB8-MT-98070078 / Gencobot 8).
  • KARL SUSS: MA-200 CC

    Details
    ID#:
    9014984
    Category:
    Mask Aligners
    Wafer Size:
    8" 
    Mask aligner exposure system, 8" notch only | Capable of working with wafer masks up to 9" x 9" | Automatic mask aligner | Configured for top side alignment | Ergonomic cassette plateforms | 1000 W lamp house | Lamp power supply unit CIC1000 LH1000 | UV400 Optic (for 365 nm and 405 nm) | Lamp adapter LH1000/HBO MA8/MA200 | Suss 2-channel light sensor 365/405 nm | AL3000 auto alignment system | DVM8 microscope with motorized objective movement with field expanders | Objective 20x Olympus UMPL FL 20X - working distance 12 mm | XRS pre aligner | Large clear field proximity mask holder for 9" corner marks, with 8" exposure area | 8" proximity chuck.
  • KARL SUSS: PM8

    Details
    ID#:
    9030666
    Category:
    Probers
    Probe station | With video and laser capabilities | Picoprobe tips | Micromanipulator probe tips | Picoprobe arms | Probe power units | Suss PH150 PH120 manipulators | Ablation chuck & platon fixture | Other manipulators | PM8 unit A video cam | Photonic Model 2205 LEP LTD 6-12V power supply | PM8 unit A power supply | PM8 unit B lenses & eye pieces | PM8 unit B MicroPoint Mod 2204 | PM8 unit B power supply | LSI laser VSL-337 & pulse gen mod 337969 | PM8 unit B Fostec light pn 20520 | Spectra Physics Laser Model 337201-00 | 8 inch wafer probe chuck | PM8 shipping hardware | Manuals & care kit | Micro-manipulators available | Currently disassembled | 2003 vintage.
  • KARL SUSS: MA-200

    Details
    ID#:
    9016061
    Category:
    Mask Aligners
    Mask aligner, 8" | UV400/cont/W-200 optics | 365/405 dual range sensor | MA200 Wafer Chuck (200mm) | Mask Holder with Guard | DVM8 with Sony cameras-machine level | (2) L25X Objective | Field Expanders | SUSS AL3000 Auto Align system with Rosie.
  • KARL SUSS: RC 8

    Details
    ID#:
    9062706
    Category:
    Photoresist
    Spin coater, up to 8" | Wafers: up to 8" square substrates up to 6" x 6" | Chuck: RC8 Gyrset, single side | Set up for 2" chuck | Suss CT 62 Process controller.
  • KARL SUSS: MA 45

    Details
    ID#:
    9054194
    Category:
    Mask Aligners
    Aligner | Currently set for 2"x 2" substrates | Capable for substrates or wafers up to 4.5" x 5" area | 350 Watt | Suss Splitfield optics with Leitz 6.5x objectives.
  • KARL SUSS: PA 150

    Details
    ID#:
    9043155
    Category:
    Probers
    Prober, 8" | Vacuum chuck | | Microscope: | Mitutoyo FS+60 | M Plan APO 10x, 20x, 5L100X | 10x/24 eyepieces | Sony DXC-107A video camera | | Suss power supply | Joystick controller | Integrated vacuum manifold.
  • KEM / KOKUSAI: MKS-500

    Details
    ID#:
    142859
    Category:
    Lab Equipment And A...
    Karl Fischer moisture titration unit, 2005 vintage.
  • HYPERVISION: V 2000

    Details
    ID#:
    149304
    Category:
    Scanning Electron M...
    Backside emission analysis microscopy system | Configuration: | Probe system: | SUSS MicroTec probe station and probe arm | Chuck: 8" | Automatic control plant | TMC anti-vibration pad | Microscope system: | Objective lens: 5x, 20x, 50x | CCD system | PC system | Power supply system | Equipment performance requirement: | Wavelength: 605 to 1060nm | Installation requirements: | Power: 220V ± 10%, 2A, 330W, 50/60Hz | GN2: 80 to 100psi | Vacuum: 0.8bar.
  • Various: Lot

    Details
    ID#:
    9062496
    Category:
    Spare Parts
    | | | Lot of Spare parts: | Qty | P/N | Description | (2) 60-0200-1615-4 EBARA SP PARTS DIAMOND COND. DISKS 260MM | (15) 60-0200-0891-2 STRASBAUGH CMP CMP 3M Diamond Pad Conditioners | (1000) SLS-2-160 V-75 ALCATEL/COMPTECH ORING COMPTECH 2460 6 INCH 2-160 V75 | (800) SLS-2-160 S-50 ALCATEL/COMPTECH ORING 2-160 SILICONE 6" COMPTECH | (1) SH-110 X-9 PARTS SCROLL PUMP VARIAN SH-110 1 PHASE | (1) 9698973 ANELVA TURBO CONTROLLER TV301 VARIAN NAVIGATO | (1) 4113-22, REV 2E PVDI SP PARTS DIFFUSER MPS-200 PVDI 12 IN | (4) .010 IN PVD SP PARTS / DLC INDIUM FOIL PVD TARGET THERMAL INTERFACE | (1) 33322-02 SAP#100013476 GENUS ALD SP PARTS Susceptor, Graphite 150mm ALD | (1) 32353-00 sap 1000121134 GENUS ALD SP PARTS SHOWER HEAD SUPPORT 10.5" ALD | (1) SAP# 100007814 #29187-02 GENUS ALD SP PARTS Valve 22, 23 P/N 945AOPLPNCHF111VESP #45800345 132860 veriflo div | (2) 21742-00 SAP# 100005429 GENUS ALD SP PARTS Wafer Lift Bellows | (1) 32916-00 / SAP 100017372 GENUS ALD SP PARTS Heater, Left Gas Line Elbow, ALD 208V | (1) 32919-00 / SAP 100017375 GENUS ALD SP PARTS Heater, Right Gas Line Elbow, ALD 208V | (1) 35261-00 , SAP100017377 GENUS ALD SP PARTS Heater, Center Gas Line, ALD, 208V | (4) M0992-60101 MATRIX ASHER SP PARTS Chamber, Quartz , System 104 | (1) 220T0046-120 Semitool Raider Tool AU/CU Motor Schematic Drive Head, Plater | (1) 900T0272-505 Semitool Raider Tool AU/CU Chemical Box Delivery Short Stack | (1) 213T0949-03 Semitool Raider Tool AU/CU Ring Assy, 150x1.1x2.5mm | (1) 121R0001-543 NMP LIFTOFF SEAL DOOR,ALL CHEM PLATEING HEADS | (1) T73301-19 Semitool Raider Tool AU/CU Amplifer Motor Digiflex, Advanced Motion | (1) 16869-01 PUMPHEAD IWAKI BOARD PUMP CONTROL FOR MLO | (1) 16753-513 PUMPHEAD IWAKI Motor Interface Board | (5) 213T0258-529 Semitool Raider Tool AU/CU Ring Seal, 150x2.5mm, Reach Seal | (3) T61104-01 PUMPHEAD IWALI PUMP MOTOR 1/3HP EXP PROOF SPC BEARING | (1) 72068-50 BSET SP PARTS Rodless Cylinder, Door Assy. | (10) 229T0136-505 Semitool Raider Tool AU/CU Rotary Purge Assy Mercury Contact | (4) 73082-03 BSET SPARE PARTS WAFER Thermistor 2252 Ohm Hi-Temp | (4) 213T0257-509 Semitool Raider Tool AU/CU Ring Contact, 150mm | (14) 310C0091-05 PUMPHEAD IWAKI ACTUATOR ASSY 3/8, NC, Alum | (1) FP-1000 DESPATCH Network Interface, RS-232/485,FP-1000 | (1) 1007-410-01 HSALD KIT PROCESS CONTROLLER W/ADAPTER | (1) 6.60003E+11 VEECO DLC TOOL NEXUS PS-1KVDC,300MA-SL300 | (1) 5200-2470-0 VEECO DLC TOOL NEXUS PLASMA BOWL INNER V2 | (1) 660007658905 PVD SP PARTS Inner Table, 6GMR, 6", PVD | (1) 1179A-15343 VEECO DLC TOOL MASS FLOW CONTROLLER 10SCCM MKS | (2) 6200-3500-0 PVD SP PARTS 13" Anode Ring, SPVD | (5) 660007658915 PVD SP PARTS Anode Ring, 12" Target, ADD, PVD | (2) 6200-0650-0 REV.E PVD SP PARTS 6" Table, SPVD | (5) 6200-1100-1 PVD SP PARTS Anode Shield w/ inner screw holes, SPVD | (50) 521565-00 PVD SP PARTS PIN CERAMIC PVD TABLE SUPPORT C57-896 | (2) 0084a-016 CORONA Bellow Lifting Device, Corona | (2) LECKMASTER 101 MAINZ NIFE PLATING MIX TANK LECKMASTER 101 MODULE, 24vdc, JOLA | (4) KNICKELECTRO SE102 MAINZ NIFE PLATING MIX TANK Knick Electrode, Mainz Mix Tank ,SE102 | (1) 354006-TG-T RUCVD Spare Parts MICRO ION GAUGE 354006-TG-T | (1) 274006 ION MILL HARMONY MICRO ION GAUGE GP DEVICENET | (1) 354006-YE-T ION MILL HARMONY MICRO ION GAUGE GP DEVICENET | (1) 001-1984-01 ION MILL HARMONY/DLC HAND HELD TEACH BOX BROOKS | (1) 354005-YD-T CORONA, PVD,NORDIKO MICRO ION GUAGE RS-485 KF16 | (2) 275538-GQ-T RUCVD Spare Parts MINI CONVECTRON GP 275538-GQ-T | (2) 370120CF PVD SP PARTS STABIL-ION GAGE 370120CF | (2) YUA08049 / 370121 PVD SP PARTS STABIL-ION GAUGE 370121 | (3) 360120 ION BEAM Granville-Phillips Stabil-ion gauge | (3) 001-9114-01 PVD SP PARTS Brooks Mapping Laser PCB | (5) 354003-YM ION MILL HARMONY FILAMENT ION GAUGE long 354003-YM | (5) 354003-YE ION MILL HARMONY FILAMENT FOR MICRO ION GAUGE KF25 | (1) IQDP 80 WAFER PART MISC PUMP IQDP80 EDWARDS DRY | (2) TMP361-C CAT85675 WAFER PART MISC PUMP, TMP361-C with ISO 100 Flange | (1) ESDP 12 GENUS ALD SP PARTS SCROLL PUMP | (5) SND5-24-100P WAFER PART MISC Power Supply , SOLA, SND5-24-100P | (10) 100-C23KD10 VEECO DLC TOOL A. B. 3 POLE CONTROLLER ELCTR0003 | (1) Y60-2160-000 CANON STEPPER SP PARTS Piezo Unit, Z Tilt | (12) A26-07217 ANELVA FILAMENT KIT A26-07217 ANELVA | (1) 660004050910 PLASMA THERM RIE SP PARTS CLAMP V-3 RIE 6" CERAMIC TECH | (1) 28945-00 GENUS ALD SP PARTS Insulator, Bottom, Alumina ALD | (5) C22748 ION BEAM INSULATOR IBDS DEP GUN C22748 | (2) S106659 DUV SP PARTS F2 TRAP, CYMER LASER | (1) T/C WAFER MAGANNEAL OVEN SP PARTS Thermocouple Wafer 150mm | (10) 269028 MAGANNEAL OVEN SP PARTS SEAL O-RING FLUO | (2) DFS111812 PVD SP PARTS BowTie Shutter Frame Assy. | (5) DFS92412 PVD SP PARTS Inner Table, 6GMR, 6", PVD | (10) DFS100612 PVD SP PARTS Anode Ring, 12" Target, ADD, PVD | (5) DFS92412A PVD SP PARTS Inner Table Segment, 6GMR, 6", PVD | (25) DFS61808 Nexus (Veeco) NEXUS 6 INCH WAFER CLAMP RING | (10) DFS62802 ION MILL / VEECO DLC GEAR FIXTURE ROTATION 72 TOOTH | (10) DFS41211A/41211B AMERIMADE NIFE SP PARTS Spring Set, Anode Assy. (Left/Right) | (10) DFS12704A ION BEAM DEP. CATHODE SUPPORT PIN A | (10) DFS12704B ION BEAM DEP. CATHODE SUPPORT PIN B | (1) 7-39-28665 SCRUBBER PUMP IWAKI BELLOW CHEM. CABINET | (2) 5-39-01466 SCRUBBER Filter DI Water Piping | (25) 5-F4-72733 SCRUBBER TOP SLIDE BRUSH 10 PER PK | (1) TPU200 C VEECO DLC TOOL Turbo Pump TMU, 2200C Main | (1) TPH-521 PC W/ISO 100 GENUS ALD SP PARTS PUMP TURBO TPH 521 PFIEFFER | (5) SFAM-162-KF40 ADD SPARE PARTS ANGLE VALVE MANUAL W/KF40 SFAM-KF40 | (1) 6ES73411AH020AE0 Mainz Nife Plating Mix Tank Comm. Processor, CP341, RS232C | (1) C-5152-046-0001 EBARA SP PARTS Motor, Driver | (1) C-5152-049-0011 EBARA SP PARTS Motor Driver, Servo | (1) C-5114-054-0101 EBARA SP PARTS Regulator, Pressure, Pneu. | (1) C-5152-048-0011 EBARA SP PARTS Mity Servo Driver , Dresser | (1) C-5050-001-7300 EBARA SP PARTS Touch Panel , FRex200 | (1) C-5152-024-0001 EBARA SP PARTS Driver, Motor, 200w, Robot D X-Axis | (1) C-5146-042-0001 EBARA SP PARTS Power Supply, Touch Panel | (1) C-3537-614-0001 EBARA SP PARTS PLATE CHUCKING C-3537-614-0001 | (8) S-929235-02 / OLD P/N A-1300-S102-0600 EBARA SP PARTS DUAL CHEVRON GROOVED 150MM | (2) C-1124-053-0001 EBARA SP PARTS BEARING CERAMIC C-1124-053-0001 | (14) S-927047 EBARA SP PARTS BRUSH 200 FLOW THRU CORE S-927047 | (1) IXH610 VEECO DLC TOOL IXH610 EDWARDS DRY PUMP | (1) PV40EKS / C41402000 VEECO DLC TOOL EDWARDS PNEUMATIC VALVE FOR ROUGH PUMP | (16) SM0.1-1F2S WAFER PART MISC FILTER D.I. WATER .1 MICRON | (1) 4035 285 13321 FIB/FEI SP PARTS Detector , CDSEM | (1) 1000648 FIB/FEI SP PARTS FIB Strip, Certus | (2) 27541 FIB/FEI SP PARTS Detector, CDSEM Mod 50 Deg | (2) 16830 FIB/FEI SP PARTS Source, Certus (COLD) | (2) 23716 FIB/FEI SP PARTS FIB Strip, Standard, DB875 | (1) 4035 272 35971 FIB/FEI SP PARTS Extractor Assy, SW, CERTUS | (2) 24115 FIB/FEI SP PARTS Extractor Assy, Magnum, DB875 | (1) 4035 272 27891 FIB/FEI SP PARTS Reservoir, Carbon, Refill Kit | (2) 4035 272 35991 FIB/FEI SP PARTS Suppressor, SW, Certus | (4) 17135 FIB/FEI SP PARTS Source, 875, LMIS, (COLD) | (1) 4022 268 00580 FIB/FEI SP PARTS Aperture Strip CLM, Certus | (2) 4035 285 53011 FIB/FEI SP PARTS Baffle, Certus | (3) 24152 FIB/FEI SP PARTS Suppressor, Magnum, LMIS, DB875 | (1) A73001983 / XDS-35i FIB/FEI SP PARTS PUMP EDWARDS XDS-35i | (1) ANEST IWATA ISP250 B GENUS ALD SP PARTS SCROLL PUMP | (1) ANEST IWATA ISP 500C WAFER PART MISC SCROLL PUMP 3-PHASE 230V | (1) PTS06003UNIVISO160 CDSEM KLA Tri-Scroll Pump Varian, 208vac/3ph CDSEM | (1) QDP 40 ION BEAM VACUUM PUMP,EDWARDS QDP40 | (1) EDWARDS GENUS ALD SP PARTS SCROLL PUMP 3-PHASE | (1) 913943-001-RFS FSI SP PARTS CPU Assy , Bake/Chill | (1) 280320002 FSI SP PARTS Whedco Motion Controller IMC-306X-X-D-AG | (1) 294017-203 FSI SP PARTS IDI Control PCB | (2) M-UPS010AD1B-UC CANON STEPPER SP PARTS UPS, Fuji, GX 100 | (1) 0102100692 NMP LIFTOFF Flash Disc, LFD-2M-DOC, On/Low Pwr | (1) 0.020 DIA W WIRE PVD SP PARTS WIRE TUNGSTEN 0.020", 1 LB.ROLL | (50) 102189-02 ION MILL HARMONY Filament Dual PBN and ANC 0.50 | (1) 3-832776-10 HHT SP PARTS O-RING AS568A-456(W) PERFLUORO | (1) 2-819492-^B HHT SP PARTS Base Flange, Ash | (1) 3-846467-^A HHT SP PARTS Shaft, Etch Shadow Ring | (1) 1-813080-01 HHT SP PARTS GAS RING EMCP | (1) 3-832776-04 HHT SP PARTS O-RING AS568-384 PERFLUORO | (1) 2-815888-11 HHT SP PARTS SENSOR COLD CATHODE | (1) 11225-1070R-001 ION BEAM Gate Valve, Turbo Pump Chamber | (1) 3CC1-351-2300 PVD CAPACITANCE MANOMETER 356-011 INFICON | (4) 352-490 PLASMA THERM RIE SP PARTS ITR100D Filament KF25 (352-490) | (1) 1000C Iso 250/Kf40 Z660 tool Z660 Turbo Pump 1000C Iso 250/Kf40 Z660 tool | (1) TMP600 PLASMA THERM RIE SP PARTS TURBO TURBOVAC 600C 160 ISO-K WC | (1) TMH260 DN100 ISO-K CORONA TURBO PUMP TMH 260 PM P02 130 | (1) TMH 260 VEECO DLC TOOL DLC Slave Turbo Pump Pfeiffer TMH 260 SG | (2) 29215-02 GENUS ALD SP PARTS ALD Swagelok Valve 16, 17 | (1) 11020611017000 LEICA TOOL SP PARTS WAFER CHANGER with HARD STOPS | (1) 11020611056000 LEICA TOOL SP PARTS CHUCK | (1) 0316039-000 LEICA TOOL SP PARTS OPERATING PANEL | (1) 11020611017004 LEICA TOOL SP PARTS WAFERCHANGER ARM NEW STYLE | (1) 11020656026100 LEICA TOOL SP PARTS MICROVALVE / FLUORISTOR | (2) 11020611007005 LEICA TOOL SP PARTS XY-LOADER ARM | (1) 11301384035000 LEICA TOOL SP PARTS stepper motor control board smc3a | (1) 11020650014033 LEICA TOOL SP PARTS Motor Unit Nosepiece | (2) 217182 Tencor P11 Spare Parts Stylus, Green , 2.0um, 60 deg Shank | (2) 11301384804002 LEICA TOOL SP PARTS JOYSTICK WITH CABLE | (1) LP-11101 MATRIX ASHER SP PARTS Chamber, Quartz , System 104 | (1) 1007303 / T 110 PLUS MAINZ NIFE PLATING MIX TANK Schott Titronic T110 Plus Pump 115V | (1) 28511062 TA50 PLUS MAINZ NIFE PLATING MIX TANK TA50 Plus Top Unit, Schott | (1) 285211054 / TA20 PLUS MAINZ NIFE PLATING MIX TANK TA20 Plus Top Unit , Schott | (3) Q51-896 ION MILL HARMONY QUARTZ DIFFUSER 5 ZONE RF350 Q51-896 | (2) Q50-896 ION MILL HARMONY QUARTZ CYLINDER 5 ZONE RF350 Q50-896 | (2) Q185-896 VEECO DLC TOOL QUARTZ LINER RF210 Q185-896 | (2) Q187-896 VEECO DLC TOOL QUARTZ DIFFUSER RF210 Q187-896 | (500) C74-896 ION BEAM INSULATOR 10-32 male | (500) C-12-896 ION BEAM BALLS,CERAMIC .236 C12-896 | (1000) C11-896 ION BEAM BALLS,CERAMIC .228 C11-896 | (5) NP-2016-160 NORDIKO Grooved Dielectric screen, A08300 | (5) 10-1016-014 PVDi SPARE PARTS Shield, Transport Cover | (1) 6053-1000-1 ALCATEL/COMPTECH PHASE SHIFTER | (4) F1DA216Z PLASMA THERM RIE SP PARTS KVM, 2 User, 16 Computer, Belkin | (1) 120A-22714 L.H Z660 BARATRON HEAD 120A-22714 (1-MBAR) | (1) 153D-20-40-1 MAGANNEAL OVEN SP PARTS VALVE SMART, MKS Throttle Valve | (1) 640A12TW1M32F GENUS ALD SP PARTS MKS PRESSURE CONTROLLER 5000 SCCM | (1) GM50A013102RAM010 PLASMA THERM RIE SP PARTS MFC 100 SCCM N2 MKS 1479A01312CR1AM | (1) 622B12TBE ALCATEL/COMPTECH BARATRON MANOMETER 100 TORR | (4) 01782973 ION MILL HARMONY TILT MOTOR BODINE N4561 | (2) 9400-0089/L2194-01 NANOMETRICS SPARE PARTS 75w xenon lamp | (2) 9400-023210 / 9400-0399993 NANOMETRICS SPARE PARTS UV LAMP WITH CONNECTOR L6881 | (1) CJ1W-DRM21 SUSS PARTS Omron PLC, CJ1W-DRM21 | (10) AMC-0378 VEECO DLC TOOL DLC DUAL PBN TERMINAL POST | (20) AMC-0377 VEECO DLC TOOL DLC DUAL PBN EXT. CERAMIC SPACER | (20) AMC-509013 ION MILL HARMONY HOLLOW CATHODE ION MILL ALLIED | (20) AMC-509014 ION MILL HARMONY NOZZLE FLANGE | (20) AMC-0375 VEECO DLC TOOL DLC DUAL PBN INT. CERAMIC SPACER | (20) AMC-0500 VEECO DLC TOOL DLC DUAL PBN NOZZLE FLANGE | (1) GM80CR / 01790150 WAFER PART MISC NILFISK CLEANROOM VACUUM CLEANER GM80CR / 01790150 | (1) A06094 NORDIKO GRID FEED THROUGH | (1) A04679 NORDIKO dielectric screen retainer 20 cm A04679 | (3) A01600 NORDIKO Table Clamp Bellows A01600 | (3) A15959 NORDIKO Vespel Bushings A15959 | (10) 319C0035-03 PUMPHEAD IWAKI Bellows Poppet, PTFE, Bleed, 0.7 x 0.95 | (20) 319C0035-01 NMP LIFTOFF Bellows Poppet, 3/8" , PTFE | (20) 313C0005-01 NMP LIFTOFF Poppet Diaphram, 3/8 Valve | (40) 316C0008-01 NMP LIFTOFF Bellows Diaphragm, 3/8", Long Stroke | (30) 76017 PUMPHEAD IWAKI Shaft Seal , .250 Dia. , 3/8" | (1) 102008316 CORONA MOTOR CORONA LIFT AND ROTATE TABLE | (1) 102008316_E CORONA MOTOR CORONA LIFT AND ROTATE TABLE | (1) BGG26252 CLUSTERLIN 200 WIDE RANGE GAUGE PKR261 | (1) 10068438 CORONA MOTOR DRIVE CAP DRIVE 24V | (1) 102020923 CORONA PC BOARD DCA 03 DC-DECOUPLING AS | (1) BGG2600 CLUSTERLIN 200 GAUGE FULL RANGE PKR251 | (3) 102339743 CLUSTERLIN 200 PIN-BUSHING CHUCK ALIGNMENT CLUSTER | (36) 612-1056 WAFER PART MISC Non-Contact Mode Probes NCHR PARK AFM | (1) PM C01 697 B VEECO DLC TOOL PFEIFFER DCU 600 DISPLAY | (2) PK T01 210 / MVP 040-2 NANOMETRICS SPARE PARTS PUMP MD4 4 NT 100-120/200-230 V #736005 | (1) PT R26 000 PKR 251 PLASMA THERM RIE SP PARTS GAUGE FULL RANGE PKR251 | (2) 102163552 PLASMA THERM RIE SP PARTS SPOOL, ICP SRC, 790 | (1) 102177006 PLASMA THERM RIE SP PARTS CLAMP CERAMIC 150MM REVERSE TAPER | (2) D00541-001 PLASMA THERM RIE SP PARTS RF CONNECTOR CONTACT ROD IPC LID | (1) 8172084931010 PLASMA THERM RIE SP PARTS CABLE RF RF5 TO AMN5 45" | (1) 6770164046605 PLASMA THERM RIE SP PARTS GATE ALUM 50X336MM SERIES 02/03 | (2) 8172084932010 PLASMA THERM RIE SP PARTS RF CABLE AMN5 LOWER ELECTRODE | (40) 4112082813010 PLASMA THERM RIE SP PARTS O-RING CERAMIC SPOOL SEAL | (1) 1000006760 DUV SP PARTS Air Sentry, OBC Span Tube | (1) PMP02005 ION MILL HARMONY TURBO PUMP 2200L/SEC | (1) TMH521 DN160 No Bom's TURBO PUMP TMH521 DN160 ISO-K PFEIFFER | (1) TG1100FBWB FUTEK SP PARTS TURBO PUMP OSAKA TG1100FBWB | (1) V551-ISO-160 KLA TENCOR Turbo Pump, V551, ISO-160 Flange | (1) XDS-10 HMDS / PVD / PVDi Scroll Pump, XDS10, 115vac, BOC Edwards | (1) PM02-130A TMP 261-P ION MILL HARMONY TMH 260 Standard also P-purge TURBO | (2) .010 IN 9X12 OVAL PVD SP PARTS / DLC INDIUM FOIL PVD TARGET THERMAL INTERFACE | (5) 034113000 ION MILL HARMONY TARGET THERMAL INTERFACE | (20) 034113000 ION MILL HARMONY TARGET THERMAL INTERFACE | (1) IH-1800 GENUS ALD SP PARTS DRY PUMP EDWARDS IH-1800 | (1) TPH 2200 VEECO DLC TOOL TURBO MOLECULAR PUMP | (1) L70 400V 3 PHASE UNAXIS FILLGAP DRY PUMP L70 EDWARDS 400V 3 Phase | (2) 2011-2921-003 PVD SP PARTS 6" Table weight, Outer, Arc Spray | (5) 2007-2614REVF V7 ALCATEL/COMPTECH V7E INNER MASK 2480 150MM | (2) PVDIWC150 PVD SP PARTS WAFER CLAMP 150MM PVDIWC150 REV A | (3) 7766/2006-2413-003,002 REV B V3-6" ALCATEL/COMPTECH SILASTIC PAD 6" MASK INNER AND OUTER | (4) 2007-2600-011-012 ALCATEL/COMPTECH SILASTIC PAD SET 2460 17"ANODE V6 6" | (4) 2007-2613/14-002 ALCATEL/COMPTECH SILASTIC PAD SET 2480 V7 20" ANODE 6" | (5) 2004-2194 AMERIMADE NIFE SP PARTS Distributor Paddle Assy, Polycarbonate | (3) 2011-2898-004 PVD SP PARTS Chamber Shield, Shutter side | (20) SWL-001 ALCATEL/COMPTECH SHUTTER WHEEL LEFT GROVED SWL-001 | (20) SWR-002 ALCATEL/COMPTECH SHUTTER WHEEL RIGHT SWR-002 | (1) 3150004-020 NORDIKO POWER SUPPLY RF5S DEP RF PSU | (1) RS3021CJ-SET ALCATEL/COMPTECH TUBE PA W/H2o KIT CT 2480 | (1) 3CX1000A7 ALCATEL/COMPTECH Tube Power 10 KW Generator | (2) CVDD-1000-15S, 15KV ALCATEL/COMPTECH Vacuum Cap, CVDD-1000-15S, 15KV | (1) 5CX1500A ALCATEL/COMPTECH TUBE 5CX1500A IPA tube | (1) 5CX1500A ALCATEL/COMPTECH TUBE 5CX1500A IPA tube | (1) 6146B/8298A ALCATEL/COMPTECH TUBE 5CX1500A IPA tube | (1) CSVF-500-0315 VEECO DLC TOOL Cap 12-500pf 15KV 65A Jenning | (24) HT57Y201KA ALCATEL/COMPTECH DOORKNOB CAP. 200PFD, 15KVDC | (10) 10389681 STRASBAUGH CMP R601 FILM 500MM x 500mm FPJ | (1) 52601998365 NIFE MIX #1&2 COPPER PLATESP PARTS PUMP EG 152 0024 SMALL MICRO PUMP | (2) KU610R-00A / 6217.2501 SOLVENT TOOL SST SP PARTS SHUTTLE/DETENT KIT, 610/110 Trebor | (2) 5930.508 STRASBAUGH CMP Flow Sensor, Signet, 3-2536-SPEC | (2) ABF1UFR3EH1/67517.15002 NMP LIFTOFF Teflon Filter NMP Pall , .2 UM Ultikleen | (8) MCS4463RJH1 / 67554.4025box SOLVENT TOOL SST SP PARTS POROUS METAL FILTER 25UM | (6) AB1VI3EH1 / 67534.950001 NMP LIFTOFF PALL SUPER ETCH PVDF 0.1UM 10" PLATERS | (13) WSC92HG11E / 67539.50002 MAINZ NIFE PLATING MIX TANK Filter, 0.2um, 10", Pall , Permaalloy | (50) 0318.043 WAFER PARTS MISC Tubing TFE, 5/32"IDx1/4"OD, | (1) 9200010000 MC2 / AT20 PLASMA THERM RIE SP PARTS MATCHING NETWORK CONTROLLER SEREN | (1) TMH520 DN160 / PM P02 420 CLUSTERLIN 200 TURBO PUMP TMH 520 / 520 SG DN160 ISO | (1) 100C DN 160 ISO K/40 KF BLDG 004 Turbovac 1000C, PUMP, DN 160 ISO-K/40 KF | (1) LEYBOLD 1000-c CORONA TMP1000 C TURBO PUMP | (1) Turbo V551 Navigator Pump BLDG 004 Turbo V551 Navigator Pump | (1) 945AOPLPNCHF222VESP3.5 GENUS ALD SP PARTS Valve 22, 23 P/N 945AOPLPNCHF222VESP3.50 | (1) SPSCA6140EI1124D/CONTAC TOR, FVNR 104A, 3-POLE FSI SP PARTS Contactor, Power Panel, CA6-140-El,24vdc | (1) GPC80-5 STRASBAUGH CMP POWER SUPPLY 5VDC 100/240VAC | (2) Z15895-16253 STRASBAUGH CMP REGULATOR MODIFIED REV A STBH# 219977 | (2) 944AOPLPNOSFSFF GENUS ALD SP PARTS ALD Veriflo Valve 4, 7,8,11 | (6) 3511-20 115875640 PLASMA THERM RIE SP PARTS Clamp Drive Linear Slide 3511 | (1) SP-RWP3M-VALVE-MOD DUV SP PARTS 3 Valve Assy, Gas Bottle , Silpac | (1) PA2310-03N-X5 BSET SPARE PARTS WAFER Pump, Pneumatic, TIC SMC, 3/8" NPT | (1) 1069890 STRASBAUGH CMP PROBE, FEMTO WAFER THICKNESS | (1) 220701 STRASBAUGH CMP ROTARY UNION 2-PASS | (1) 225230 STRASBAUGH CMP Motor encoder assy. BEI/E25 B | (1) 243121 STRASBAUGH CMP CABLES RTZ ROBOT MOTOR SET OF 3 | (1) 243122 STRASBAUGH CMP CABLE ROBOT ENCODER 30 IN | (1) 247130 STRASBAUGH CMP LEAD NUT ROBOT TRAVEL | (1) 104601 STRASBAUGH CMP AMPL SVOBRSHL B30AB | (1) 219718 STRASBAUGH CMP VALVE TEFLON SOL. 24VDC 2 WAY | (1) 104769 STRASBAUGH CMP CABLE ASSY 25' DB25-S | (2) 224969 STRASBAUGH CMP PULLEYS ROBOT KIT | (6) 284316 STRASBAUGH CMP CARRIER RETAINING RING VIPER FOR 6'' | (30) 273216 STRASBAUGH CMP 6 inch R601 Carrier Backing Film | (1) RE71TN0460FQ WAFER PART MISC ABSORBER SUMATOMO FOR FUTEK | (2) 6LVV-MSM-ALD3T-2-P-CSV RUCVD Spare Parts VALVE ALD 2PORT NRML CLOSD THRML ACTUAT | (24) MS-ISK-C-1 BSET SPARE PARTS WAFER Switch, Nupro Indicator | (40) SS-4BA-K1 NMP LIFTOFF Bellows Rebuild Kit, Nupro Valve | (1) G157308 SUSS PARTS Lamp Power Supply Assy, CIC 1200 LH1000 | (1) 01,299693 / G299693 SUSS PARTS Motion Controller MC206, 01,299693 | (1) G172931 SUSS PARTS Mask Loading Plate | (1) 111T1393-01 Semitool Raider Tool AU/CU Copper Anode, ( Set of 3) , 200 mm | (1) TF 280320002-002-RFS FSI SP PARTS Whedco Motion Controller IMC-306X-X-D-AG | (1) TF913943-001-RFS FSI SP PARTS CPU Assy , Bake/Chill | (1) TF925941-150 FSI SP PARTS Endeffector 6 Inch Wafer | (1) 1213110510200200 AMERIMADE NIFE SP PARTS Chiller , 208/230vac, Mainz Mix Tank | (5) 103642 BSET SPARE PARTS WAFER PH Electrode Sentix81ATC Elect 1M Din | (5) 0916A25 / 103642 BSET SPARE PARTS WAFER PH Electrode Sentix81ATC Elect 1M Din | (10) 91230-64433-00 / C-35 Tosetz Plating Spare Parts Gasket, Wafer Seal | (1) 800150v0011 / tw250s VEECO DLC TOOL TURBO PUMP HIDEN ENDPOINT 250 LEYBOLD | (1) MDP5011 WAFER PART MISC Turbo Pump, XRF, MDP5011, Alctel | (100) C-1040 PLASMA THERM RIE SP PARTS SCREW 10-32 X 2-1/2' SS VENTED C-1040 | (1) 5000840 NIKON I14 SPARE PARTS MERCURY LAMP NIKON STEPPER, I-12,LONGLIF | (10) SUV-2001C1HL/S / 5001594 CANON STEPPER SP PARTS Mercury Lamp Ushio 2000w High Intensity | (2) 5000545 SUSS PARTS Mercury Lamp, 1000 W, Ushio USH-1000KS | (6) 5000501 / USH-250BY CANON STEPPER SP PARTS Lamp Mercury OEBR Ushio 250w | (2) 78201-R1 ION MILL HARMONY VAT VALVE REPLACEMENT BLADE SS | (1) 14036-UE44-0004 ION MILL HARMONY GATE VALVE VAT FOR HIDEN 2 1/2" | (1) 12140-PA-44-0001A/12140-PA4400010354 ION MILL HARMONY GATE VALVE LOADLOCK ION MILL | (4) 77369-R8 ION MILL HARMONY VAT VALVE BELLOWS REBUILD KIT | (1) 033270904 Nexus (Veeco) POWER SUPPLY SL1200-RS232 SPELLMAN 1.5K | (1) 033270902 ION MILL HARMONY SPELLMAN POWER SUPPLY SL1200 | (1) 038618601 Nexus (Veeco) NEXUS PLASMA BOWL INNER V2 | (1) 038618500 NEXUS NEXUS PLASMA BOWL OUTER | (1) 033270803 VEECO DLC TOOL NEXUS PS-1KVDC,300MA-SL300 | (1) 033432206 ION MILL HARMONY MOTOR DLC FIXTURE 30 rpm | (1) 03860200 PVDI SP PARTS 6" Table weight, 1 Piece, Arc Spray | (1) 038478200 PVDI SP PARTS 12" Anode Ring, Arc Spray | (1) 038820500 PVDI SP PARTS Shutter, Arc Spray | (1) 033410403 VEECO DLC TOOL SHAFT SPINDLE | (1) 038860300 PVD SP PARTS 6" Clamp Chuck Table, Middle | (1) 038860500 PVDI SP PARTS 6" Clamp Chuck Table, Outer | (1) 038619900 NEXUS GAS DISTRIBUTION RING NEXUS 038619900 | (1) 034170301 / '034170301 VEECO DLC TOOL CARD INTERFACE DEVICENET 5136-DNP-PCI | (1) 033511200 VEECO DLC TOOL ANALOG ISOLATION BOARD | (1) 033441400 ION MILL HARMONY FEEDTHROUGH VIEWPORT ION MILL | (3) 034113000 ION MILL HARMONY TARGET THERMAL INTERFACE | (2) 034113000 ION MILL HARMONY TARGET THERMAL INTERFACE VEECO DLC | (5) 038348300 PVD SP PARTS INDIUM FOIL PVD TARGET THERMAL INTERFACE | (2) 033218500 VEECO DLC TOOL QUARTZ BOWL RIM210 | (1) 033571912 ION MILL HARMONY Board, CCA Analog Input | (1) 032951000 VEECO DLC TOOL Board, CCA Sensor PCB | (1) 038841503 PVDI SP PARTS Chamber Top Shield, Tall, For Ta Only | (2) 033432204 ION MILL HARMONY FIXTURE ROTATION MOTOR (VEECO) | (2) 033218700 VEECO DLC TOOL Quartz Diffuser 210 Gun | (2) 12206 VEECO DLC TOOL INDIUM FOIL | (3) 033618102 ION MILL HARMONY SHUTTER, Inner | (2) 033618002 ION MILL HARMONY SHUTTER, Outer | (3) 038841507 PVDI SP PARTS Chamber Shield, Transfer port side | (3) 038860600 PVDI SP PARTS Chuck Table Segment | (10) 033258600 No Bom's TERMINAL, Filament, Moly | (1) BG4-6628-000V CANON STEPPER SP PARTS Cam HD | (1) TW250S IBBDS TURBO PUMP TW250S LEYBOLD | (1) 710-1617-11 S/N 88781 YES ASHER Spare Parts Assembly, Tray Active, Glen-1000P.
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