KLA TENCOR 2401 VIPER Products

  • KLA / TENCOR: 2401 Viper

    Details
    ID#:
    9072235
    Category:
    Mask & Wafer Inspec...
    Wafer defect inspection system.
  • KLA / TENCOR: 2401 Viper

    Details
    ID#:
    9035143
    Category:
    Mask & Wafer Inspec...
    Wafer Size:
    8" 
    Wafer defect inspection system, 8".
  • KLA / TENCOR: 2401 Viper

    Details
    ID#:
    9066135
    Category:
    Mask & Wafer Inspec...
    Wafer defect inspection system.
  • KLA / TENCOR: 2401 Viper

    Details
    ID#:
    9014087
    Category:
    Mask & Wafer Inspec...
    Automated macro-defect inspection system | Brightfield and darkfield inspection | Throughput: 80 wafer/hour | Recipe-configurable pass/fail settings | Camera and optics calibration capability | Windows NT user interface | | Specifications: | 100-240 V, 1 phase, 50/60 Hz | 200-240 VAC | | No hard drives or software | De-installed, crated | 1999 vintage.
  • KLA / TENCOR: 2401 Viper

    Details
    ID#:
    9074355
    Category:
    Mask & Wafer Inspec...
    Wafer defect inspection systems.
  • KLA / TENCOR: 2410 Viper

    Details
    ID#:
    9000431
    Category:
    Mask & Wafer Inspec...
    Wafer Size:
    8" 
    Vintage:
    2000 
    Automated macro-defect inspection system, 8" | 2000 vintage.
  • KLA / TENCOR: 2410 Viper

    Details
    ID#:
    9074146
    Category:
    Mask & Wafer Inspec...
    Wafer Size:
    8" 
    Vintage:
    2000 
    Macro-defect inspection system, 8" | OS: English | 2000 vintage.
  • KLA / TENCOR: 2430 Viper

    Details
    ID#:
    9078499
    Category:
    Mask & Wafer Inspec...
    Automated defect inspection systems, 12".
  • KLA / TENCOR: 2430 Viper

    Details
    ID#:
    9078515
    Category:
    Mask & Wafer Inspec...
    Automated defect inspection systems, 12".
  • KLA / TENCOR: Lot

    Details
    ID#:
    9067214
    Category:
    Spare Parts
    Lot of spare parts: | | 1 0015645-000 CABLE TEST POINT AEROTECH STAGE | 2 0130026-000 4-CHANNEL PWM MOTOR DRIVE; 113387 | 1 050-612903-000 Lamp halogen 150W100V ESY | 1 10-00070 Replacement Scan Style, 5 Micron Radius, 20-87 | 1 103306 Puck Holder Excluding Adjust Screw | 2 108715 BELT TIMING R MOTOR DRIVE | 2 108731 BELT TIMING FFM MOTOR DRIVE | 2 108910 BELT, TIMING THETA AXIS | 1 113115 MOTOR, DC 24V 60 5:1 WBALL BRG | 4 114791 SWITCH KEYBOARD (SW1-40) | 1 126799 PULLEY ASSY RADIAL HANDLER | 1 130150 SWITCH EMERGENCY STOP CONTACTS; BRETER F40 A600-P600 | 1 136379 MIRROR RETRO | 1 144185 MOTOR, FFM HNDLR ASSY | 1 147745 SWITCH DOOR INTERLOCK DUAL SPDT | 2 156710 CSREW CARRIAGEFLEXURE JACK | 1 156868 ENCODER CARRIAGE | 1 157392 Switch Rear Bracket Shuttle | 3 159387 ASSY CABLE RECEIVER, PHOTODIODE, THRBEAM2 | 1 172359 Timing Belt 160T 0-25W KEVLR | 1 172790 PIN CAM FOLLOWER SHUTTLE | 1 172812 Lead Screw, Driven Sort Cam | 1 18-016057 TWI OP7341 Lamp Assm., White Light, P34 | 3 181757 FUSE, 3A, 250V, Time Delay, 5MM X 2MM | 1 184950 PCB, BUFFER BOARD, MEAS/INSP | 1 187178 MOTOR, T-AXIS ASSY | 1 203343 Honeywell HOA2004, Transmissive Optoschmitt Sensor | 1 208-600180 PCB 20SR THETA SENSOR | 1 208-600204 PCB Limit Sensor (S) | 2 208-600220-2 PCB 20SR Photo REF., T281-600220-4 | 1 T286-000959-2 HARNESS MICROSCOPE ARM CABLE#119 | 1 208-600291-1 PHOTO REFLECTOR | 2 208-600303-2 PHOTO REFLECTOR | 2 208-800214-2 PCB A/L LIMIT SENSOR, AL SENS BRD, 81E | 1 210-0307 INKER HOLDER BSAE H7 | 2 237540 MOTOR, Z-AXIS ASSY,24 VDC 500 CPR | 1 239372 PCB ASSY DISK CONTROLLER IDE EVEREX | 1 244183 PCB ASSY RELAY DRIVER P/S ILLUMINATION, 047506 | 1 244627 Cable, Polarizer Assembly S6400 | 1 245224 Spring TORS Door | 1 256056 COUPLING, ROTARY HANDLING, PRO | 1 28-0086 DESICCANT CARTRIDGE | 1 281-500103-4 NEW PCB Prober I/F | 1 281-600290-1 PCB LIMIT SENSOR (LH PROBER A/L ARMS), T281-600290-2 | 1 286-000959-2 Microscope Harness Arm Cable #119 | 2 287-000919-2 KLA-TENCOR CORP CABLE GROUND INTERNAL | 6 326410 WASHER SCAN TIMING 0.015 | 3 326429 WASHER SCAN TIMING 0.025 | 1 34509 Ball Bearing FLDG 25BX6250DXX19W | 6 35-201619-1 Push Button Switch ( INITIAL ) | 1 38-0016 KLA-TENCOR FLEX CABLE 9 COND X 10 | 3 38-0029 CABLE ASSY | 14 3940572411 PAPER THERMAL 57*24*12.5 FOR DIGITEC MOD | 4 40126 BELT CARRIAGE DRIVE P/N 040126 | 2 416249 KLA-TENCOR FILTER VACUUM LINE | 1 470-01405-000 PAPER, IMAGE, THERMAL | 2 50-0072 DATA CARTRIDGE, 44MB, FT-750 | 2 50-0152 DATA CARTRIDGE, 200MB, OMNIMAP RS55 | 3 50-0158 DATA CARTRIDGE, 200MB, OMNIMAP RS55/tc | 1 500-900778-00 PCB Z LIMIT SENSOR KLA | 2 54-0117 SENSOR, FLAT ALLLIGNED | 2 54-0126 PCB, KEYPAD | 2 54-0148 PCB, FLAT ALLIGNED INTERFACE | 1 54-0215 PCB, INTERFACE 'Z' I/O; 36-0197 REV2 | 2 54-0279 PROMETRIX VTF POS SENSOR | 2 54-0412 PCB, PARALLEL I/O H2 | 2 55-0232 CBL ASSY, X LIMIT | 6 55-0233 CABLE ASSY, X-LIMIT SENSOR | 2 55-0234 THETA ASSY CABLE TO CONNECTION | 5 INKER CABLE CONNECTOR ASSY | 2 KLA-TENCOR NEON BULB FOR MICROSCOPE LAMP | 1 551241606 KLA-TENCOR CORP LED I.R. PREALIGN | 6 551241730 Board Ejector Small Black | 1 57398 Fuse, 1A, 250V, SB, Size 5x20mm GPIO Collector Polarizer Motors | 1 59307 ROD FIBER OPTIC 1.00MM DIA (PER INCH) | 3 655-801301 KLA-TENCOR SCREW CAM FOLLOWER | 1 655-902570-00 KLA-TENCOR SHAFT THETA | 1 710-404114-00 LAMP, ARC STARTER | 1 710-650099-20 PCB | 1 716-402347-00 BANDWIDTH LIMITING FILTER KLA5X00 | 6 72-0101 kit, ref substrate cleaning | 1 731-404371-00 CABLE, POWER PZT 3' 4.5" | 25 77-0047-03 STRIP | 32 77-0047-04 STRIP | 17 77-0047-05 STRIP | 21 77-0047-06 STRIP | 20 77-0047-08 STRIP | 2 77-0162-01 VACUUM FINGER OVERLAY 4'' 5'' 6'' | 3 8314 MULTIFAN 24V, 2.2W | 3 96-0015 VALVE, SOLENOID ALIGNER VAC | 1 255-657172-00 CASTROL BRAYCO 812 PERFLUORINATED POLYETHER LUBRICATION OIL; KLA TENCOR 255-657172-00 | 3 H7-24E7 INKER CATRIDGE HOLDER | 1 198765 POWER SUPPLY 5V/3A SWITCH 120VAC, 198765 | 1 PCA 54-0220 H2 THETA INTERFACE | 1 PCB 36-0123 FT-500 VACUUM SENSOR/VALVE CONNECTOR BOARD | 1 PCB36-0203 PROMETRIX HANDLER SHUTTLE BOARD | 1 S0090042100 PCB LIMIT SENSOR (D) | 1 T281-600203-1 PCB DISPLAY | 1 T281-600219-3 PCB Handling Arm U/D LIMIT Assembly, 208-600219-3 | 2 TS285-003013-1 ARM UNLOAD. | 1 T012-002493-1 Solenoid Valve A/L SUB-CHUCK, T012-002493-1, 500-900471-00, 12V, DC HZ, 3W, M5 Pipe, Pressure: 0~7 kg f/cm^2(bar) | 7 564-480908-000 PISCO 5300 VACUUM FILTER; KLA-TENCOR 564-480908-000 | 1 X48177 Polarizer Assembly P/S Illumination | 1 0044208-000 SPU H2 UV1XX0 | 1 097608 I/O INTERFACE PC ASSEMBLY | 1 14-119394 PCB,CONFIG,LIGHT PEN,FSTPNT | 1 190870 PCB ASSY SERIAL KEYBOARD INTERFACE | 1 190870 PCB INTERFACE KEYPAD 7X00 | 1 28-0115 Xenon Lamp Power Supply | 1 36-0325 SBC 80C186 | 1 407305 407805; APM INTERFACE PCB 5400 FLEXUS UPGRADE PART | 1 53-011 VL-7806C CPU FOR FT-500 | 8 54-0046 Motor Controller Board | 2 54-0128 FT-500 DIAGNOSTICS DRIVER BOARD | 1 PCA MOTOR DRIVER DC SERVO | 2 54-0147 PCA EDGE SENSOR FLAT ALIGNER | 2 54-0148 FLAT ALIGNER INTERFACE C2C | 2 54-0276-R PCA Door Interconnect, Repaired, pca: 54-0276 | 1 54-0290 X MOTOR INTERFACE PCB UV1050 | 1 54-0425 SBC LOWER STAGE INTERCONNECT PCB | 1 54-0462 SBC BOARD, UV1XX0 (REPLACES 54-0216) | 1 55-0214 CABLE ASSY | 1 710-400554-00 PCA MOTOR CONTROLLER | 2 710-404556-00 KLA 52XX VME STAGE STEPPER DRIVER | 5 710-404582-00 PZT CONTROLLER BOARD; P/N: 073-404581-00, ASSY | 1 710-404582-00 CONTROLLER PZT KLA 5X00 | 1 720-02847-000 MCA Module Micro Channel Plate Amplifier | 1 012-001456-1 KLA-TENCOR CORP SOLENOID A/L 2WAY P-5136M6E NO ATS | 1 060-450224-00 POWERMAX II 1.8° STEP MOTOR | 1 110647 184772; VAC ASSY CHUCK V4 FFM HOLDER, VALVE NO. 2X315; ORIFICE: 5/32 X 5/64 | 1 14-007135 AF INTERCONNECT, AT | 1 18-012799 OPTIC ASSEMBLY | 1 206890 PCB DISK CONTROLLER., 4630 | 1 208-500117-1 PCB RS232 INTERFACE TYPE RS98 | 1 208-600242-2 PCB A/L I/F | 1 213802 PCB ASSY PMT LID | 3 251739 Socket Assembly Particle PMT | 1 281-600244-3 PCB WAFER SENSOR | 1 36-0112 PROMETRIX FT-500 REAR PANEL BOARD | 1 36-0188 SPECTROMETER INTERFACE | 1 432-06045-000 STAGE, ELEVATOR LIMIT SWITCH FEEDTHRU | 1 471-07291-000 PKR 251 Compact Full Range Gauge | 2 480-15438-000 CCD Video Camera Module | 3 500-900918-00 ARM LOAD endeffector | 2 54-0136 TESTER VACUUM MANIFOLD | 1 54-0215 PCB, INTERFACE 'Z' I/O; 36-0197 REV2 | 1 551241007 KLA-TENCOR CORP THETA MOTORIZED PROBCARD OPTION | 1 KLA-TENCOR CORP RAISER 3 PINS CHUCK | 1 61-000342-00 PCB DISK CONTROLLER. | 2 6543-31 PCB ASSY, LAMP-CONTROL, MEAS | 2 716-402608-07 PREALIGN ASSEMBLY | 1 740-679132-00 Power Supply, 65V/24V stage amp driver supply KLA 2138 | 2 IEEE-448 CABLE | 1 780-08568-000 HVPZT-AMPLIFIER | 1 780-10019-001 CRANKSHAFT, FEEDTHRU ELEVATOR | 1 78344 BEARING, LINEAR | 12 PCB36-0099 SERVO-MOTOR CONTROLLER BOARD | 1 PCB36-0133 PROMETRIX SERVO CONTROLLER/DRIVER | 1 W2618-0003 PCB HOT CHUCK CONTROLLER | 1 480-15438-000 CCD Video Camera Module | 1 480-15438-000 CCD Video Camera Module | 2 106500 Spring Bearing 265IDX 367OD 302SS--not in original packaging | 1 157376 Lead, Screw Bearing Cartridge--not in original packaging | 1 157384 Switch Front Bracket Shuttle--not in original packaging | 1 198773 Power Supply; (P) Series Name, (30) Output wattage: 30w, (E) UL recognized TUV approved, CSA certified: E, (-24) Output voltage: 24v, (-N) comes with a cover | 1 220663 OPERATOR KEYPAD | 3 221392 TN7XXX MOTOR AND ENCODER | 1 224022 PCB Assembly Solenoid Valve DR Polarizers RE, 224022--not in original packaging | 1 281-600614-2 PCB Prealign Sensor AMP. SELL FOR PARTS ONLY--not in original packaging | 1 52-0337 24V Single Solenoid Vacuum Valve | 1 527645 AIT KLA CABLE, FLEX, X MOTOR, TOP LOOP | 1 TS1280-001472-12 PT SENSOR, Y331-D8 | 1 54-0215 PCB, INTERFACE 'Z' I/O; 36-0197 REV2 | 1 54-0215 PCB, INTERFACE 'Z' I/O; 36-0197 REV2 | 1 54-0215 PCB, INTERFACE 'Z' I/O; 36-0197 REV2 | 1 54-0215 PCB, INTERFACE 'Z' I/O; 36-0197 REV2 | 1 54-0215 PCB, INTERFACE 'Z' I/O; 36-0197 REV2 | 1 54-0215 PCB, INTERFACE 'Z' I/O; 36-0197 REV2 | 1 001-9070-07 ASSY, VCE-6 WSO SENSOR EMITTER | 1 112976 PCB, MOTOR CONTROL | 2 50-0057 CARTRIDGE, SM300 SPECTRAMAP | 1 54-0215 PCB, INTERFACE 'Z' I/O; 36-0197 REV2 | 1 54-0215 PCB, INTERFACE 'Z' I/O; 36-0197 REV2 | 2 00-M-547 DRW#00-M-547 TEFLON LINEAR SLIDE BEARING AUTOLOADER | 3 157228 SENSOR ASSY OPTO | 1 T282-003586-1 ARM WAFER HANDLING A (LH PROBER), STD FOR 20SL, T282-003586-1 | 1 500-902148-00 KLA-TENCOR CORP PAD PROBE POLISH | 1 FO-14-40 Fiber Optics 40" Cable--not in original packaging | 2 00-M-547 DRW#00-M-547 TEFLON LINEAR SLIDE BEARING AUTOLOADER | 1 157198 Vacuum Assembly Shuttle--not in original packaging | 1 710-800667 PCB 3021 KLAASP, FAB NO. 073-800707-00 | 1 50-0002-03 Probe type C | 1 156876 Pin Carriage Rotate Stop--not in original packaging | 2 00-M-547 DRW#00-M-547 TEFLON LINEAR SLIDE BEARING AUTOLOADER | 2 00-M-547 DRW#00-M-547 TEFLON LINEAR SLIDE BEARING AUTOLOADER | 2 00-M-547 DRW#00-M-547 TEFLON LINEAR SLIDE BEARING AUTOLOADER | 2 00-M-547 DRW#00-M-547 TEFLON LINEAR SLIDE BEARING AUTOLOADER | 2 00-M-547 DRW#00-M-547 TEFLON LINEAR SLIDE BEARING AUTOLOADER | 2 00-M-547 DRW#00-M-547 TEFLON LINEAR SLIDE BEARING AUTOLOADER | 2 00-M-547 DRW#00-M-547 TEFLON LINEAR SLIDE BEARING AUTOLOADER | 2 00-M-547 DRW#00-M-547 TEFLON LINEAR SLIDE BEARING AUTOLOADER.
  • KLA / TENCOR: S740-673035-001

    Details
    ID#:
    9065977
    Category:
    Spare Parts
    FRU, ASSY STAGE for VIPER 2401.
  • KLA / TENCOR: 238740

    Details
    ID#:
    9038943
    Category:
    Spare Parts
    PCB Assy, GPIO S6400 | For KLA / TENCOR 6420 systems.
  • KLA / TENCOR: 188859

    Details
    ID#:
    9038944
    Category:
    Spare Parts
    PCB Assy, 4 Chan-MTR-DRV | For KLA / TENCOR 6420 systems.
  • KLA / TENCOR: 2132

    Details
    ID#:
    139716
    Category:
    Mask & Wafer Inspec...
    Wafer defect inspection system | | Includes: | KLA / TENCOR 2132 wafer inspection unit (primary) | KLA / TENCOR 2132 wafer inspection unit (secondary) | KLA / TENCOR 2552 data analysis station | KLA / TENCOR 2132 power line conditioner | | Specifications: | KLA / TENCOR 2132 wafer inspection unit (primary): | Label model: KLA-2131, front panel reads "2132" | Chuck installed: 8" | Power cable intact, all other cables cut | Front upper panel cover shocks / struts are worn | Missing: PC, 1-2 body panels | Power rating: 120VAC, 25A, 50/60Hz | 1994 vintage | | KLA / TENCOR 2132 wafer inspection unit (secondary): | Label model: KLA-2131, front panel reads "2132" | Body panel does not fully mount | Power rating: 120VAC, 3-phase, 25A, 50/60Hz | 1994 vintage | | Components: | KLA PC/IF 486/66 PC system, p/n 750-660859-00 | Dual monitors | Keyboard | Trackball | | Modules installed: | KLA PC/IF 486/66 PC system, p/n 750-660859-00 | KLA Memory Controller Phase 3, p/n 710-658232-20 | FAB, p/n 710-658085-00 | (2) Mass Memory 2 Phase, p/n 710-658051-20 | (2) KLA CornerTurn 3, p/n 710-655651-20 | (2) Y-Interpolator, p/n 710-658172-20 | (2) X-Interpolator, p/n 710-658177-20 | UNIQUENESS Processor, p/n 073-658045-00 | Alignment Processor Phase 3, p/n 710-658041-20 | Alignment Processor (AP1), p/n 710-65803620 | Defect Filter (H.R.), p/n 710-659724-00 | Defect Processor Phase 3, p/n 710-658075-20 | KLA DP, p/n 710-650099-20 | KLA DD, p/n 710-650044-20 | KLA DF FAB PH3073, p/n 073-65836-00 | IB Module | RIF Module | | KLA / TENCOR 2552 data analysis station: | Label model: KLA-2551X, front panel reads "2552" | Power rating: 120VAC, 20A, 50/60Hz | 1994 vintage | | Components: | INTEL XBASE8TE8F-C PC computer tower | APC BackUPS | Dual monitors | Keyboard | Trackball | | KLA / TENCOR 2132-LC power line conditioner: | P/N: 750-653120 | Power rating: 9kVA, 416V, 21A, 3-phase, 50/60Hz | Input: 3-phase, 50/60Hz | Output: 3-phase, 208V/120V | 1996 vintage | | System currently de-installed.
  • KLA / TENCOR: 2132

    Details
    ID#:
    77349
    Category:
    Mask & Wafer Inspec...
    Wafer Size:
    8" 
    Bright-field Wafer Inspection system, up to 8" | Vacuum piped | Facilities: 120V 3 phase 25A per phase | | Speed: 5 sec/cm2 Sensitivity: 0.62 | Speed: 15 sec/cm2 Sensitivity: 0.39 | Speed: 30 sec/cm2 Sensitivity: 0.25 | | Includes: | Wafer Inspection Module for 4, 5, 6 or 8" wafer size | Image Computer | Minimum inspectable feature size of 0.25µm in DIE to DIE mode | Defect Clustering and Auto Review | Sampling Blanket Wafer Inspection | Automated Inspection Automatic Focusing | SECS-GEM | KLA SAT segmented auto threshold imaging processing hardware and software using mean and range functions on the KLA 2132 and KLA 2135 platforms | KLA ADC Automated Defect classification Package | Includes image processing and analysis software for inspection station | | (2) Internal computers: | System computer: controls the machine in run mode | ADC computer: controls the machine in automatic review mode (you can also do manual review mode) | Fully automatic, non-contact wafer alignment | Uses image recognition without special test site requirement | Accomodates SEMI standard 25 wafer cassettes | Pick-and-place, random access wafer handling system | Image hard copy | Remote image access XV | Loader: Tencor 6000 | | Substrates: For silicon wafers conforming to SEMI standard M1.1 Wafer diameter: 4", 5", 6", 8"; Wafer thickness (µm): 525, 625, 625, 675, 725 | | Sensitivity and Inspection Speed: | DIE to DIE Mode Cell to Cell Mode Sensitivity (µm) | Speed (sec/cm2) Sensitivity (µm) Speed (sec/cm2): 0.60, 05; 0.50, 1.5; 0.40, 15; 0.30, 05; 0.25, 30; 0.20, 15 | | KLA2132 Board Configuration | MAIN CARD CAGE DP 710-683424-001 REV AA DF 710 | 661726-00 BD1 API 710-658036-00 REV C1 API 710 | 658041-20 REV E0 UP 710-658046-00 REV F0 XINT 710 | 658176-00 REV A0 YINT 710-658172-00 REV H0 XINT 710 | 658176-00 REV A0 YINT 710-658172-00 REV H0 CT 710 | 655651-20 REV C0 CT 710-655651-20 REV C0 MM 710 | 659412-00 REV C0 MM 710-659412-00 REV C0 MC 710 | 658232-20 REV H0 IF1 710-658086-20 REV E0 AUXILIARY | | Card Cage | DF 710-678525-001 REV AB | DD 710-650044-20 REV DB0 | DP 710-678545-00 REV B1 | RTF 710-652840-20 REV D3 | 710-659485-20 | | 1995 vintage.
  • KLA / TENCOR: P22

    Details
    ID#:
    170395
    Category:
    Wafer Testing And M...
    Wafer Size:
    8" 
    Automated Surface Profiler, 8" | | Specifications: | Wafer size: 8"/200mm | Software: 4.20 | Can be modified to older SW version 3.1.9 | Automated Wafer Handler | (1) Open Loader for 8" | Computer Controlled | Scan Method: Moving Stage, Stationary Stylus | Scan Length: 205mm (8") | Scan Speed: 1 Î1Ž4m/sec to 25 mm/sec (0.04 mil/sec to 1 in/sec) | Sampling Rate: 50, 100, 200, 500, 1000 sample/sec nominal | Vertical Ranges | Resolution: ±3.2 Î1Ž4m / 0.5 Å (±0.13 mil/0.002 Î1Ž4in), ±13 Î1Ž4m / | 2 Å (±0.51 mil/0.008 Î1Ž4in), 130 Î1Ž4m / 10 Å (±5.1 mil/0.04 Î1Ž4in) | Vertical Linearity: ±0.5% above 2000 Å, 10 Å below 2000 Å | Stylus Control: Programmable Force | MHII Range: 0.05-50 mg | Resolution: 0.1 mg | Programmable Descent Rate | Dual View Optics | Side View Optics 150-600x | Top View Optics 185-750x and 300-1200x (with User Interchangeable Lens) | Operators Manual for KLA-Tencor P22 Profiler | | ~1997 vintage.
  • KLA / TENCOR: D2 HB Lamp

    Details
    ID#:
    200228
    Category:
    Spare Parts
    KLA-Tencor Model No: 0092173-001 | Hamatsu Model No: L9519-01.
  • KLA / TENCOR: 271900

    Details
    ID#:
    9038942
    Category:
    Spare Parts
    Reflector, tile, ccm, silicon | For KLA / TENCOR 6420 systems.
  • KLA / TENCOR: 108278

    Details
    ID#:
    9038941
    Category:
    Spare Parts
    Sensor vacuum start TB, 2 ports | For KLA / TENCOR 6420 systems.
  • KLA / TENCOR: 372420

    Details
    ID#:
    9038939
    Category:
    Spare Parts
    Power supplies, 30MV | For KLA / TENCOR 6420 systems.
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