KLA TENCOR 2401 VIPER Products

Automated macro-defect inspection system, 8" | Install Type: Ballroom | System SW: Known as DIAG 2401 | KLA Viper Macro Defect Inspection System | Load/Unload Cassette Station | PRI Automation Robot | PRI Automated Single Wafer Prealign | 4.6 GB Optical Hard Drive | Mitsubishi CP700 Digital Color Printer | Mounted Color Control Monitor | Electrical: 1 Phase/50-60 Hz/115-230V | Contains Class 1 Laser | Software: 3.5; also have 1.9 and 2.2 available | Full load current: 6 Amps at 120VAC; 3.5 Amps at 220VAC | Includes full set of manuals | Powered off | Can be inspected | 1999 vintage.

Automated macro-defect inspection system | Brightfield and darkfield inspection | Throughput: 80 wafer/hour | Recipe-configurable pass/fail settings | Camera and optics calibration capability | Windows NT user interface | | Specifications: | 100-240 V, 1 phase, 50/60 Hz | 200-240 VAC | | No hard drives or software | De-installed, crated.

Wafer Inspection Stations.

Automated macro-defect inspection system, 8", 2000 vintage.

Automated macro-defect inspection systems, 8" | CE-Marked | Software Version: 3.6.1.2 | Handler Configuration: x2 Asyst SMIF Loadports | Wafer Handler Type: Puck | Safety Enclosure | Dual Detection channels (Bright Field, Dark Field) | Touch Screen Monitor | 18GB Hdd | SECS / GEM Interface | Fluorotrac MID Reader | 100 to 240 V, 15 A, Single-Phase / 3-Wire, Freq 50/60Hz | 2001 vintage.

Automated Surface Profiler, 8" | Specifications: | Wafer size: 8"/200mm | Software: 4.20 | Can be modified to older SW version 3.1.9 | Automated Wafer Handler | (1) Open Loader for 8" | Computer Controlled | Scan Method: Moving Stage, Stationary Stylus | Scan Length: 205mm (8") | Scan Speed: 1 Î1Ž4m/sec to 25 mm/sec (0.04 mil/sec to 1 in/sec) | Sampling Rate: 50, 100, 200, 500, 1000 sample/sec nominal | Vertical Ranges | Resolution: ±3.2 Î1Ž4m / 0.5 Å (±0.13 mil/0.002 Î1Ž4in), ±13 Î1Ž4m / | 2 Å (±0.51 mil/0.008 Î1Ž4in), 130 Î1Ž4m / 10 Å (±5.1 mil/0.04 Î1Ž4in) | Vertical Linearity: ±0.5% above 2000 Å, 10 Å below 2000 Å | Stylus Control: Programmable Force | MHII Range: 0.05-50 mg | Resolution: 0.1 mg | Programmable Descent Rate | Dual View Optics | Side View Optics 150-600x | Top View Optics 185-750x and 300-1200x (with User Interchangeable Lens) | Operators Manual for KLA-Tencor P22 Profiler | Can be inspected and demonstrated | ~1997 vintage.

KLA-Tencor Model No: 0092173-001 | Hamatsu Model No: L9519-01.

Wafer defect inspection system | Includes: | KLA / TENCOR 2132 wafer inspection unit (primary) | KLA / TENCOR 2132 wafer inspection unit (secondary) | KLA / TENCOR 2552 data analysis station | KLA / TENCOR 2132 power line conditioner | Specifications: | KLA / TENCOR 2132 wafer inspection unit (primary): | Label model: KLA-2131, front panel reads "2132" | Chuck installed: 8" | Power cable intact, all other cables cut | Front upper panel cover shocks / struts are worn | Missing: PC, 1-2 body panels | Power rating: 120VAC, 25A, 50/60Hz | 1994 vintage | KLA / TENCOR 2132 wafer inspection unit (secondary): | Label model: KLA-2131, front panel reads "2132" | Body panel does not fully mount | Power rating: 120VAC, 3-phase, 25A, 50/60Hz | 1994 vintage | Components: | KLA PC/IF 486/66 PC system, p/n 750-660859-00 | Dual monitors | Keyboard | Trackball | Modules installed: | KLA PC/IF 486/66 PC system, p/n 750-660859-00 | KLA Memory Controller Phase 3, p/n 710-658232-20 | FAB, p/n 710-658085-00 | (2) Mass Memory 2 Phase, p/n 710-658051-20 | (2) KLA CornerTurn 3, p/n 710-655651-20 | (2) Y-Interpolator, p/n 710-658172-20 | (2) X-Interpolator, p/n 710-658177-20 | UNIQUENESS Processor, p/n 073-658045-00 | Alignment Processor Phase 3, p/n 710-658041-20 | Alignment Processor (AP1), p/n 710-65803620 | Defect Filter (H.R.), p/n 710-659724-00 | Defect Processor Phase 3, p/n 710-658075-20 | KLA DP, p/n 710-650099-20 | KLA DD, p/n 710-650044-20 | KLA DF FAB PH3073, p/n 073-65836-00 | IB Module | RIF Module | KLA / TENCOR 2552 data analysis station: | Label model: KLA-2551X, front panel reads "2552" | Power rating: 120VAC, 20A, 50/60Hz | 1994 vintage | Components: | INTEL XBASE8TE8F-C PC computer tower | APC BackUPS | Dual monitors | Keyboard | Trackball | KLA / TENCOR 2132-LC power line conditioner: | P/N: 750-653120 | Power rating: 9kVA, 416V, 21A, 3-phase, 50/60Hz | Input: 3-phase, 50/60Hz | Output: 3-phase, 208V/120V | 1996 vintage | System currently de-installed.

PCB Indexer | For KLA / TENCOR 5000 systems.

pattern wafer inspection system | Upgraded from AIT 2 to AIT XP by KLA | Darkfield defect inspection tool: KLA / TENCOR Fusion, 2002 vintage | Load ports: (Qty 2) ASYST SMIF-300FL, 300 mm | 1998 vintage.

Power supply for KLA / TENCOR SP1 DLS.

Boards with racks and robot | For the KLA / TENCOR eS20XP inspection system | | Boards: | 710-608020-01 REV AF | 740-607105-00 REV AD | 740-607105-003 | 740-607107-003 | 740-607108-003 | 740-614411-000 | 740-614412-000 | 740-614413-000 | 740-614414-000 | 740-614415-000 | 740-614416-000 | 740-614417-000 | 740-614419-000 | 740-614421-000 | 740-612858-001 REV AA | 750-613674-000 | 750-613674-000 | | Robot assy: | Brooks Automation, model 002-0921-20.

Inner chuck | For KLA / TENCOR SP1 units.

Camera assy | For KLA UV 1050 to 1280 systems.

Motor lamp driver assys | For KLA 7600 Systems.

Door interconnect boards | For KLA UV 1050 Systems.

Turret servo board | For KLA UV 1050 to 1280 systems.

Vision system | For KLA UV 1050 to 1280 systems.

Color filter | For KLA UV 1050 to 1280 systems.

Lampheat sink assy | For KLA UV 1050 to 1280 systems.