KLA TENCOR 2401 VIPER Products

  • KLA / TENCOR: 2401 Viper

    Details
    ID#:
    94565
    Category:
    Mask & Wafer Inspec...
    Wafer Size:
    8" 
    Vintage:
    1999 
    Automated macro-defect inspection system, 8" | Install Type: Ballroom | System SW: Known as DIAG 2401 | KLA Viper Macro Defect Inspection System | Load/Unload Cassette Station | PRI Automation Robot | PRI Automated Single Wafer Prealign | 4.6 GB Optical Hard Drive | Mitsubishi CP700 Digital Color Printer | Mounted Color Control Monitor | Electrical: 1 Phase/50-60 Hz/115-230V | Contains Class 1 Laser | Software: 3.5; also have 1.9 and 2.2 available | Full load current: 6 Amps at 120VAC; 3.5 Amps at 220VAC | Includes full set of manuals | Powered off | Can be inspected | 1999 vintage.
  • KLA / TENCOR: 2401 Viper

    Details
    ID#:
    9066135
    Category:
    Mask & Wafer Inspec...
    Wafer defect inspection system.
  • KLA / TENCOR: 2401 Viper

    Details
    ID#:
    9014087
    Category:
    Mask & Wafer Inspec...
    Automated macro-defect inspection system | Brightfield and darkfield inspection | Throughput: 80 wafer/hour | Recipe-configurable pass/fail settings | Camera and optics calibration capability | Windows NT user interface | | Specifications: | 100-240 V, 1 phase, 50/60 Hz | 200-240 VAC | | No hard drives or software | De-installed, crated | 1999 vintage.
  • KLA / TENCOR: 2401 Viper

    Details
    ID#:
    9035143
    Category:
    Mask & Wafer Inspec...
    Wafer Size:
    8" 
    Wafer defect inspection system, 8".
  • KLA / TENCOR: 2410 Viper

    Details
    ID#:
    9000431
    Category:
    Mask & Wafer Inspec...
    Wafer Size:
    8" 
    Vintage:
    2000 
    Automated macro-defect inspection system, 8", 2000 vintage.
  • KLA / TENCOR: 2410 Viper

    Details
    ID#:
    62720
    Category:
    Mask & Wafer Inspec...
    Wafer Size:
    8" 
    Vintage:
    2001 
    Automated macro-defect inspection systems, 8" | CE-Marked | Software Version: 3.6.1.2 | Handler Configuration: x2 Asyst SMIF Loadports | Wafer Handler Type: Puck | Safety Enclosure | Dual Detection channels (Bright Field, Dark Field) | Touch Screen Monitor | 18GB Hdd | SECS / GEM Interface | Fluorotrac MID Reader | 100 to 240 V, 15 A, Single-Phase / 3-Wire, Freq 50/60Hz | 2001 vintage.
  • KLA / TENCOR: 2410 Viper

    Details
    ID#:
    9040442
    Category:
    Mask & Wafer Inspec...
    Macro-defect inspection system, 8" | OS: English | 2000 vintage.
  • KLA / TENCOR: 2132

    Details
    ID#:
    77349
    Category:
    Mask & Wafer Inspec...
    Wafer Size:
    8" 
    Bright-field Wafer Inspection system, up to 8" | Vacuum piped | Facilities: 120V 3 phase 25A per phase | | Speed: 5 sec/cm2 Sensitivity: 0.62 | Speed: 15 sec/cm2 Sensitivity: 0.39 | Speed: 30 sec/cm2 Sensitivity: 0.25 | | Includes: | Wafer Inspection Module for 4, 5, 6 or 8" wafer size | Image Computer | Minimum inspectable feature size of 0.25µm in DIE to DIE mode | Defect Clustering and Auto Review | Sampling Blanket Wafer Inspection | Automated Inspection Automatic Focusing | SECS-GEM | KLA SAT segmented auto threshold imaging processing hardware and software using mean and range functions on the KLA 2132 and KLA 2135 platforms | KLA ADC Automated Defect classification Package | Includes image processing and analysis software for inspection station | | (2) Internal computers: | System computer: controls the machine in run mode | ADC computer: controls the machine in automatic review mode (you can also do manual review mode) | Fully automatic, non-contact wafer alignment | Uses image recognition without special test site requirement | Accomodates SEMI standard 25 wafer cassettes | Pick-and-place, random access wafer handling system | Image hard copy | Remote image access XV | Loader: Tencor 6000 | | Substrates: For silicon wafers conforming to SEMI standard M1.1 Wafer diameter: 4", 5", 6", 8"; Wafer thickness (µm): 525, 625, 625, 675, 725 | | Sensitivity and Inspection Speed: | DIE to DIE Mode Cell to Cell Mode Sensitivity (µm) | Speed (sec/cm2) Sensitivity (µm) Speed (sec/cm2): 0.60, 05; 0.50, 1.5; 0.40, 15; 0.30, 05; 0.25, 30; 0.20, 15 | | KLA2132 Board Configuration | MAIN CARD CAGE DP 710-683424-001 REV AA DF 710 | 661726-00 BD1 API 710-658036-00 REV C1 API 710 | 658041-20 REV E0 UP 710-658046-00 REV F0 XINT 710 | 658176-00 REV A0 YINT 710-658172-00 REV H0 XINT 710 | 658176-00 REV A0 YINT 710-658172-00 REV H0 CT 710 | 655651-20 REV C0 CT 710-655651-20 REV C0 MM 710 | 659412-00 REV C0 MM 710-659412-00 REV C0 MC 710 | 658232-20 REV H0 IF1 710-658086-20 REV E0 AUXILIARY | | Card Cage | DF 710-678525-001 REV AB | DD 710-650044-20 REV DB0 | DP 710-678545-00 REV B1 | RTF 710-652840-20 REV D3 | 710-659485-20 | | 1995 vintage.
  • KLA / TENCOR: 188859

    Details
    ID#:
    9038944
    Category:
    Spare Parts
    PCB Assy, 4 Chan-MTR-DRV | For KLA / TENCOR 6420 systems.
  • KLA / TENCOR: 054364

    Details
    ID#:
    9024712
    Category:
    Spare Parts
    PCB Indexer | For KLA / TENCOR 5000 systems.
  • KLA / TENCOR: SP1-TBI

    Details
    ID#:
    9044510
    Category:
    Mask & Wafer Inspec...
    Vintage:
    2006 
    Wafer surface inspection systems, 12" | Dual FIM/FOUP, Puck/Vacuum Handling | Configured for 300mm Wafers (Inquire about 200mm Handler Configurations) | Unpatterned Surface Inspection System | Wafer Measurement Module | Triple Beam Illumination (TBI) | Normal Illumination- 0.079 Defect Sensitivity | Oblique Illumination- 0.060 Defect Sensitivity | 0.005 ppm Haze Sensitivity | Ar Ion Laser (488 nm) | RTDC (Real Time Defect Classification) | Measurement Chamber with ULPA filter and Blower Unit | Operator Interface | Microsoft Windows NT 4.0 Operating System | Software Version 4.1 | Security, Logging and Native Networking as provided by Windows NT | Interactive Pointing Device, Key Pad Controls | TFT Flat Panel Display | Parallel Printer Port | Defect Map and Histogram with Zoom | Micro View Measurement Capability | Blower Box | Operations Manual for KLA-Tencor SP1 TBI | | Includes Options: | a) Brightfield (DIC) | b) Light Tower | c) SECs/GEM | d) X-Y Coordinates | e) Oblique Illumination Optics | f) NFS Client, Hummingbird | | 2006 vintage.
  • KLA / TENCOR: 0074638-000-AA

    Details
    ID#:
    9024560
    Category:
    Spare Parts
    Inner chuck | For KLA / TENCOR SP1 units.
  • KLA / TENCOR: 238740

    Details
    ID#:
    9038943
    Category:
    Spare Parts
    PCB Assy, GPIO S6400 | For KLA / TENCOR 6420 systems.
  • KLA / TENCOR: D2 HB Lamp

    Details
    ID#:
    200228
    Category:
    Spare Parts
    KLA-Tencor Model No: 0092173-001 | Hamatsu Model No: L9519-01.
  • KLA / TENCOR: P/N 0029941-001

    Details
    ID#:
    147702
    Category:
    Power Supplies
    Power supply for KLA / TENCOR SP1 DLS.
  • KLA / TENCOR: P22

    Details
    ID#:
    170395
    Category:
    Wafer Testing And M...
    Wafer Size:
    8" 
    Vintage:
    ~1997 
    Automated Surface Profiler, 8" | Specifications: | Wafer size: 8"/200mm | Software: 4.20 | Can be modified to older SW version 3.1.9 | Automated Wafer Handler | (1) Open Loader for 8" | Computer Controlled | Scan Method: Moving Stage, Stationary Stylus | Scan Length: 205mm (8") | Scan Speed: 1 Î1Ž4m/sec to 25 mm/sec (0.04 mil/sec to 1 in/sec) | Sampling Rate: 50, 100, 200, 500, 1000 sample/sec nominal | Vertical Ranges | Resolution: ±3.2 Î1Ž4m / 0.5 Å (±0.13 mil/0.002 Î1Ž4in), ±13 Î1Ž4m / | 2 Å (±0.51 mil/0.008 Î1Ž4in), 130 Î1Ž4m / 10 Å (±5.1 mil/0.04 Î1Ž4in) | Vertical Linearity: ±0.5% above 2000 Å, 10 Å below 2000 Å | Stylus Control: Programmable Force | MHII Range: 0.05-50 mg | Resolution: 0.1 mg | Programmable Descent Rate | Dual View Optics | Side View Optics 150-600x | Top View Optics 185-750x and 300-1200x (with User Interchangeable Lens) | Operators Manual for KLA-Tencor P22 Profiler | Can be inspected and demonstrated | ~1997 vintage.
  • KLA / TENCOR: SP1-TBI

    Details
    ID#:
    9037692
    Category:
    Mask & Wafer Inspec...
    Wafer Size:
    8" 
    Vintage:
    2006 
    Unpatterned surface inspection system, 8" | Dual FIM/FOUP, Puck/Vacuum Handling | Configured for 300mm Wafers (Inquire about 200mm Handler Configurations) | Unpatterned Surface Inspection System | Wafer Measurement Module | Triple Beam Illumination (TBI) | Normal Illumination | 0.079 Defect Sensitivity | Oblique Illumination | 0.060 Defect Sensitivity | 0.005 ppm Haze Sensitivity - Ar Ion Laser (488 nm) | RTDC (Real Time Defect Classification) | Measurement Chamber with ULPA filter and Blower Unit | Operator Interface | Microsoft Windows NT 4.0 Operating System | Software Version 4.1 | Security, Logging and Native Networking as provided by Windows NT | Interactive Pointing Device, Key Pad Controls | TFT Flat Panel Display | Parallel Printer Port | Defect Map and Histogram with Zoom | Micro View Measurement Capability | Blower Box - Refurbished to Meet Specifications | Operations Manual for KLA-Tencor SP1 TBI | | Includes Options: | a) Brightfield (DIC) | b) Light Tower | c) SECs/GEM | d) X-Y Coordinates | e) Oblique Illumination Optics | f) NFS Client, Hummingbird | g) Haze | | 2006 vintage.
  • KLA / TENCOR: 108278

    Details
    ID#:
    9038941
    Category:
    Spare Parts
    Sensor vacuum start TB, 2 ports | For KLA / TENCOR 6420 systems.
  • KLA / TENCOR: 372420

    Details
    ID#:
    9038939
    Category:
    Spare Parts
    Power supplies, 30MV | For KLA / TENCOR 6420 systems.
  • KLA / TENCOR: 271900

    Details
    ID#:
    9038942
    Category:
    Spare Parts
    Reflector, tile, ccm, silicon | For KLA / TENCOR 6420 systems.
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