MKS 647B 12502 Products

  • MKS: PVS-6

    Details
    ID#:
    9033041
    Category:
    Spare Parts
    Portable calibration system for testing MKS vacuum gauges | | Baratron Model 690A13TRA with range of 1000 Torr | Baratron Model 690A12TRA with range of 100 Torr | Baratron Model 690A11TRA with range of 10 Torr | Signal conditioner model 270 | 3-channel selector model 274 | HPS hot cathode controller model 919 Torr X10 | MKS PR 4000 | | Alcatel turbomolecular pump | Alcatel rotary vane roughing pump | Alcatel ACT 200T | APC Back-Ups CS 500.
  • MKS: 1179A

    Details
    ID#:
    168000
    Category:
    Electronic Test Equ...
    Mass flow controllers | Specifications: | Model: MKS 1179A12CR1BV-S | Gas: O2 | Flow Rate: 200 sccm.
  • MKS: 146C-AFFFO-1

    Details
    ID#:
    164099
    Category:
    Spare Parts
    Controller | Includes cards to control 3 MKS flow controllers, and 1 baratron manometer.
  • MKS: 631A13TBEH3

    Details
    ID#:
    141051
    Category:
    Spare Parts
    Heated baratrons, pressure transducers with cables for MKS 631.
  • MKS: Baratron 627D

    Details
    ID#:
    9013133
    Category:
    Spare Parts
    Manometer, 50 mTorr F.S. | Part no. 627DU5TLD1B | CF 2.75" flange | Horizontally calibrated.
  • MKS: Astronex

    Details
    ID#:
    9015076
    Category:
    Spare Parts
    Remote plasma source | Part number: FI80131 | AMAT number: 0920-00057 | Rev B | Input: 200-208VAC~, 60A, 50/60Hz, 3ø | Not currently operational.
  • MKS: NW 100

    Details
    ID#:
    102207
    Category:
    Spare Parts
    Two Stage Heated Vacuum Valve, HPS DIV Jalapeno 45 Series Heater Cover.
  • MKS: Baratron 627D

    Details
    ID#:
    9013134
    Category:
    Spare Parts
    Manometer, 100 mTorr F.S. | Part no. 627D.1TLDB1 | CF 2.75" flange | Horizontally calibrated.
  • MKS: AX 8200A-CER

    Details
    ID#:
    110640
    Category:
    Other Wafer Process...
    Ozone generators | Many available.
  • MKS: FI 20620

    Details
    ID#:
    110637
    Category:
    Other Wafer Process...
    unit.
  • MKS: RPS AX 7670-12

    Details
    ID#:
    110628
    Category:
    Other Wafer Process...
    Plasma source.
  • MKS: ASTRONex

    Details
    ID#:
    9013231
    Category:
    Other Wafer Process...
    Plasma source | Part No: FI80131 | AMAT P/N: 0920-00131 | Rev.C | 200-208VAC~, 3~, 60A, 50/60Hz, 3ø | CE marked.
  • MKS: AX8406B

    Details
    ID#:
    9011912
    Category:
    Facilities Equipment
    Ozone generator | AMAT part number: 0190-02404 | Rev.K | Input: 208V~, 3ø, 20A, 50/60Hz | Not operational.
  • MKS: AX 8403A

    Details
    ID#:
    9016902
    Category:
    Other Wafer Process...
    Ozone generators.
  • MKS: Astroni AX 7670

    Details
    ID#:
    96597
    Category:
    Other Wafer Process...
    Remote plasma source | Rated to 3.0 slm NF3 flow rate | Remote source for reactive gas by generating atomic fluorine | Data sheet available.
  • MKS: AX 8403

    Details
    ID#:
    74112
    Category:
    Other Wafer Process...
    Ozone generators | Many available.
  • MKS: AX 9018

    Details
    ID#:
    74114
    Category:
    Other Wafer Process...
    Plasma source, CPS SmartMacher.
  • MKS: 55-0770

    Details
    ID#:
    9003934
    Category:
    Spare Parts
    Valve throttle heater kits | Part no. 410-00058-000-P01.
  • MKS: ASTeX Astronex Fl 20620

    Details
    ID#:
    96600
    Category:
    Other Wafer Process...
    Generator | 400 kHz output, 208 V, 3Phase input, 38 lbs | Gas Supply: 100% Ar required for ignition only | Operating Pressure: 1 to 4 Torr during ignition measured at ASTRON outlet | 1 to 10 Torr post ignition measured at ASTRON outlet once flow is stabilized | Reactant Output: >98% dissociation up to 6 slm NF3 | Wetted Materials: 6061-T6 Aluminum hardcoat anodized | 6061-T6 Aluminum, Chemraz | Alumina: Control Interface 9 and 25pin D connectors, opto-isolated I/O | Inputs: On/Off | Outputs: Ready, AC line, Plasma On, Utilities | Power 187 to 228 VAC, 50/60 Hz, 60A, 3 phase | Cooling water 2.0 gpm, <30°C | Ambient 40°C max | Compliance, S2-0200,CE, NRTL, F47.
  • MKS: Astex AX 2050

    Details
    ID#:
    96602
    Category:
    Other Wafer Process...
    Micro generator, 208 V, 3 Phase, 25 Amp, 50-60 Hz.
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