SEMITOOL 480 D Products

Spin Rinse Dryer with PSC101 and options.

Spin rinse dryer.

S-Style Spin rinser dryer on rolling cart (1 bowl system), remanufactured | Accommodates up to 8” low profile | 102 Controllers, Digital | Brushless motor | Non-contact labyrinth seal upgrade for motor drive and bowl assembly | Rotor Quick Disconnect, for a low profile cassette A192-81M | Resistivity Monitor | Static Eliminator Assembly | Complete Documentation Package | Guaranteed Particle counts <50 at .3 micron | Polypropylene Cabinet “Aero Style” | Electro-polished Bowl | Manufactured and Qualified with 17 meg Ohm DI water and class 1 N2.

Spin Rinse Dryer.

S-Style Spin rinser dryer bench top (1 bowl system), remanufactured | Accommodates up to 8” low profile | 102 Controllers, Digital | Brushless motor | Non-contact labyrinth seal upgrade for motor drive and bowl assembly | Rotor Quick Disconnect, for a low profile cassette A192-81M | Resistivity Monitor | Static Eliminator Assembly | Complete Documentation Package | Guaranteed Particle counts <50 at .3 micron | Polypropylene Cabinet “Aero Style” | Electro-polished Bowl | 17 meg Ohm DI water and class 1 N2.

rinser/dryers.

F-Style Spin rinser dryer, single stack with rotor | Accommodates up to 8” low profile | 101 Controllers, Digital | Ferrofluidic Rear Bowl Shaft Seal | Electropolished bowl | Polypropylene Cabinet Aero Style | Electropolished Bowl | 1/2 HP Direct Drive Motor | Rotor to accommodate low profile 8” A192-81M | Static Eliminator | Resistivity | Complete Documentation Package | Guaranteed Particle counts < 25 at .5 micron | 17 meg Ohm DI water and class 1 N2.

F-Style Spin rinser dryer, bench top with rotor | Accommodates up to 8” low profile | 101 Controllers, Digital | Ferrofluidic Rear Bowl Shaft Seal | Electropolished bowl | Polypropylene Cabinet Aero Style | Electropolished Bowl | 1/2 HP Direct Drive Motor | Rotor to accommodate low profile 8” A192-81M | Static Eliminator | Resistivity | Complete Documentation Package | Guaranteed Particle counts < 25 at .5 micron | 17 meg Ohm DI water and class 1 N2.

Dual stack SRD wafer cleaning system | Includes: | Dual PSC-101 Controllers | Anti-Static with N2 Purge | Emergency Power Off (EPO) | Resistivity Monitor and Water Circulation | Quick Disconnect Rotor | N2 Rear Seal | Capable of processing up to 8"/200mm wafers. | Rotors included 2x semitool rotor A192-81M 150MM | Can be inspected | 2000 vintage.

Rotor for SEMITOOL ST 240.

spin rinse dryer, 6" | Capable of 25 wafer batch processing | Bowl Diameter: 15-inches (380mm) | Maximum Round Substrate Size: 9-inches (230mm) | Maximum Square Substrate Size: 8.75-inches (220mm) | Rotor Type: Requires 4-bolt rotors | Controller: Semitool PSC-101 controller | Resistivity Meter | 2002 vintage.

Rotor for SEMITOOL ST240 SRD systems.

Rotors for SEMITOOL ST240 SRD systems.

Wet Solvent Stripper, 4", Semitool graphic controller display screens, chemical cabinet (2 tanks, 1 for redian PRS1000, 1 for fresh PRS1000), (Automatic drain system), Front loading with On-Axis Spin, 4"-6" wafer configurable (current : 4"), 2000 vintage.

Spin Rinse Dryer (SRD), 6" | Includes service manual for a similar tool | All facilities connected | Currently powers up.

Spray acid processor | Chemicals: NH4OH, H2O2, HF | (2) TREBOR MAGNUM 610 pumps | Damages: | This machine can't power on | Parts missing: System CPU Board | Touch monitor failed | 1996 vintage.

Spin Rinse Dryers (SRD) | Dual Axes - Designed to accommodate two rotors; (2) rotors included | Accommodates two each 125mm or 100mm wafer cassettes per run | Includes controllers: P228/C325 | Light Switches: | Heater | Holding | System Power | Door Sealed | Two each rotors: A182-50mb-0215 & A72040mb-0215 included | Start Switch | Stop Switch | Lower opening front access panels for controls: Not included, is missing | Rear access for plumbing panels | Rolling casters.

Spin Rinse Dryer (SRD) | Specifications: | 101 Controllers, Digital | Polypropylene cabinet | Up to 6" process capability | Brushless motor | Teflon DI and N2 lines | Color coded pneumatic tubing | Electropolished Bowls | Labyrinth Seal design | 110V | QD rotor design - No rotors are included | DI resistivity monitor option is included | Anti Static module option is included | DI recirculation option is included.

Double stack unit. 328 3-cycle control. Refurbished unit.

Spin rinse dryer | Specifications: | Single table top unit | (1) 280 bowl assembly | Brushless motors | Electropolished bowl | Labyrinth rear bowl shaft seal | Teflon lines | Pneumatic color-coded line | PSC-101 digital controllers (single rinse and dual dry) | N2 Cartridge heater | N2 Filter | Labyrinth door seal | Accepts QD rotors | Rotor to accommodate 7" squares available for an additional cost.