SEMITOOL 480 D Products

  • SEMITOOL: 480

    Details
    ID#:
    78272
    Category:
    Photoresist
    F-Style Spin rinser dryer, bench top with rotor | Accommodates up to 8” low profile | 101 Controllers, Digital | Ferrofluidic Rear Bowl Shaft Seal | Electropolished bowl | Polypropylene Cabinet Aero Style | Electropolished Bowl | 1/2 HP Direct Drive Motor | Rotor to accommodate low profile 8” A192-81M | Static Eliminator | Resistivity | Complete Documentation Package | Guaranteed Particle counts < 25 at .5 micron | 17 meg Ohm DI water and class 1 N2.
  • SEMITOOL: 480 S

    Details
    ID#:
    135528
    Category:
    Photoresist
    Spin Rinse Dryer with PSC101 and options.
  • SEMITOOL: 480 S

    Details
    ID#:
    148515
    Category:
    Photoresist
    Spin rinse dryer.
  • SEMITOOL: 480

    Details
    ID#:
    84362
    Category:
    Photoresist
    Spin Rinse Dryer.
  • SEMITOOL: 480

    Details
    ID#:
    78271
    Category:
    Photoresist
    F-Style Spin rinser dryer, single stack with rotor | Accommodates up to 8” low profile | 101 Controllers, Digital | Ferrofluidic Rear Bowl Shaft Seal | Electropolished bowl | Polypropylene Cabinet Aero Style | Electropolished Bowl | 1/2 HP Direct Drive Motor | Rotor to accommodate low profile 8” A192-81M | Static Eliminator | Resistivity | Complete Documentation Package | Guaranteed Particle counts < 25 at .5 micron | 17 meg Ohm DI water and class 1 N2.
  • SEMITOOL: 480

    Details
    ID#:
    78270
    Category:
    Photoresist
    S-Style Spin rinser dryer bench top (1 bowl system), remanufactured | Accommodates up to 8” low profile | 102 Controllers, Digital | Brushless motor | Non-contact labyrinth seal upgrade for motor drive and bowl assembly | Rotor Quick Disconnect, for a low profile cassette A192-81M | Resistivity Monitor | Static Eliminator Assembly | Complete Documentation Package | Guaranteed Particle counts <50 at .3 micron | Polypropylene Cabinet “Aero Style” | Electro-polished Bowl | 17 meg Ohm DI water and class 1 N2.
  • SEMITOOL: 480

    Details
    ID#:
    71201
    Category:
    Photoresist
    Wafer Size:
    8" 
    S-Style Spin rinser dryer on rolling cart (1 bowl system), remanufactured | Accommodates up to 8” low profile | 102 Controllers, Digital | Brushless motor | Non-contact labyrinth seal upgrade for motor drive and bowl assembly | Rotor Quick Disconnect, for a low profile cassette A192-81M | Resistivity Monitor | Static Eliminator Assembly | Complete Documentation Package | Guaranteed Particle counts <50 at .3 micron | Polypropylene Cabinet “Aero Style” | Electro-polished Bowl | Manufactured and Qualified with 17 meg Ohm DI water and class 1 N2.
  • SEMITOOL: 480 D

    Details
    ID#:
    24500
    Category:
    Photoresist
    rinser/dryers.
  • SEMITOOL: WST-406MG

    Details
    ID#:
    35587
    Category:
    Photoresist
    Wafer Size:
    Vintage:
    2000 
    Wet Solvent Stripper, 4", Semitool graphic controller display screens, chemical cabinet (2 tanks, 1 for redian PRS1000, 1 for fresh PRS1000), (Automatic drain system), Front loading with On-Axis Spin, 4"-6" wafer configurable (current : 4"), 2000 vintage.
  • SEMITOOL: A72-40MB

    Details
    ID#:
    198296
    Category:
    Spare Parts
    Rotor for SEMITOOL ST240 SRD systems.
  • SEMITOOL: A182-39M

    Details
    ID#:
    198294
    Category:
    Spare Parts
    Rotors for SEMITOOL ST240 SRD systems.
  • SEMITOOL: 4300S

    Details
    ID#:
    77166
    Category:
    Photoresist
    Wafer Size:
    6" 
    Vintage:
    2002 
    spin rinse dryer, 6" | Capable of 25 wafer batch processing | Bowl Diameter: 15-inches (380mm) | Maximum Round Substrate Size: 9-inches (230mm) | Maximum Square Substrate Size: 8.75-inches (220mm) | Rotor Type: Requires 4-bolt rotors | Controller: Semitool PSC-101 controller | Resistivity Meter | 2002 vintage.
  • SEMITOOL: A190-60M-0215

    Details
    ID#:
    200689
    Category:
    Photoresist
    Rotor for SEMITOOL ST 240.
  • SEMITOOL: 880S

    Details
    ID#:
    9038591
    Category:
    Photoresist
    Stand alone spin rinse dryer, 8" | | Includes: | DI Water: 30-40 PSI | N2: 30-40 PSI | Single axis | Rotor | Resistivity prove and cell | Teflon and PVDF fluid path | Fully automated door, slides up and down | Spare door | Heat options | Rinse to resistivity | Other Semitool OEM upgrades | Does not include PCS 101 or 102 controller.
  • SEMITOOL: ST 240D

    Details
    ID#:
    103676
    Category:
    Photoresist
    Mobile Spin Rinse Dryer with Controller and TC-20 Resistivity Monitor | Stored in a warehouse.
  • SEMITOOL: Equinox

    Details
    ID#:
    70448
    Category:
    Reactors
    Vintage:
    1998 
    Plating machine | Single cup 8" copper plater | Chemical plating solution supply tank ~5 gallons | No external bulk fill with the system | No external heat exchanger with the system | Some fire suppression controls are present but not complete | No fire extinguisher tank | | Services: | Nitrogen, vacuum, chilled water, di water, CDA and exhaust | Dedicated CO2 fire suppression system | | Chemicals: | Copper sulfate | Sulfuric acid | Hydrochloric acid | Organic additives | | Exhaust: EF-LF 9A | Power fed from: LF-UP 2, circuit #4, via underfloor buss duct #4 | | Power supply and manual included | 1998 vintage.
  • SEMITOOL: A72-40MB-10215

    Details
    ID#:
    70129
    Category:
    Spare Parts
    Rotor.
  • SEMITOOL: ST 2700

    Details
    ID#:
    164135
    Category:
    Photoresist
    Wafer Size:
    5" 
    Rinser/Dryer configured for processing 5" wafers.
  • SEMITOOL: Raider ECD

    Details
    ID#:
    9040376
    Category:
    Photoresist
    Au Plating system, 6" | For 6" GaAs substrates | | Process modules: | (4) Raptor process chambers for Au ECD | (2) SRD Process chambers for final DI rinsing and N2 drying | SEMITOOL 502 Windows based control system | ULPA mini-environment | CO2 Fire suppression system | | Automation: | SEMITOOL robot with edge-grip end effector | | WIP: | 1-2 Position open cassette WIP for 6" cassettes | | Tanks: | 120-Liter process tank and associated plumbing for Au plating chemistry | | Ancillary equipment: | External heater / chiller unit for Au plating chemistry temperature control | | 2010 vintage.
  • SEMITOOL: SAT

    Details
    ID#:
    9043972
    Category:
    Photoresist
    Spray Acid Tool, 6".
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