SEMITOOL 480 D Products

  • SEMITOOL: 480

    Details
    ID#:
    78272
    Category:
    Photoresist
    F-Style Spin rinser dryer, bench top with rotor | Accommodates up to 8” low profile | 101 Controllers, Digital | Ferrofluidic Rear Bowl Shaft Seal | Electropolished bowl | Polypropylene Cabinet Aero Style | Electropolished Bowl | 1/2 HP Direct Drive Motor | Rotor to accommodate low profile 8” A192-81M | Static Eliminator | Resistivity | Complete Documentation Package | Guaranteed Particle counts < 25 at .5 micron | 17 meg Ohm DI water and class 1 N2.
  • SEMITOOL: 480

    Details
    ID#:
    84362
    Category:
    Photoresist
    Spin Rinse Dryer.
  • SEMITOOL: 480 S

    Details
    ID#:
    135528
    Category:
    Photoresist
    Spin Rinse Dryer with PSC101 and options.
  • SEMITOOL: 480 S

    Details
    ID#:
    148515
    Category:
    Photoresist
    Spin rinse dryer.
  • SEMITOOL: 480 D

    Details
    ID#:
    24500
    Category:
    Photoresist
    rinser/dryers.
  • SEMITOOL: 480

    Details
    ID#:
    78271
    Category:
    Photoresist
    F-Style Spin rinser dryer, single stack with rotor | Accommodates up to 8” low profile | 101 Controllers, Digital | Ferrofluidic Rear Bowl Shaft Seal | Electropolished bowl | Polypropylene Cabinet Aero Style | Electropolished Bowl | 1/2 HP Direct Drive Motor | Rotor to accommodate low profile 8” A192-81M | Static Eliminator | Resistivity | Complete Documentation Package | Guaranteed Particle counts < 25 at .5 micron | 17 meg Ohm DI water and class 1 N2.
  • SEMITOOL: 480

    Details
    ID#:
    78270
    Category:
    Photoresist
    S-Style Spin rinser dryer bench top (1 bowl system), remanufactured | Accommodates up to 8” low profile | 102 Controllers, Digital | Brushless motor | Non-contact labyrinth seal upgrade for motor drive and bowl assembly | Rotor Quick Disconnect, for a low profile cassette A192-81M | Resistivity Monitor | Static Eliminator Assembly | Complete Documentation Package | Guaranteed Particle counts <50 at .3 micron | Polypropylene Cabinet “Aero Style” | Electro-polished Bowl | 17 meg Ohm DI water and class 1 N2.
  • SEMITOOL: 480

    Details
    ID#:
    71201
    Category:
    Photoresist
    Wafer Size:
    8" 
    S-Style Spin rinser dryer on rolling cart (1 bowl system), remanufactured | Accommodates up to 8” low profile | 102 Controllers, Digital | Brushless motor | Non-contact labyrinth seal upgrade for motor drive and bowl assembly | Rotor Quick Disconnect, for a low profile cassette A192-81M | Resistivity Monitor | Static Eliminator Assembly | Complete Documentation Package | Guaranteed Particle counts <50 at .3 micron | Polypropylene Cabinet “Aero Style” | Electro-polished Bowl | Manufactured and Qualified with 17 meg Ohm DI water and class 1 N2.
  • SEMITOOL: 4300S

    Details
    ID#:
    77166
    Category:
    Photoresist
    Wafer Size:
    6" 
    Vintage:
    2002 
    spin rinse dryer, 6" | Capable of 25 wafer batch processing | Bowl Diameter: 15-inches (380mm) | Maximum Round Substrate Size: 9-inches (230mm) | Maximum Square Substrate Size: 8.75-inches (220mm) | Rotor Type: Requires 4-bolt rotors | Controller: Semitool PSC-101 controller | Resistivity Meter | 2002 vintage.
  • SEMITOOL: 880S

    Details
    ID#:
    9038591
    Category:
    Photoresist
    Stand alone spin rinse dryer, 8" | | Includes: | DI Water: 30-40 PSI | N2: 30-40 PSI | Single axis | Rotor | Resistivity prove and cell | Teflon and PVDF fluid path | Fully automated door, slides up and down | Spare door | Heat options | Rinse to resistivity | Other Semitool OEM upgrades | Does not include PCS 101 or 102 controller.
  • SEMITOOL: WST-406MG

    Details
    ID#:
    35587
    Category:
    Photoresist
    Wafer Size:
    Vintage:
    2000 
    Wet Solvent Stripper, 4", Semitool graphic controller display screens, chemical cabinet (2 tanks, 1 for redian PRS1000, 1 for fresh PRS1000), (Automatic drain system), Front loading with On-Axis Spin, 4"-6" wafer configurable (current : 4"), 2000 vintage.
  • SEMITOOL: A182-39M

    Details
    ID#:
    198294
    Category:
    Spare Parts
    Rotors for SEMITOOL ST240 SRD systems.
  • SEMITOOL: A190-60M-0215

    Details
    ID#:
    200689
    Category:
    Photoresist
    Rotor for SEMITOOL ST 240.
  • SEMITOOL: A72-40MB

    Details
    ID#:
    198296
    Category:
    Spare Parts
    Rotor for SEMITOOL ST240 SRD systems.
  • SEMITOOL: Rotors

    Details
    ID#:
    51679
    Category:
    Spare Parts
    for SRDs and 6" wafer size.
  • SEMITOOL: ST 2700

    Details
    ID#:
    9036264
    Category:
    Photoresist
    Wafer Size:
    6" 
    Vintage:
    1989 
    SRD, 6" | 1989 vintage.
  • SEMITOOL: ECP LT210 CU

    Details
    ID#:
    9032612
    Category:
    Photoresist
    Wafer Size:
    8" 
    Vintage:
    2000 
    CMP - Cu plating system, 8" | (10) Chambers | Module: CMP/CU | SMIF interface: (2) Asyst indexers | | Process application: copper plating | Copper process: yes | Batch/single wafer: single wafer | Electrochemical copper deposition in dil, CuSO4/H2SO4 solution with organic additives; backside cleaning and bevel etching with dil. PIR-Solution | | CE marked | Configuration: (6) plating chambers, (4) bevel etch capsules | | Features: | External chem. conc. control by support tool | Capable of Pulse-Reverse-Plating and DC-Plating and Hot-Entry | ECD chamber retrofit (wet contact rings and finger clean) | Photometric in situ analysis of Cu and H2SO4 | Robot beam upgrade | Capsule retrofit (fingerless rotors) | Capsule retrofit: one piece delivery manifold | Modified bowl return-flow for bubble suppression | M&W Systems chiller | Dynatronix power supply upgrade | Capsules: adjustable flowmeters for chemical supply | UPS-retrofit (data saving in case of power loss) | Plating rotors with extended wafer supporting posts | Configuration: EPC LT210 Cu | | Crated | 2000 vintage.
  • SEMITOOL: SST-264

    Details
    ID#:
    9033429
    Category:
    Photoresist
    Spray solvent tool, 4".
  • SEMITOOL: ST-870

    Details
    ID#:
    9030618
    Category:
    Photoresist
    Spin rinse dryer, (SRD).
  • SEMITOOL: Paragon

    Details
    ID#:
    9030610
    Category:
    Photoresist
    Wafer Size:
    8" 
    System, 8".
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