SEMITOOL 480 D Products

  • SEMITOOL: 480

    Details
    ID#:
    9074408
    Category:
    Photoresist
    Spin Rinse Dryers | Mainframe: 880.
  • SEMITOOL: 480 D

    Details
    ID#:
    24500
    Category:
    Photoresist
    rinser/dryers.
  • SEMITOOL: 480 S

    Details
    ID#:
    135528
    Category:
    Photoresist
    Spin Rinse Dryer with PSC101 and options.
  • SEMITOOL: 480

    Details
    ID#:
    78272
    Category:
    Photoresist
    F-Style Spin rinser dryer, bench top with rotor | Accommodates up to 8” low profile | 101 Controllers, Digital | Ferrofluidic Rear Bowl Shaft Seal | Electropolished bowl | Polypropylene Cabinet Aero Style | Electropolished Bowl | 1/2 HP Direct Drive Motor | Rotor to accommodate low profile 8” A192-81M | Static Eliminator | Resistivity | Complete Documentation Package | Guaranteed Particle counts < 25 at .5 micron | 17 meg Ohm DI water and class 1 N2.
  • SEMITOOL: 480

    Details
    ID#:
    78271
    Category:
    Photoresist
    F-Style Spin rinser dryer, single stack with rotor | Accommodates up to 8” low profile | 101 Controllers, Digital | Ferrofluidic Rear Bowl Shaft Seal | Electropolished bowl | Polypropylene Cabinet Aero Style | Electropolished Bowl | 1/2 HP Direct Drive Motor | Rotor to accommodate low profile 8” A192-81M | Static Eliminator | Resistivity | Complete Documentation Package | Guaranteed Particle counts < 25 at .5 micron | 17 meg Ohm DI water and class 1 N2.
  • SEMITOOL: 480

    Details
    ID#:
    84362
    Category:
    Photoresist
    Spin Rinse Dryer.
  • SEMITOOL: 480

    Details
    ID#:
    78270
    Category:
    Photoresist
    S-Style Spin rinser dryer bench top (1 bowl system), remanufactured | Accommodates up to 8” low profile | 102 Controllers, Digital | Brushless motor | Non-contact labyrinth seal upgrade for motor drive and bowl assembly | Rotor Quick Disconnect, for a low profile cassette A192-81M | Resistivity Monitor | Static Eliminator Assembly | Complete Documentation Package | Guaranteed Particle counts <50 at .3 micron | Polypropylene Cabinet “Aero Style” | Electro-polished Bowl | 17 meg Ohm DI water and class 1 N2.
  • SEMITOOL: WST-406MG

    Details
    ID#:
    35587
    Category:
    Photoresist
    Wafer Size:
    Vintage:
    2000 
    Wet Solvent Stripper, 4", Semitool graphic controller display screens, chemical cabinet (2 tanks, 1 for redian PRS1000, 1 for fresh PRS1000), (Automatic drain system), Front loading with On-Axis Spin, 4"-6" wafer configurable (current : 4"), 2000 vintage.
  • SEMITOOL: 880S

    Details
    ID#:
    9038591
    Category:
    Photoresist
    Stand alone spin rinse dryer, 8" | | Includes: | DI Water: 30-40 PSI | N2: 30-40 PSI | Single axis | Rotor | Resistivity prove and cell | Teflon and PVDF fluid path | Fully automated door, slides up and down | Spare door | Heat options | Rinse to resistivity | Other Semitool OEM upgrades | Does not include PCS 101 or 102 controller.
  • SEMITOOL: 4300S

    Details
    ID#:
    77166
    Category:
    Photoresist
    Wafer Size:
    6" 
    Vintage:
    2002 
    spin rinse dryer, 6" | Capable of 25 wafer batch processing | Bowl Diameter: 15-inches (380mm) | Maximum Round Substrate Size: 9-inches (230mm) | Maximum Square Substrate Size: 8.75-inches (220mm) | Rotor Type: Requires 4-bolt rotors | Controller: Semitool PSC-101 controller | Resistivity Meter | 2002 vintage.
  • SEMITOOL: WSST

    Details
    ID#:
    9067596
    Category:
    Photoresist
    Solvent processors, 8" | Non-SMIF.
  • SEMITOOL: 480S

    Details
    ID#:
    9021897
    Category:
    Photoresist
    Spin Rinser Dryer (SRD) | 101 controllers, digital | Polypropylene cabinet | Up to 8" process capability | Brushless motor | Teflon DI and N2 lines | Color coded pneumatic tubing | Bowls to be electropolished | Labyrinth seal design | 220 V ready system (transformer included) | QD rotor design | | Options included: | Static eliminator | DI resistivity probes | (1) QD rotor (8") - low profile cassette only.
  • SEMITOOL: Paragon P210-F2-P2-T1-8-EE-5-2

    Details
    ID#:
    182420
    Category:
    Photoresist
    Wafer Size:
    4" 
    Vintage:
    2002 
    Eletroplating multibath, 4" | | Two Cassette WIP station | Two Linear robots | | Three ECD reactors for plating copper comprised of the following: | Three Natural Polypropylene CFD2 chamber | Three lift and rotate mechanisms with ring contact | One 85 liter chemical reservoir with one centrifugal pump for each electroplating chamber | One filter housing (filter cartridge not included) unit per chamber | | One ECD reactor for plating nickel comprised of the following: | One Natural Polypropylene CFD2 chamber | One lift and rotate mechanism with ring contact | One 36 liter chemical reservoir with one centrifugal pump for electroplating | One filter housing (filter cartridge not included) | | Two ECD reactors for plating gold comprised of the following: | Two Natural Polypropylene CFD2 chamber | Two Lift and rotate mechanisms with ring contact | One 36 liter chemical reservoir with one centrifugal pump for electroplating | One filter housing (filter cartridge not included) unit per chamber | | One Spray Acid Chamber | The Spray Acid chamber is for pre-treating the wafers before plating | One 20 liter chemical reservoir with one pneumatic pump | One filter housing (filter cartridge not included) | | One Pre-align Module | The pre-aligner ensures, the wafer go into the chambers in the correct position | | One SRD Module | The Spin Rinse Dry module is for rinsing and drying the substrates after/between plating | | Other Features | Distributed process controller, front and rear color touch screen | Data Logging and GEM/SECS II Software | Standard Fire Retardant Polypropylene | CO2 Fire Suppression as standard | | One 4-Bay CDU | | In original package | 2002 vintage.
  • SEMITOOL: Raider SP312

    Details
    ID#:
    9074630
    Category:
    Etchers / Ashers
    Wafer Size:
    12" 
    Vintage:
    2007 
    Etcher / Clean System, 12" | Single wafer processing | Stand-Alone Type | Model: RE12F4SPD1205 | Cassette Interface: (4) Integrated 12" FOUP Load-Ports | | Main Tool | Process stations: CP1-CP12 (FEOL) | Process Flow: CP1, CP2, CP3, CP4, CP5, CP6, CP7, CP8, CP9, CP10, CP11, CP12 | Status Lamp (R/B/Y/G) | User Interface: Front-side mounted, Flat Panel Monitor, Keyboard/Mouse | WIP Robot | Process Robot (Track) | Electrical & Module Computers | Buffer Tower | | Chamber Configuration | Lift Assembly | Rotate Assembly | ARD Motor | ARD Swing Arm | Cylinder (Up/Down) assembly | Chamber Cover | Drip tray | Rotor | Stand-off support Pin | Chuck Pin Finger | Splash Ring | DIWSID Nozzles | | Chemical Tanks: | | T1 & T2 Chemical Tank | Operating Temp.: 25°C | Chemical: H2SO4/H2O2/DI | Measure: 20L | | T3 & T5 Chemical Tank | Operating Temp.: 25°C | Chemical: HF/DI | Measure: 40L | | T4 Chemical Tank | Operating Temp.: 25°C | Chemical: HF/DI | Mix: 1:100 DHF | Measure: 40L | | Supporting Equipment | ABB Concentration Computer Unit | Fire Suppression system | Hot DIW Heater | Ozone (O3) Gas Generator | (2) Cooling Units: (1) IPA vapor gas, (1) Chemical tanks | Power Box | | Dry pumps: not included | Currently in a cleanroom | 2007 vintage.
  • SEMITOOL: 2300S

    Details
    ID#:
    151756
    Category:
    Photoresist
    Wafer Size:
    Up To 12" 
    Spin rinse dryer, up to 12".
  • SEMITOOL: 880S

    Details
    ID#:
    151757
    Category:
    Photoresist
    Wafer Size:
    Up To 8" 
    Spin rinse dryer, up to 8".
  • SEMITOOL: SSTF221270PB

    Details
    ID#:
    9097495
    Category:
    Photoresist
    Vintage:
    1996 
    Spray Solvent Tool (SST) | (2) Heated tanks: 6 gallons | Trebor pump | Vertical auto door | Bowl size: 270 | 380V, 3 Phase, 50/60Hz, 16A, 5 Wires | 1996 vintage.
  • SEMITOOL: Storm II

    Details
    ID#:
    9075415
    Category:
    Box Washers
    Box and Carrier cleaner, 8" | Cassette ladder: missing.
  • SEMITOOL: Storm II

    Details
    ID#:
    9075046
    Category:
    Box Washers
    Wafer Size:
    8" 
    Vintage:
    2001 
    Spray cleaning tool, 8" | Pod/cassette clean: (6) racks which can hold (6) pods and (8) cassettes (4) reticle pods | Missing parts: power breakers and power relays | 2001 vintage.
  • SEMITOOL: Magnum

    Details
    ID#:
    9067007
    Category:
    Spare Parts
    Wafer Size:
    6" 
    Lot of spare parts for 6" system: | | 8 000M2979-01 COMB ROTOR 150MM ROTAINER | 7 570U0010-01 CLATCH ASM ROTAINER PLATE | 1 500U0119-01 ROTOR ASSY ROTAINER SAT 25 WAF | 1 PF100FLR CATCHER PREFILTER | 1 23724-01 BOARD ASSY SENSOR | 1 310C0022-01 ACTUATOR 1/4 FAST ACTING | 1 310U0002-01 ACTUATOR ASSY DRN 3/4 VALVE NC | 1 310U0001-01 ACTUATOR ASSY DRN 3/4 VALVE NO | 1 310C0025-501 ACTUATOR 3/8 ACTING NC | 2 310C0031-01 ACTUATOR 3/8 SLOW ACTING NC | 1 311R0002-501 BODY 3/8 VALVE 2 STG | 1 311R0002-505 BODY 3/8 VALVE 4 STG | 1 311C0004-501 VALVE BODY DRAIN 3/4X4 | 2 311R0004-501 BODY 3/8 VALVE 2STG 1/2 | 2 329C0023-01 BODY ASPIRATOR | 15 313C0001-01 POPPET DIA 3/4 DRAIN | 1 70752 ADAPTER 1SLP X 1 NPT | 2 372R0002-01 BELLOW METERING PUMP | 3 70904-02 GAUGE PRESSURE 0-30/ 0-60 PSI | 1 70905-01 REGULATOR AIR SS | 2 133U0002-01 SUP.ROD CPC DOOR LH | 4 133U0002-02 SUP.ROD CPC DOOR RH | 1 3039-02 AIR CYLINDER 091-D BIMBA | 2 3039-03 AIR CYLINDER 121-D | 2 70867-03 ADAPTATOR 3/8X1/2 VCR | 1 4021-01 ENCODER INCREMENTAL LOW PROFIL | 6 80785-01 NOZZLE BLOW OFF WIND. | 1 352R0011-03 ADAPTER DRAIN MANIFOLD 2X6 | 1 315C0001-01 ACTUATOR HOUSING 3/4 | 2 70765-02 ADAPTER 2 SLP X 2 | 8 HNUT340708 NUT 3/4 FLARETEK PFA | 1 16750-501 BOARD ASSY 32 BIT | 3 116R0002-01 SEAL BOWL 240-300 WHT | 2 73082 THERMOCOUPLE TYPE J 9FT | 1 70887-10 FURON 958 DOOR CYLINDER SEAL | 1 70887-11 FURON 959 DOOR CYLINDER SEAL | 1 121R0001-503 SEAL DOOR 280 WHT | 1 351R0007-01 MANIFOLD SPRAY TEF.9 POS. | 1 354R0001-01 MANIFOLD N2 280 | 1 386U0004-01 BRKT LEVEL 20L TNK LID | 1 122U0006-507 DOOR 280 VAD CPC | 1 60270-220 HEATER BLNKT 6 X 7 3/4 220V 290W | 10 61707-81 WIRE BLACK 8 GA STRANDED | 1 73018 CAPACITIVE PROXIMITY SWITCH | 2 326R0007-01 TEE RUN 3/8 X 3/8 FLR | 3 324R0094-01 ADAPTATOR 3/8 X 3/8 NPTF | 1 324C0006-01 ADAPTOR 1/4 X 3/8 FLRTK | 1 325R0004-01 ADAPTER 3/8 X 1/2 FLR | 1 325R0011-01 ADAPTER 3/8 X 3/8 FLR ELBOW | 2 324R0007-01 ADAPTER 3/8 X 3/8 FLR | 1 324R0038-01 ADAPTER 3/8 X 1/4 FLR | 4 324R0023-01 ADAPTOR 3/4FLR X 3/4DRN | 2 70835-60 ADAPTER 3/4NPT X 3/4FLR | 3 70866-50 ADAPTOR 3/8TB X 1/4NPTF | 1 316C0001-01 ACTUATING DIA.3/4 TFE | 7 313C0005-01 POPPET DIA.3/8 SA&FA | 9 343C0002-501 NOZZLE RET. TFE | 14 343C0002-01 NOZZLE RET. TFE | 11 341U0001-01 NOZZLE CPC FRONT RINSE KEL-F | 6 341U0001-503 NOZZLE CPC FRONT RINSE | 12 70736-03 ADAPTOR 1/8NPT X 10/32KYNAR | 1 341U0001-501 NOZZLE CHEM H-FLOW KEL-F. | 5 341U0005-01 NOZZLE DAM HIGH FLOW | 15 70732-08 BARB KYNAR 10-32 X 1/16 BELLOW | 10 000M2975-01 BUMPER ROTAINER ROD | 17 70732-06 BARB KYNAR 10-32 X 1/16 STAIGH | 15 70992 BARB KYNAR 10-32UNF X 1/8TB | 10 000M2975-501 BUMPER ROTAINER ROD OVAL | 1 341R0010-03 NOZZLE 80 CONE SPRAY POLY SHOR | 1 311R0003-01 BODY 3/8 V.1 STG | 1 311R0002-01 BODY 3/8 V 1 STG 3/8 FLA | 2 313C0003-01 POPPET DPHRGM 3/8 .425X.627 | 5 000M3822-01 LATCH PLATE CARR. SAT ROTOR | 5 424U0001-05 BRKT SHROUD MOUNT AUTO DOOR WT | 1 386U0006-01 BRKT LEVEL SENSOR QUICK RELEAS | 1 371R0009-01 HOUSING CAP METERING PUMP | 3 317C0002-01 ACTUATOR CAP 3/4 V PVC | 3 21029-03 BRKT LEVEL SENSOR SPRING LOAD | 1 70752-02 ADAPTER 2SLP X 2NPT PVC | 5 21029-11 BUSHING LEVEL SENSOR SPRING LO | 1 133U0003-01 BUSHING SHUTTLE TUBE 260/70/80 | 1 70804-02 REGULATOR AIR ADJUST.1/8 FNPT | 7 95201-06 BUMPER DOOR 260/70/80 VAD | 1 76015 SEAL ROTOR SHAFT TFE | 2 73082-14 THERMOCOUPLE J-TYPE 11/2 SHEALTH 1/8 | 1 61566-01 SWITCH PUSH BUTTON NO MOM CLOS | 3 922R0003-501 BRKT ELL 3 HOLE | 1 72049-01 REGULATOR FLOW ADJ.NICKEL PLAT | 1 312C0002-01 RETAINER PLATE ROLLED SS | 1 312C0002-501 RETAINER PLATE FLAT SS | 8 73082-05 CONTROLER THERMOCOUPLE MTP J-FEMME | 6 73082-09 CONTROLER THERMOCOUPLE MTP J-MALE | 1 240R0001-01 CARTRIDGE FERROFLUID (SRD) | 4 70824 ADPT 1/4 NPT X 1/4 TB TEFL.CAR | 1 70821-60 ELBOW 1/4 NPT X 1/4 FLR | 1 70875-65 UNION 1/2 FLR | 2 HNUT380708 NUT 3/8 FLARETEK | 2 ZHNUT120708 NUT 1/2 FLARETEK PFA | 9 427U0004-01 NUT CONTACT SWITCH CPC VAD | 2 427U0005-01 RING LOCK SWITCH | 3 Z73066 PIN CONTACT SPLIT 18-26GA | 3 315R0008-01 HOUSING ACTUATOR METERING PUMP | 10 000M4663-03 PIN SNAP ROTOR LONG | 3 323R0001-01 GRIPPER METERING PUMP PVDF | 3 317C0004-501 CAP ACTUATOR 1/4 3/8 VLV PVDF | 1 373R0009-01 PISTON DRIVE METERING PUMP | 4 000M3822-01 LATCH PLATE CARRIERLESS SAT | 5 000M2467-507 PIN | 8 000M2467-501 PIN CROSS RETAINER KEL-F | 5 313C0003-501 POPPET DPHRGM 3/8 | 1 000M3811-01 PIN LATCH .375 X 1.69 KEL-F | 1 000M2467-509 PIN CROSS .250 X .500 KEL-F | 2 000M2467-503 PIN CROSS .375 X 1.06 KEL-F | 2 000M2467-01 PIN CROSS .250 X 1.06 KEL-F | 6 4612-03 SENSOR OPTICAL RECEIVER | 4 62730-01 DAMPENER VIBRATION SHOCK | 2 316C0002-01 DIAPHRAM ACTUATING 1/4 3/8 | 14 70843-12 BARB STRGHT 3/32 X 10-32 UNC NYLON | 15 70843-13 BARB ELBOW 3/32X10-32 KYNAR | 2 70964 BARB KYNAR 1/8 X 10/32 ELBOW | 14 319C0004-01 INSERT SEAT/PLUG DRAIN TFE | 3 319C0004-501 INSERT SEAT/PLUG DRAIN TFE NO | 3 313R0006-01 POPPET BELLOWS METERING PUMP | 3 374R0003-501 CLAMP ACTUATOR METERING PUMP | 3 SUNX EX-13P EMETTEURS NPN | 3 374R0003-503 CLAMP BELLOW METERING PUMP | 1 CX-D800-PN DIFFUSE REFLECTIVE 800MM | 1 73020-02 SWITCH FLOAT VERTICAL PVDF | 1 WSHRF030M0008 WASHER FLAT TFE #8 X .030 THK | 1 134R0025-01 CYLINDER INNER 260/70/80 CPC | 1 000M3022-503 COMB ELEVATOR C-LESS 6 | 1 114U0006-01 ELBOW DRAIN 260-280 CPC | 1 114U0005-507 ADPT DRAIN BLOCK 3.13 LONG | 1 253R0022-001 RSP 280/300 SLOW ACTING | 1 R108-01 VALVE STD H2O | 1 11018-01 RETAINER SEAL 260/70/80 CPC | 10 ORNG102D04489 O-RING 047 | 4 ORNG012F08038 O-RING 266 | 1 165633 MOTOR ELBOW DRIVE | 1 3045-02 SEAL FURON | 1 3045-01 SEAL FURON 6.5 ODX 6.25 ID | 1 3002-01 BEARING ELBOW RIGHT ROBOT MAG. | 1 3002-08 BEARING KA050ARO SMIF ROTARY | 2 000M2752-01 COVER FRT. PLATE DRIVE ROTARY | 1 4017-01 ENCODER ABSOLUTE W/INTERPERLAT | 1 FMP8SU STRAIGHT UNION 1/2" | 12 FMP8SUP STRAIGHT UNION PANEL 1/2" | 1 FMP8UE UNION ELBOW | 4 FMP12SU STRAIGHT UNION 3/4" | 3 FMP12SUP STRAIGHT UNION PANEL 3/4" | 3 FMP812UR UNION REDUCER 1/2"X 3/4" | 4 FMP12UE UNION ELBOW 3/4" | 4 FMP12FF12UE FEMALE FLARE UNION ELBOW 3/4" | 1 396003-300-14F SMIF INTERFACE 6" | 1 013500-225-26F CONTROL UNIT 230V WITHOUT PIF | 1 LDFFN1F00113E5S FILTRE | 2 72068-50 RODLESS CYLINDER | 1 000M4689-01 COMB SIDE 150MM ROTOR KEL-F | 1 000M4644-01 COMB ROTOR ROTAINER KEL-F | 1 000M4644-501 COMB ROTOR ROTAINER KEL-F | 2 ORNGO12H17455 O-RING 464 | 1 550U0011-502 COMB 150MM CARRIERLESS | 1 550U0011-01 COMB 150MM CARRIERLESS | 2 251U0001-03 DISC OTICAL SENSOR 60 SLOT | 2 324R0027-01 UNION 3/4 FLR X 3/4 FLR BHD | 3 70734-60 UNION 1/2 FLRTK BLKHD | 1 70977-60 UNION 3/4 FLR BHD | 1 550U0010-01 PLAT ROTAINER SAT | 1 000M3814-01 PIN PIVOT ROTATE RETAINER 2.14 | 1 000M3814-501 PIN PIVOT ROTATE RETAINER | 4 333U0027-01 SPRING LEVEL SENSOR SAT CL1 | 1 361 012 POWER SUPPLY +24V 220V INPUT | 1 16839-503 BOARD ASSY FIBEROPTIC LNK 12PRTRCV NO DOOR | 1 Z16838-01 BOARD FIBEROPTIC TRANS CARRIAG | 2 23710-01 BOARD HORIZONTAL SLIDE ENCODER | 1 4005-01 BOARD MOTION MAGNUM 4 AXIS | 1 16846-01 BOARD MULTIFUNCTION | 1 T70905-19 REGULATOR O-125 PSI | 4 4022-03 BLOCK PILLOW MOTION | 1 62808-04 SWITCH SNAPMAIN RESET N2 HEATER | 1 16838-01 BOARD ASSY FIBER OPTIC | 4 70732-09 BARB BRANCH TEE 10-32 X 1/16 KYNAR | 2 FLOWMETER 75ml/min | 1 3011-01 BANDE METALLIQUE MS5X.X6 MK, SANS ADHESIF L=4000mm | 2 000M4607-01 BAR RETAINER 200mm 50WAFER CARRIERLESS | 8 000M4663-01 ROTOR LATCH PIN SHORT | 1 013501-815-25 SMIF ARM CONTROLLER IV-BOARD | 1 EX-13A SENSOR THRU-BEAM 500mm, NPN LIGHT-ON (SUNX EX-13A) | 4 T40120-02 CABLE FIBER OPTIC 393 INCHES (10M) | 4 21029-07 SCREW LEVEL SENSOR SPRING LOADED PVC | 3 CABLE POUR PHOTO ELEC. SENSOR (DROIT) | 1 000M3438-01 BLOCK PILLOW FLOATING MOD CARRIAGE MAG | 4 CF-5/8-SB CAM FOLLOWER 5/8 | 2 YR-1032 CAM FOLLOWER.
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