SEMITOOL 480 D Products

  • SEMITOOL: 480

    Details
    ID#:
    78270
    Category:
    Photoresist
    S-Style Spin rinser dryer bench top (1 bowl system), remanufactured | Accommodates up to 8” low profile | 102 Controllers, Digital | Brushless motor | Non-contact labyrinth seal upgrade for motor drive and bowl assembly | Rotor Quick Disconnect, for a low profile cassette A192-81M | Resistivity Monitor | Static Eliminator Assembly | Complete Documentation Package | Guaranteed Particle counts <50 at .3 micron | Polypropylene Cabinet “Aero Style” | Electro-polished Bowl | 17 meg Ohm DI water and class 1 N2.
  • SEMITOOL: 480

    Details
    ID#:
    78272
    Category:
    Photoresist
    F-Style Spin rinser dryer, bench top with rotor | Accommodates up to 8” low profile | 101 Controllers, Digital | Ferrofluidic Rear Bowl Shaft Seal | Electropolished bowl | Polypropylene Cabinet Aero Style | Electropolished Bowl | 1/2 HP Direct Drive Motor | Rotor to accommodate low profile 8” A192-81M | Static Eliminator | Resistivity | Complete Documentation Package | Guaranteed Particle counts < 25 at .5 micron | 17 meg Ohm DI water and class 1 N2.
  • SEMITOOL: 480

    Details
    ID#:
    78271
    Category:
    Photoresist
    F-Style Spin rinser dryer, single stack with rotor | Accommodates up to 8” low profile | 101 Controllers, Digital | Ferrofluidic Rear Bowl Shaft Seal | Electropolished bowl | Polypropylene Cabinet Aero Style | Electropolished Bowl | 1/2 HP Direct Drive Motor | Rotor to accommodate low profile 8” A192-81M | Static Eliminator | Resistivity | Complete Documentation Package | Guaranteed Particle counts < 25 at .5 micron | 17 meg Ohm DI water and class 1 N2.
  • SEMITOOL: 480 D

    Details
    ID#:
    24500
    Category:
    Photoresist
    rinser/dryers.
  • SEMITOOL: 480 S

    Details
    ID#:
    148515
    Category:
    Photoresist
    Spin rinse dryer.
  • SEMITOOL: 480 S

    Details
    ID#:
    135528
    Category:
    Photoresist
    Spin Rinse Dryer with PSC101 and options.
  • SEMITOOL: 480

    Details
    ID#:
    84362
    Category:
    Photoresist
    Spin Rinse Dryer.
  • SEMITOOL: 480

    Details
    ID#:
    71201
    Category:
    Photoresist
    Wafer Size:
    8" 
    S-Style Spin rinser dryer on rolling cart (1 bowl system), remanufactured | Accommodates up to 8” low profile | 102 Controllers, Digital | Brushless motor | Non-contact labyrinth seal upgrade for motor drive and bowl assembly | Rotor Quick Disconnect, for a low profile cassette A192-81M | Resistivity Monitor | Static Eliminator Assembly | Complete Documentation Package | Guaranteed Particle counts <50 at .3 micron | Polypropylene Cabinet “Aero Style” | Electro-polished Bowl | Manufactured and Qualified with 17 meg Ohm DI water and class 1 N2.
  • SEMITOOL: WST-406MG

    Details
    ID#:
    35587
    Category:
    Photoresist
    Wafer Size:
    Vintage:
    2000 
    Wet Solvent Stripper, 4", Semitool graphic controller display screens, chemical cabinet (2 tanks, 1 for redian PRS1000, 1 for fresh PRS1000), (Automatic drain system), Front loading with On-Axis Spin, 4"-6" wafer configurable (current : 4"), 2000 vintage.
  • SEMITOOL: A72-40MB

    Details
    ID#:
    198296
    Category:
    Spare Parts
    Rotor for SEMITOOL ST240 SRD systems.
  • SEMITOOL: 880S

    Details
    ID#:
    9038591
    Category:
    Photoresist
    Stand alone spin rinse dryer, 8" | | Includes: | DI Water: 30-40 PSI | N2: 30-40 PSI | Single axis | Rotor | Resistivity prove and cell | Teflon and PVDF fluid path | Fully automated door, slides up and down | Spare door | Heat options | Rinse to resistivity | Other Semitool OEM upgrades | Does not include PCS 101 or 102 controller.
  • SEMITOOL: A182-39M

    Details
    ID#:
    198294
    Category:
    Spare Parts
    Rotors for SEMITOOL ST240 SRD systems.
  • SEMITOOL: 4300S

    Details
    ID#:
    77166
    Category:
    Photoresist
    Wafer Size:
    6" 
    Vintage:
    2002 
    spin rinse dryer, 6" | Capable of 25 wafer batch processing | Bowl Diameter: 15-inches (380mm) | Maximum Round Substrate Size: 9-inches (230mm) | Maximum Square Substrate Size: 8.75-inches (220mm) | Rotor Type: Requires 4-bolt rotors | Controller: Semitool PSC-101 controller | Resistivity Meter | 2002 vintage.
  • SEMITOOL: A190-60M-0215

    Details
    ID#:
    200689
    Category:
    Photoresist
    Rotor for SEMITOOL ST 240.
  • SEMITOOL: M4620-01

    Details
    ID#:
    9014347
    Category:
    Spare Parts
    Rotor combs.
  • SEMITOOL: Magnum HF/EG

    Details
    ID#:
    9031690
    Category:
    Photoresist
    Wafer Size:
    8" 
    Vintage:
    1997 
    Batch wafer processor, 8" | Software: UIAW 3.4 | (2) Chambers | (1) SRD | Options: Astex ozone generator | Process: pullback pad nitrure 2% HF / 6% H2O / 92% EG 80°C ± 5°C | SMIF: no | Warehoused | 1997 vintage.
  • SEMITOOL: A72-40MB

    Details
    ID#:
    193152
    Category:
    Spare Parts
    Cassette rotor.
  • SEMITOOL: SST-C-621

    Details
    ID#:
    93897
    Category:
    Photoresist
    Vintage:
    1993 
    Spray solvent tool | | Specifications: | Single chamber tool | (Qty 6) tanks | 26" W x 60" D x 66.5" H | Class1 stainless steel cabinet | 6" Max product dimension | 270 size chamber for 6” Substrates | 6" stainless steel tank "A" | PSC-302 Color touch screen controller | 6 high temperature pumps "D" Trebor | Filtration on reclaim tanks 4" 0.2um | Point of use N2 Filter system | Stainless steel rotor | Chemical fill from bottle with pumps | Pancake heaters on tanks | | Chemicals used: | Isopropanol | Stripper ALEG 625 | DI water | | Gases: | Nitrogen | | Previously used for Gold application | Currently stored in a "Gray-Room" with fixed temperature and humidity levels | Crated | 1993 vintage.
  • SEMITOOL: 880S

    Details
    ID#:
    83037
    Category:
    Photoresist
    Spin rinse dryer with rotors.
  • SEMITOOL: 870S

    Details
    ID#:
    88868
    Category:
    Photoresist
    Wafer Size:
    4", 5", 6" 
    Vintage:
    ~ 1994 
    rinse dryer, 4" and 5" (up to 6”), dual stack. De-installed, ~1994 vintage, as is, where is.
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