SEMITOOL 480 D Products

  • SEMITOOL: 480

    Details
    ID#:
    78270
    Category:
    Photoresist
    S-Style Spin rinser dryer bench top (1 bowl system), remanufactured | Accommodates up to 8” low profile | 102 Controllers, Digital | Brushless motor | Non-contact labyrinth seal upgrade for motor drive and bowl assembly | Rotor Quick Disconnect, for a low profile cassette A192-81M | Resistivity Monitor | Static Eliminator Assembly | Complete Documentation Package | Guaranteed Particle counts <50 at .3 micron | Polypropylene Cabinet “Aero Style” | Electro-polished Bowl | 17 meg Ohm DI water and class 1 N2.
  • SEMITOOL: 480

    Details
    ID#:
    78272
    Category:
    Photoresist
    F-Style Spin rinser dryer, bench top with rotor | Accommodates up to 8” low profile | 101 Controllers, Digital | Ferrofluidic Rear Bowl Shaft Seal | Electropolished bowl | Polypropylene Cabinet Aero Style | Electropolished Bowl | 1/2 HP Direct Drive Motor | Rotor to accommodate low profile 8” A192-81M | Static Eliminator | Resistivity | Complete Documentation Package | Guaranteed Particle counts < 25 at .5 micron | 17 meg Ohm DI water and class 1 N2.
  • SEMITOOL: 480

    Details
    ID#:
    84362
    Category:
    Photoresist
    Spin Rinse Dryer.
  • SEMITOOL: 480

    Details
    ID#:
    9074408
    Category:
    Photoresist
    Spin Rinse Dryers | Mainframe: 880.
  • SEMITOOL: 480 D

    Details
    ID#:
    24500
    Category:
    Photoresist
    rinser/dryers.
  • SEMITOOL: 480 S

    Details
    ID#:
    135528
    Category:
    Photoresist
    Spin Rinse Dryer with PSC101 and options.
  • SEMITOOL: 480

    Details
    ID#:
    78271
    Category:
    Photoresist
    F-Style Spin rinser dryer, single stack with rotor | Accommodates up to 8” low profile | 101 Controllers, Digital | Ferrofluidic Rear Bowl Shaft Seal | Electropolished bowl | Polypropylene Cabinet Aero Style | Electropolished Bowl | 1/2 HP Direct Drive Motor | Rotor to accommodate low profile 8” A192-81M | Static Eliminator | Resistivity | Complete Documentation Package | Guaranteed Particle counts < 25 at .5 micron | 17 meg Ohm DI water and class 1 N2.
  • SEMITOOL: 880S

    Details
    ID#:
    9038591
    Category:
    Photoresist
    Stand alone spin rinse dryer, 8" | | Includes: | DI Water: 30-40 PSI | N2: 30-40 PSI | Single axis | Rotor | Resistivity prove and cell | Teflon and PVDF fluid path | Fully automated door, slides up and down | Spare door | Heat options | Rinse to resistivity | Other Semitool OEM upgrades | Does not include PCS 101 or 102 controller.
  • SEMITOOL: WST-406MG

    Details
    ID#:
    35587
    Category:
    Photoresist
    Wafer Size:
    Vintage:
    2000 
    Wet Solvent Stripper, 4", Semitool graphic controller display screens, chemical cabinet (2 tanks, 1 for redian PRS1000, 1 for fresh PRS1000), (Automatic drain system), Front loading with On-Axis Spin, 4"-6" wafer configurable (current : 4"), 2000 vintage.
  • SEMITOOL: A190-60M-0215

    Details
    ID#:
    200689
    Category:
    Photoresist
    Rotor for SEMITOOL ST 240.
  • SEMITOOL: A72-40MB

    Details
    ID#:
    198296
    Category:
    Spare Parts
    Rotor for SEMITOOL ST240 SRD systems.
  • SEMITOOL: 4300S

    Details
    ID#:
    77166
    Category:
    Photoresist
    Wafer Size:
    6" 
    Vintage:
    2002 
    spin rinse dryer, 6" | Capable of 25 wafer batch processing | Bowl Diameter: 15-inches (380mm) | Maximum Round Substrate Size: 9-inches (230mm) | Maximum Square Substrate Size: 8.75-inches (220mm) | Rotor Type: Requires 4-bolt rotors | Controller: Semitool PSC-101 controller | Resistivity Meter | 2002 vintage.
  • SEMITOOL: A182-39M

    Details
    ID#:
    198294
    Category:
    Spare Parts
    Rotors for SEMITOOL ST240 SRD systems.
  • SEMITOOL: 2300S

    Details
    ID#:
    151756
    Category:
    Photoresist
    Wafer Size:
    Up To 12" 
    Spin rinse dryer, up to 12".
  • SEMITOOL: SRD

    Details
    ID#:
    9049873
    Category:
    Photoresist
    Wafer Size:
    4" 
    Spin Rinse Dryer (SRD), 4".
  • SEMITOOL: 880S

    Details
    ID#:
    38555
    Category:
    Photoresist
    SRD with PSC101 or PSC102 digital controllers | Brushless Servo Motors | Heated Nitrogen | Door Hinge Left Side | Single Bolt Rotor setup | Bowls are 200 mm compliant | Functional condition | Video/Training/Startup/Acceptance: 4 hours at our site included | | Options included: | Resistivity probe, attaches to PSC101 or PSC102 | Anti Static with N2 purge | DI water Recirculation (note b) | Flaretek Fittings | | Options available: | Particle verification with rebuild | Emergency power off | Mechanical door lock.
  • SEMITOOL: Magnum

    Details
    ID#:
    62741
    Category:
    Photoresist
    Resist strippers, 8" | Application: BEOL Polymer Removal | Model: WS-S3 | CE Marked | Wafer Load Size: 50 | Wafer Payload Size: 25 | (2) Integrated SMIF Interface | Status lamp | VAC 380, A 65, Phase: 3 / 5-Wire, 50 / 60 Hz | Module Configuration: | (3) Solvent modules | 1996 vintage.
  • SEMITOOL: Sirius

    Details
    ID#:
    9077555
    Category:
    Photoresist
    Hydrozone (ozone) system, up to 8" | Chamber: 50 wafers | CE certification: yes | 2008 vintage.
  • SEMITOOL: 870ST

    Details
    ID#:
    34820
    Category:
    Photoresist
    Spin Rinse Dryer (SRD).
  • SEMITOOL: 280F

    Details
    ID#:
    151759
    Category:
    Photoresist
    Wafer Size:
    Up To 8" 
    Spin rinse dryer, up to 8".
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