SEMITOOL PSC 101 Products

wafer cleaner.

Spin rinse dryer, 6".

Spin rinse dryer on platform.

Spin rinse dryer, 6", 2006 vintage.

Spin Rinse Dryer (SRD) system.

spin rinse dryer, 6" | Capable of 25 wafer batch processing | Bowl Diameter: 15-inches (380mm) | Maximum Round Substrate Size: 9-inches (230mm) | Maximum Square Substrate Size: 8.75-inches (220mm) | Rotor Type: Requires 4-bolt rotors | Controller: Semitool PSC-101 controller | Resistivity Meter | 2002 vintage.

Dual stack SRD wafer cleaning system | Includes: | Dual PSC-101 Controllers | Anti-Static with N2 Purge | Emergency Power Off (EPO) | Resistivity Monitor and Water Circulation | Quick Disconnect Rotor | N2 Rear Seal | Capable of processing up to 8"/200mm wafers. | Rotors included 2x semitool rotor A192-81M 150MM | Can be inspected | 2000 vintage.

Table-top Spin Rinse Dryer (SRD) | Capable of processing up to 6" wafers | "F" model has the class 10 poly, brush motors and the PSC-101 controller | Controller Compatability: PCS-101 | DI Water Recirculation: YES | Motor Seal: Ferrofluidic | Motor Type: Brush | N2 Heater Capable: YES | Resistivity Monitoring Capable: YES | Rotor Type: 4 Bolt | Static Eliminator Capable: YES | Substrate size: 150 mm max. | System Configuration: Table Top Single Bowl | Specifications: | 101 Controller, Digital | Polypropylene cabinet | Up to 6" process capability | Brush motor | Teflon DI and N2 lines | Color coded pneumatic tubing | Bowls to be electropolished | Ferrofluidic Seal design | 110V ready system | 4 Bolt rotor design - No rotors are included | DI resistivity monitor option is included | Anti Static module option is included | DI recirculation option is included | Electropolish metal surfaces | Spin dryer bowl | Nitrogen manifold | Mounting brackets | Components: | Gaskets & O-Rings for | D.I. Water Manifold | Nitrogen manifold | Rear bowl seal | Door seal | Vibration dampers | Color-coded pneumatic tubing | Teflon lines for N2 | Teflon lines for D.I. | DI Nozzles | N2 Filter.

Dual stack spin rinse dryer | Includes PSC-101 Series Controllers.

Spin rinse dryer, (SRD), up to 8" | Capable Dual Stack | PSC-101 Process Controllers | LC-4+ Motor Controller | Anti Static | Quick Disconnect Rotor Capable | Manual Included.

Dual stack spin rinse dryers, 6" | Controller type: PSC-102.

Rotors for SEMITOOL ST240 SRD systems.

Spin rinse dryer | Specifications: | Single table top unit | (1) 280 bowl assembly | Brushless motors | Electropolished bowl | Labyrinth rear bowl shaft seal | Teflon lines | Pneumatic color-coded line | PSC-101 digital controllers (single rinse and dual dry) | N2 Cartridge heater | N2 Filter | Labyrinth door seal | Accepts QD rotors | Rotor to accommodate 7" squares available for an additional cost.

Wet Solvent Stripper, 4", Semitool graphic controller display screens, chemical cabinet (2 tanks, 1 for redian PRS1000, 1 for fresh PRS1000), (Automatic drain system), Front loading with On-Axis Spin, 4"-6" wafer configurable (current : 4"), 2000 vintage.

Spin rinse dryer, 2" to 4" | PSC-101 digital controller.

Spin Rinse Dryer (SRD) | PSC 101 controller | Servo motor, brushless | Can configure tool with anti-static | DI water resistivity option included | Water recirculation option included | New rotors are available (2 are needed).

Rotor for SEMITOOL ST240 SRD systems.

Dual Stack Spin Rinse Dryers | Includes PSC-102 Series Controllers.

F-Style Spin rinser dryer, bench top with rotor | Accommodates up to 8” low profile | 101 Controllers, Digital | Ferrofluidic Rear Bowl Shaft Seal | Electropolished bowl | Polypropylene Cabinet Aero Style | Electropolished Bowl | 1/2 HP Direct Drive Motor | Rotor to accommodate low profile 8” A192-81M | Static Eliminator | Resistivity | Complete Documentation Package | Guaranteed Particle counts < 25 at .5 micron | 17 meg Ohm DI water and class 1 N2.

Rotor for SEMITOOL ST 240.