SEMITOOL PSC 101 Products

  • SEMITOOL: PSC-101

    Details
    ID#:
    159383
    Category:
    Photoresist
    Spin rinse dryer on platform.
  • SEMITOOL: PSC 101

    Details
    ID#:
    9074516
    Category:
    Photoresist
    Spin Rinse Dryer (SRD) systems.
  • SEMITOOL: PSC 101

    Details
    ID#:
    201046
    Category:
    Photoresist
    Spin Rinse Dryer (SRD) system.
  • SEMITOOL: PSC-101

    Details
    ID#:
    103408
    Category:
    Photoresist
    wafer cleaner.
  • SEMITOOL: PSC-101

    Details
    ID#:
    137503
    Category:
    Photoresist
    Wafer Size:
    6" 
    Vintage:
    2006 
    Spin rinse dryer, 6", 2006 vintage.
  • SEMITOOL: PSC-101

    Details
    ID#:
    163869
    Category:
    Photoresist
    Wafer Size:
    6" 
    Spin rinse dryer, 6".
  • SEMITOOL: PSC-101

    Details
    ID#:
    9036854
    Category:
    Photoresist
    Rinse dryer.
  • SEMITOOL: 4300S

    Details
    ID#:
    77166
    Category:
    Photoresist
    Wafer Size:
    6" 
    Vintage:
    2002 
    spin rinse dryer, 6" | Capable of 25 wafer batch processing | Bowl Diameter: 15-inches (380mm) | Maximum Round Substrate Size: 9-inches (230mm) | Maximum Square Substrate Size: 8.75-inches (220mm) | Rotor Type: Requires 4-bolt rotors | Controller: Semitool PSC-101 controller | Resistivity Meter | 2002 vintage.
  • SEMITOOL: 870S

    Details
    ID#:
    9013123
    Category:
    Photoresist
    Dual stack spin rinse dryer | Includes PSC-101 Series Controllers.
  • SEMITOOL: 270-F

    Details
    ID#:
    178372
    Category:
    Photoresist
    Table-top Spin Rinse Dryer (SRD) | Capable of processing up to 6" wafers | "F" model has the class 10 poly, brush motors and the PSC-101 controller | Controller Compatability: PCS-101 | DI Water Recirculation: YES | Motor Seal: Ferrofluidic | Motor Type: Brush | N2 Heater Capable: YES | Resistivity Monitoring Capable: YES | Rotor Type: 4 Bolt | Static Eliminator Capable: YES | Substrate size: 150 mm max. | System Configuration: Table Top Single Bowl | Specifications: | 101 Controller, Digital | Polypropylene cabinet | Up to 6" process capability | Brush motor | Teflon DI and N2 lines | Color coded pneumatic tubing | Bowls to be electropolished | Ferrofluidic Seal design | 110V ready system | 4 Bolt rotor design - No rotors are included | DI resistivity monitor option is included | Anti Static module option is included | DI recirculation option is included | Electropolish metal surfaces | Spin dryer bowl | Nitrogen manifold | Mounting brackets | Components: | Gaskets & O-Rings for | D.I. Water Manifold | Nitrogen manifold | Rear bowl seal | Door seal | Vibration dampers | Color-coded pneumatic tubing | Teflon lines for N2 | Teflon lines for D.I. | DI Nozzles | N2 Filter.
  • SEMITOOL: 880S

    Details
    ID#:
    9038591
    Category:
    Photoresist
    Stand alone spin rinse dryer, 8" | | Includes: | DI Water: 30-40 PSI | N2: 30-40 PSI | Single axis | Rotor | Resistivity prove and cell | Teflon and PVDF fluid path | Fully automated door, slides up and down | Spare door | Heat options | Rinse to resistivity | Other Semitool OEM upgrades | Does not include PCS 101 or 102 controller.
  • SEMITOOL: A182-39M

    Details
    ID#:
    198294
    Category:
    Spare Parts
    Rotors for SEMITOOL ST240 SRD systems.
  • SEMITOOL: 240F

    Details
    ID#:
    141081
    Category:
    Photoresist
    Spin rinse dryer, 2" to 4" | PSC-101 digital controller.
  • SEMITOOL: A190-60M-0215

    Details
    ID#:
    200689
    Category:
    Photoresist
    Rotor for SEMITOOL ST 240.
  • SEMITOOL: 860S

    Details
    ID#:
    133030
    Category:
    Photoresist
    Spin Rinse Dryer (SRD) | PSC 101 controller | Servo motor, brushless | Can configure tool with anti-static | DI water resistivity option included | Water recirculation option included | New rotors are available (2 are needed).
  • SEMITOOL: 280S

    Details
    ID#:
    84758
    Category:
    Photoresist
    Spin rinse dryer | Specifications: | Single table top unit | (1) 280 bowl assembly | Brushless motors | Electropolished bowl | Labyrinth rear bowl shaft seal | Teflon lines | Pneumatic color-coded line | PSC-101 digital controllers (single rinse and dual dry) | N2 Cartridge heater | N2 Filter | Labyrinth door seal | Accepts QD rotors | Rotor to accommodate 7" squares available for an additional cost.
  • SEMITOOL: 480

    Details
    ID#:
    78271
    Category:
    Photoresist
    F-Style Spin rinser dryer, single stack with rotor | Accommodates up to 8” low profile | 101 Controllers, Digital | Ferrofluidic Rear Bowl Shaft Seal | Electropolished bowl | Polypropylene Cabinet Aero Style | Electropolished Bowl | 1/2 HP Direct Drive Motor | Rotor to accommodate low profile 8” A192-81M | Static Eliminator | Resistivity | Complete Documentation Package | Guaranteed Particle counts < 25 at .5 micron | 17 meg Ohm DI water and class 1 N2.
  • SEMITOOL: 480

    Details
    ID#:
    78272
    Category:
    Photoresist
    F-Style Spin rinser dryer, bench top with rotor | Accommodates up to 8” low profile | 101 Controllers, Digital | Ferrofluidic Rear Bowl Shaft Seal | Electropolished bowl | Polypropylene Cabinet Aero Style | Electropolished Bowl | 1/2 HP Direct Drive Motor | Rotor to accommodate low profile 8” A192-81M | Static Eliminator | Resistivity | Complete Documentation Package | Guaranteed Particle counts < 25 at .5 micron | 17 meg Ohm DI water and class 1 N2.
  • SEMITOOL: 870S

    Details
    ID#:
    133118
    Category:
    Photoresist
    Spin rinse dryer (SRD) | PSC 101 controllers | 6" rotor and cassette | 4" rotor and cassette.
  • SEMITOOL: WST-406MG

    Details
    ID#:
    35587
    Category:
    Photoresist
    Wafer Size:
    Vintage:
    2000 
    Wet Solvent Stripper, 4", Semitool graphic controller display screens, chemical cabinet (2 tanks, 1 for redian PRS1000, 1 for fresh PRS1000), (Automatic drain system), Front loading with On-Axis Spin, 4"-6" wafer configurable (current : 4"), 2000 vintage.
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