SILTEC CYBEQ 3800 Products

  • UEDA / CYBEQ: IP 8000

    Details
    ID#:
    153732
    Category:
    Wafer Grinding, Lap...
    Wafer Size:
    6" - 8" 
    CMP polishing tool, 6" - 8" | Designed to process up to (6) 6" / 8" wafers at once | Integrated head retraction system | Can be modified to include 4" / 5" wafers | At a polish setting of 1 minute: | Cycle time: 6.5 minutes | Throughput: 55 wafers per hour | Dual input wafer cassettes | Load side cassette nests are designed to tilt from 0 to 90° | Unload side cassette nests are open backed and remain at a constant 90° over (2) height adjustable DI water tanks | Each cassette can hold up to (25) 6" / 8" wafers | Each side holds (2) cassettes | Previous processes run: STI, ILD, BPSG, Tungsten (single step Cabot slurry and specific pad), Poly Silicon (addition of a heated platen from a closed loop M&W heater / chiller), silicon wafer reclaim | Wafer planarization of ~50 angstroms across surface of all wafers with a range between heads of <80 | Edge exclusion of 3mm achievable | Specifications: | Polishing System: | Employs 3 degrees of motion: platen, carousel, and carriers, plus eccentric motion | Wafer Handling Capacity: | 150 mm or 200 mm diameter (100/125mm possible) | 2 Cybeq Articulated Robots | 2 Head Loading Modules (HLMs) | Dual input and output cassettes | Wafer Carriers/Heads: | 6 floating heads (patented design) | Programmable retracting heads allow 2 to 6 wafers per polishing cycle | Programmable speed from 1 to 30 rpm +/- 1% | Programmable uniform down force air pressure from 1 to 10 psi | Powered by a brushless servo motor | Wafer Cleaning: | Automated nozzle rinse with DI water after polishing | Automated low pressure DI water polishing/cleaning cycle after polishing | Platen: | 36” diameter | Made of number 304 stainless steel | Polyurethane coated on exposed surfaces for acid based slurries | Programmable speed from 1 to 35 rpm | Programmable rotational direction, cw or ccw | Powered by a brushless servo motor | Optional temperature control unit | Carousel: | 30” diameter | Made of anodized aluminium | Polyester-urethane coated on exposed surfaces | Programmable speed from 1 to 30 rpm | Programmable rotational direction, cw or ccw | Powered by a brushless servo motor | Pad Dresser: | Optional 4” or 12” diamond disc | Programmable speed from 1 to 30 rpm | Programmable down force from 0 to 200 lbs | Slurry: | Dual peristaltic pumps feeding through dual or separate PALL filters | System Control: | Microsoft Windows Graphical User Interface (GUI) with front and back TFT touch screen controllers/monitors | Multiple steps of unlimited polishing recipes | Siemens PLCs for motion control | Fully automatic or semi-automatic operation | Optionally SECSI, II, and GEM capable | Facility: | 200 –240 VAC, 3 phase 50 – 60 Hz, 60 amps maximum, AC – line filter | CDA, 80-90 psi at 2 cfpm | Nitrogen, 60 psi at 2 cfpm | DI water, 2 to 4 gpm at 40 psi | Slurry, 2 x 1/2” inputs, minimum 12psi.
  • CYBEQ: Per4Mer 8000

    Details
    ID#:
    55564
    Category:
    Wafer Handlers
    Vintage:
    1995 
    Transfer robot | With laser DD-50S cross slot detector | 6100 rack mount controller | 2831 prealigner | Interface cables | Setup keypad (not shown) | 1995 vintage.
  • CYBEQ: 6100

    Details
    ID#:
    165295
    Category:
    Wafer Handlers
    Vintage:
    2002 
    Vacuum Wafer Robot 6100V ASM VAC 300 | Part Number: 0125-5015 | Controller: | Model Number: 6100 Controller | Controller is missing the display board | CE Marked: Yes | Teaching Pendant: | Model Number: TT1R2-1 | CE Marked: Yes | 2002 vintage.
  • CYBEQ: Lot

    Details
    ID#:
    9043044
    Category:
    Spare Parts
    Lot of spare parts: | | 1 0370-0237 BEARING, BALL | 1 0370-0198 GEAR HEAD 0GK3K | 1 0370-0708 CYLINDER | 1 0370-0707 CYLINDER | 4 0370-0149 SENSOR FIBER SENSOR FU-5FFAC # 00006415 | 1 0370-0803 BALL SLIDE | 1 0370-0132 FILTER GAS SFB300-02 | 1 0370-0549 KEEP SOLENOID | 1 0370-0333 PCB 32 BIT DO | 4 0122-0010-100 MECHANISM,2660F,W/FLIP ARM | 1 0370-0619 VALVE, SOLENOID | 1 0370-0701 SWT, VAC | 1 0370-0202 GEARHEAD | 4 0122-8264 PCB ASSY | 1 0370-0674 ROLLER.
  • CYBEQ: Per4Mer 3000

    Details
    ID#:
    166866
    Category:
    Wafer Handlers
    Wafer Size:
    3"-12" 
    Vintage:
    2003 
    Non-Contact Wafer Pre-Aligner, 3"-12" | Specifications: | Applied Materials kit 2170002W | Programmable wafer prealigner, NO wafer edge contact | Controlled by host computer (NOT included) via RS-232 | Centers wafer | Accurately locat & position notches or flats | Align/center squre substrates | Angular resolution: 0.06º | Wafer capacity: 3" to 12" | Substrate capacity: 3" to 7" | Class 10 cleanroom compatible | Programmable angular positioning | Movement in X, Y, and theta (rotation) axes | Power: 120V 5A plus Vacuum | 2003 vintage.
  • CYBEQ: 2831

    Details
    ID#:
    9051893
    Category:
    Mask Aligners
    Prealigner, P/N: 0123-5650-1.
  • SILTEC: 0122-0653

    Details
    ID#:
    199107
    Category:
    Electronic Test Equ...
    PCB board.
  • CYBEQ: 8000

    Details
    ID#:
    9001389
    Category:
    Wafer Handlers
    Robot.
  • CYBEQ: 6100

    Details
    ID#:
    9068423
    Category:
    Mask Aligners
    Robot | Cybeq 2831 Pre-aligner | Driel 77501 | Spectra Diode Labs SDL 800 (Missing a few front knobs) | EG&G Princeton Applied Research 5210 Lock-In Amplifier | Klinger CD4 Motor Controller/Driver | SEC4400MC Mass Flow Controller | Includes everything in photos.
  • CYBEQ: 2850

    Details
    ID#:
    9011150
    Category:
    Mask Aligners
    Prealigner.
  • CYBEQ: OCL 300 Series 9000

    Details
    ID#:
    160146
    Category:
    Wafer Handlers
    Wafer Size:
    6", 8" 
    Wafer sorter, 6" and 8" | Includes: | OCR (0124-0192) | Per4Mer 800D Robot (0125-7502).
  • CYBEQ: 6100

    Details
    ID#:
    9008942
    Category:
    Wafer Handlers
    Vacuum wafer robot with controller | CE marked | Controller has a dent in back | Plastic housing on power input connection is cracked. |
  • SPEEDLINE / CAMALOT: 3800

    Details
    ID#:
    171190
    Category:
    Pc Board Assembly A...
    Automatic dispenser | Set up : inline | Input : belt type | Output : belt type | Head : Twin head.
  • VARIAN: CP 3800

    Details
    ID#:
    182936
    Category:
    Spectrometers
    Gas chromatography system.
  • GIGAMAT: 3800

    Details
    ID#:
    176851
    Category:
    Wafer Grinding, Lap...
    Polisher | (4) wafer carriers | Control power: 115V, 60Hz, 1Ph, 15A | Main power: 380V, 50Hz, 3Ph, 60A.
  • BROOKS AUTOMATION / JENOPTIK: Ergospeed 3800

    Details
    ID#:
    189254
    Category:
    Wafer Handlers
    Wafer Size:
    8" 
    SMIF load-port systems, 8".
  • STC: EP-3800 SF

    Details
    ID#:
    9005124
    Category:
    Crystal Growing, Sa...
    Edge grinder, parts machine | Fixtures to process either 76.2mm or 100mm diameter wafers | Used exclusively to process single crystal quartz; no hazardous material.
  • BROOKS AUTOMATION / JENOPTIK: Ergospeed 3800

    Details
    ID#:
    9005849
    Category:
    Wafer Handlers
    Loaders.
  • THERMOTRON: S-32-3800

    Details
    ID#:
    9007932
    Category:
    Environmental Chamb...
    Environmental Test Chamber | Inner dimensions: 38x38x38, no shelves included | Workspace volume:32 cu ft (906L) | Temperature range:+180°C to -70°C | No humidity capability.
  • SPEEDLINE / CAMALOT: 3800

    Details
    ID#:
    196398
    Category:
    Pc Board Assembly A...
    Dispenser | 1997 vintage.
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